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11. 发明授权

US06641962B2 Micro devices manufacturing method utilizing concave and convex alignment mark patterns 失效
标题翻译：微型器件制造方法利用凹凸对准标记图案
公开(公告)号：US06641962B2
公开(公告)日：2003-11-04
申请号：US10375012
申请日：2003-02-28
申请人： Shinji Mizutani , Kazuya Ota , Masahiko Yasuda
发明人： Shinji Mizutani , Kazuya Ota , Masahiko Yasuda
IPC分类号： G03F900
CPC分类号： G03F9/708 , G03F9/70 , G03F9/7076 , G03F9/7084
摘要： An exposure method according to the present invention includes a first step of forming on a substrate an alignment mark including a concave and convex pattern; a second step of forming a coat over said alignment mark and the other area on said substrate; a third step of flattening said coat; and a fourth step of applying a photosensitive material on said coat flattened by said third step and projecting a mask pattern thereto. The alignment mark is formed by said concave and convex pattern arranged with a pitch which is smaller than the predetermined value between adjacent convex portions having a width of not less than a predetermined value.
摘要翻译：根据本发明的曝光方法包括：在基板上形成包括凹凸图案的对准标记的第一步骤; 在所述对准标记和所述基板上的其他区域上形成涂层的第二步骤; 第三步，使所述外套变平; 以及在由所述第三步骤变平的所述涂层上施加感光材料并向其投射掩模图案的第四步骤。对准标记由所述凹凸图案形成，所述凹凸图案以相对于具有不小于预定值的宽度的相邻凸部之间的预定值小的间距排列。

12. 发明授权

US06353078B1 Polyurethane adhesive, method for use in bonding, and use of mixture 失效
标题翻译：聚氨酯胶粘剂，粘合方法和混合物的使用
公开(公告)号：US06353078B1
公开(公告)日：2002-03-05
申请号：US09463793
申请日：2000-01-27
申请人： Shigeru Murata , Masahiko Yasuda , Tetsuya Nakajima
发明人： Shigeru Murata , Masahiko Yasuda , Tetsuya Nakajima
IPC分类号： C08G1842
CPC分类号： C09J175/06 , C08G18/4216 , C08L2666/36 , C09J167/02 , Y10S528/905
摘要： The present invention provides an adhesive comprising a polyester polyol or polyurethane polyol possessing structural units represented by the following general formula (I) within its molecular structure, and an organic polyisocyanate in which the isocyanate groups may be protected: wherein R1 and R2 are the same or different and each represents lower alkyl. The adhesive of the present invention exhibits an excellent initial adhesion strength; and provides adhered objects that exhibit an excellent permanent adhesion strength, hot water resistance, flexibility, flexibility at a low temperature, and fatigue resistance, and is useful in adhering plastic, metal, and the like. In addition, the present invention provides a method of mixing the aforementioned components and using the mixture for adhesion, and a use of the mixture of the aforementioned components.
摘要翻译：本发明提供一种粘合剂，其包含在其分子结构中具有由以下通式（I）表示的结构单元的聚酯多元醇或聚氨酯多元醇，其中异氰酸酯基可被保护的有机多异氰酸酯：其中R1和R2相同或不同，并且各自表示低级烷基。本发明的粘合剂表现出优异的初始粘合强度; 并且提供具有优异的永久粘合强度，耐热水性，柔软性，低温柔韧性和耐疲劳性的粘合物，并且可用于粘附塑料，金属等。此外，本发明提供了混合上述组分并使用该混合物进行粘合的方法，以及上述组分的混合物的用途。

