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121. 发明授权

US07408175B2 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former 有权
标题翻译：用于电子束检查的装置，其操作方法以及使用前者制造半导体器件的方法
公开(公告)号：US07408175B2
公开(公告)日：2008-08-05
申请号：US11783780
申请日：2007-04-12
申请人： Toshifumi Kimba , Tohru Satake , Tsutomu Karimata , Kenji Watanabe , Nobuharu Noji , Takeshi Murakami , Masahiro Hatakeyama , Mamoru Nakasuji , Hirosi Sobukawa , Shoji Yoshikawa , Shin Oowada , Mutsumi Saito
发明人： Toshifumi Kimba , Tohru Satake , Tsutomu Karimata , Kenji Watanabe , Nobuharu Noji , Takeshi Murakami , Masahiro Hatakeyama , Mamoru Nakasuji , Hirosi Sobukawa , Shoji Yoshikawa , Shin Oowada , Mutsumi Saito
IPC分类号： H01J37/18
CPC分类号： H01J37/222 , G01N23/225 , G01N23/2251 , H01J37/06 , H01J37/073 , H01J37/185 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/0216 , H01J2237/082 , H01J2237/2002 , H01J2237/2007 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2813 , H01J2237/2816 , H01J2237/2817 , H01L2224/48227 , H01L2924/01019 , H01L2924/01025 , H01L2924/01057 , H01L2924/01067 , H01L2924/01078 , H01L2924/10253 , H01L2924/12032 , H01L2924/3025 , H01L2924/00
摘要： A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26-1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10-1; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20-1 and guiding it to a detecting system 35-1; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37-1; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput.
摘要翻译：本发明的基板检查装置1-1（图1）执行以下步骤：将要检查的基板“S”运送到检查室23-1中; 在所述检查室中保持真空; 将所述检查室与振动隔离; 通过至少一个自由度的阶段26-1连续地移动所述衬底; 照射具有指定宽度的电子束; 帮助所述电子束经由一次电子光学系统10-1到达所述衬底的表面; 通过二次电子光学系统20-1捕获从所述衬底发射的二次电子并将其引导到检测系统35-1; 基于由所述检测系统获得的二次电子束的检测信号，在图像处理系统中形成二次电子图像; 基于由所述图像处理系统形成的二次电子图像检测所述基板中的缺陷位置; 通过CPU37-1指示和/或存储所述衬底中的所述缺陷位置; 并将完全检查的基板从检查室中取出。因此，可以以高水平的精度和效率以及更高的生产量连续地执行基板上的缺陷检查。

122. 发明授权

US07361895B2 Electron beam apparatus and a device manufacturing method by using said electron beam apparatus 有权
标题翻译：电子束装置和使用所述电子束装置的装置制造方法
公开(公告)号：US07361895B2
公开(公告)日：2008-04-22
申请号：US11304680
申请日：2005-12-16
申请人： Mamoru Nakasuji , Takao Kato , Nobuharu Noji , Tohru Satake , Takeshi Murakami , Kenji Watanabe
发明人： Mamoru Nakasuji , Takao Kato , Nobuharu Noji , Tohru Satake , Takeshi Murakami , Kenji Watanabe
IPC分类号： H01J49/44
CPC分类号： H01J3/10 , B82Y10/00 , B82Y40/00 , G01N23/225 , H01J3/021 , H01J37/063 , H01J37/073 , H01J37/1471 , H01J37/1472 , H01J37/3174 , H01J2237/06316 , H01J2237/2817
摘要： An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising means for optimizing irradiation of the electron beam emitted from the electron gun onto the sample, the optimizing means may be two-stage deflectors disposed in proximity to the electron gun which deflects and directs the electron beam emitted in a specific direction so as to be in alignment with the optical axis direction of the electron beam apparatus, the electron beam emitted in the specific direction being at a certain angle with respect to the optical axis due to the fact that, among the crystal orientations of said cathode, a specific crystal orientation allowing a higher level of electron beam emission out of alignment with the optical axis direction.
摘要翻译：电子束装置，其中从具有阴极和阳极的电子枪发射的电子束被聚焦并照射到样品上，并且从样品发出的二次电子被引导到检测器中，该装置还包括用于优化照射的装置从电子枪发射到样品上的电子束的优化装置可以是设置在电子枪附近的两级偏转器，其偏转并引导沿特定方向发射的电子束以与光学器件对准电子束装置的轴方向，由于在所述阴极的晶体取向中具有更高水平的特定晶体取向的事实，在特定方向上发射的电子束相对于光轴成一定角度电子束发射与光轴方向不对准。

