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121. 发明授权

US08193806B2 Object detecting apparatus 有权
标题翻译：物体检测装置
公开(公告)号：US08193806B2
公开(公告)日：2012-06-05
申请号：US12557923
申请日：2009-09-11
申请人： Shoji Yamaguchi , Mario Fuse , Tsukasa Matsuda , Kunihiro Takahashi , Hiroyoshi Inoue , Eizo Kurihara , Seigo Makida
发明人： Shoji Yamaguchi , Mario Fuse , Tsukasa Matsuda , Kunihiro Takahashi , Hiroyoshi Inoue , Eizo Kurihara , Seigo Makida
IPC分类号： G01N27/72
CPC分类号： G01R33/0029 , G01V3/08 , G01V3/10 , G01V15/00
摘要： An object detecting apparatus that detects an object including a magnetic body including: a detection signal acquiring unit that acquires a detection signal based on a magnetic signal; a disturbance source detection signal storage unit that stores a detection signal of a disturbance source that generates a disturbance component with respect to the detection signal; a determining unit that determines whether the detection signal acquired by the detection signal acquiring unit contains the disturbance component; an amplitude correction unit that corrects an amplitude of the disturbance source detection signal and generates an amplitude-corrected disturbance source detection signal; a disturbance component suppression unit that generates a determination signal by suppressing the disturbance component contained in the detection signal; and an object determination unit that determines whether the object is the object to be detected based on the determination signal.
摘要翻译：一种检测包括磁体的物体的物体检测装置，包括：检测信号获取单元，其基于磁信号获取检测信号; 干扰源检测信号存储单元，其存储相对于所述检测信号产生干扰成分的干扰源的检测信号; 确定单元，确定由检测信号获取单元获取的检测信号是否包含干扰分量; 幅度校正单元，其校正所述干扰源检测信号的幅度并产生振幅校正的干扰源检测信号; 干扰分量抑制单元，其通过抑制检测信号中包含的干扰分量来产生确定信号; 以及对象确定单元，其基于所述确定信号来确定所述对象是否是所述被检测对象。

122. 发明授权

US08076010B2 Magnetic wire and recording medium 有权
标题翻译：磁线和记录介质
公开(公告)号：US08076010B2
公开(公告)日：2011-12-13
申请号：US11730628
申请日：2007-04-03
申请人： Mario Fuse , Shoji Yamaguchi , Tsukasa Matsuda , Eizo Kurihara , Yasunori Koda , Kunihiro Takahashi
发明人： Mario Fuse , Shoji Yamaguchi , Tsukasa Matsuda , Eizo Kurihara , Yasunori Koda , Kunihiro Takahashi
IPC分类号： B32B15/00
CPC分类号： G11B5/642 , Y10T428/31993 , Y10T428/32
摘要： A magnetic wire includes a magnetic metal wire material having a surface coated with a layer of an insulating material. The magnetic wire has a magnetic coercive force of 30 A/m or less and has a Barkhausen effect.
摘要翻译：磁线包括具有涂覆有绝缘材料层的表面的磁性金属线材料。磁线具有30A / m以下的磁矫顽力，具有巴克豪森效应。

123. 发明授权

US07998592B2 Recording paper used for an electrophotographic system and image recording method 有权
标题翻译：用于电子照相系统的记录纸和图像记录方法
公开(公告)号：US07998592B2
公开(公告)日：2011-08-16
申请号：US11443371
申请日：2006-05-31
申请人： Chizuru Koga , Tsukasa Matsuda , Toshiyuki Kasahara , Kouzou Ohta
发明人： Chizuru Koga , Tsukasa Matsuda , Toshiyuki Kasahara , Kouzou Ohta
IPC分类号： B32B27/42
CPC分类号： G03G7/006 , Y10T428/31942 , Y10T428/31993
摘要： A recording paper used for an electrophotographic system is provided, wherein, in a gas chromatograph generated using a headspace method by holding two pieces of the paper of dimensions about 1 cm×about 1 cm at about 120° C. for about 3 minutes, the quantity of aldehyde compounds generated having a straight-chain alkyl chain of about 5 to about 20 carbon atoms is equivalent to a peak surface area ratio of no more than about 65% and a peak surface area of no more than about 40,000.
摘要翻译：提供了一种用于电子照相系统的记录纸，其中在使用顶空法生成的气相色谱仪中，通过在约120℃下保持2cm尺寸约1cm×约1cm的纸约3分钟，产生具有约5至约20个碳原子的直链烷基链的醛化合物的量等于峰面积比不超过约65％，峰表面积不超过约40,000。

