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    • 148. 发明申请
    • METHOD FOR MANUFACTURING LIGHT EMITTING DEVICE
    • 制造发光装置的方法
    • US20100197054A1
    • 2010-08-05
    • US12669790
    • 2008-10-01
    • Takao Yonehara
    • Takao Yonehara
    • H01L33/00
    • H01L27/15H01L33/0079
    • A method for manufacturing a light emitting device according to the present invention has the steps of: preparing a first member which has an emission layer on a substrate having a compound semiconductor layer through an etch stop layer and a sacrifice layer; forming a bonded structure by bonding the first member on a second member including a silicon layer so that the emission layer is positioned in the inner side; providing a through groove in the substrate so that the etch stop layer is exposed, by etching the first member from the reverse side of the emission layer; and removing the substrate having the through groove provided therein from the bonded structure by etching the sacrifice layer.
    • 根据本发明的制造发光器件的方法具有以下步骤:通过蚀刻停止层和牺牲层来制备在具有化合物半导体层的衬底上具有发光层的第一构件; 通过将第一构件粘合在包括硅层的第二构件上以使得发射层位于内侧来形成接合结构; 通过从发射层的相反侧蚀刻第一构件,在衬底中提供通孔,使得蚀刻停止层暴露; 并且通过蚀刻牺牲层从接合结构去除其中设置有通孔的基板。