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    • 121. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US06919617B2
    • 2005-07-19
    • US10462880
    • 2003-06-17
    • Masaki YamadaHideki Shibata
    • Masaki YamadaHideki Shibata
    • H01L21/768H01L23/532H01L23/58
    • H01L23/53238H01L23/53295H01L2924/0002H01L2924/00
    • There is disclosed a semiconductor device comprising a first metal wiring buried in a first wiring groove formed, via a first barrier metal, in a first insulating layer formed on a semiconductor substrate, a second insulating layer formed on the first metal wiring, a via plug formed of a metal buried, via a second barrier metal, in a via hole formed in the second insulating layer, a third insulating layer formed on the second insulating layer in which the via plug is buried, and a second metal wiring buried in a second wiring groove formed in the third insulating layer via a third barrier metal having a layer thickness of layer quality different from that of the second barrier metal.
    • 公开了一种半导体器件,其包括埋在第一布线槽中的第一金属布线,第一布线槽经由第一阻挡金属形成在形成于半导体基板上的第一绝缘层中,形成在第一金属布线上的第二绝缘层, 由形成在所述第二绝缘层中的通孔中的通过第二阻挡金属掩埋的金属形成,形成在所述第二绝缘层上的第三绝缘层,所述第二绝缘层中埋设有所述通孔插塞,以及第二金属布线, 通过具有不同于第二阻挡金属的层质量的层厚度的第三阻挡金属形成在第三绝缘层中的布线槽。
    • 123. 发明授权
    • Semiconductor device having etching stopper layer formed by oxidation
and method of fabricating the same
    • 具有通过氧化形成的蚀刻停止层的半导体装置及其制造方法
    • US6008127A
    • 1999-12-28
    • US965887
    • 1997-11-07
    • Masaki Yamada
    • Masaki Yamada
    • H01L21/302H01L21/3065H01L21/3205H01L21/768H01L23/532H01L21/00
    • H01L21/76856H01L21/76802H01L21/76829H01L21/76843H01L21/76877H01L21/76888H01L23/53223H01L23/53238H01L2924/0002
    • A process for fabricating a semiconductor device using an etching stopper film which does not increase the number of photo-etching steps and does not cause a deterioration in device characteristics comprises the steps of: forming an impurity region at the surface of a semiconductor substrate; forming a first insulating layer on the semiconductor substrate; forming a first hole in the first insulating layer and thereby exposing the impurity region; forming a first metal layer on the first insulating layer and the inner surface of the first hole; forming a second metal layer on the region of the first metal layer formed on the inner surface of the first hole and filling the first hole with the second metal layer; oxidizing the first metal layer with the second metal layer as a mask; forming a second insulating layer on the first metal layer and the second metal layer; forming a second hole in the second insulating layer exposing the second metal layer by etching the second insulating layer with the first metal layer and the second metal layer as etching stoppers; and filling the second hole with a metal and thereby forming a third metal layer.
    • 使用不会增加光蚀刻步骤数量并且不引起器件特性劣化的使用蚀刻阻挡膜的半导体器件的制造方法包括以下步骤:在半导体衬底的表面形成杂质区; 在所述半导体衬底上形成第一绝缘层; 在所述第一绝缘层中形成第一孔,从而暴露所述杂质区; 在第一绝缘层和第一孔的内表面上形成第一金属层; 在形成在第一孔的内表面上的第一金属层的区域上形成第二金属层,并用第二金属层填充第一孔; 用第二金属层作为掩模氧化第一金属层; 在所述第一金属层和所述第二金属层上形成第二绝缘层; 通过用第一金属层和第二金属层蚀刻第二绝缘层作为蚀刻阻挡层,在第二绝缘层中形成暴露第二金属层的第二孔; 并用金属填充第二孔,从而形成第三金属层。
    • 126. 发明授权
    • Disc package
    • 光盘包
    • US4635792A
    • 1987-01-13
    • US722370
    • 1985-04-12
    • Masaki YamadaMitsuru YokoiKazuhiro Oishi
    • Masaki YamadaMitsuru YokoiKazuhiro Oishi
    • G11B23/03G11B33/04B65D85/30
    • G11B33/0427G11B23/0328
    • A disc package for enclosing a record disc and which is capable of opening to permit the disc to be withdrawn therefrom for insertion into a disc player comprises a body for accommodating the record disc, a cover, and a cover hinge pivotably connecting the cover to the body. The body comprises a first part adjacent to the cover hinge, a second part spaced away from the cover hinge, and a body hinge pivotably connecting the first and second body parts. A central holding member formed on the first body part is engageable within a center hole formed in the disc when the package is closed around the disc. A peripheral holding member is formed on a side of the second body part remote from the body hinge for gripping the outer edge of the disc. The disc package thus can be moved between a closed position wherein it securely grips, encloses and protects the disc and an open position wherein the disc is free of the cover, of the first body part and of the central holding member and is held only by the second body part, including the peripheral holding member, so that it is easily inserted into a disc player.
    • 用于封闭记录盘并且能够打开以允许将盘从其中取出以插入到盘播放器中的盘包装包括用于容纳记录盘的主体,盖和可铰接地将盖连接到盖的铰链的盖铰链 身体。 主体包括与盖铰链相邻的第一部分,与盖铰链间隔开的第二部分,以及可枢转地连接第一和第二主体部分的主体铰链。 形成在第一主体部分上的中央保持构件可以在封装围绕盘周围形成在盘中形成的中心孔内。 外围保持构件形成在远离主体铰链的第二主体部分的一侧,用于夹持盘的外边缘。 因此,盘包装可以在关闭位置之间移动,其中它牢固地夹持,包围并保护盘,并且打开位置,其中盘没有盖,第一主体部分和中央保持构件,并且仅由 第二主体部分,包括外围保持构件,使得其容易地插入到盘播放器中。
    • 129. 发明授权
    • Network node, information processing system, and method
    • 网络节点,信息处理系统和方法
    • US08601593B2
    • 2013-12-03
    • US12946938
    • 2010-11-16
    • Nobuyuki MuranakaYuji OgataKoki NakashiroMasaki Yamada
    • Nobuyuki MuranakaYuji OgataKoki NakashiroMasaki Yamada
    • G06F21/10
    • H04L63/102G06F8/61G06F21/84
    • The consistency between an application output destination and a permitted user for an I/O device section is ensured when a user deploys an application for processing and outputting input data onto an entrance node. The entrance node includes an output destination/user table that manages correspondence between an application output destination and a user. The output destination/user table stores information about the output destination used for each user who uses the entrance node. An application deployment management function of a processing section in the entrance node determines whether application deployment can be accepted from a user. To do this, the application deployment management function specifies a user corresponding to the output destination for the application from the output destination/user table and verifies that the user is consistent with a user permitted for an I/O device in the I/O device section used by the application.
    • 当用户部署用于处理和输出输入数据到入口节点的应用程序时,确保了应用输出目的地和I / O设备部分的允许用户之间的一致性。 入口节点包括管理应用输出目的地与用户之间的对应关系的输出目的地/用户表。 输出目的地/用户表存储有关使用入口节点的每个用户使用的输出目的地的信息。 入口节点中的处理部分的应用部署管理功能确定是否可以从用户接受应用部署。 为此,应用程序部署管理功能从输出目标/用户表指定与应用程序的输出目标相对应的用户,并验证用户是否与I / O设备中的I / O设备允许的用户一致 应用程序使用的部分。