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    • 105. 发明授权
    • Engineered high dielectric constant oxide and oxynitride heterostructure gate dielectrics by an atomic beam deposition technique
    • 通过原子束沉积技术工程化的高介电常数氧化物和氧氮化物异质结构栅极电介质
    • US06541079B1
    • 2003-04-01
    • US09426656
    • 1999-10-25
    • Nestor A. Bojarczuk, Jr.Eduard A. CartierSupratik Guha
    • Nestor A. Bojarczuk, Jr.Eduard A. CartierSupratik Guha
    • C23C1408
    • C23C14/22C23C14/081
    • A method of forming a layer of oxide or oxynitride upon a substrate including first placing a substrate having an upper surface and a lower surface in a high vacuum chamber and then exposing the upper surface to a beam of atoms or molecules, or both, of oxygen or nitrogen or a combination of same at a temperature sufficient to form a reacted layer on the upper surface of said substrate wherein said layer has a chemical composition different from the chemical composition of said substrate. The reacted upper layer is then exposed simultaneously in the chamber to atomic or molecular beams of oxygen, nitrogen or both and to a beam of metal atoms or metal molecules selected from the group consisting of Al, Si, Zr, La, Y, Sc, Sr, Ba, Ti, Ta, W, Cr, Zr, Ca, Mg, Be, Pr, Nd and Hf to form a metal oxide, a metal nitride or a metal oxynitride layer in said layer. Another option is to expose the upper surface of the substrate simultaneously in the chamber to atomic or molecular beams of oxygen, nitrogen or both and to a beam of metal atoms or meal molecules selected from the group consisting of Al, Si, Zr, La Y, Sc, Sr, Ba, Ti, Ta, W, Cr, Zr, Ca, Mg, Be, Pr, Nd and Hf to form a metal oxide, a metal nitride or a metal oxynitride layer on said reacted layer.
    • 一种在衬底上形成氧化物或氮氧化物层的方法,包括首先将具有上表面和下表面的衬底放置在高真空室中,然后将上表面暴露于原子或分子或两者的氧气束 或氮或其组合,其温度足以在所述基材的上表面上形成反应层,其中所述层具有不同于所述基材的化学组成的化学组成。 然后将反应的上层在室中同时暴露于氧,氮或两者的原子或分子束,并且暴露于选自Al,Si,Zr,La,Y,Sc等金属原子或金属分子束, Sr,Ba,Ti,Ta,W,Cr,Zr,Ca,Mg,Be,Pr,Nd和Hf,以在所述层中形成金属氧化物,金属氮化物或金属氮氧化物层。 另一个选择是将基板的上表面同时暴露于氧,氮或两者的原子或分子束,以及选自Al,Si,Zr,La Y的金属原子或粉末分子束 ,Sc,Sr,Ba,Ti,Ta,W,Cr,Zr,Ca,Mg,Be,Pr,Nd和Hf,以在所述反应层上形成金属氧化物,金属氮化物或金属氮氧化物层。
    • 106. 发明授权
    • Organic light emitting diodes having transparent cathode structures
    • 具有透明阴极结构的有机发光二极管
    • US5739545A
    • 1998-04-14
    • US794072
    • 1997-02-04
    • Supratik GuhaRichard Alan HaightJoseph M. KarasinskiRonald R. Troutman
    • Supratik GuhaRichard Alan HaightJoseph M. KarasinskiRonald R. Troutman
    • H01L51/50H01L51/52H05B33/12H05B33/14H05B33/22H05B33/26H01L35/24H01L51/00
    • H01L51/5234H01L2251/5323
    • Organic light emitting diodes having a transparent cathode structure is disclosed. The structure consists of a low work function metal in direct contact with the electron transport layer of the OLED covered by a layer of a wide bandgap semiconductor. Calcium is the preferred metal because of its relatively high optical transmissivity for a metal and because of its proven ability to form a good electron injecting contact to organic materials. ZnSe, ZnS or an alloy of these materials are the preferred semiconductors because of their good conductivity parallel to the direction of light emission, their ability to protect the underlying low work function metal and organic films and their transparency to the emitted light. Arrays of these diodes, appropriately wired, can be used to make a self-emissive display. When fabricated on a transparent substrate, such a display is at least partially transparent making it useful for heads-up display applications in airplanes and automobiles. Such a display can also be fabricated on an opaque substrate, such as silicon, in which previously fabricated devices and circuits can be used to drive the display.
    • 公开了具有透明阴极结构的有机发光二极管。 该结构由与宽带隙半导体层覆盖的OLED的电子传输层直接接触的低功函数金属组成。 由于金属具有相对较高的透光率,因此,由于已证明能够与有机材料形成良好的电子注入接触,钙是优选的金属。 ZnSe,ZnS或这些材料的合金是优选的半导体,因为它们具有与光发射方向平行的良好导电性,它们保护下层低功函数金属和有机膜的能力及其对发射光的透明度。 这些二极管的数组,适当连接,可用于进行自发光显示。 当在透明基板上制造时,这种显示器至少部分透明,使其对于在飞机和汽车中的单机显示应用是有用的。 这种显示器也可以在诸如硅的不透明衬底上制造,其中可以使用先前制造的器件和电路来驱动显示器。