124. 发明申请

US20100167540A1 Film Forming Method, Plasma Film Forming Apparatus and Storage Medium 有权
标题翻译：成膜方法，等离子体成膜装置和储存介质
公开(公告)号：US20100167540A1
公开(公告)日：2010-07-01
申请号：US12223781
申请日：2007-02-09
申请人： Takashi Sakuma , Taro Ikeda , Osamu Yokoyama , Tsukasa Matsuda , Tatsuo Hatano , Yasushi Mizusawa
发明人： Takashi Sakuma , Taro Ikeda , Osamu Yokoyama , Tsukasa Matsuda , Tatsuo Hatano , Yasushi Mizusawa
IPC分类号： H01L21/768 , C23C14/34
CPC分类号： C23C14/046 , H01J37/321 , H01J37/34 , H01L21/2855 , H01L21/76846 , H01L21/76877 , H01L21/76882 , H01L21/76883
摘要： Disclosed is a technique for embedding metal in a recess provided in the surface of a process object, such as a semiconductor wafer W, only by plasma sputtering. The metal is copper as a typical example. The recess has a microscopic hole or trench having a diameter or width of 100 nm or less as a typical example. A film forming step and a diffusion step are alternately performed a plurality of times. The film forming step deposits a small amount of a metal film in the recess. The diffusion step moves the deposited metal film toward the bottom portion of the recess. In the film forming step, bias power to be applied to a stage for supporting the wafer W is set to a value ensuring that, on the surface of the wafer W, the rate of metal deposition due to the drawing-in of metal particles is substantially equal to the rate of the sputter etching by plasma. In the diffusion step, the wafer W is maintained at a temperature which permits occurrence of surface diffusion of the metal film deposited in the recess.
摘要翻译：公开了一种仅通过等离子体溅射将金属嵌入设置在诸如半导体晶片W的处理对象表面的凹部中的技术。金属是铜，作为典型的例子。该凹部具有作为典型实例的直径或宽度为100nm或更小的微孔或沟槽。交替进行成膜步骤和扩散步骤。成膜步骤在凹槽中沉积少量的金属膜。扩散步骤将沉积的金属膜移向凹部的底部。在成膜步骤中，施加到用于支撑晶片W的载物台的偏置功率被设定为确保在晶片W的表面上由金属颗粒的吸入引起的金属沉积速率为基本上等于通过等离子体的溅射蚀刻的速率。在扩散步骤中，晶片W保持在允许沉积在凹槽中的金属膜的表面扩散出现的温度。

125. 发明申请

US20090183984A1 Seed Film Forming Method, Plasma-Assisted Film Forming System and Storage Medium 审中-公开
标题翻译：种子成膜方法，等离子体辅助成膜系统和储存介质
公开(公告)号：US20090183984A1
公开(公告)日：2009-07-23
申请号：US12223383
申请日：2007-01-26
申请人： Takashi Sakuma , Taro Ikeda , Osamu Yokoyama , Tsukasa Matsuda , Tatsuo Hatano , Yasushi Mizusawa
发明人： Takashi Sakuma , Taro Ikeda , Osamu Yokoyama , Tsukasa Matsuda , Tatsuo Hatano , Yasushi Mizusawa
IPC分类号： C23C14/34 , C23C14/14
CPC分类号： C23C14/046 , C23C14/345 , H01J37/321 , H01J37/32935 , H01J37/3299 , H01J37/34 , H01L21/2855 , H01L21/76843 , H01L21/76862 , H01L21/76873 , H01L2221/1089
摘要： The invention is related to A seed film forming method capable of forming a seed film in recesses without forming overhangs.The seed film forming method of depositing a seed film for plating includes the steps of: producing metal ions by ionizing a metal target with a plasma in a processing vessel that can be evacuated; and depositing a metal film on a surface provided with recesses of a workpiece mounted on a stage placed in the processing vessel by supplying bias power to the workpiece to attract the metal ions to the workpiece; wherein a film deposition step of depositing the metal film by using the bias power determined so that the metal film deposited on the surface of the workpiece may not be sputtered, and a film deposition interrupting step of interrupting the deposition of the metal film by stopping producing the metal ions are repeated alternately by a number of cycles.
摘要翻译：本发明涉及能够在不形成突出端的情况下在凹陷中形成种子膜的种子膜形成方法。沉积用于电镀的种子膜的种子膜形成方法包括以下步骤：通过在能够被抽真空的处理容器中用等离子体电离金属靶产生金属离子; 以及通过向所述工件提供偏置功率以将金属离子吸引到所述工件上，在安装在放置在所述处理容器中的工作台上的工件的设置有凹部的表面上沉积金属膜; 其中，通过使用确定为使得沉积在所述工件的表面上的金属膜不会被溅射的偏置功率来沉积所述金属膜的膜沉积步骤，以及通过停止产生来中断所述金属膜的沉积的膜沉积中断步骤金属离子交替重复多次。