123. 发明申请

US20080067377A1 ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS 有权
标题翻译：电子束装置和抛光校正光学装置
公开(公告)号：US20080067377A1
公开(公告)日：2008-03-20
申请号：US11760235
申请日：2007-06-08
申请人： Masahiro Hatakeyama , Takeshi Murakami , Nobuharu Noji , Mamoru Nakasuji , Hirosi Sobukawa , Satoshi Mori , Tsutomu Karimata
发明人： Masahiro Hatakeyama , Takeshi Murakami , Nobuharu Noji , Mamoru Nakasuji , Hirosi Sobukawa , Satoshi Mori , Tsutomu Karimata
IPC分类号： G21K7/00
CPC分类号： H01J37/153 , H01J37/065 , H01J2237/061 , H01J2237/06375 , H01J2237/083 , H01J2237/1534 , H01J2237/24592 , H01J2237/28
摘要： An electron beam apparatus for providing an evaluation of a sample, such as a semiconductor wafer, that includes a micro-pattern with a minimum line width not greater than 0.1 μm with high throughput. A primary electron beam generated by an electron gun is irradiated onto a sample and secondary electrons emanating from the sample are formed into an image on a detector by an image projection optical system. An electron gun 61 has a cathode 1 and a drawing electrode 3, and an electron emission surface 1a of the cathode defines a concave surface. The drawing electrode 3 has a convex surface 3a composed of a partial outer surface of a second sphere facing the electron emission surface 1a of the cathode and an aperture 73 formed through the convex surface for passage of the electrons. An aberration correction optical apparatus comprises two identically sized multi-polar Wien filters arranged such that their centers are in alignment with a 1/4 plane position and a ¾ plane position, respectively, along an object plane-image plane segment in the aberration correction optical apparatus, and optical elements having bidirectional focus disposed in an object plane position, an intermediate image-formation plane position and an image plane position, respectively, in the aberration correction optical apparatus.
摘要翻译：一种用于提供诸如半导体晶片的样品的评估的电子束装置，其包括具有不大于0.1μm的最小线宽的微量图案，具有高生产量。由电子枪产生的一次电子束照射在样品上，从样品发出的二次电子通过图像投影光学系统形成检测器上的图像。电子枪61具有阴极1和拉伸电极3，阴极的电子发射表面1a限定凹面。拉制电极3具有由面对阴极的电子发射表面1a的第二球体的部分外表面和由电子通过凸面形成的孔73构成的凸面3a。像差校正光学装置包括两个相同大小的多极维恩滤波器，其布置成使得它们的中心分别与像差校正光学中的物平面图像平面段的1/4平面位置和¾平面位置对准装置和具有分别设置在像差校正光学装置中的物平面位置，中间图像形成平面位置和图像平面位置的双向焦点的光学元件。

