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    • 134. 发明授权
    • Systems and methods for evaluating semiconductor layers
    • 用于评估半导体层的系统和方法
    • US06882424B2
    • 2005-04-19
    • US10797163
    • 2004-03-10
    • Jon OpsalLi Chen
    • Jon OpsalLi Chen
    • G01B11/06G01N21/17G01N21/21G01N21/27G01N21/00
    • G01N21/211G01N21/1717
    • An apparatus for characterizing multilayer samples is disclosed. An intensity modulated pump beam is focused onto the sample surface to periodically excite the sample. A probe beam is focused onto the sample surface within the periodically excited area. The power of the reflected probe beam is measured by a photodetector. The output of the photodetector is filtered and processed to derive the modulated optical reflectivity of the sample. Measurements are taken at a plurality of pump beam modulation frequencies. In addition, measurements are taken as the lateral separation between the pump and probe beam spots on the sample surface is varied. The measurements at multiple modulation frequencies and at different lateral beam spot spacings are used to help characterize complex multilayer samples. In the preferred embodiment, a spectrometer is also included to provide additional data for characterizing the sample.
    • 公开了一种用于表征多层样品的装置。 将强度调制的泵浦光束聚焦到样品表面上以周期性地激发样品。 探针光束聚焦在周期性激发区域内的样品表面上。 反射探测光束的光束由光电检测器测量。 对光电检测器的输出进行滤波和处理,以得出样品的调制光学反射率。 在多个泵浦光束调制频率下进行测量。 此外,测量取决于泵和探针之间的横向分离,样品表面上的光斑变化。 使用多个调制频率和不同横向光斑间距的测量来帮助表征复杂的多层样品。 在优选实施例中,还包括光谱仪以提供用于表征样品的附加数据。
    • 135. 发明申请
    • Multiple beam ellipsometer
    • 多光束椭偏仪
    • US20050002033A1
    • 2005-01-06
    • US10893449
    • 2004-07-16
    • Martin EbertLi Chen
    • Martin EbertLi Chen
    • G01B11/06G01J4/04G01N21/21G01N21/95G01J4/00
    • G01N21/211G01J4/04
    • An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.
    • 椭圆仪器提供了两个撞击的聚焦探针光束,其被引导以沿两个相互不同的,优选地基本垂直的方向反射出样品。 旋转台将晶片的部分旋转到由两个垂直取向的线性级的两个线性轴限定的行进区域中。 结果,整个晶片被访问以进行测量,线性级的行程范围仅为晶片直径的一半。 减小的线性行程导致由晶片占据的小行程信封,因此在该设备的小占地面积内。 使用两个垂直定向的探针光束允许沿优选方向测量周期性结构,同时允许使用减小的运动级。
    • 136. 发明授权
    • Apparatus for evaluating metalized layers on semiconductors
    • 用于评估半导体上的金属化层的装置
    • US06836338B2
    • 2004-12-28
    • US10342027
    • 2003-01-14
    • Jon OpsalLi Chen
    • Jon OpsalLi Chen
    • G01B1124
    • G01N21/211G01N21/1717
    • An apparatus for characterizing multilayer samples is disclosed. An intensity modulated pump beam is focused onto the sample surface to periodically excite the sample. A probe beam is focused onto the sample surface within the periodically excited area. The power of the reflected probe beam is measured by a photodetector. The output of the photodetector is filtered and processed to derive the modulated optical reflectivity of the sample. Measurements are taken at a plurality of pump beam modulation frequencies. In addition, measurements are taken as the lateral separation between the pump and probe beam spots on the sample surface is varied. The measurements at multiple modulation frequencies and at different lateral beam spot spacings are used to help characterize complex multilayer samples. In the preferred embodiment, a spectrometer is also included to provide additional data for characterizing the sample.
    • 公开了一种用于表征多层样品的装置。 将强度调制的泵浦光束聚焦到样品表面上以周期性地激发样品。 探针光束聚焦在周期性激发区域内的样品表面上。 反射探测光束的光束由光电检测器测量。 对光电检测器的输出进行滤波和处理,以得出样品的调制光学反射率。 在多个泵浦光束调制频率下进行测量。 此外,测量取决于泵和探针之间的横向分离,样品表面上的光斑变化。 使用多个调制频率和不同横向光斑间距的测量来帮助表征复杂的多层样品。 在优选实施例中,还包括光谱仪以提供用于表征样品的附加数据。
    • 139. 发明授权
    • Wavelength selective optical cross switch and optical add/drop multiplexer using volume phase grating and array of micro electro mechanical mirrors
    • 波长选择光交叉开关和光分插复用器,使用体积相位光栅和微机电镜阵列
    • US06671428B1
    • 2003-12-30
    • US09813772
    • 2001-03-20
    • Wei YangShu ZhangLi Chen
    • Wei YangShu ZhangLi Chen
    • G02B626
    • G02B6/356G02B6/29311G02B6/29383G02B6/3512G02B6/3556
    • An optical cross switch device for selectively switching light beams between a plurality of fiber optic elements. The device includes an input fiber mounting assembly for securing at least one input fiber terminating in a fiber end for radiating an associated input light beam; collimating means for collimating the at least one input light beam; focusing means for focusing light beams incident thereon; an output fiber mounting assembly for securing at least one output fiber terminating in an output fiber end for receiving an associated light beam; and at least one mirror unit having at least one reflective element for selectively redirecting an associated one of the collimated input light beams toward an associated selected one of the output fiber ends via the focusing means.
    • 一种用于在多个光纤元件之间选择性地切换光束的光交叉开关装置。 所述装置包括输入光纤安装组件,用于固定终止于光纤端的至少一个输入光纤,用于辐射相关联的输入光束; 用于准直所述至少一个输入光束的准直装置; 用于聚焦入射在其上的光束的聚焦装置; 输出光纤安装组件,用于固定端接在输出光纤端的至少一个输出光纤,用于接收相关联的光束; 以及至少一个具有至少一个反射元件的反射镜单元,用于经由聚焦装置选择性地将相关联的一个准直输入光束重定向到相关联的所选输出光纤端。
    • 140. 发明授权
    • System and method for induction motor control
    • 感应电机控制系统及方法
    • US06630809B2
    • 2003-10-07
    • US09683180
    • 2001-11-29
    • Li ChenXingyi XuVinod ReddyRichard Joseph HampoKerry Eden Grand
    • Li ChenXingyi XuVinod ReddyRichard Joseph HampoKerry Eden Grand
    • H02P764
    • H02P21/22
    • Field oriented induction motor system including a field oriented induction motor having an associated torque current and an associated flux current and a predetermined current ratio, wherein the predetermined current ratio is defined as the ratio of the torque current to the flux current, and wherein the predetermined current ratio is dependent upon the saturation state of the motor. A method for selecting the ratio of torque current to flux current for a field oriented induction motor including applying an allocation factor to the torque current and flux current, wherein the allocation factor is dependent upon the saturation state of the motor. The saturation state of the motor is determined based upon motor parameters.
    • 磁场定向感应电动机系统包括具有相关联的转矩电流和相关联的磁通电流和预定电流比的场定向感应电动机,其中预定电流比被定义为转矩电流与磁通电流的比率,并且其中预定 电流比取决于电机的饱和状态。 一种用于选择场定向感应电动机的转矩电流与磁通电流的比率的方法,包括对转矩电流和磁通电流施加分配因子,其中分配因子取决于电动机的饱和状态。 电动机的饱和状态根据电机参数确定。