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91. 发明申请

WO2006000621A1 ENHANCING STABILITY AND REDUCING TEMPERATURE FACTOR IN A MICROMECHANICAL DEVICE 审中-公开
标题翻译：增强稳定性和降低微生物装置中的温度因子
公开(公告)号：WO2006000621A1
公开(公告)日：2006-01-05
申请号：PCT/FI2005/000285
申请日：2005-06-16
申请人： VALTION TEKNILLINEN TUTKIMUSKESKUS , SEPPÄ, Heikki , KÄRKKÄINEN, Anu , OJA, Aarne
发明人： SEPPÄ, Heikki , KÄRKKÄINEN, Anu , OJA, Aarne
IPC分类号： B81B5/00
CPC分类号： G01P15/125 , G01P1/006 , G01P21/00
摘要： The publication discloses a method for improving stability in a micromechanical sensor, which comprises a part that is arranged to move and a fixed electrode, in such a way that a built-in voltage (U bi ) is associated with the sensor. The stability of the sensor is improved by connecting to the sensor a direct-current voltage (U dc ) that at least partly compensates for the built-in voltage (U bi ) The publication also describes a method for reducing temperature dependence in a micromechanical component, which has a temperature coefficient (β) deriving from the temperature fluctuation of its mechanical properties. In this case, a direct-current voltage (U dc ) is connected in series with the built-in voltage (U bi ) of the component and the magnitude of the direct-current voltage is selected in such a way that the effect of the temperature fluctuation of the built-in voltage (U bi ) at least partly compensates for the effect that the temperature fluctuation of the mechanical properties of the component have on the quantity given by the component.
摘要翻译：该出版物公开了一种用于提高微机械传感器的稳定性的方法，该微机械传感器包括被布置成移动的部分和固定电极，使得内置电压（U SUB）与其相关联与传感器。传感器的稳定性通过将传感器连接至至少部分地补偿内置电压（U SUB）的直流电压（U SUB）来提高，该出版物还描述了一种降低微机械部件中的温度依赖性的方法，其具有源自其机械性能的温度波动的温度系数（ß）。在这种情况下，直流电压（U SUB DC）与组件的内置电压（U SUB）成串联连接，直流电压以这样的方式选择电流电压，使得内置电压（U SUB）的温度波动的影响至少部分地补偿了这样的效果：组件具有由组件给出的数量。

92. 发明申请

WO01051934A1 TEMPERATURE COMPENSATED OSCILLATING ACCELEROMETER WITH FORCE MULTIPLIER 审中-公开
标题翻译：温度补偿振动加速度计与强制乘法器
公开(公告)号：WO01051934A1
公开(公告)日：2001-07-19
申请号：PCT/US2000/027576
申请日：2000-10-05
IPC分类号： G01P1/00 , G01P15/097 , G01P15/10 , G01P15/08
CPC分类号： G01P15/097 , G01P1/006 , G01P2015/0828
摘要： A temperature compensated oscillating accelerometer (10d) with force multiplier (60) includes a support substrate (14d); a tuning fork (20d, 22d) suspended above the substrate (14d); a primary anchor device (18d) connected between the tuning fork (20d, 22d) and substrate (14d); a proof mass (12d) having an input axis (32d); a force multiplier (60) interconnected between the proof mass (12d) and the tuning fork (20d, 22d); and a force multiplier anchor (68d) connected to the substrate (14d) and disposed at approximately the same area along the input axis (32d) as the primary anchor for offsetting the opposing effects of thermal expansion and stiffness in response to variations in temperature.
摘要翻译：具有力乘数（60）的温度补偿振荡加速度计（10d）包括支撑衬底（14d）; 悬挂在基板（14d）上方的音叉（20d，22d）; 连接在音叉（20d，22d）和基板（14d）之间的主锚装置（18d）; 具有输入轴（32d）的检验质量块（12d）; 互连在所述检验质量块（12d）和所述音叉（20d，22d）之间的力乘数器（60）; 以及连接到所述基板（14d）并且沿着与所述主锚的输入轴线（32d）大致相同的区域设置的力乘数锚（68d），用于响应于温度变化抵消热膨胀和刚度的相反影响。