124. 发明授权

US07328596B2 Steering lock 有权
标题翻译：转向锁
公开(公告)号：US07328596B2
公开(公告)日：2008-02-12
申请号：US11188944
申请日：2005-07-25
申请人： Hiroyasu Hasegawa , Masanari Okuno , Takeshi Murakami , Mitsuo Murakami
发明人： Hiroyasu Hasegawa , Masanari Okuno , Takeshi Murakami , Mitsuo Murakami
IPC分类号： B60R25/02 , E05B63/00
CPC分类号： B60R25/02153 , Y10T70/5531 , Y10T70/5664 , Y10T70/5956
摘要： A steering lock that is easy to assemble but difficult for an automobile thief to dismantle. The steering lock includes a cover on which a support structure for supporting a lock mechanism is integrally formed. The lock mechanism is attached to the cover to assemble a first subunit. A steering lock ECU is attached to an ECU case to assemble a second subunit. The first subunit is attached to the second subunit to assemble a lock unit. The lock unit is attached to the housing. A bolt fastens the lock unit and the housing to each other. A second connector is then attached to the housing.
摘要翻译：一种易于组装但难以将汽车小偷拆卸的转向锁。转向锁包括盖，其上一体地形成有用于支撑锁定机构的支撑结构。锁定机构附接到盖子以组装第一子单元。转向锁定ECU附接到ECU壳体以组装第二子单元。第一子单元附接到第二子单元以组装锁单元。锁定单元连接到外壳。螺栓将锁定单元和壳体彼此紧固。然后将第二连接器附接到壳体。

125. 发明申请

US20070259854A1 Triazole Derivative or Salt Thereof 有权
标题翻译：三唑衍生物或其盐
公开(公告)号：US20070259854A1
公开(公告)日：2007-11-08
申请号：US11663089
申请日：2005-09-14
申请人： Takeshi Murakami , Tomoaki Kawano , Ryota Shiraki , Hirofumi Ishii , Seiji Yoshimura , Takehiko Ohkawa , Mitsuru Hosaka , Hiroki Fukudome , Yutaka Inoki
发明人： Takeshi Murakami , Tomoaki Kawano , Ryota Shiraki , Hirofumi Ishii , Seiji Yoshimura , Takehiko Ohkawa , Mitsuru Hosaka , Hiroki Fukudome , Yutaka Inoki
IPC分类号： A61K31/4196 , A61K31/55 , A61P7/12 , C07D223/00 , C07D249/08
CPC分类号： C07D409/14 , C07D249/08 , C07D401/04 , C07D401/08 , C07D401/12 , C07D403/04 , C07D403/12 , C07D405/04 , C07D405/12 , C07D409/06 , C07D409/08 , C07D417/12 , C07D471/04 , C07D487/04
摘要： [Problem] There is provided a compound which can be used for therapy of diseases in which 11β-hydroxysteroid dehydrogenase type 1 (11β-HSD1) participates, in particular diabetes, insulin resistance. [Means for Solution] It has been found that a triazole derivative wherein the triazole ring is substituted with a trisubstituted methyl group in the 2-position or a pharmaceutically acceptable salt thereof has a strong 11β-HSD1 inhibitory activity. Moreover, the triazole derivative of the invention exhibits an excellent blood-glucose level-lowering action and hence can be used for therapy of diabetes, insulin resistance.
摘要翻译： [问题]提供了可用于治疗其中参与了11β-羟类固醇脱氢酶1型（11beta-HSD1）的疾病的化合物，特别是糖尿病，胰岛素抵抗。 [解决方案]已经发现，其中三唑环被2-位上的三取代甲基或其药学上可接受的盐取代的三唑衍生物具有强的11beta-HSD1抑制活性。此外，本发明的三唑衍生物显示出优异的血糖降低作用，因此可用于治疗糖尿病，胰岛素抵抗。