126. 发明授权

US07511814B2 Particle-measuring system and particle-measuring method 有权
公开(公告)号：US07511814B2
公开(公告)日：2009-03-31
申请号：US11782031
申请日：2007-07-24
申请人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
发明人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
IPC分类号： G01N21/00
CPC分类号： G01N1/24 , C23C16/4405 , C23C16/4412 , G01N15/06 , G01N2015/0693 , H01L21/67069 , H01L21/67115 , H01L21/67253 , H01L21/68742 , Y10T137/8593 , Y10T137/87652 , Y10T137/8766
摘要： The present invention provides a particle measuring system which is provided in a processing system 40 which generates an atmosphere obtained by exhausting air or a gas in a processing chamber 48 by a vacuum pump 98 and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe 90 which connects an exhaust opening 86 of the processing chamber 48 with the vacuum pump 98, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.

127. 发明授权

US07510750B2 Recording paper and image recording method 失效
标题翻译：记录纸和图像记录方法
公开(公告)号：US07510750B2
公开(公告)日：2009-03-31
申请号：US11013803
申请日：2004-12-17
申请人： Chizuru Koga , Kiyoshi Hosoi , Takashi Ogino , Tsukasa Matsuda
发明人： Chizuru Koga , Kiyoshi Hosoi , Takashi Ogino , Tsukasa Matsuda
IPC分类号： B41M5/00
CPC分类号： B41M5/52 , B41M5/5218 , B41M5/5227 , B41M5/5236 , B41M5/5245 , B41M5/5254 , G03G7/0013 , G03G7/002 , G03G7/004 , G03G7/0046 , Y10T428/24802
摘要： A recording paper containing pulp fibers and filler as main components and containing at least a heterocyclic carboxylic acid and a water-soluble polymer in the surface of the recording paper, wherein the surface contains at least one kind of cationic substance selected from the group consisting of a cationic organic molecule and a metal salt containing a metal cation of valency two or greater.
摘要翻译：一种含有纸浆纤维和填料作为主要成分并且在记录纸表面含有至少一种杂环羧酸和一种水溶性聚合物的记录纸，其中该表面含有至少一种选自以下的阳离子物质：阳离子有机分子和含有两个或更多价的金属阳离子的金属盐。

128. 发明申请

US20090026261A1 CONTROL GATE 审中-公开
标题翻译：控制门
公开(公告)号：US20090026261A1
公开(公告)日：2009-01-29
申请号：US12179155
申请日：2008-07-24
申请人： Hiroyoshi INOUE , Shoji YAMAGUCHI , Yasunori KODA , Kunihiro TAKAHASHI , Mario FUSE , Tsukasa MATSUDA
发明人： Hiroyoshi INOUE , Shoji YAMAGUCHI , Yasunori KODA , Kunihiro TAKAHASHI , Mario FUSE , Tsukasa MATSUDA
IPC分类号： G06K5/00
CPC分类号： G08B13/2434 , G08B13/2408 , G08B13/2445 , G08B13/2471
摘要： A control gate includes a first exciting coil, a first detection coil, a second exciting coil, a second detection coil, a signal determination unit and an amplification factor setting unit. The first exciting coil forms a first alternating magnetic field in a passage. The first detection coil detects a variation in the first alternating magnetic field. The second exciting coil forms a second alternating magnetic field in the passage. The second detection coil that detects a variation in the second magnetic field. The signal determination unit includes a first amplifier which (i) amplifies a first detection signal of the first detection coil and (ii) determines a passage of the magnetic material based on the amplified first detection signal. The amplification factor setting unit sets a first amplification factor for the first amplifier based on a second detection signal of the second detection coil.
摘要翻译：控制门包括第一激励线圈，第一检测线圈，第二激励线圈，第二检测线圈，信号确定单元和放大因子设置单元。第一激励线圈在通道中形成第一交变磁场。第一检测线圈检测第一交变磁场的变化。第二激励线圈在通道中形成第二交变磁场。检测第二磁场变化的第二检测线圈。信号确定单元包括：第一放大器，其（i）放大第一检测线圈的第一检测信号，以及（ii）基于放大的第一检测信号确定磁性材料的通过。放大率设定单元基于第二检测线圈的第二检测信号设定第一放大器的第一放大系数。

