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11. 发明申请

WO2010068525A2 LAMINATED ELECTRICALLY TINTABLE WINDOWS 审中-公开
标题翻译：层压电动可折叠窗
公开(公告)号：WO2010068525A2
公开(公告)日：2010-06-17
申请号：PCT/US2009/066255
申请日：2009-12-01
申请人： APPLIED MATERIALS, INC. , KWAK, Byung-Sung, Leo , HAAS, Dieter , BANGERT, Stefan , KRISHNA, Nety, M. , HOFFMANN, Winfried
发明人： KWAK, Byung-Sung, Leo , HAAS, Dieter , BANGERT, Stefan , KRISHNA, Nety, M. , HOFFMANN, Winfried
IPC分类号： C03C17/00 , C03C27/00 , B32B17/00
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可光刻的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个可着色着色片中的每一个与所述多个窗玻璃片中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可光亮的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

12. 发明申请

WO2013022992A3 THIN FILM STRUCTURES AND DEVICES WITH INTEGRATED LIGHT AND HEAT BLOCKING LAYERS FOR LASER PATTERNING 审中-公开
标题翻译：薄膜结构和装置，具有集成的光和热封层用于激光图案
公开(公告)号：WO2013022992A3
公开(公告)日：2013-05-10
申请号：PCT/US2012050025
申请日：2012-08-08
申请人： APPLIED MATERIALS INC , SONG DAOYING , JIANG CHONG , KWAK BYUNG SUNG LEO , GORDON JOSEPH G
发明人： SONG DAOYING , JIANG CHONG , KWAK BYUNG SUNG LEO , GORDON JOSEPH G
IPC分类号： H01L21/301 , H01L31/18 , H01M10/04
CPC分类号： H01L31/1876 , H01L31/02164 , H01L31/02167 , H01L31/024 , H01L31/0463 , H01L31/18 , H01M4/0471 , H01M6/40 , H01M10/0436
摘要： Selective removal of specified layers of thin film structures and devices, such as solar cells, electrochromics, and thin film batteries, by laser direct patterning is achieved by including heat and light blocking layers in the device/structure stack immediately adjacent to the specified layers which are to be removed by laser ablation. The light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy penetrating through the dielectric/semiconductor layers and the heat blocking layer is a conductive layer with thermal diffusivity low enough to reduce heat flow into underlying metal layer(s), such that the temperature of the underlying metal layer(s) does not reach the melting temperature, Tm, or in some embodiments does not reach (Tm)/3, of the underlying metal layer(s) during laser direct patterning.
摘要翻译：通过激光直接图案化来选择性去除指定层的薄膜结构和器件，例如太阳能电池，电致变色和薄膜电池，通过将热和光阻挡层包括在紧邻指定层的器件/结构堆叠中来实现通过激光消融去除。遮光层是吸收或反射透过电介质/半导体层的激光能量的一部分的金属层，并且热阻层是导热层，其热扩散率足够低以减少进入下面的金属层的热量），使得下一个金属层的温度在激光直接图案化期间未达到熔融温度Tm，或在一些实施例中未达到下面金属层的（Tm）/ 3）。

13. 发明申请

WO2012170363A3 METHODS OF AND HYBRID FACTORIES FOR THIN-FILM BATTERY MANUFACTURING 审中-公开
标题翻译：薄膜电池制造和混合工艺方法
公开(公告)号：WO2012170363A3
公开(公告)日：2013-04-04
申请号：PCT/US2012040798
申请日：2012-06-04
申请人： APPLIED MATERIALS INC , KWAK BYUNG-SUNG , BANGERT STEFAN , HAAS DIETER , NALAMASU OMKARAM
发明人： KWAK BYUNG-SUNG , BANGERT STEFAN , HAAS DIETER , NALAMASU OMKARAM
IPC分类号： H01M10/04 , H01M6/40 , H01M10/0585
CPC分类号： H01M10/0436 , H01M4/0423 , H01M4/0426 , H01M4/134 , H01M4/1395 , H01M4/382 , H01M6/188 , H01M6/40 , H01M6/50 , H01M10/0404 , H01M10/052 , Y02E60/122 , Y02P70/54
摘要： Methods of and hybrid factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A hybrid factory includes one or more tool sets for fabricating a thin-film battery. In an example, a hybrid factory layout for lithium-based thin-film battery manufacturing includes a process tool for depositing active layers. The process tool includes a cluster tool for deposition of an active layer. The hybrid factory layout also includes an in-line tool for deposition of an active layer and a lithium evaporation tool having one or more gloveboxes coupling the lithium evaporation tool to the cluster tool and to the in-line tool.
摘要翻译：描述了薄膜电池制造的方法和混合工厂。一种方法包括制造薄膜电池的操作。混合工厂包括一个或多个用于制造薄膜电池的工具组。在一个示例中，用于锂基薄膜电池制造的混合工厂布局包括用于沉积活性层的处理工具。该工艺工具包括用于沉积有源层的簇工具。混合工厂布局还包括用于沉积活性层的在线工具和具有将锂蒸发工具耦合到簇工具和直列工具的一个或多个手套箱的锂蒸发工具。