126. 发明授权

US07285010B2 TDI detecting device, a feed-through equipment and electron beam apparatus using these devices 有权
标题翻译： TDI检测装置，使用这些装置的馈通装置和电子束装置
公开(公告)号：US07285010B2
公开(公告)日：2007-10-23
申请号：US10476795
申请日：2002-05-14
申请人： Masahiro Hatakeyama , Tohru Satake , Takeshi Murakami , Kenji Watanabe , Nobuharu Noji
发明人： Masahiro Hatakeyama , Tohru Satake , Takeshi Murakami , Kenji Watanabe , Nobuharu Noji
IPC分类号： H01R1/01
CPC分类号： H01J37/222 , G01N21/956 , H01J37/224 , H01J37/244 , H01J2237/2445 , H01J2237/2447 , H01R13/2421 , H04N5/2253 , Y10S439/935
摘要： An electron beam apparatus comprises a TDI sensor (64) and a feed-through device (50). The feed-through device has a socket contact (54) for interconnecting a pin (52) attached to a flanged (51) for separating different environments. The other pin (53) making a pair with the pin (52) and the socket contact (54) together construct a connecting block, and the socket contact (54) has an elastic member (61). The pin (53) is connected with the TDI sensor (64), in which a pixel array has been adaptively configured based on the optical characteristic of an image projecting optical system. That sensor has a number of integration stages that can reduce the field of view of the image projecting optical system. Further, the number of integration stage may be determined such that the data rate of the TDI sensor would not be reduced but the number of pins would not be increased as much as possible. Preferably, the number of line count may be almost equal to the number of integration stages.
摘要翻译：电子束装置包括TDI传感器（64）和馈通装置（50）。馈通装置具有用于互连连接到带法兰（51）的销（52）的插座触点（54），用于分离不同的环境。的。与销（52）和插座触头（54）成对的另一个销（53）一起构成连接块，并且插座触头（54）具有弹性构件（61）。引脚（53）与TDI传感器（64）连接，其中像素阵列已经基于图像投影光学系统的光学特性被自适应地配置。该传感器具有可以减少图像投影光学系统的视野的多个积分级。此外，可以确定积分级的数量，使得TDI传感器的数据速率不会降低，但是引脚的数量不会尽可能多地增加。优选地，行计数的数量可以几乎等于积分级数。

127. 发明申请

US20070040168A1 Organic electroluminescent element 有权
标题翻译：有机电致发光元件
公开(公告)号：US20070040168A1
公开(公告)日：2007-02-22
申请号：US11503999
申请日：2006-08-15
申请人： Tatsuya Igarashi , Takeshi Murakami
发明人： Tatsuya Igarashi , Takeshi Murakami
IPC分类号： H01L29/08
CPC分类号： H01L51/0085 , C09K11/06 , C09K2211/1029 , C09K2211/1044 , C09K2211/185 , H01L21/26513 , H01L21/2658 , H01L29/78 , H01L51/0081 , H01L51/5012 , Y10S428/917
摘要： An organic electroluminescent element comprises: a pair of electrodes; and at least one organic compound layer between the pair of electrodes, said at least one organic compound layer comprising a light-emitting layer, wherein the organic luminescent element comprises at least one complex represented by formula (1): wherein M11 represents a hexacoordinate transition metal ion, Y11 represents a nitrogen atom or a substituted or unsubstituted carbon atom, L11 represents a ligand, Q11 and Q12 each represents an atomic group for forming a nitrogen-containing heterocyclic ring, n11 represents an integer of 1 to 3, n12 represents an integer of 0 to 4, X11 represents a counter ion, and n13 represents an integer of 0 to 3.
摘要翻译：有机电致发光元件包括：一对电极; 和所述一对电极之间的至少一个有机化合物层，所述至少一个有机化合物层包含发光层，其中所述有机发光元件包含至少一个由式（1）表示的络合物：其中M 11 表示六配位过渡金属离子，Y 11表示氮原子或取代或未取代的碳原子，L 11表示配体Q 11 各自表示用于形成含氮杂环的原子团，n表示1〜3的整数，n≥12 表示0〜4的整数，X 11表示抗衡离子，n 13表示0〜3的整数。