93. 发明申请

WO99001771A1 SENSOR WITH DIAPHRAGM SENSOR CHIP 审中-公开
标题翻译：传感器与膜分析芯片
公开(公告)号：WO99001771A1
公开(公告)日：1999-01-14
申请号：PCT/JP1998/002992
申请日：1998-07-02
IPC分类号： G01P21/00 , G01P1/00 , G01P1/02 , G01P15/12 , H01L23/29 , H01L23/31 , H01L29/84 , G01P9/06
CPC分类号： G01P15/122 , G01P1/006 , G01P1/02 , G01P1/023 , H01L2224/05554 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/49171 , H01L2224/73265 , H01L2924/10253 , H01L2924/00014 , H01L2924/00
摘要： An acceleration sensor with a diaphragm sensor chip (6) which includes a plurality of lead frames (3). One of the lead frames (3) has a die pad (4). The sensor chip (6) is elastically bonded with an adhesive (10) onto the die pad (4). The sensor chip (6) has a diaphragm (6b) and outputs a signal representing the flexure of the diaphragm (6b). The lead frames (3) are encapsulated with the molding material (2), with a space around the sensor chip (6). The molding material has a linear expansion coefficient of 1.4x10 / DEG C to 1.8x10 / DEG C and an elastic modulus of 100x10 kg/cm to 130x10 kg/cm . The use of such a molding material (2) decreases the rate of change of the temperature sensitivity of the acceleration sensor, thus providing an acceleration sensor with excellent temperature characteristics.
摘要翻译：本发明涉及一种设置有膜分析芯片（6）的加速度传感器，该加速度传感器包括多个连接栅格（3）。其中一个引线框架（3）的具有垫（4）与芯片（6），所述传感器通过粘接剂（10）的装置弹性地紧固的哪个。具有膜（6b）的传感器的芯片（6）产生表示该膜（6b）的弯曲的信号。连接栅格（3）通过模制材料（2）封装，在所述传感器芯片（6）周围提供空间。该模塑材料具有1,4x10 <-5> /℃至1,8x10 <-5> /℃，和100×10的模量<3>千克/厘米<2>的线性膨胀系数在130×10 3 kg / cm 2。通过使用该成型材料（2），能够降低加速度传感器的温度灵敏度变化的速度，后者具有优异的热特性。

94. 发明申请

WO98053328A1 MICRO-ACCELEROMETER WITH CAPACITIVE RESONATOR 审中-公开
标题翻译：带电容式谐振器的微型加速度计
公开(公告)号：WO98053328A1
公开(公告)日：1998-11-26
申请号：PCT/FR1998/000997
申请日：1998-05-19
IPC分类号： G01P1/00 , G01P1/02 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P1/006 , G01P1/023 , G01P2015/0828
摘要： The invention concerns a micro-accelerometer characterised in that: it comprises three micro-machined silicon plates (10, 20, 30), welded superposed with inserted insulating layers (15, 25); the middle plate (30) comprises a subassembly (36) sensitive to accelerations, and a peripheral frame (35) electrically insulated from the subassembly and enclosing it; said frame (35) forms a spacer between a bottom plate (10) and a top plate (20) from which it is likewise electrically insulated; the subassembly comprises a leg (37) fixed on the bottom plate (10) and a protruding seismic weight (31) hanging from the leg, an electrical connection being provided between the bottom plate and the subassembly leg; the suspension of the seismic weight comprises a central vibrating beam (32) connected to the seismic weight and to the leg and substantially located in the seismic weight top surface horizontal plane and two short suspending side arms (33) connected to the leg (37) and located on either side of the central beam (32) but in a horizontal plane substantially passing through the seismic weight centre of gravity. The invention is applicable to an aircraft micro-accelerometer for inertia navigation assistance.
摘要翻译：本发明涉及一种微加速度计，其特征在于：它包括与被插入的绝缘层（15,25）重叠焊接的三个微加工硅板（10,20,30）。所述中间板（30）包括对加速度敏感的子组件（36）和与所述子组件电绝缘并封闭的外围框架（35）; 所述框架（35）在底板（10）和顶板（20）之间形成间隔件，同时电绝缘; 所述子组件包括固定在所述底板（10）上的支脚（37）和从所述支腿悬挂的突出的地震重物（31），在所述底板和所述子组件脚之间设置电连接; 地震重量的悬挂包括连接到地震重量和腿部并且基本上位于地震重锤顶面水平面上的中心振动梁（32）和连接到腿部（37）的两个短悬挂臂（33）并且位于中心梁（32）的任一侧上，但位于基本上穿过地震重力重心的水平面中。本发明适用于用于惯性导航辅助的飞行器微加速度计。

95. 发明申请

WO1990000254A1 STRESS COMPENSATED TRANSDUCER 审中-公开
标题翻译：应力补偿传感器
公开(公告)号：WO1990000254A1
公开(公告)日：1990-01-11
申请号：PCT/US1989002464
申请日：1989-06-06
申请人： SUNDSTRAND DATA CONTROL, INC.
发明人： SUNDSTRAND DATA CONTROL, INC. , NORLING, Brian, L.
IPC分类号： G01P15/13
CPC分类号： G01P1/006 , G01P15/132 , G01P2015/0828
摘要： A transducer having compensation for a deflection due to an applied stress. The transducer includes a support ring (32) having a proof mass (34) cantilevered on a pair of flexures (38) between the magnets (26, 28) of a stator in which the transducer is mounted. Deflection of the support ring due to an imbalanced applied force is compensated by either moving the pads (30) used to mount the support ring, moving the centroid of capacitance (128) of the proof mass, or by modifying the support ring to provide a pair of moment arms (156), each approach insuring that an axis of deflection (102, 130) of the support ring is coaligned with the centroid of capacitance, thereby minimizing a bias error in the transducer output.