13. 发明授权

US06306548B1 Micro devices manufacturing method and apparatus therefor 有权
标题翻译：微型器件制造方法及其设备
公开(公告)号：US06306548B1
公开(公告)日：2001-10-23
申请号：US09476208
申请日：1999-12-30
申请人： Shinji Mizutani , Kazuya Ota , Masahiko Yasuda
发明人： Shinji Mizutani , Kazuya Ota , Masahiko Yasuda
IPC分类号： G03F900
CPC分类号： G03F9/708 , G03F9/70 , G03F9/7076 , G03F9/7084
摘要： An exposure method according to the present invention includes a first step of forming on a substrate an alignment mark including a concave and convex pattern; a second step of forming a coat over said alignment mark and the other area on said substrate; a third step of flattening said coat; and a fourth step of applying a photosensitive material on said coat flattened by said third step and projecting a mask pattern thereto. The alignment mark is formed by said concave and convex pattern arranged with a pitch which is smaller than the predetermined value between adjacent convex portions having a width of not less than a predetermined value.
摘要翻译：根据本发明的曝光方法包括：在基板上形成包括凹凸图案的对准标记的第一步骤; 在所述对准标记和所述基板上的其他区域上形成涂层的第二步骤; 第三步，使所述外套变平; 以及在由所述第三步骤变平的所述涂层上施加感光材料并向其投射掩模图案的第四步骤。对准标记由所述凹凸图案形成，所述凹凸图案以相对于具有不小于预定值的宽度的相邻凸部之间的预定值小的间距排列。

14. 发明授权

US6110021A Micro devices manufacturing method and apparatus therefor 有权
公开(公告)号：US6110021A
公开(公告)日：2000-08-29
申请号：US192439
申请日：1998-11-16
申请人： Kazuya Ota , Masahiko Yasuda
发明人： Kazuya Ota , Masahiko Yasuda
IPC分类号： G03F9/00 , B24B7/00
CPC分类号： G03F9/708 , G03F9/70 , G03F9/7076 , G03F9/7084
摘要： An exposure method according to the present invention includes a first step of forming on a substrate an alignment mark including a concave and convex pattern; a second step of forming a coat over said alignment mark and the other area on said substrate; a third step of flattening said coat; and a fourth step of applying a photosensitive material on said coat flattened by said third step and projecting a mask pattern thereto. The alignment mark is formed by said concave and convex pattern arranged with a pitch which is smaller than the predetermined value between adjacent convex portions having a width of not less than a predetermined value.

15. 发明授权

US5292853A Polyurethane resin containing a phosphoric acid group 失效
标题翻译：含有磷酸基团的聚氨酯树脂
公开(公告)号：US5292853A
公开(公告)日：1994-03-08
申请号：US740398
申请日：1991-08-05
申请人： Masahiko Yasuda , Shigeo Hosokawa , Yorozu Yokomori , Shinichiro Jimbo , Edmond G. Kolycheck
发明人： Masahiko Yasuda , Shigeo Hosokawa , Yorozu Yokomori , Shinichiro Jimbo , Edmond G. Kolycheck
IPC分类号： C08G18/08 , C08G18/38 , C08G18/50 , C08G18/58 , G11B5/702 , C08G18/00
CPC分类号： C08G18/0819 , C08G18/388 , C08G18/3885 , C08G18/5084 , C08G18/58 , C08G18/587 , G11B5/7021
摘要： A polyurethane resin is synthesized from a reaction mixture of at least one phosphorus compound, an epoxy compound, a polyisocyanate, a polyfunctional hydroxy compound, and optionally a chain extender. The polyurethane resin contains one phosphoric acid group or one residual group derived from phosphoric acid per 3,000 to about 200,000 number average molecular weight of the polyurethane resin. The weight average molecular weight of the polyurethane resin is from about 10,000 to about 250,000. A magnetic coating formulation is comprised of principally of magnetic particles and a binder. A magnetic recording media comprises a laminate as in the form of a magnetic layer composed principally of magnetic particles and a binder wherein at least a portion of the binder is the polyurethane resin. The substrate of the magnetic recording medium is a suitable polymer such as polyester, and the like. The utilization of the polyurethane resin containing a phosphorus compound therein results in excellent dispersion of the magnetic particles as well as exceptional durability.
摘要翻译：由至少一种磷化合物，环氧化合物，多异氰酸酯，多官能羟基化合物和任选的扩链剂的反应混合物合成聚氨酯树脂。聚氨酯树脂含有一种磷酸基或一个来源于磷酸的残留基，每3,000〜200,000数均分子量的聚氨酯树脂。聚氨酯树脂的重均分子量为约10,000至约250,000。磁性涂层制剂主要由磁性颗粒和粘合剂组成。磁记录介质包括主要由磁性颗粒和粘合剂组成的磁性层形式的层压体，其中粘合剂的至少一部分是聚氨酯树脂。磁记录介质的基材是合适的聚合物，例如聚酯等。含有磷化合物的聚氨酯树脂的利用导致磁性颗粒的优异分散性以及出色的耐久性。