14. 发明申请

WO2012173874A3 THIN FILM BATTERY FABRICATION WITH MASK-LESS ELECTROLYTE DEPOSITION 审中-公开
公开(公告)号：WO2012173874A3
公开(公告)日：2012-12-20
申请号：PCT/US2012/041410
申请日：2012-06-07
申请人： APPLIED MATERIALS, INC. , SONG, Daoying , JIANG, Chong , KWAK, Byung Sung, Leo
发明人： SONG, Daoying , JIANG, Chong , KWAK, Byung Sung, Leo
IPC分类号： H01M14/00
摘要： A method of fabricating a thin film battery may include a blanket deposition of an electrolyte layer followed by selective laser patterning of the electrolyte layer. Some or all the other device layers may be in situ patterned layers - formed using shadow masks.

15. 发明申请

WO2012173874A2 THIN FILM BATTERY FABRICATION WITH MASK-LESS ELECTROLYTE DEPOSITION 审中-公开
标题翻译：薄膜电池制造与无电解电沉积
公开(公告)号：WO2012173874A2
公开(公告)日：2012-12-20
申请号：PCT/US2012041410
申请日：2012-06-07
申请人： APPLIED MATERIALS INC , SONG DAOYING , JIANG CHONG , KWAK BYUNG SUNG LEO
发明人： SONG DAOYING , JIANG CHONG , KWAK BYUNG SUNG LEO
IPC分类号： H01M14/00
CPC分类号： H01M6/40 , H01M4/0426 , H01M4/0471 , H01M4/139 , H01M4/70 , H01M10/0436 , H01M10/052 , H01M10/0562 , H01M10/0585
摘要： A method of fabricating a thin film battery may include a blanket deposition of an electrolyte layer followed by selective laser patterning of the electrolyte layer. Some or all the other device layers may be in situ patterned layers - formed using shadow masks.
摘要翻译：制造薄膜电池的方法可以包括电解质层的覆盖沉积，然后进行电解质层的选择性激光图案化。一些或所有其他器件层可以是原位图案层 - 使用荫罩形成。

16. 发明申请

WO2012170363A2 METHODS OF AND HYBRID FACTORIES FOR THIN-FILM BATTERY MANUFACTURING 审中-公开
标题翻译：薄膜电池制造和混合工艺方法
公开(公告)号：WO2012170363A2
公开(公告)日：2012-12-13
申请号：PCT/US2012/040798
申请日：2012-06-04
申请人： APPLIED MATERIALS, INC. , KWAK, Byung-Sung , BANGERT, Stefan , HAAS, Dieter , NALAMASU, Omkaram
发明人： KWAK, Byung-Sung , BANGERT, Stefan , HAAS, Dieter , NALAMASU, Omkaram
CPC分类号： H01M10/0436 , H01M4/0423 , H01M4/0426 , H01M4/134 , H01M4/1395 , H01M4/382 , H01M6/188 , H01M6/40 , H01M6/50 , H01M10/0404 , H01M10/052 , Y02E60/122 , Y02P70/54
摘要： Methods of and hybrid factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A hybrid factory includes one or more tool sets for fabricating a thin-film battery. In an example, a hybrid factory layout for lithium-based thin-film battery manufacturing includes a process tool for depositing active layers. The process tool includes a cluster tool for deposition of an active layer. The hybrid factory layout also includes an in-line tool for deposition of an active layer and a lithium evaporation tool having one or more gloveboxes coupling the lithium evaporation tool to the cluster tool and to the in-line tool.
摘要翻译：描述了薄膜电池制造的方法和混合工厂。一种方法包括制造薄膜电池的操作。混合工厂包括一个或多个用于制造薄膜电池的工具组。在一个示例中，用于锂基薄膜电池制造的混合工厂布局包括用于沉积活性层的处理工具。该工艺工具包括用于沉积有源层的簇工具。混合工厂布局还包括用于沉积活性层的在线工具和具有将锂蒸发工具耦合到簇工具和直列工具的一个或多个手套箱的锂蒸发工具。

