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111. 发明专利

JPH02202025A THIN FILM FORMING DEVICE AND ETCHING DEVICE 失效
公开(公告)号：JPH02202025A
公开(公告)日：1990-08-10
申请号：JP2130489
申请日：1989-01-31
申请人： FUJITSU LTD
发明人： KOBAYASHI KAZU , UEHARA YUJI , SAWADA SHIGETOMO , SATO FUMIHIKO
IPC分类号： G01N21/66 , C23C4/00 , H01L21/203 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/24
摘要： PURPOSE:To enable the thin films in optimum physical properties and even thickness to be formed by a method wherein the line width and line shape expanded by the Doppler effect of the fine structure of one luminous spectral line of thin film forming atoms emitted from plasma are measured and then the filming conditions are controlled in terms of the results of measurement. CONSTITUTION:The fine structure of e.g. one spectral line emitted from atoms sputtered from a target is measured by a Fabry-Perot interferometer 9 while the line width and line shape expanded by the Doppler effect are also measured. In such a way, the velocity profile and the mean energy of the sputtered atoms deposited on a substrate 23 are measured and then the power (power supply and current) of sputter power supply current fed to an electromagnet, sputter gas pressure, gas pressure during the sputtering process and the mixing ratio thereof are controlled to make the velocity profile and the mean energy constant. Through these procedures, the thin film in optimum physical properties and even thickness can be formed constantly.

112. 发明专利

JPH0238852A DETERIORATION MEASURING APPARATUS FOR PHOTOSENSITIVE BODY 失效
公开(公告)号：JPH0238852A
公开(公告)日：1990-02-08
申请号：JP18890788
申请日：1988-07-28
申请人： FUJITSU LTD
发明人： UEHARA YUJI , KIMURA MASATOSHI
IPC分类号： G01N27/00 , G03G5/00 , G03G21/00
摘要： PURPOSE:To achieve an accurate replacement of a photosensitive drum by arranging a means for measuring a surface potential of a photosensitive body by a XTOF method comprising an exposure means and a surface potential detection means, a means of analyzing the results thereof and a means of storing the results of analysis. CONSTITUTION:A photosensitive drum 1 is charged with -several hundred V by a corotron 24, rotated and fixed in such a manner that a charging with -several hundred V occurs at the position of a surface potential probe 14. Then, from above the transparent probe 14, the drum is irradiated with a beam light from a semiconductor laser 20 as expanded with a beam expander 21. Attenuation of a surface potential following the laser irradiation is measured with the probe 14 and a surface potential meter 15. Here, a response speed of the potential meter 15 is set to be shorter sufficiently than a running time of a light carrier. A signal from the potential meter 15 is applied to a degree of deterioration calculator 17 to calculate a valve of an attenuation of the surface potential, thereby enabling the learning of a timing of changing the photosensitive drum.

113. 发明专利

JPS61285458A PRODUCTION OF ELECTROPHOTOGRAPHIC SENSITIVE BODY 失效
公开(公告)号：JPS61285458A
公开(公告)日：1986-12-16
申请号：JP12905385
申请日：1985-06-12
申请人： FUJITSU LTD
发明人： UEHARA YUJI , ARAKI MAKOTO , OSAME HIROSHI , KIYOTA KOHEI
IPC分类号： G03G5/08 , G03G5/082
摘要： PURPOSE:To stabilize electrostatic charge potential and to improve characteristics by forming a charge blocking layer and photoconductive layer by using the reactive gas of the same component under the specific gaseous pressure which is varied in the stage of forming the respective films. CONSTITUTION:A conductive base 1 consisting of Al is provided on a susceptor 12 provided in a vessel 11 and an electrode 13 facing the susceptor 12 is provided. The inside of the vessel 11 is evacuated to 10-6 Torr vacuum degree by using an evacuation pump 15. Gaseous disilane (Si2H6) added with an extremely slight amt. of gaseous diborane (B2H6) is introduced at 10 sccs flow rate through a gas introducing pipe 16 into the vessel 11 until the pressure in the vessel attains 1.0 Torr. A high-frequency voltage is impressed between the susceptor 12 and the electrode 13 by a high-frequency power source 17 under such conditions to generate a glow discharge between the susceptor 12 and the electrode 13 and to decompose the gas in the vessel 11, thereby forming the charge blocking layer 2 on the base 1. The pressure of the reactive gas in the vessel 11 is decreased to 0.2 Torr and the photoconductive layer 3 is formed on the layer 2 under the similar conditions.

114. 发明专利

JPS6161169A Electrophotographic photosensitive body 失效
标题翻译：电子感光体
公开(公告)号：JPS6161169A
公开(公告)日：1986-03-28
申请号：JP18320984
申请日：1984-08-31
申请人： Fujitsu Ltd
发明人： UEHARA YUJI , KIYOTA KOHEI , ARAKI MAKOTO , OTSUKA KEITA
IPC分类号： G03G5/08 , G03G5/14
CPC分类号： G03G5/08
摘要： PURPOSE:To improve an electrification characteristics, and also to prevent a memory phenomenon by providing a photosensitive layer of amorphous silicon hydride on a conductive supporting body, and forming a Schottky barrier on an interface of its supporting body and the photosensitive layer. CONSTITUTION:A conductive supporting body 21 (11) consisting of Mo, etc. in a vacuum chamber 21 is rotated by a motor 24, and also heated by a heater 25. A disilane gas is led into the chamber 21 through a valve 28 from a cylinder 26, glow discharge occurs by turning on a high-frequency power between discharge electrodes 32 having many gas jet holes 31 by a high-frequency power source 30, and an amorphous silicon hydride photosensitive layer 12 is formed. In this case, Shottky barrier 14 is formed on an interface of the photosensitive layer 12 and the supporting body 11. Subsequently, an ammonia gas is led into the chamber 21 together with the disilane gas, and a photective layer 13 constituted of silicon nitride is formed. In this way, an electrification characteristic is improved, and also a memory phenomenon is prevented.
摘要翻译：目的：为了提高通电特性，并且还通过在导电性支撑体上设置非晶硅氢化物的感光层来防止记忆现象，并且在其支撑体和感光层的界面上形成肖特基势垒。构成：由真空室21中的Mo等构成的导电性支撑体21（11）由马达24旋转，并由加热器25进行加热。乙硅烷气体通过阀28从阀28引导到室21内气缸26通过由高频电源30接通具有多个气体喷射孔31的放电电极32之间的高频功率而形成辉光放电，形成非晶硅氢化物感光层12。在这种情况下，在感光层12和支撑体11的界面上形成有肖特基势垒14.随后，氨气与乙硅烷气体一起被引入到室21中，由氮化硅构成的喷射层13是形成。以这种方式，提高了通电特性，并且防止了记忆现象。

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