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101. 发明授权

US06951627B2 Method of drilling holes with precision laser micromachining 有权
标题翻译：用精密激光微加工钻孔的方法
公开(公告)号：US06951627B2
公开(公告)日：2005-10-04
申请号：US10329036
申请日：2002-12-24
申请人： Ming Li , Makoto Ishizuka , Xinbing Liu
发明人： Ming Li , Makoto Ishizuka , Xinbing Liu
IPC分类号： B23K26/00 , B23K26/04 , B23K26/06 , B23K26/38 , B23K26/03
CPC分类号： B23K26/066 , B23K26/04 , B23K26/043 , B23K26/382 , B23K26/40 , B23K2103/50
摘要： The invention is an apparatus and a method for drilling holes in a work piece with a laser. A laser beam is received by the optical system and directed along an optical path. The system directs the laser beam through a moveable mask aperture creating a sub-beam, that is reduced in size by a lens system as it is imaged onto a work piece. Multiple features are formed in the work piece by moving the mask.
摘要翻译：本发明是用于在具有激光的工件上钻孔的装置和方法。激光束被光学系统接收并沿着光路引导。系统将激光束引导通过可移动的掩模孔，产生子光束，当透镜系统被成像到工件上时，其被减小。通过移动掩模在工件中形成多个特征。

102. 发明申请

US20050176240A1 Cyclical deposition of tungsten nitride for metal oxide gate electrode 有权
标题翻译：氮化钨周期沉积金属氧化物栅电极
公开(公告)号：US20050176240A1
公开(公告)日：2005-08-11
申请号：US11003020
申请日：2004-12-01
申请人： Shulin Wang , Ulrich Kroemer , Lee Luo , Aihua Chen , Ming Li
发明人： Shulin Wang , Ulrich Kroemer , Lee Luo , Aihua Chen , Ming Li
IPC分类号： C23C16/34 , C23C16/44 , C23C16/455 , H01L21/4763
CPC分类号： C23C16/45527 , C23C16/02 , C23C16/34 , C23C16/45525 , H01L21/28061 , H01L21/28562 , H01L21/28568 , H01L21/76841 , H01L27/10861 , H01L28/60 , H01L29/4941 , H01L29/66181
摘要： A method for depositing a tungsten nitride layer is provided. The method includes a cyclical process of alternately adsorbing a tungsten-containing compound and a nitrogen-containing compound on a substrate. The barrier layer has a reduced resistivity, lower concentration of fluorine, and can be deposited at any desired thickness, such as less than 100 angstroms, to minimize the amount of barrier layer material.
摘要翻译：提供了一种用于沉积氮化钨层的方法。该方法包括在基材上交替吸附含钨化合物和含氮化合物的循环过程。阻挡层具有降低的电阻率，较低的氟浓度，并且可以以任何期望的厚度（例如小于100埃）沉积以使阻挡层材料的量最小化。

103. 发明授权

US06870246B1 Method and apparatus for providing an integrated circuit cover 失效
标题翻译：用于提供集成电路盖的方法和装置
公开(公告)号：US06870246B1
公开(公告)日：2005-03-22
申请号：US09944545
申请日：2001-08-31
申请人： Donald R. Mullen , Belgacem Haba , Ming Li
发明人： Donald R. Mullen , Belgacem Haba , Ming Li
IPC分类号： H01L23/367 , H01L23/40 , H01L23/433 , H01L23/02
CPC分类号： H01L23/3675 , H01L23/4093 , H01L23/4338 , H01L2224/16225 , H01L2224/73253
摘要： An integrated circuit cover incorporating a spring portion is described. The spring portion may include any structure that allows displacement between a plate portion of the integrated circuit cover and an attachment portion of the integrated circuit cover and that provides a substantially equalizing effect of pressure on the plate portion. The spring portion is preferably more flexible than the plate portion. The integrated circuit cover accommodates variations in the mounted height of integrated circuits over which the integrated circuit cover is installed The integrated circuit cover may be formed as a unitary structure or may be constructed as an assembly of multiple components.
摘要翻译：描述了包括弹簧部分的集成电路盖。弹簧部分可以包括允许在集成电路盖的板部分和集成电路盖的附接部分之间的位移并且提供对板部分的压力的基本均衡的作用的任何结构。弹簧部优选比板部更柔软。集成电路盖适应安装集成电路盖的集成电路的安装高度的变化。集成电路盖可以形成为整体结构，或者可以被构造为多个部件的组件。

