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    • 13. 发明授权
    • Flow rate sensor
    • 流量传感器
    • US06889545B2
    • 2005-05-10
    • US10778205
    • 2004-02-17
    • Keiichi NakadaJunichi HorieIzumi Watanabe
    • Keiichi NakadaJunichi HorieIzumi Watanabe
    • G01F1/68F02D41/18G01F1/684G01F1/692G01F1/698G01F1/699G01F1/72G01F5/00
    • G01F1/699F02D41/187G01F1/6842G01F1/692G01F1/698G01F1/72G01F5/00
    • A flow rate sensor detects the flow rate in a pulsating condition including a large amount of the reverse flow. Upstream temperature sensors and downstream temperature sensors are formed in both sides of a heater, parallel resistors are formed in the external side of a thin film portion (cavity), and the downstream temperature sensors are connected at the contacts. The upstream and downstream temperature sensors are respectively allocated to the four sides of the bridge circuit so that the sensors of the same type are not side by side and the electrodes are balanced when the flow rate is zero. The upstream temperature sensor is cooled during the forward flow, while the downstream temperature sensor is influenced by the heater but virtual change is rather small and potential difference between the electrodes becomes larger. During the reverse flow, the downstream temperature sensor is cooled but virtual change is rather small.
    • 流量传感器检测包括大量逆流的脉动状态下的流量。 上游温度传感器和下游温度传感器形成在加热器的两侧,并且在薄膜部分(空腔)的外侧形成并联电阻,并且下游温度传感器连接在触点上。 上游和下游温度传感器分别分配给桥接电路的四侧,使得相同类型的传感器不是并排的,并且当流量为零时电极是平衡的。 上游温度传感器在向前流动期间被冷却,而下游温度传感器受到加热器的影响,但虚拟变化相当小,并且电极之间的电位差变大。 在逆流期间,下游温度传感器被冷却,但虚拟变化相当小。
    • 17. 发明授权
    • Thermal air flow sensor
    • 热空气流量传感器
    • US06357294B1
    • 2002-03-19
    • US09253945
    • 1999-02-22
    • Keiichi Nakada
    • Keiichi Nakada
    • G01F168
    • G01F1/6845
    • Disclosed is a thermal air flow sensor in which polycrystalline silicon is used as a heat generating resistor, and which has improved detection sensitivity. An upstream heat generating resistor, a downstream heat generating resistor, a temperature measuring resistor, and an air temperature measuring resistor are formed on a silicon substrate. These resistors are each formed of a semiconductor thin film in which polycrystalline silicon is mixed with a silicide compound and which contains an impurity doped therein. The formed resistor has small specific resistance and a large resistance temperature coefficient.
    • 公开了一种热空气流量传感器,其中多晶硅用作发热电阻器,并且具有改进的检测灵敏度。 在硅衬底上形成上游发热电阻器,下游发热电阻器,温度测量电阻器和空气温度测量电阻器。 这些电阻均由半导体薄膜形成,其中多晶硅与硅化物混合并且其中掺杂有杂质。 形成的电阻器具有小的电阻率和较大的电阻温度系数。
    • 18. 发明授权
    • Thermal type air flow sensor
    • 热式气流传感器
    • US06349596B1
    • 2002-02-26
    • US09461190
    • 1999-12-15
    • Keiichi NakadaIzumi WatanabeHiroshi Yoneda
    • Keiichi NakadaIzumi WatanabeHiroshi Yoneda
    • G01F168
    • G01F1/6845G01F1/692G01F1/696G01F15/043
    • A thermal type air flow sensor which corrects variation of characteristics of a thermal type air flow sensor due to adherence or deposition of fouling contained in an intake air for maintaining an initial accuracy. An air flow rate is measured by means of a heating resistor and a temperature measuring resistor formed by semiconductor fine patterning. A part of the semiconductor substrate is removed. The heating resistor and a portion of the temperature measuring resistor are formed above a space defined by removing the semiconductor substrate. A voltage of the portion of the temperature measuring resistor located above the space is detected for correcting an error in measurement of an intake air using the voltage detected.
    • 一种热式空气流量传感器,其用于校正由于包含在进气中的污垢的粘附或沉积导致的热式空气流量传感器的特性的变化,以保持初始精度。 通过加热电阻器和通过半导体精细图案化形成的温度测量电阻器来测量空气流量。 去除半导体衬底的一部分。 加热电阻器和温度测量电阻器的一部分形成在通过去除半导体衬底限定的空间的上方。 检测位于空间上方的温度测量电阻器的部分的电压,以使用检测到的电压来校正进气测量误差。