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    • 147. 发明申请
    • Method of forming one or more nanopores for aligning molecules for molecular electronics
    • 形成一个或多个用于分子电子学分子的纳米孔的形成方法
    • US20080203055A1
    • 2008-08-28
    • US11906819
    • 2007-10-03
    • Theodore I. KaminsYong ChenPatricia A. Beck
    • Theodore I. KaminsYong ChenPatricia A. Beck
    • B31D3/00
    • B82Y10/00B81C1/00031C03C15/00C03C17/001H01L21/0332H01L21/0337H01L21/31144
    • A technique is provided for forming a molecule or an array of molecules having a defined orientation relative to the substrate or for forming a mold for deposition of a material therein. The array of molecules is formed by dispersing them in an array of small, aligned holes (nanopores), or mold, in a substrate. Typically, the material in which the nanopores are formed is insulating. The underlying substrate may be either conducting or insulating. For electronic device applications, the substrate is, in general, electrically conducting and may be exposed at the bottom of the pores so that one end of the molecule in the nanopore makes electrical contact to the substrate. A substrate such as a single-crystal silicon wafer is especially convenient because many of the process steps to form the molecular array can use techniques well developed for semiconductor device and integrated-circuit fabrication.
    • 提供了一种用于形成具有相对于基底具有限定取向的分子或分子阵列的技术,或用于形成用于在其中沉积材料的模具。 分子阵列通过将它们分散在基底中的小的,对准的孔(纳米孔)或模具的阵列中而形成。 通常,形成纳米孔的材料是绝缘的。 底层衬底可以是导电的或绝缘的。 对于电子器件应用,基底通常是导电的并且可以在孔的底部暴露,使得纳米孔中的分子的一端与基底电接触。 诸如单晶硅晶片的衬底是特别方便的,因为形成分子阵列的许多工艺步骤可以使用用于半导体器件和集成电路制造的技术。