104. 发明授权

US06819837B2 Method of temporarily adjusting the index of refraction of ring resonator with precision laser micromachining 失效
$Method of temporarily adjusting the index of refraction of ring resonator with precision laser micromachining$
标题翻译：利用精密激光微加工临时调整环形谐振器的折射率的方法
公开(公告)号：US06819837B2
公开(公告)日：2004-11-16
申请号：US10396030
申请日：2003-03-25
申请人： Ming Li , Daniel Hogan , Xinbing Liu , Makoto Ishizuka
发明人： Ming Li , Daniel Hogan , Xinbing Liu , Makoto Ishizuka
IPC分类号： G02B626
CPC分类号： G02B6/12007
摘要： A tuned optical resonator having a substrate and an input waveguide and an optical resonator waveguide formed on the substrate. The optical resonator waveguide has a resonant frequency, exhibits a first index of refraction, temporarily exhibits a second index of refraction responsive to application of laser energy, and temporarily resonates at the resonant frequency while the laser energy is being applied.
摘要翻译：一种调谐光学谐振器，其具有基板和形成在基板上的输入波导和光学谐振波导。光谐振器波导具有谐振频率，呈现第一折射率，响应于施加激光能量暂时呈现第二折射率，并且在施加激光能量时暂时谐振在谐振频率。

105. 发明授权

US06720251B1 Applications and methods of making nitrogen-free anti-reflective layers for semiconductor processing 有权
标题翻译：制造半导体加工无氮抗反射层的应用和方法
公开(公告)号：US06720251B1
公开(公告)日：2004-04-13
申请号：US09990197
申请日：2001-11-21
申请人： Bart van Schravendijk , Ming Li , Jason Tian , Tom Mountsier , M. Zlaul Karim
发明人： Bart van Schravendijk , Ming Li , Jason Tian , Tom Mountsier , M. Zlaul Karim
IPC分类号： H01L21205
CPC分类号： H01L21/02126 , C23C16/401 , G03F7/091 , H01L21/02274 , H01L21/0276 , H01L21/31144 , H01L21/31612
摘要： A nitrogen-free anti-reflective layer for use in semiconductor photolithography is fabricated in a chemical vapor deposition process, optionally plasma-enhanced, using a gaseous mixture of carbon, silicon, and oxygen sources. By varying the process parameters, acceptable values of the refractive index n and extinction coefficient k can be obtained. The nitrogen-free anti-reflective layer produced by this technique eliminates the mushrooming and footing problems found with conventional anti-reflective layers.
摘要翻译：使用碳，硅和氧源的气体混合物，在化学气相沉积工艺（任选地等离子体增强）中制造用于半导体光刻中的无氮抗反射层。通过改变工艺参数，可以获得折射率n和消光系数k的可接受值。通过这种技术生产的无氮抗反射层消除了常规抗反射层发现的萌发和基础问题。

