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111. 发明申请

WO2003083886A1 SWITCH DEVICE 审中-公开
标题翻译：开关装置
公开(公告)号：WO2003083886A1
公开(公告)日：2003-10-09
申请号：PCT/GB2003/001304
申请日：2003-03-26
申请人： QINETIQ LIMITED , BRUNSON, Kevin, Michael , COMBES, David, Jonathan , KINGS, David, Oury
发明人： COMBES, David, Jonathan , KINGS, David, Oury
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H47/325 , H01H2059/0036 , H01H2059/0063
摘要： The present invention relates to a switch device (10) comprising a first actuation electrode (11) and a second actuation electrode (12) and a first contact electrode (16) and a second contact electrode (17), the first actuation electrode (11) and first contact electrode (16) being mounted on at least part of, or forming at least part of, a resiliently flexible arm (13), the switch further comprising an electrical actuation means (21, 22, 23) for, when in use, applying a first inter-electrode potential difference between the first electrode (11) and the second electrode (12); characterised in that the electrical actuation means further comprises a resonance means for, when in use, varying the first inter-electrode potential difference in such a manner that mechanical resonance is caused to occur in the resiliently flexible arm (13). The resonance means comprises an electrical feedback circuit.
摘要翻译：本发明涉及包括第一致动电极（11）和第二致动电极（12）和第一接触电极（16）和第二接触电极（17）的开关装置（10），第一致动电极（11））和第一接触电极（16）安装在弹性柔性臂（13）的至少一部分或至少部分形成弹性柔性臂（13），所述开关还包括电致动装置（21,22,23），用于当处于使用在第一电极（11）和第二电极（12）之间施加第一电极间电位差; 其特征在于，电致动装置还包括谐振装置，用于在使用时改变第一电极间电位差，使得在弹性柔性臂（13）中发生机械共振。谐振装置包括电反馈电路。

112. 发明申请

WO2002079076A1 MEMS DEVICE MEMBERS HAVING PORTIONS THAT CONTACT A SUBSTRATE AND ASSOCIATED MEHTODS OF OPERATING 审中-公开
标题翻译：具有接触基板和相关操作手段的MEMS器件成员
公开(公告)号：WO2002079076A1
公开(公告)日：2002-10-10
申请号：PCT/IB2001/001010
申请日：2001-06-11
申请人： JDS UNIPHASE CORPORATION
发明人： HILL, Edward, Arthur , MAHADEVAN, Ramaswamy
IPC分类号： B81B3/00
CPC分类号： H01H1/0036 , B81B3/001 , B81B2201/032 , B81B2203/0118 , B81B2203/0307 , F03G7/06 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H61/02 , H01H2059/0063 , H01H2059/0072 , H01H2059/0081 , H01H2061/006
摘要： MEMS devices include a substrate, an anchor attached to the substrate, and a multilayer member attached to the anchor and spaced apart from the substrate. The multilayer member can have a first portion that is remote from the anchor and that curls away from the substrate and a second portion that is adjacent the anchor that contacts the substrate. Related methods are disclosed.
摘要翻译： MEMS器件包括衬底，附接到衬底的锚固体和附接到锚固体并与衬底间隔开的多层构件。所述多层构件可以具有远离所述锚固体并且远离所述基底的第一部分和邻近所述锚固体接触所述基底的第二部分。公开了相关方法。

113. 发明申请

WO01045120A2 VARIABLE CAPACITOR AND ASSOCIATED FABRICATION METHOD 审中-公开
标题翻译：可变电容器及相关制造方法
公开(公告)号：WO01045120A2
公开(公告)日：2001-06-21
申请号：PCT/IB2000/002051
申请日：2000-11-28
IPC分类号： B81B3/00 , F03G7/06 , H01G5/16 , H01G5/18 , H01H1/00 , H01H59/00 , H01H61/02 , H01G
CPC分类号： H01G5/18 , B81B3/0056 , F03G7/06 , H01G5/16 , H01H1/0036 , H01H59/0009 , H01H61/02 , H01H2059/0063 , H01H2059/0072 , H01H2059/0081 , H01H2061/006
摘要： A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters.
摘要翻译：提供具有低损耗和相应高Q的可变电容器。除了基板之外，可变电容器包括至少一个基板电极和基板电容器板，其设置在基板上并且由诸如HTS材料或厚金属层的低电阻材料形成。可变电容器还包括从基板向外延伸并且在至少一个基板电极上方的双压电晶片。双压电晶片构件包括由具有不同热膨胀系数的材料形成的第一和第二层。双压电晶片构件的第一和第二层限定至少一个双压电晶片电极和双压电晶片电容器板，使得在衬底电极和双压电晶片电极之间建立电压差使双压电晶片相对于衬底电极移动，从而改变电极间间距以及电容器板之间的距离。因此，可以基于双压电晶片构件和下面的衬底之间的相对间隔来控制可变电容器的电容。还提供了一种用于微加工或以其他方式制造具有由低电阻材料形成的电极和电容器板的可变电容器的方法，使得所得到的可变电容器具有低损耗和相应高的Q.因此，可变电容器可用于高频应用，如某些可调谐滤波器所要求的。

