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    • 92. 发明授权
    • System and method for controlling process temperatures for a semi-conductor wafer
    • 用于控制半导体晶片的工艺温度的系统和方法
    • US06188050B1
    • 2001-02-13
    • US09456602
    • 1999-12-08
    • Charles E. DufferJorge J. Alcoz
    • Charles E. DufferJorge J. Alcoz
    • H05B102
    • H01L21/67248G01K11/22G01N29/228G01N29/2418G01N2291/012G01N2291/02854G01N2291/02881G01N2291/0422G01N2291/106
    • A system for controlling process temperatures for semi-conductor wafers comprises a heater to heat the wafer, an element to generate a plurality of ultrasonic vibrations in the wafer, a Sagnac interferometer adapted to sense the ultrasonic vibrations and generate a wafer temperature signal responsive thereto, a system to calculate the wafer temperature on the basis of the generated wafer temperature signal, and a control element the wafer heater on the basis of the calculated wafer temperature. A method for controlling process temperatures for semi-conductor wafers comprises the steps of heating the wafer, generating a plurality of ultrasonic vibrations in the wafer, sensing the ultrasonic vibrations with a Sagnac interferometer, generating the wafer temperature signal in response to sensing the ultrasonic vibrations with the Sagnac interferometer, calculating the wafer temperature on the basis of the generated wafer temperature signal, and controlling the heat applied to the wafer on the basis of the calculated wafer temperature.
    • 用于控制半导体晶片的处理温度的系统包括加热晶片的加热器,用于在晶片中产生多个超声波振动的元件,适于感测超声波振动并产生响应于此的晶片温度信号的Sagnac干涉仪, 基于所生成的晶片温度信号来计算晶片温度的系统,以及基于所计算的晶片温度的晶片加热器的控制元件。 用于控制半导体晶片的处理温度的方法包括以下步骤:加热晶片,在晶片中产生多个超声波振动,用Sagnac干涉仪感测超声波振动,响应感测超声波振动产生晶片温度信号 使用Sagnac干涉仪,基于所生成的晶片温度信号计算晶片温度,并且基于计算的晶片温度来控制施加到晶片的热量。
    • 93. 发明授权
    • Ultrasonic probes for use in harsh environments
    • 用于恶劣环境的超声波探头
    • US5747672A
    • 1998-05-05
    • US850642
    • 1997-05-02
    • Luc ParentGuy PeloquinGilles TremblayAndre Vaillancourt
    • Luc ParentGuy PeloquinGilles TremblayAndre Vaillancourt
    • G01N29/032G01N29/22G01N29/24G01N29/28G01S7/521G10K11/00G10K11/02G01N29/00
    • G01N29/2437G01N29/032G01N29/228G01N29/28G10K11/004G10K11/02G01N2291/02416G01N2291/0252G01N2291/02809G01N2291/045G01N2291/048G01N2291/101G01N2291/102G01S7/521
    • An ultrasonic device for detecting concentrations of solids or positions of solid/liquid interfaces in liquid media, particularly Bayer process liquids. The device comprises at least one piezoelectric element provided with electrodes; electrical circuit elements connected to the electrodes for conveying electrical signals, in use, to and from control apparatus; an ultrasound-transparent window, made of glassy carbon, positioned adjacent to the or each piezoelectric element; a protective matrix, preferably of epoxy resin, embedding and surrounding said the or each piezoelectric element and the electrodes while allowing ultrasonic waves to pass through the or each adjacent window to or from the piezoelectric element, and an external protective cover, preferably comprising an elastomer that is resistant to caustic alkali and has a smooth and non-porous surface, forming an exterior of the device except at the or each window. The use of glassy carbon for the windows makes the probes resistant to corrosion and scaling without impeding the effectiveness of the device. Further improved scaling resistance is provided by an elastomeric material preferably used as the external protective cover.
    • 用于检测液体介质,特别是拜耳法处理液体中固体或固体/液体界面位置的超声波装置。 该装置包括至少一个设置有电极的压电元件; 连接到电极的电路元件用于在使用中传送和传出来自控制装置的电信号; 与玻璃碳制成的超声波透明窗,邻近或每个压电元件定位; 优选环氧树脂的保护基体,包围并围绕所述压电元件和电极,同时允许超声波通过或从压电元件穿过或相邻的窗口,以及外部保护盖,优选地包括弹性体 耐苛性碱,具有光滑无孔的表面,除了在每个窗口之外形成装置的外部。 使用玻璃碳作为窗户使探针能够抵抗腐蚀和结垢,而不会妨碍设备的有效性。 通过优选用作外部保护盖的弹性体材料提供进一步改善的抗结垢性。
    • 94. 发明授权
    • High temperature electromagnetic acoustic transducer (EMAT) probe and
coil assemblies
    • 高温电磁换能器(EMAT)探头和线圈组件
    • US5689070A
    • 1997-11-18
    • US506413
    • 1995-07-24
    • Steven P. ClarkJohn H. FloraDaniel T MacLauchlan
    • Steven P. ClarkJohn H. FloraDaniel T MacLauchlan
    • B06B1/04G01N29/22G01N29/24G01N29/04
    • G01N29/228B06B1/04G01N29/2412G01N2291/0422
    • An enhanced EMAT probe and coil construction takes advantage of heat transfer and magnetic flux principles to permit inspection of workpieces at elevated temperatures of 1200.degree. F. and higher. A ferromagnetic, cup-shaped probe assembly having an end cap and a barrel is provided for carrying a coil assembly, preferably one or more permanent magnets, and a frustoconical focus core. The magnets are located within the barrel and connected to the end cap, and the cup-shaped probe assembly positions the coil assembly proximate the surface of the workpiece. A plurality of passageways may be provided in the end cap and barrel for admitting cooling air to an interior portion of the cup-shaped probe assembly. The cup-shaped probe assembly serves to provide a return path for magnetic flux of the magnetic field back to the permanent magnet means. The coil assembly has a coil disk having a matrix of holes and grooves which allow at least one eddy current coil wire to be threaded and interwoven into the coil disk without shorting against itself. A layer of fiberglass cloth covers the coil assembly to thermally and electronically insulate it from the workpiece, providing a durable, rugged and economical construction.