106. 发明授权

US06681991B1 Card reading device having a multi-functional connector 失效
标题翻译：具有多功能连接器的读卡装置
公开(公告)号：US06681991B1
公开(公告)日：2004-01-27
申请号：US10201900
申请日：2002-07-25
申请人： Ming Li
发明人： Ming Li
IPC分类号： G06K700
CPC分类号： G06K7/0052
摘要： A card reading device includes a multi-functional connector capable of connecting to one of a variety of portable electronic devices and a control circuit of the card reading device respectively, wherein the control circuit has a detection circuit. Once a portable electronic device is connected to the cad reading device, the detection circuit is automatically activated to detect an identification (ID) of the electronic device. In response, one of second drivers is activated to drive the electronic device for electrically connecting the electronic device and reading data from the memory cards connected thereto.
摘要翻译：卡读取装置包括能够分别连接到各种便携式电子设备中的一种和卡读取装置的控制电路的多功能连接器，其中控制电路具有检测电路。一旦便携式电子设备连接到读卡器，检测电路就被自动激活，以检测电子设备的识别（ID）。作为响应，第二驱动器中的一个被激活以驱动用于电连接电子设备的电子设备和从连接到其的存储卡读取数据。

107. 发明授权

US06570122B2 Apparatus for drilling holes with sub-wavelength pitch with laser 失效
公开(公告)号：US06570122B2
公开(公告)日：2003-05-27
申请号：US10038330
申请日：2002-01-03
申请人： Xinbing Liu , Ming Li
发明人： Xinbing Liu , Ming Li
IPC分类号： B23K2638
CPC分类号： B23K26/0624 , B23K26/382 , B23K26/40 , B23K2103/16 , B23K2103/50 , B82Y20/00 , G02B6/1225
摘要： A method of laser machining using an ultra-fast pulse laser is presented. According to the present invention a plurality of holes with a pitch less than the wavelength of the laser are drilled into a material sample. Reliable and reproducible hole drilling is accomplished through an exemplary drilling sequence which applies a number of pulses at a first pulse energy to the surface spaced to avoid laser hardening of the surface for adjacent holes of a first set of holes. Next, the number of pulses is increased or the energy of the laser beam is increased to drill holes that are interstitial to the first set of holes. The exemplary laser machining process may used to produce both one-dimensional and two-dimensional photonic crystals, among other applications.

108. 发明授权

US06529307B1 Selective intensity modulation of channels in a multiplexed optical communication system 有权
标题翻译：复用光通信系统中信道的选择性强度调制
公开(公告)号：US06529307B1
公开(公告)日：2003-03-04
申请号：US09874474
申请日：2001-06-04
申请人： Song Peng , Ming Li
发明人： Song Peng , Ming Li
IPC分类号： G02F103
CPC分类号： H04B10/2569 , H04B10/532
摘要： A method and apparatus for achieving dynamic intensity modulation of the channels in a wavelength-division multiplexed optical communication system is presented. Wavelengths are spatially separated into a plurality of channels, the polarization states of which are individually modulated. The channels can be combined or filtered by polarization states to achieve the desired intensity in the output signal. An exemplary embodiment includes at least a polarization modulator, a birefringent wedge, a lens, and a dispersive element (e.g., diffraction grating) arranged in various order. Each segment of the polarization modulator can be made to rotate the polarization direction of an incident channel by a specified angle. A half-wave plate may be inserted between the second dispersive element and the second birefringent wedge to eliminate polarization-dependent loss. Optionally, a parallel birefringent plate may be inserted after the second birefringent wedge to reduce polarization mode dispersion.
摘要翻译：提出了一种用于实现波分复用光通信系统中的信道的动态强度调制的方法和装置。波长在空间上分成多个通道，其偏振状态被单独调制。可以通过极化状态组合或滤波通道，以在输出信号中达到所需的强度。示例性实施例至少包括以各种顺序布置的偏振调制器，双折射楔形，透镜和分散元件（例如，衍射光栅）。可以使偏振调制器的每个段使入射通道的偏振方向旋转指定的角度。可以在第二分散元件和第二双折射楔之间插入半波片，以消除偏振相关损耗。可选地，可以在第二双折射楔之后插入平行双折射板以降低偏振模色散。