114. 发明申请

WO1994027308A1 BI-STABLE MEMORY ELEMENT 审中-公开
标题翻译：双稳态存储元件
公开(公告)号：WO1994027308A1
公开(公告)日：1994-11-24
申请号：PCT/GB1994000977
申请日：1994-05-06
申请人： SMITH, Charles, Gordon
IPC分类号： H01H01/00
CPC分类号： H01H1/0036 , G11C11/50 , G11C23/00 , H01H1/20 , H01H1/66 , H01H59/0009 , H01H2001/0042 , H01H2059/0036 , H01H2059/0063
摘要： A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the bridging contact (8) is in contact with the base contact (3), and in the other of which the bridging contact (8) is spaced apart from the base contact (3). Deflection means (4, 5) deflects the bridging contact (8) from one stable position to the other.
摘要翻译：双稳态存储元件（1）包括由导电材料制成的基极触点（3）和桥接触头（8）。桥接触点（8）的尺寸设计成具有两个稳定的位置，其中桥接触点（8）中的一个与基极触点（3）接触，而另一个桥接触点（8）是与基部触点（3）间隔开。偏转装置（4,5）将桥接接触件（8）从一个稳定位置偏转到另一个。

115. 发明授权

US08948706B2 Stiction reduction for MEMS devices 有权
标题翻译： MEMS器件的静态减少
公开(公告)号：US08948706B2
公开(公告)日：2015-02-03
申请号：US13706913
申请日：2012-12-06
申请人： Motorola Mobility LLC
发明人： Adrian Napoles , Vijay L. Asrani , Gregory R. Black
IPC分类号： H04B1/38 , H03K3/01 , B81C1/00 , H03H7/40 , H01H59/00 , H03H7/00 , H03H7/38
CPC分类号： H03K3/01 , B81C1/00976 , H01H2059/0018 , H01H2059/0063 , H03H7/40 , H03H2007/006 , H03H2007/008 , H03H2007/386
摘要： A capacitive micro-electromechanical switch (MEMS) integrated circuit (IC) comprises a plurality of capacitors, each having a voltage terminal for applying an actuation voltage to the individual capacitor, wherein each capacitor is capable of being individually cycled. The MEMS IC further includes: a high voltage driver having a voltage distribution mechanism that couples to the voltage terminal of each of the plurality of capacitors to enable the high voltage driver to selectively provide a pre-determined voltage input required to actuate and charge a selected one or more of the plurality of capacitors; and control logic communicatively coupled to the high voltage driver and which deterministically applies power cycle times (less than a stiction limit) for an actuation and de-actuation of at least a first capacitor of the plurality of capacitors to substantially reduce an occurrence of stiction within at least the first capacitor during operation of the MEMS device.
摘要翻译：电容微机电开关（MEMS）集成电路（IC）包括多个电容器，每个电容器具有用于向各个电容器施加致动电压的电压端子，其中每个电容器能够单独循环。 MEMS IC还包括：具有电压分配机构的高压驱动器，其耦合到多个电容器中的每一个的电压端子，以使得高电压驱动器能够选择性地提供所需的预定电压输入，以对所选择的电压进行充电和充电多个电容器中的一个或多个; 以及控制逻辑，其通信地耦合到所述高电压驱动器，并且确定性地施加用于所述多个电容器中的至少第一电容器的致动和解除驱动的功率周期时间（小于静态极限），以基本上减少所述多个电容器内的静电的发生至少在MEMS器件的操作期间的第一电容器。

