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    • 111. 发明授权
    • Polishing body, polisher, polishing method, and method for producing semiconductor device
    • 抛光体,抛光机,抛光方法及半导体装置的制造方法
    • US06749714B1
    • 2004-06-15
    • US09856272
    • 2001-05-18
    • Akira IshikawaTatsuya Senga
    • Akira IshikawaTatsuya Senga
    • B24B3700
    • B24B37/205B24B37/26
    • The present invention provides a hard polishing pad consisting of a non-foam material which is used in a CMP apparatus. Hard polishing pads consisting of foam resins show good pattern step difference elimination, but tend to cause scratching of the wafer. Furthermore, the polishing rate tends to be lower than that of polishing pads consisting of foam polyurethane. In the polishing pad of the present invention, spiral grooves or concentric circular grooves and lattice-form grooves are combined in the surface of the polishing pad; furthermore, the angles of intersection of the grooves are set at less than 2 degrees, and there are no edge parts with a curvature radius of 50 nm or less in the surface of the polishing pad. Accordingly, since there is no generation of flash, the object of polishing is not scratched, and the polishing rate can be increased.
    • 本发明提供一种由CMP装置中使用的非泡沫材料组成的硬抛光垫。 由泡沫树脂组成的硬抛光垫具有良好的图案阶差消除,但倾向于引起晶片划伤。 此外,抛光速率倾向于低于由泡沫聚氨酯组成的抛光垫的抛光速率。 在本发明的研磨垫中,在抛光垫的表面上组合有螺旋槽或同心圆形槽和格子状槽, 此外,凹槽的交叉角度设定在小于2度,并且在抛光垫的表面中没有曲率半径为50nm以下的边缘部分。 因此,由于不产生闪光,因此不会划伤抛光的目的,并且可以提高抛光速率。
    • 116. 发明授权
    • Injectable thermal balls for tumor ablation
    • 注射热球用于肿瘤消融
    • US06423056B1
    • 2002-07-23
    • US09475819
    • 1999-12-30
    • Akira IshikawaNabuo TakedaSuzanne I. AhnSamuel S. AhnSteven R. HaysF. Andrew Gaffney
    • Akira IshikawaNabuo TakedaSuzanne I. AhnSamuel S. AhnSteven R. HaysF. Andrew Gaffney
    • A61B1818
    • A61B5/416A61B5/0008A61B5/42A61N1/406
    • A method of tumor ablation using injectable thermal-sensing balls. A catheter system (115) is used to inject a slurry (134) of thermal-sensing balls (136) into a tumor (122) located in, for example, a liver (120). The catheter system (115) comprises a catheter (128) and a specialized syringe (129) consisting of a housing (130) and a plunger (132). The housing (130) includes a cylindrical chamber having the slurry (134) of thermal-sensing balls (136). The catheter (128) is inserted retrograde into the femoral artery and passed to the site of the tumor (122). The hepatic artery (124) branches into smaller vessels, one of which is a tumor artery (126) which feeds the tumor (122). The tip of the catheter (128) is placed in the tumor artery (126) guided by conventional fluoroscopy. The injected balls (136) then receive energy from an external control system (110). The system (110) comprises a control panel (114) as an operator interface for controlling the system (110) and reading data therefrom. A CPU (112) is used for control and monitor of the operation, and transmits power and signals to the injected balls (136) via a radiating antenna (118), which energy is converted into heat to increase the temperature of the tumor (122). The temperature of the balls (136) can then be read from one or more onboard temperature sensors, and displayed to the operator for accurate control of the tumor temperature.
    • 使用注射热感应球的肿瘤消融的方法。 导管系统(115)用于将热感测球(136)的浆液(134)注入位于例如肝脏(120)中的肿瘤(122)中。 导管系统(115)包括由壳体(130)和柱塞(132)组成的导管(128)和专用注射器(129)。 壳体(130)包括具有热敏球(136)的浆料(134)的圆柱形腔室。 将导管(128)逆行插入股动脉并传递至肿瘤部位(122)。 肝动脉(124)分支成较小的血管,其中一个是肿瘤(122)的肿瘤动脉(126)。 将导管(128)的尖端放置在通过常规荧光透视引导的肿瘤动脉(126)中。 注射的球(136)然后从外部控制系统(110)接收能量。 系统(110)包括作为用于控制系统(110)并从其读取数据的操作员界面的控制面板(114)。 CPU(112)用于控制和监视操作,并且经由辐射天线(118)将功率和信号发送到注射的球(136),该辐射天线(118)将该能量转换成热量以增加肿瘤的温度(122 )。 然后可以从一个或多个车载温度传感器读取球(136)的温度,并且显示给操作者以准确控制肿瘤温度。
    • 117. 发明授权
    • Radiation dosimetry system
    • 放射剂量测定系统
    • US06398710B1
    • 2002-06-04
    • US09478591
    • 2000-01-06
    • Akira IshikawaNabuo TakedaSuzanne I. AhnSamuel S. AhnSteven R. HaysF. Andrew Gaffney
    • Akira IshikawaNabuo TakedaSuzanne I. AhnSamuel S. AhnSteven R. HaysF. Andrew Gaffney
    • A61N500
    • G01T1/026A61N5/1048G01T1/161
    • A radiation dosimetry system (110) using miniature implanted transponder balls. A patient having a tumor that is the target of the radiation treatment lies in a treatment area with the tumor positioned beneath a target (112) used for alignment purposes. The system (110) is controlled and monitored by a CPU (114) which receives instructions from a radiologist operating a control panel (116), and displays control parameters, data and graphics to the radiologist on a display (118). The CPU (114) controls an RF system operating through a broad-band antenna (120) and directed at the target area (112). The CPU (114) controls operation of a radiation source (122), which may be a conventional linear accelerator, for directing radiation at the target area (112). The radiation source (122) includes a collimator (124) or similar apparatus for shaping a radiation beam for accurate application to the target area (112). A pair of RF receivers (126) and (128) are positioned such that they are spaced apart and opposite from the CPU antenna (120) with respective antennas (130) and (132) directed at the target area (112). Communication connections (133a), (133b), (133c), (133d) and (133e) interconnect the various elements of the system (110).
