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    • 101. 发明授权
    • Processing method
    • 加工方法
    • US08017525B2
    • 2011-09-13
    • US12238066
    • 2008-09-25
    • Takashi Ito
    • Takashi Ito
    • H01L21/302
    • H01L21/67069H01L21/67167H01L21/67207H01L21/67236H01L21/6831H01L21/76808
    • A multichamber-type processing apparatus and processing method using same, in which a substrate is reliably neutralized without being damaged, thereby ensuring excellent accuracy and throughput. The processing apparatus includes a transfer chamber, etching chambers selectively communicating with the transfer chamber and providing a space to etch a first substrate therein, and ashing chambers selectively communicating with the transfer chamber and providing a space to ash a second substrate therein. A transfer mechanism is installed in the transfer chamber to sequentially transfer the substrate from the transfer chamber into the etching and ashing chambers. The substrate is electrostatically adsorbed to electrostatic chucks in the etching and ashing chambers. An monatomic nitrogen atom supply unit supplies dissociated monatomic nitrogen atoms into the etching and ashing chambers.
    • 一种多室型处理装置及其处理方法,其中基板被可靠地中和而不被损坏,从而确保优异的精度和生产量。 所述处理装置包括传送室,选择性地与所述传送室连通并且提供蚀刻其中的第一基板的空间的蚀刻室以及与所述传送室选择性连通并且为其中的第二基板灰化的空间。 传送机构安装在传送室中以将基板从传送室依次传送到蚀刻和灰化室中。 基板被静电吸附到蚀刻和灰化室中的静电卡盘。 单原子氮原子供应单元将解离的单原子氮原子供应到蚀刻和灰化室中。
    • 102. 发明申请
    • GAS SENSOR AND METHOD FOR MANUFACTURING SAME
    • 气体传感器及其制造方法
    • US20110186431A1
    • 2011-08-04
    • US13013094
    • 2011-01-25
    • Sumiko HORISAKAHiroki FujitaMika MurakamiTakashi Ito
    • Sumiko HORISAKAHiroki FujitaMika MurakamiTakashi Ito
    • G01N27/30C03B29/00
    • G01N27/4077G01N27/4075G01N33/0037Y02A50/245
    • A NOx sensor 100 includes a sensor device 110 and a heater 70 capable of heating the sensor device 110. The sensor device 110 includes an inner pump electrode 22 and an outer pump electrode 23 disposed respectively on the inner side and the outer side of a solid electrolyte layer 6. The sensor device 110 detects the concentration of NOx by introducing a gas to be measured into a first inner vacancy 20, pumping out oxygen in the gas to be measured from the inner pump electrode 22 to the outer pump electrode 23, introducing the gas to be measured, from which the oxygen has been pumped out, into a second inner vacancy 40, reducing the NOx in the gas to be measured, to thereby generate oxygen, and detecting the generated oxygen. A characteristic stabilizing layer 24 covers the outer pump electrode 23 and is made of a porous body with a thickness of 10 to 200 μm and a thickness variation of 20% or less.
    • NOx传感器100包括能够加热传感器装置110的传感器装置110和加热器70.传感器装置110包括分别设置在固体的内侧和外侧的内泵电极22和外泵电极23 电解质层6.传感器装置110通过将待测量的气体引入第一内部空间20来检测NOx的浓度,从内部泵电极22向外部泵电极23抽出待测量的气体中的氧气,引入 待被测量的气体已被排出氧气,进入第二内部空位40,减少要测量的气体中的NOx,从而产生氧气,并检测所产生的氧气。 特性稳定层24覆盖外泵电极23,由厚度为10〜200μm,厚度变化为20%以下的多孔体构成。
    • 103. 发明申请
    • GAS SENSOR AND METHOD FOR MANUFACTURING SENSOR ELEMENT
    • 气体传感器和制造传感器元件的方法
    • US20110147214A1
    • 2011-06-23
    • US12904417
    • 2010-10-14
    • Hiroki FUJITASumiko HorisakaMika MurakamiTakashi Ito
    • Hiroki FUJITASumiko HorisakaMika MurakamiTakashi Ito
    • G01N27/30H05K13/00
    • G01N27/4071G01N27/419
    • A gas sensor capable of a high-accuracy measurement which is realized by a high responsiveness and a strength that prevents a sensor element from being damaged by a stress occurring in assemblage and usage. This gas sensor includes a sensor element formed of an oxygen-ion conductive solid electrolyte as a main component, and the sensor element includes: an internal space to which a measurement gas is introduced from the outside; a first electrode formed on a surface of the internal space; a second electrode formed in a space different from the internal space; and a pumping cell including the first and second electrodes. The pumping cell is operable to pump out oxygen existing in the internal space when a predetermined voltage is applied to between the first and second electrodes. The thickness of the internal space is 50 μm or more and 180 μm or less.