16. 发明授权

US5162162A Magnetic coating formulations and magnetic recording media 失效
标题翻译：磁性涂料配方和磁记录介质
公开(公告)号：US5162162A
公开(公告)日：1992-11-10
申请号：US684078
申请日：1991-05-09
申请人： Masahiko Yasuda , Shigeo Hosokawa , Yorozu Yokomori , Shinichiro Jimbo
发明人： Masahiko Yasuda , Shigeo Hosokawa , Yorozu Yokomori , Shinichiro Jimbo
IPC分类号： C08G18/08 , C08G18/38 , C08G18/50 , C08G18/58 , G11B5/702
CPC分类号： C08G18/58 , C08G18/0819 , C08G18/388 , C08G18/3885 , C08G18/5084 , C08G18/587 , G11B5/7021 , Y10S428/90
摘要： A magnetic coating formulation is composed principally of magnetic particles and a binder. At least a portion of the binder is a polyurethane resin synthesized from a reactant mixture of specific phosphorus compound, epoxy compound, isocyanate compound and polyfunctional hydroxy compounds. The reactant mixture may optionally contain a chain extender. The polyurethane resin contains one phosphoric acid group or one residual group derived from phosphoric acid per 3,000-200,000 number average molecular weight of the polyurethane resin, and has a number average molecular weight of 4,000-150,000. A magnetic recording medium with a magnetic coating layer formed from the magnetic coating formulation is also disclosed. The magnetic coating layer features not only excellent dispersion of magnetic particles, in other words, excellent magnetic characteristics but also superb durability.
摘要翻译：磁性涂层制剂主要由磁性颗粒和粘合剂组成。粘合剂的至少一部分是由特定磷化合物，环氧化合物，异氰酸酯化合物和多官能羟基化合物的反应物混合物合成的聚氨酯树脂。反应物混合物可任选地含有扩链剂。聚氨酯树脂含有一个磷酸基或一个来自磷酸的残留基，每3,000-200,000数均分子量的聚氨酯树脂，其数均分子量为4,000-150,000。还公开了由磁性涂层制剂形成的具有磁性涂层的磁记录介质。磁性涂层不仅具有磁性粒子的极好的分散性，也就是说，具有优异的磁特性，而且具有极好的耐久性。

17. 发明授权

US08477310B2 Measurement method, measurement apparatus, exposure method, and exposure apparatus 有权
标题翻译：测量方法，测量装置，曝光方法和曝光装置
公开(公告)号：US08477310B2
公开(公告)日：2013-07-02
申请号：US11587099
申请日：2005-04-20
申请人： Mitsuru Kobayashi , Masahiko Yasuda
发明人： Mitsuru Kobayashi , Masahiko Yasuda
IPC分类号： G01B11/00
CPC分类号： G03F9/7046 , G03F9/7003 , G03F9/7011 , G03F9/7019 , G03F9/7084
摘要： To perform high-speed and highly accurate measurement by setting desired measuring conditions for each measuring object. In an alignment sensor of exposure apparatus, in the case of performing position measurement for a plurality of sample shots, measurement is performed by changing the measuring conditions, in response to a measuring axis direction, a mark or a layer whereupon a mark to be measured exists. At that time, for the measuring objects to be measured under the same measuring conditions, for example, a position in a Y axis direction and a position in an X axis direction, measurement is continuously performed. When the measuring condition is changed, a baseline value is remeasured. The changeable measuring conditions are wavelength of measuring light, use and selection of a retarder, NA and σ of an optical system, a light quantity of measuring light, illumination shape, signal processing algorithm, etc.
摘要翻译：通过设置每个测量对象的所需测量条件来执行高速和高精度的测量。在曝光装置的对准传感器中，在对多个采样拍摄进行位置测量的情况下，通过根据测量轴方向改变测量条件，进行测量的标记或层，进行测量存在此时，对于在相同测量条件下测量的测量对象，例如，Y轴方向的位置和X轴方向的位置，连续进行测量。当测量条件改变时，将重新测量基准值。可变测量条件是测量光的波长，延迟器的使用和选择，光学系统的NA和西格玛，测量光的光量，照明形状，信号处理算法等。