17. 发明申请

WO2012099975A3 ELECTROCHROMIC TUNGSTEN OXIDE FILM DEPOSITION 审中-公开
标题翻译：电致变色氧化钨薄膜沉积
公开(公告)号：WO2012099975A3
公开(公告)日：2012-11-01
申请号：PCT/US2012021740
申请日：2012-01-18
申请人： APPLIED MATERIALS INC , JIANG CHONG , KWAK BYUNG SUNG LEO
发明人： JIANG CHONG , KWAK BYUNG SUNG LEO
IPC分类号： C23C14/34
CPC分类号： C23C14/0089 , C23C14/0036 , C23C14/0042 , C23C14/083
摘要： A deposition method for electrochromic WOx films involves cyclic deposition of very thin poisoned and metallic tungsten oxide layers to build up a film with a desired general stoichiometry with x in the range of 3>x>2.75. The method may include: charging a deposition chamber with oxygen gas to poison a tungsten metal target; initiating sputtering of the target while reducing the oxygen partial pressure being supplied to the chamber and pumping the chamber; sputtering target for time t1 + t2 to form, first and second tungsten oxide layers, where the first layer is deposited during time ti from a poisoned target and the second layer is deposited during time t2 from a metallic target, and where the stoichiometry of the film comprising the first and second layers is a function of t1 and t2; and, repeating until a desired film thickness is achieved.
摘要翻译：电致变色WOx薄膜的沉积方法包括非常薄的中毒和金属钨氧化物层的循环沉积，以形成具有在3> x> 2.75范围内的x的期望的一般化学计量的薄膜。该方法可以包括：用氧气向沉积室充电以毒化钨金属靶; 开始靶的溅射，同时减少供应到室的氧分压并泵送室; 溅射靶在时间t 1 + t 2以形成第一和第二钨氧化物层，其中第一层在时间t 1期间从中毒靶沉积并且第二层在时间t 2期间从金属靶沉积，并且其中化学计量包括第一和第二层的膜是t1和t2的函数; 并重复，直到达到所需的膜厚度。

18. 发明申请

WO2011056403A2 SHADOW MASK ALIGNMENT AND MANAGEMENT SYSTEM 审中-公开
标题翻译： SHADOW面罩对齐与管理系统
公开(公告)号：WO2011056403A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/053067
申请日：2010-10-18
申请人： APPLIED MATERIALS, INC. , KWAK, Byung-Sung, Leo , BANGERT, Stefan , HOFMANN, Ralf , KOENIG, Michael
发明人： KWAK, Byung-Sung, Leo , BANGERT, Stefan , HOFMANN, Ralf , KOENIG, Michael
IPC分类号： H01M10/04 , H01M10/0562 , H01M6/18 , H01G9/025
CPC分类号： H01M6/40 , C23C14/042 , H01M4/02 , H01M4/13 , H01M4/139 , H01M4/5825 , H01M4/621 , H01M4/623 , H01M4/663 , H01M2004/028 , Y02E60/122 , Y10T29/49002 , Y10T29/5313
摘要： A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.
摘要翻译：用于基板薄膜处理的磁性处理组件，用于组装和拆卸荫罩以覆盖工件顶部以暴露于加工状态的系统和方法。组件可以包括磁性处理载体和荫罩，其设置在磁性处理载体上并且磁耦合到磁性处理载体以覆盖待暴露于加工过程中待设置在荫罩和磁性处理载体之间的工件的顶部条件。系统包括具有用于保持荫罩的第一支撑件的第一室，用于保持处理托架的第二支撑件以及将荫罩对准待设置在承载器和荫罩之间的工件的对准系统。第一和第二支撑件可相对于彼此移动。