    • 辐射剂量测定系统(110),使用微型植入式转发器球。 具有作为放射治疗靶标的肿瘤的患者位于治疗区域中,肿瘤位于用于对准目的的靶(112)下方。 系统(110)由接收来自操作控制面板(116)的放射科医生的指令的CPU(114)进行控制和监视,并在显示器(118)上向放射科医师显示控制参数,数据和图形。 CPU(114)控制通过宽带天线(120)操作并且指向目标区域(112)的RF系统。 CPU(114)控制用于将辐射引导到目标区域(112)的辐射源(122)的操作,其可以是常规的直线加速器。 辐射源(122)包括准直器(124)或用于使辐射束成形以用于准确应用于目标区域(112)的类似装置。 一对RF接收器(126)和(128)被定位成使得它们与CPU天线(120)间隔开并与其相对应的天线(130)和(132)指向目标区域(112)。 通信连接(133a),(133b),(133c),(133d)和(133e)互连系统(110)的各种元件。
    • 118. 发明授权
    • Moving exposure system and method for maskless lithography system
    • 无掩模光刻系统的移动曝光系统和方法
    • US06379867B1
    • 2002-04-30
    • US09480796
    • 2000-01-10
    • Wenhui MeiTakashi KanatakeAkira Ishikawa
    • Wenhui MeiTakashi KanatakeAkira Ishikawa
    • G03F902
    • G03F7/70275G03F7/70291G03F7/70425
    • A photolithography system and method for providing a mask image to a subject such as a wafer is provided. The mask images are divided into sub-patterns and sequentially provided to a pixel panel, such as a deformable mirror device or a liquid crystal display. The pixel panel converts each sub-pattern into a plurality of pixel elements. Each of the pixel elements is then simultaneously focused to discrete, non-contiguous portions of the subject through a microlense array. The subject and pixel elements are then moved (e.g., one or both may be moved) and the next sub-pattern in the sequence is provided to the pixel panel. As a result, light can be projected on the subject, according to the pixel elements, to create a contiguous image on the subject.
    • 提供了一种用于向诸如晶片的对象提供掩模图像的光刻系统和方法。 掩模图像被分成子图案,并且顺序地提供给诸如可变形反射镜装置或液晶显示器的像素面板。 像素面板将每个子图案转换成多个像素元件。 然后,每个像素元件通过微透镜阵列同时聚焦到对象的离散的,非连续的部分。 然后移动对象和像素元素(例如,可以移动一个或两个),并且将序列中的下一个子图案提供给像素面板。 结果,可以根据像素元素将光投影到被摄体上,以在对象上创建连续的图像。
    • 119. 发明授权
    • Spherical shaped solar cell fabrication and panel assembly
    • 球形太阳能电池制造和面板组装
    • US06355873B1
    • 2002-03-12
    • US09599155
    • 2000-06-21
    • Akira Ishikawa
    • Akira Ishikawa
    • H01L3106
    • H01L31/0272H01L31/035281Y02E10/50
    • A spherical shaped solar diode having an n-type substrate surrounded by a p-type layer of semiconductor material is disclosed. In addition, a plurality of hetero-junction super lattice structures are formed surrounding the p-type layer. The plurality of hetero-junction super lattice structures include alternating layers of Si and SeBeTe. The plurality of hetero-junction super lattice structures adapt the diode to convert higher energy light (as compared to 1.1eV light) to electrical energy. The diodes are formed into a solar panel assembly. The panel assembly includes a wire mesh to secure the diodes and electrically contact one electrode of each diode. A dimpled sheet is also used for securing the diodes and electrically contacting the other electrode of each diode. The diodes are positioned adjacent to the dimpled sheet so that when light is applied to the solar panel assembly, the diodes are exposed to the light on a majority of each diode's surface.
    • 公开了一种具有由p型半导体材料层围绕的n型衬底的球形太阳能二极管。 此外,围绕p型层形成多个异质结超晶格结构。 多个异质结超晶格结构包括Si和SeBeTe的交替层。 多个异质结超晶格结构适应二极管以将较高能量的光(与1.1eV光相比)转换成电能。 二极管形成太阳能电池板组件。 面板组件包括用于固定二极管并电接触每个二极管的一个电极的金属丝网。 凹陷片也用于固定二极管并电接触每个二极管的另一个电极。 二极管被定位成邻近凹陷片,使得当将光施加到太阳能面板组件时,二极管暴露于​​每个二极管表面上大部分的光。