109. 发明授权

US06414765B1 Protection switch in a two-fiber optical channel shared protection ring 失效
标题翻译：保护开关在双光纤通道共享保护环
公开(公告)号：US06414765B1
公开(公告)日：2002-07-02
申请号：US09799374
申请日：2001-03-05
申请人： Ming Li , Mark Soulliere , Richard Wagner
发明人： Ming Li , Mark Soulliere , Richard Wagner
IPC分类号： H04B1008
CPC分类号： H04Q11/0062 , H04B10/032 , H04J14/0212 , H04J14/0283 , H04J14/0295 , H04Q2011/0081 , H04Q2011/0083 , H04Q2011/0092
摘要： A protection switch for use in a two-fiber optical channel shared protection ring is disclosed. It includes an electrical switching circuit coupled to an optical signal monitor. The electrical switching circuit includes modular switching fabrics that respond to fault condition alarms provided by the optical signal monitor. Each modular switching fabric is versatile in that it includes a ring switch mode responsive to the multi-wavelength channel failures, and a span switch mode responsive to the single wavelength channel failures. Because the switching fabric of the electrical switching circuit is comprised of the plurality of small modular switching fabrics, the possibility of incurring a single-point switching failure in the switching fabric is virtually eliminated. Further, each modular switching fabric can be easily replaced in the event of failure, without affecting the operation of other switch fabrics within the protection switch.
摘要翻译：公开了一种用于双光纤通道共享保护环的保护开关。它包括耦合到光信号监视器的电开关电路。电气开关电路包括响应由光信号监视器提供的故障状况报警的模块化交换结构。每个模块化交换结构都是通用的，因为它包括响应于多波长信道故障的环形开关模式，以及响应单波长通道故障的量程开关模式。由于电切换电路的交换结构由多个小型模块化交换结构组成，所以实际上消除了在交换结构中导致单点切换故障的可能性。此外，每个模块化交换结构可以在发生故障的情况下容易地更换，而不会影响保护交换机内其他交换结构的操作。

110. 发明授权

US6057928A Free-space time-domain method for measuring thin film dielectric properties 有权
标题翻译：用于测量薄膜介电性质的自由空间时域法
公开(公告)号：US6057928A
公开(公告)日：2000-05-02
申请号：US333596
申请日：1999-06-15
申请人： Ming Li , Xi-Cheng Zhang , Gyu Cheon Cho
发明人： Ming Li , Xi-Cheng Zhang , Gyu Cheon Cho
IPC分类号： G01N21/35 , G01N21/41 , G01N21/55
CPC分类号： G01N21/41 , G01N21/3563 , G01N21/3586
摘要： A non-contact method for determining the index of refraction or dielectric constant of a thin film on a substrate at a desired frequency in the GHz to THz range having a corresponding wavelength larger than the thickness of the thin film (which may be only a few microns). The method comprises impinging the desired-frequency beam in free space upon the thin film on the substrate and measuring the measured phase change and the measured field reflectance from the reflected beam for a plurality of incident angles over a range of angles that includes the Brewster's angle for the thin film. The index of refraction for the thin film is determined by applying Fresnel equations to iteratively calculate a calculated phase change and a calculated field reflectance at each of the plurality of incident angles, and selecting the index of refraction that provides the best mathematical curve fit with both the dataset of measured phase changes and the dataset of measured field reflectances for each incident angle. The dielectric constant for the thin film can be calculated as the index of refraction squared.
摘要翻译：一种非接触式方法，用于在GHz至THz范围内以期望的频率确定衬底上的薄膜的折射率或介电常数，其具有大于薄膜厚度的相应波长（其可能仅为少数几个微米）。该方法包括将自由空间中的期望频率光束照射到衬底上的薄膜上，并且在包括布鲁斯特角度的角度范围内测量测量的相位变化和来自反射光束的多个入射角的测量的场反射率为薄膜。通过应用菲涅尔方程来迭代地计算多个入射角中的每一个处的相位变化和计算的场反射率来确定薄膜的折射率，并且选择提供最佳数学曲线拟合的折射率测量相位变化的数据集和每个入射角的测量场反射数据集。可以计算薄膜的介电常数作为折射率平方。

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