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    • 14. 发明授权
    • Vapor composition and flow sensor
    • 蒸汽组成和流量传感器
    • US5515714A
    • 1996-05-14
    • US341258
    • 1994-11-17
    • Michel F. SultanCharles R. HarringtonMichael J. O'Rourke
    • Michel F. SultanCharles R. HarringtonMichael J. O'Rourke
    • G01D3/028G01F1/684G01F1/696G01N27/18G01N25/00
    • G01N27/18G01D3/028G01F1/6845G01F1/696
    • The present invention is directed to a single solid state thermal diffusion sensor capable of measuring both the composition and flow of gaseous vapors traveling through a duct. The sensor comprises two orthogonal sensing patterns, each having a heating element positioned equidistant between two thermistor elements. The heaters and thermistors are made from thin film platinum deposited on a thermally insulating polyimide layer having low thermal diffusivity. A sinusoidal voltage is applied to each heating element for generating oscillating thermal waves which propagate through the gaseous vapor to their respective thermistors. The thermistors of a first, transversely positioned sensing pattern are responsive to both the composition and flow of the gaseous vapor, while the thermistors of a second, longitudinally positioned sensing pattern are responsive only to the composition of the gaseous vapor. Appropriate electronic circuitry utilizes the responses of the thermistor pairs for determining the composition and flow of the gaseous vapor.
    • 本发明涉及能够测量穿过管道的气态蒸气的组成和流量的单个固态热扩散传感器。 传感器包括两个正交感测图案,每个具有位于两个热敏电阻元件之间等距的加热元件。 加热器和热敏电阻由沉积在具有低热扩散率的绝热聚酰亚胺层上的薄膜铂制成。 正弦电压被施加到每个加热元件,用于产生通过气态蒸气传播到它们各自的热敏电阻的振荡热波。 第一横向定位的感测图案的热敏电阻响应于气体蒸气的组成和流动,而第二纵向定位的感测图案的热敏电阻仅响应气态蒸汽的组成。 适当的电子电路利用热敏电阻对的响应来确定气态蒸汽的组成和流量。