    • 能够通过高响应性和强度实现高精度测量的气体传感器,其防止传感器元件被组装和使用中发生的应力损坏。 该气体传感器包括由氧离子导电固体电解质作为主要成分形成的传感器元件,并且传感器元件包括:从外部引入测量气体的内部空间; 形成在所述内部空间的表面上的第一电极; 形成在与所述内部空间不同的空间中的第二电极; 以及包括第一和第二电极的泵浦单元。 当预定电压施加到第一和第二电极之间时,泵送单元可操作以泵出存在于内部空间中的氧气。 内部空间的厚度为50μm以上且180μm以下。
    • 105. 发明授权
    • Printing control according to combinations of color materials
    • 根据彩色材料的组合进行打印控制
    • US07961352B2
    • 2011-06-14
    • US12077705
    • 2008-03-19
    • Nao KanekoYoshifumi AraiTakashi Ito
    • Nao KanekoYoshifumi AraiTakashi Ito
    • H04N1/60G03F3/08G06K9/00
    • H04N1/603H04N1/54
    • A printing control device which performs printing control for printing by using color materials of a plurality of types, includes: acquiring unit that acquires a color material set which is a combination of the color materials used for printing; and creation unit that creates a color conversion profile which prescribes conversion rules for converting image data expressed by a first color space into image data expressed by a second color space which differs from the first color space and which is a color space expressed by a color material amount set which is a combination of usage amounts for the respective color materials constituting the color material set.
    • 一种打印控制装置,其通过使用多种颜色材料进行打印控制,包括:获取单元,获取作为用于打印的彩色材料的组合的彩色材料组; 以及创建单元,其创建颜色转换简档,其规定用于将由第一颜色空间表达的图像数据转换成由与第一颜色空间不同的第二颜色空间表示的图像数据的转换规则,并且其是由颜色材料表示的颜色空间 数量集合,其是构成颜色材料组的各个颜色材料的使用量的组合。
    • 106. 发明申请
    • Portable Electronic Apparatus
    • 便携式电子设备
    • US20110105100A1
    • 2011-05-05
    • US13001486
    • 2009-06-26
    • Kensaku TanakaTakashi Ito
    • Kensaku TanakaTakashi Ito
    • H04W4/00
    • H04M1/18H01H13/702H01H35/24H01H2219/039H01H2223/022H01H2231/022H01H2231/044H01H2239/01H01H2239/052H04M1/22H04M1/72569H04M2250/12H04W52/0251H04W52/0264H04W52/027H04W52/0274Y02D70/00
    • A portable electronic apparatus capable of reliably determining whether a load detected by detecting units is caused by water pressure or by some other pressure and performing predetermined control according to the determination. A portable telephone apparatus (1) is provided with operation detecting units (101) and a control unit (103). The operation detecting units (101) are detecting units for detecting pressure caused by a pressing operation. When a pressure is detected by at least one of the operation detecting units (101), the control unit (103) performs first control (for example, control caused by detection of pressure other than water pressure). When even pressures are simultaneously detected by the operation detecting units (101), the control unit (103) performs second control (for example, control caused by detection of water pressure) different from the first control.
    • 一种便携式电子设备,其能够可靠地确定由检测单元检测到的负载是由水压还是由其他压力引起的,并且根据该确定执行预定控制。 便携式电话设备(1)设有操作检测单元(101)和控制单元(103)。 操作检测单元(101)是用于检测由按压操作引起的压力的检测单元。 当由操作检测单元(101)中的至少一个检测到压力时,控制单元(103)进行第一控制(例如,通过检测除了水压以外的压力引起的控制)。 当由操作检测单元(101)同时检测到压力时,控制单元(103)执行与第一控制不同的第二控制(例如由水压检测引起的控制)。