128. 发明授权

US07157703B2 Electron beam system 失效
标题翻译：电子束系统
公开(公告)号：US07157703B2
公开(公告)日：2007-01-02
申请号：US10651105
申请日：2003-08-29
申请人： Mamoru Nakasuji , Tohru Satake , Nobuharu Noji , Shoji Yoshikawa , Takeshi Murakami
发明人： Mamoru Nakasuji , Tohru Satake , Nobuharu Noji , Shoji Yoshikawa , Takeshi Murakami
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J2237/0492 , H01J2237/2441 , H01J2237/2446 , H01J2237/2806 , H01J2237/2817
摘要： Provided is an electron beam system, in which an electron beam emitted from an electron gun is irradiated to a stencil mask, and the electron beam that has passed through the stencil mask is magnified by an electron lens and then detected by a detector having a plurality of pixels so as to form an image of the sample. Further provided is an electron beam system, in which a primary electron beam emitted from an electron gun is directed to a sample surface of a sample prepared as a subject to be inspected, and an electron image formed by a secondary electron beam emanated from the sample is magnified and detected, wherein an NA aperture is disposed in a path common to both of the primary electron beam and the secondary electron beam. An electron lens is disposed in the vicinity of a sample surface, and in this arrangement, a crossover produced by the electron gun, the electron lens and the NA aperture may be in conjugate relationships relative to each other with respect to the primary electron beam.
摘要翻译：提供了一种电子束系统，其中从电子枪发射的电子束照射到模板掩模，并且已经通过模板掩模的电子束被电子透镜放大，然后由具有多个以形成样品的图像。进一步提供了一种电子束系统，其中从电子枪发射的一次电子束被引导到作为待检查对象制备的样品的样品表面，并且由从样品发出的二次电子束形成的电子图像被放大和检测，其中NA孔径设置在一次电子束和二次电子束共同的路径中。电子透镜设置在样品表面附近，并且在这种布置中，由电子枪，电子透镜和NA孔径产生的交叉可以相对于一次电子束相对于彼此的共轭关系。

129. 发明申请

US20060286406A1 Organic electroluminescent device 有权
标题翻译：有机电致发光器件
公开(公告)号：US20060286406A1
公开(公告)日：2006-12-21
申请号：US11410000
申请日：2006-04-25
申请人： Tatsuya Igarashi , Takeshi Murakami , Ikuo Kinoshita
发明人： Tatsuya Igarashi , Takeshi Murakami , Ikuo Kinoshita
IPC分类号： H01L51/54 , H05B33/14 , C09K11/06
CPC分类号： H01L51/5016 , C09K11/06 , C09K2211/1011 , C09K2211/1014 , C09K2211/1029 , C09K2211/1044 , C09K2211/1059 , C09K2211/185 , C09K2211/186 , C09K2211/188 , H01L51/0085 , H01L51/0087 , H05B33/14 , Y10S428/917
摘要： An organic electroluminescent device comprising: a pair of electrodes comprising a positive electrode and a negative electrode; and a plurality of organic compound layers including a light emitting layer between the pair of electrodes, wherein at least one layer containing a metal complex having a tridentate or more ligand is provided between the light emitting layer and the negative electrode.
摘要翻译：一种有机电致发光器件，包括：一对电极，包括正极和负极; 以及在所述一对电极之间包括发光层的多个有机化合物层，其中在所述发光层和所述负极之间设置至少一层含有具有三齿或更多配位体的金属络合物的层。

130. 发明申请

US20060219909A1 Detecting apparatus and device manufacturing method 有权
公开(公告)号：US20060219909A1
公开(公告)日：2006-10-05
申请号：US11435128
申请日：2006-05-17
申请人： Masahiro Hatakeyama , Takeshi Murakami , Tohru Satake , Nobuharu Noji , Ichirota Nagahama , Yuichiro Yamazaki
发明人： Masahiro Hatakeyama , Takeshi Murakami , Tohru Satake , Nobuharu Noji , Ichirota Nagahama , Yuichiro Yamazaki
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/244 , G01N21/9501 , G03F1/84 , H01J37/285 , H01J2237/2441 , H01J2237/2446
摘要： A detecting apparatus for detecting a fine geometry on a surface of a sample, wherein an irradiation beam is irradiated against the sample placed in a different environment different from an atmosphere and a secondary radiation emanated from the sample is detected by a sensor, and wherein the sensor is disposed at an inside of the different environment, a processing device to process detection signals from the sensor is disposed at an outside of the different environment, and a transmission means transmits detection signals from the sensor to the processing device.

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