18. 发明申请

US20130027680A1 MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE METHOD, AND EXPOSURE APPARATUS 有权
标题翻译：测量方法，测量装置，曝光方法和曝光装置
公开(公告)号：US20130027680A1
公开(公告)日：2013-01-31
申请号：US13495284
申请日：2012-06-13
申请人： Mitsuru KOBAYASHI , Masahiko YASUDA
发明人： Mitsuru KOBAYASHI , Masahiko YASUDA
IPC分类号： G03B27/54 , G01B11/14
CPC分类号： G03F9/7046 , G03F9/7003 , G03F9/7011 , G03F9/7019 , G03F9/7084
摘要： To perform high-speed and highly accurate measurement by setting desired measuring conditions for each measuring object. In an alignment sensor of exposure apparatus, in the case of performing position measurement for a plurality of sample shots, measurement is performed by changing the measuring conditions, in response to a measuring axis direction, a mark or a layer whereupon a mark to be measured exists. At that time, for the measuring objects to be measured under the same measuring conditions, for example, a position in a Y axis direction and a position in an X axis direction, measurement is continuously performed. When the measuring condition is changed, a baseline value is remeasured. The changeable measuring conditions are wavelength of measuring light, use and selection of a retarder, NA and σ of an optical system, a light quantity of measuring light, illumination shape, signal processing algorithm, etc.
摘要翻译：通过设置每个测量对象的所需测量条件来执行高速和高精度的测量。在曝光装置的对准传感器中，在对多个采样拍摄进行位置测量的情况下，通过根据测量轴方向改变测量条件，进行测量的标记或层，进行测量存在此时，对于在相同测量条件下测量的测量对象，例如，Y轴方向的位置和X轴方向的位置，连续进行测量。当测量条件改变时，将重新测量基准值。可变的测量条件是测量光的波长，减速器的使用和选择，NA和＆sgr; 的光学系统，光量测量光，照明形状，信号处理算法等。

19. 发明授权

US08072578B2 Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method 有权
标题翻译：位置测量方法，位置控制方法，测量方法，加载方法，曝光方法和曝光装置以及装置制造方法
公开(公告)号：US08072578B2
公开(公告)日：2011-12-06
申请号：US12071262
申请日：2008-02-19
申请人： Masahiko Yasuda , Taro Sugihara
发明人： Masahiko Yasuda , Taro Sugihara
IPC分类号： G03B27/42 , G03B27/52 , G03B27/58
CPC分类号： G03F7/70341 , G03F7/70691 , G03F7/707 , G03F7/70725 , G03F7/70775 , G03F7/70975 , G03F9/7011 , G03F9/7088 , Y10T29/49002
摘要： A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
摘要翻译：通过对准系统检测可拆卸地安装在移动体上的预定形状的板的一部分，同时通过设置移动体的移动坐标系的测量单元测量移动体的位置，并且基于检测结果和与检测结果对应的测量单元的测量结果，获得板的外周边缘的位置信息。因此，即使在移动体上没有对准标记来进行位置测量，也可以基于由测量单元设定的移动坐标系来控制板的位置，即移动体的位置，基于板的外周缘的位置信息。

20. 发明授权

US08059260B2 Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method 有权
公开(公告)号：US08059260B2
公开(公告)日：2011-11-15
申请号：US11281544
申请日：2005-11-18
申请人： Masahiko Yasuda , Taro Sugihara
发明人： Masahiko Yasuda , Taro Sugihara
IPC分类号： G03B27/52 , G03B27/42 , G03B27/58
CPC分类号： G03F7/70341 , G03F7/70691 , G03F7/707 , G03F7/70725 , G03F7/70775 , G03F7/70975 , G03F9/7011 , G03F9/7088 , Y10T29/49002
摘要： A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.

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