129. 发明申请

US20080227010A1 Transfer Paper for Electrophotography 审中-公开
标题翻译：转印纸用于电子照相
公开(公告)号：US20080227010A1
公开(公告)日：2008-09-18
申请号：US11939220
申请日：2007-11-13
申请人： Eizo Kurihara , Tsukasa Matsuda , Mario Fuse , Shoji Yamaguchi , Kunihiro Takahashi , Tomofumi Tokiyoshi
发明人： Eizo Kurihara , Tsukasa Matsuda , Mario Fuse , Shoji Yamaguchi , Kunihiro Takahashi , Tomofumi Tokiyoshi
IPC分类号： G03G7/00
CPC分类号： D21H21/14 , D21H17/67 , D21H27/30 , G03G7/0046 , G03G7/0053
摘要： A transfer paper for electrophotography contains a pulp fiber and a magnetic material for generating a large Barkhausen effect. An average dehydration speed S1a (an average value (% by mass/second) of dehydration speeds S1 of 5 sheets of paper) is 0.15 or less. The dehydration speed S1 is represented by (W1a−W1b)/30. Here, W1a represents a moisture content ratio (% by mass) of the paper after moisture conditioning, and W1b represents a moisture content ratio (% by mass) of the paper after a dehydration process including leaving the paper in a 80° C. environment for 30 seconds after moisture conditioning.
摘要翻译：用于电子照相的转印纸包含用于产生大的巴克豪森效应的纸浆纤维和磁性材料。平均脱水速度S 1a（5张纸的脱水速度S 1的平均值（质量％/秒））为0.15以下。脱水速度S 1由（W 1 a -W 1 b）/ 30表示。这里，W 1a表示湿度调节后的纸的含水率（质量％），W1b表示脱水处理后的纸的含水率（质量％），包括将纸留在80 湿度调节后30秒的环境。

130. 发明申请

US20080081464A1 METHOD OF INTEGRATED SUBSTRATED PROCESSING USING A HOT FILAMENT HYDROGEN RADICAL SOUCE 审中-公开
标题翻译：使用热线性氢辐射的集成基底处理方法
公开(公告)号：US20080081464A1
公开(公告)日：2008-04-03
申请号：US11537573
申请日：2006-09-29
申请人： Tsukasa Matsuda , Isamu Sakuragi
发明人： Tsukasa Matsuda , Isamu Sakuragi
IPC分类号： H01L21/34
CPC分类号： H01L21/76814 , H01L21/02063 , H01L21/28562 , H01L21/76843
摘要： A method of integrated processing is provided for a substrate in the substrate processing tool. The substrate contains an etch feature in a dielectric film and an exposed metal interconnect pattern formed underneath the etch feature. The integrated process includes pretreating exposed surfaces of the etch feature and the exposed metal interconnect pattern with a flow of hydrogen radicals generated by thermal decomposition of H2 gas by a hot filament hydrogen radical source separated from the substrate by a showerhead plate containing gas passages facing the substrate. The integrated process further includes depositing a barrier metal film over the pretreated exposed surfaces, and forming a Cu metal film on the barrier metal film.
摘要翻译：为基板处理工具中的基板提供一体化处理方法。衬底包含介电膜中的蚀刻特征以及形成在蚀刻特征下方的暴露的金属互连图案。整合过程包括通过热分解H 2气体产生的氢自由基的流动来预处理蚀刻特征和暴露的金属互连图案的暴露表面，所述热自由基由通过一个包含面向衬底的气体通道的喷头板。整合方法还包括在预处理的暴露表面上沉积阻挡金属膜，并在阻挡金属膜上形成Cu金属膜。

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