19. 发明申请

WO2009055529A1 METHOD FOR HIGH VOLUME MANUFACTURING OF THIN FILM BATTERIES 审中-公开
标题翻译：薄膜电池高容量制造方法
公开(公告)号：WO2009055529A1
公开(公告)日：2009-04-30
申请号：PCT/US2008/080884
申请日：2008-10-23
申请人： APPLIED MATERIALS, INC. , MOTOROLA, INC. , KWAK, Byung-sung , KRISHNA, Nety , EISENBEISER, Kurt , DAUKSHER, William J. , CANDELARIA, Jon
发明人： KWAK, Byung-sung , KRISHNA, Nety , EISENBEISER, Kurt , DAUKSHER, William J. , CANDELARIA, Jon
IPC分类号： H01M10/00 , B05C1/00
CPC分类号： H01M10/0585 , H01M6/40 , H01M10/0436 , H01M10/052 , H01M2300/0068
摘要： Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.
摘要翻译：提供了概念和方法，以通过消除和/或最小化常规物理（阴影）掩模的使用来降低薄膜电池（TFB）大批量制造的成本和复杂性。激光划线和其他可选的物理无掩模图案化技术满足某些或所有图案化要求。在一个实施例中，制造薄膜电池的方法包括提供衬底，在衬底上沉积与薄膜电池结构相对应的层，所述层按沉积顺序包括阴极，电解质和阳极，其中至少沉积层中的一个在沉积期间由物理掩模未图案化，沉积保护涂层，以及划刻层和保护涂层。此外，层的边缘可以被封装层覆盖。此外，可以将这些层沉积在两个基板上，然后层压以形成薄膜电池。

20. 发明申请

WO2012174260A2 PINHOLE-FREE DIELECTRIC THIN FILM FABRICATION 审中-公开
标题翻译：无孔电介质薄膜制造
公开(公告)号：WO2012174260A2
公开(公告)日：2012-12-20
申请号：PCT/US2012/042487
申请日：2012-06-14
申请人： APPLIED MATERIALS, INC. , JIANG, Chong , KWAK, Byung Sung, Leo
发明人： JIANG, Chong , KWAK, Byung Sung, Leo
IPC分类号： H01M14/00
CPC分类号： C23C14/0676 , C23C14/08 , C23C14/5826 , C23C14/586
摘要： A method of depositing a dielectric thin film may include: depositing a thin layer of dielectric; stopping deposition of the dielectric layer, and modifying the gas in the chamber if desired; inducing and maintaining a plasma in the vicinity of the substrate to provide ion bombardment of the deposited layer of dielectric; and repeating the depositing, stopping and inducing and maintaining steps until a desired thickness of dielectric is deposited. A variation on this method may include, in place of the repeating step: depositing a thick layer of lower quality dielectric; depositing a thin layer of high quality dielectric; stopping deposition of the dielectric layer, and modifying the gas in the chamber if desired; and inducing and maintaining a plasma in the vicinity of the substrate to provide ion bombardment of the deposited layer of dielectric. The thick layer of dielectric may be deposited more rapidly than the thin layers.
摘要翻译：沉积电介质薄膜的方法可以包括：沉积介电薄层; 阻止介电层的沉积，如果需要则改变腔中的气体; 在衬底附近诱导和维持等离子体，以提供沉积的电介质层的离子轰击; 并重复沉积，停止和引导和维持步骤，直到沉积所需的电介质厚度。该方法的变型可以包括：代替重复步骤：沉积较厚质量的电介质层; 沉积一层高质量的电介质; 阻止介电层的沉积，如果需要则改变腔中的气体; 以及在衬底附近诱导和维持等离子体，以提供沉积的电介质层的离子轰击。电介质的厚层可以比薄层更快地沉积。

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