116. 发明授权

US08289674B2 Moving a free-standing structure between high and low adhesion states 有权
标题翻译：在高和低粘附状态之间移动独立结构
公开(公告)号：US08289674B2
公开(公告)日：2012-10-16
申请号：US12405758
申请日：2009-03-17
申请人： Charles Gordon Smith , Richard L. Knipe
发明人： Charles Gordon Smith , Richard L. Knipe
IPC分类号： H01H47/00
CPC分类号： H01H59/0009 , G11C23/00 , H01H1/0036 , H01H2001/0047 , H01H2059/0036 , H01H2059/0054 , H01H2059/0063
摘要： Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
摘要翻译：本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到仅弱附着点的力的脉冲来解决开关器件中的静电问题。一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近电极的低电压产生的静电力将开关拉离开接触。

117. 发明授权

US08098120B2 Spring structure for MEMS device 有权
标题翻译：用于MEMS器件的弹簧结构
公开(公告)号：US08098120B2
公开(公告)日：2012-01-17
申请号：US11718130
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
摘要翻译： MEM器件具有可移动元件（30），一对电极（e1，e2）以移动可移动元件，一个电极具有可独立移动的部分（e3），弹性地联接到相应电极的其余部分以提供额外的电阻到电极的拉。这可以实现更高的释放电压Vrel，从而降低静电的风险。此外，可以减小Vpi与Vrel的比率，因此更大的电压范围可用于可移动元件的移动。这样可以实现更快的切换。可独立移动部分的面积小于电极的其余部分，并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。或者，可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分，以在与基板接触时提供额外的拉入阻力。

118. 发明授权

US07619497B2 Electrostatic relay 失效
标题翻译：静电继电器
公开(公告)号：US07619497B2
公开(公告)日：2009-11-17
申请号：US11237843
申请日：2005-09-29
申请人： Takashi Yuba , Hideki Iwata
发明人： Takashi Yuba , Hideki Iwata
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/18 , H01H1/20 , H01H2001/0068 , H01H2059/0063 , H01H2059/0072
摘要： An electrostatic micro relay, in which the contact gap between moving and fixed contacts may be increased and the reliability and high-performance regarding contacting and separating the moving contact with and from the fixed contact may be improved. In the micro relay according to the invention, as a comb-shaped moving electrode is supported at an obliquely upper position relative to a fixed comb-shaped electrode, the contact gap may be lengthened. When a predetermined voltage is applied between the contacts, the moving electrode is moved obliquely downward toward the fixed electrode such that the contact surface of the moving electrode slidably contacts the contact surface of the fixed electrode. This slidably contact may cause a wiping effect, whereby each contact surface may be kept clean.
摘要翻译：可以增加静电微型继电器，其中移动和固定触点之间的接触间隙可以增加，并且可以提高与固定触点接触和分离移动触点的可靠性和高性能。在根据本发明的微型继电器中，作为梳状移动电极，相对于固定梳状电极在倾斜上部位置被支撑，可以延长接触间隙。当在触点之间施加预定电压时，移动电极向固定电极倾斜向下移动，使得移动电极的接触表面滑动地接触固定电极的接触表面。这种滑动接触可能引起擦拭效果，由此每个接触表面可以保持清洁。

119. 发明授权

US07342710B2 Mems switch and method of fabricating the same 失效
标题翻译： Mems开关及其制造方法
公开(公告)号：US07342710B2
公开(公告)日：2008-03-11
申请号：US11806143
申请日：2007-05-30
申请人： Che-heung Kim , Hyung-jae Shin , Soon-cheol Kweon , Kyu-sik Kim , Sang-hun Lee
发明人： Che-heung Kim , Hyung-jae Shin , Soon-cheol Kweon , Kyu-sik Kim , Sang-hun Lee
IPC分类号： G02B26/00 , H01L21/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
摘要翻译：一种微机电系统开关及其制造方法。微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且包括开关接触点和在基板的上表面上和多个信号线之间的多个不可移动的电极。内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。推杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。接触构件形成在外致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

120. 发明申请

US20070227863A1 Mems switch and method of fabricating the same 失效
标题翻译： Mems开关及其制造方法
公开(公告)号：US20070227863A1
公开(公告)日：2007-10-04
申请号：US11806143
申请日：2007-05-30
申请人： Che-heung Kim , Hyung-jae Shin , Soon-cheol Kweon , Kyu-sik Kim , Sang-hun Lee
发明人： Che-heung Kim , Hyung-jae Shin , Soon-cheol Kweon , Kyu-sik Kim , Sang-hun Lee
IPC分类号： H01H57/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
摘要翻译：一种微机电系统开关及其制造方法。微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且包括开关接触点和在基板的上表面上和多个信号线之间的多个不可移动的电极。内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。推杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。接触构件形成在外致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

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