96. 发明申请

WO1989003019A1 AN ELECTRONIC CONTROLLER UNIT 审中-公开
标题翻译：电子控制器单元
公开(公告)号：WO1989003019A1
公开(公告)日：1989-04-06
申请号：PCT/GB1988000822
申请日：1988-10-05
申请人： KELLETT, Michael, Andrew
IPC分类号： G01D03/04
CPC分类号： G01P1/006 , G01D3/0365 , G01D18/008
摘要： An electronic controller unit for at least one transducer, characterised in that the control circuit incorporates a microprocessor (1) for enabling operational calibration of each transducer (6, 7) associated therewith in such manner as to take into account zero output level influencing factors to establish a compound calibration relationship for each such transducer (6, 7); means for storing each such calibration relationship; and means (1) for comparing the instantaneous output of each transducer with its stored associated calibration relationship value for the ambient temperature prevailing at the time of said instantaneous output to produce a temperature corrected output value for each said transducer. The control circuit is particularly intended for use with intelligent suspension systems for motor vehicles.
摘要翻译：一种用于至少一个换能器的电子控制器单元，其特征在于，所述控制电路包括微处理器（1），用于使得与其相关联的每个换能器（6,7）能够进行操作校准，以便将零输出电平影响因素考虑在内为每个这样的传感器建立复合校准关系（6,7）; 用于存储每个这样的校准关系的装置; 以及用于将每个换能器的瞬时输出与其存储的相关联的校准关系值进行比较的装置（1），用于在所述瞬时输出时所占据的环境温度，以产生每个所述换能器的温度校正输出值。控制电路特别适用于机动车辆的智能悬挂系统。

97. 发明申请

WO1988010431A1 ACCELEROMETERS AND ASSOCIATED CONTROL CIRCUITS 审中-公开
标题翻译：加速度计和相关控制电路
公开(公告)号：WO1988010431A1
公开(公告)日：1988-12-29
申请号：PCT/GB1988000474
申请日：1988-06-20
申请人： KELLETT, Michael, Andrew
IPC分类号： G01P15/08
CPC分类号： G01P1/006 , G01N2291/02827 , G01P15/0922
摘要： An accelerometer unit characterised by first and second piezo-electric elements (5, 6) mounted upon opposed surfaces of an electrically conductive sheet, plate or the like (1), and in that the sheet, plate or the like is adapted to be centrally supportable by support (12) such that the first and second piezo-electric elements are subjectable to similar forces upon subjecting the piezo-electric elements to acceleration forces. The elements (5, 6) are connected electrically in parallel so that the effects of one piezo-electric element are caused to negate electrical output arising from pyroelectric effects of the other piezo-electric element. A combined band pass filter and amplification circuit in which at least a part of the capacitance (37) of the initial high frequency pass filter of the circuit is provided by the capacitance of the piezo-electric elements.

98. 发明专利

NO860460A 未知
公开(公告)号：NO860460A
公开(公告)日：1986-04-09
申请号：NO860460
申请日：1986-02-10
申请人： SUNDSTRAND DATA CONTROL
发明人： NORLING BRIAN LEE
IPC分类号： G01P15/02 , G01P1/00 , G01P15/13 , G01P
CPC分类号： G01P1/006 , G01P15/132 , G01P2015/0828

99. 发明专利

SE7810693A 未知
公开(公告)号：SE7810693A
公开(公告)日：1979-04-18
申请号：SE7810693
申请日：1978-10-13
申请人： SUNDSTRAND DATA CONTROL
发明人： KLEIN N J , BLAKE G A , COREY V B
IPC分类号： G01P1/00 , G01P15/13 , H01F7/02 , G01P15/08
CPC分类号： H01F7/021 , G01P1/006 , G01P15/132

100. 发明专利

JP2018162976A 物理量センサー、電子機器および移動体审中-公开
公开(公告)号：JP2018162976A
公开(公告)日：2018-10-18
申请号：JP2017058707
申请日：2017-03-24
申请人：セイコーエプソン株式会社
发明人：大槻哲也 , 井出次男
IPC分类号： G01P15/10 , G01C19/5628 , H01L29/84 , G01P15/08
CPC分类号： G01P15/123 , G01C19/5607 , G01L19/147 , G01P1/006 , G01P1/023 , G01P15/0802 , G01P2015/0828
摘要：【課題】接合時の熱応力に伴う歪の影響を低減し、小型の物理量センサーを提供する。【解決手段】物理量センサー1は、加速度センサー素子12と加速度センサー素子12を収容しているパッケージ14とを有する加速度センサー10と、第1の面22を有し第1の面22に加速度センサー10を支持する支持部材20と、支持部材20の第1の面22と対向する第2の面24が接合されているICチップ30と、を備え、加速度センサー10と支持部材20との積層方向からの平面視において、パッケージ14の外縁で囲まれた領域の面積をS1、第1の面22の面積をS2とした場合に、S1≧S2を満たす。【選択図】図1

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