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    • 111. 发明授权
    • Metal gate fill by optimizing etch in sacrificial gate profile
    • 通过优化牺牲栅极剖面中的蚀刻来进行金属栅极填充
    • US08765537B2
    • 2014-07-01
    • US13606035
    • 2012-09-07
    • Man Fai NgBin Yang
    • Man Fai NgBin Yang
    • H01L21/338
    • H01L21/28114H01L29/42376H01L29/66545H01L29/6659H01L29/7833
    • A high-k metal gate electrode is formed with reduced gate voids. An embodiment includes forming a replaceable gate electrode, for example of amorphous silicon, having a top surface and a bottom surface, the top surface being larger than the bottom surface, removing the replaceable gate electrode, forming a cavity having a top opening larger than a bottom opening, and filling the cavity with metal. The larger top surface may be formed by etching the bottom portion of the amorphous silicon at greater temperature than the top portion, or by doping the top and bottom portions of the amorphous silicon differently such that the bottom has a greater lateral etch rate than the top.
    • 形成具有减小的栅极空隙的高k金属栅电极。 一个实施例包括形成可替换的栅电极,例如具有顶表面和底表面的非晶硅,顶表面大于底表面,去除可更换的栅电极,形成具有大于 底部开口,并用金属填充空腔。 可以通过在比顶部更高的温度下蚀刻非晶硅的底部,或者通过不同地掺杂非晶硅的顶部和底部来形成较大的顶表面,使得底部具有比顶部更大的侧向蚀刻速率 。
    • 113. 发明授权
    • Method and device for printing image
    • 打印图像的方法和设备
    • US08632152B2
    • 2014-01-21
    • US12920267
    • 2009-02-27
    • Jinghua ShenYapeng ChenBin YangLidong Wang
    • Jinghua ShenYapeng ChenBin YangLidong Wang
    • B41J29/38B41J29/393B41J2/15
    • G06K15/02H04N1/40068
    • Disclosed is a method for printing an image, comprising a step of rasterizing an image to be printed in view of a first resolution to generate a first data bitmap; a step of splitting the first data bitmap according to a ratio of the first resolution to a second resolution to generate second data bitmaps; and a step of outputting the second data bitmaps to a printer with the second resolution for printing. Disclosed is also a device for printing images. The method and device for printing an image may solve the problem in the prior art that the definition of an image printed from a printer is too low and improve the definition of an image printed from a printer.
    • 公开了一种打印图像的方法,包括:根据第一分辨率光栅化要打印的图像以生成第一数据位图的步骤; 根据第一分辨率与第二分辨率的比率分割第一数据位图以产生第二数据位图的步骤; 以及将第二数据位图输出到具有用于打印的第二分辨率的打印机的步骤。 公开了一种用于打印图像的装置。 用于打印图像的方法和设备可以解决现有技术中从打印机打印的图像的定义太低并且提高从打印机打印的图像的定义的问题。