    • 增强的EMAT探头和线圈结构利用传热和磁通原理,允许在1200°F以上的高温下对工件进行检查。 提供具有端盖和筒体的铁磁性杯形探针组件,用于承载线圈组件,优选地一个或多个永磁体和截头圆锥形聚焦芯。 磁体位于筒内并连接到端盖,并且杯状探针组件将线圈组件定位在工件的表面附近。 多个通道可以设置在端盖和筒中,用于将冷却空气引入杯状探针组件的内部。 杯形探针组件用于提供磁场的磁通量返回到永磁体装置的返回路径。 线圈组件具有线圈盘,其具有孔和凹槽的矩阵,其允许至少一个涡流线圈线被螺纹连接并且交织到线圈盘中而不会自身短路。 一层玻璃纤维布覆盖线圈组件,以使其与工件热电子和电子绝缘,从而提供耐用,坚固耐用和经济的结构。
    • 98. 发明授权
    • On-line measurement of fluid mixtures
    • 在线测量流体混合物
    • US4509360A
    • 1985-04-09
    • US508217
    • 1983-06-24
    • Lewis ErwinJeffrey L. Dohner
    • Lewis ErwinJeffrey L. Dohner
    • G01N29/032G01N29/22G01N29/00
    • G01N29/032G01N29/221G01N29/228G01N2291/02416G01N2291/0421G01N2291/0422
    • An apparatus and method for measuring particle agglomeration or dispersion in fluid mixtures, such as polymer melts, resides in a piezoelectric transducer, a spherical fused quartz lens, and a fluid housing. A repetitive, broadband, ultrasonic wave is produced by the transducer and is sent into the lens, which also serves to isolate the transducer from the mixture. The ultrasonic wave meets a spherical dimple at the end of the lens which focuses a portion of it into a diffraction limited spot or "interrogation zone". Since the intensity of the wave is large in the interrogation zone, small changes in the impedance of the fluid in this zone, caused by passing agglomerates, will cause large fluctuations in the intensity of the back scattered wave, which is monitored by the transducer between pulses and displayed by associated electronic elements.
    • 用于测量流体混合物(例如聚合物熔体)中的颗粒聚集或分散的装置和方法驻留在压电换能器,球形熔融石英透镜和流体壳体中。 重复的,宽带的超声波由换能器产生并被送入透镜,其也用于将换能器与混合物隔离。 超声波在透镜的端部处遇到一个球形凹坑,将其一部分聚焦成衍射限制光斑或“询问区”。 由于询问区的波强大,该区域的流体阻抗的小变化是由聚集体引起的,会引起背散射波强度的大幅波动,这是由传感器监测的 脉冲并由相关联的电子元件显示。
    • 100. 发明授权
    • Method and apparatus for transmitting and receiving electromagnetically
generated and received ultrasonic pulses
    • 用于发送和接收电磁产生和接收的超声波脉冲的方法和装置
    • US4314479A
    • 1982-02-09
    • US89983
    • 1979-10-31
    • Johan Spijkerman
    • Johan Spijkerman
    • G01N29/04G01N29/22G01N29/24G01N29/34G01N29/36G01S7/52H03K3/00H04B11/00
    • H04B11/00G01N29/228G01N29/2412G01N29/343G01N29/346G01N29/36G01N2291/0234G01N2291/044G01N2291/102
    • A method and an apparatus for transmitting and receiving electromagnetic ultra-sound, especially in non-destructive testing of electrically conductive material, comprising the steps of generating one or more magnetic fields by means of one or more electromagnets (1,2,3,4) and supplying a transmitter coil (8) in said magnetic field with a supersonic frequency, and scanning a receiver coil (56) in said magnetic field. In known apparatuses, especially in the testing of non-magnetic material, the signal/noise ratio of a received signal is unfavorable.According to the present invention said ratio is improved in that said magnetic field is generated during a short time compared with the time between two successively occurring magnetic fields, and that a number of pulses of well-defined length of supersonic frequency are supplied to the transmitter coil (8) when the magnetic field or fields have a sufficient strength.The receiver coil (56) is scanned after each such pulse, and the different receiver signals are summed up in an integrator (60). The said pulses each have a preferred length of a complete sinusoidally-shaped cycle, whereafter the respective pulse is extinguished entirely.
    • 一种用于发送和接收电磁超声的方法和装置,特别是在导电材料的非破坏性测试中,包括以下步骤:通过一个或多个电磁体(1,2,3,4)产生一个或多个磁场 ),并且在所述磁场中以超音速提供发射器线圈(8),并且在所述磁场中扫描接收器线圈(56)。 在已知的装置中,特别是在非磁性材料的测试中,接收信号的信噪比是不利的。 根据本发明,比较了与两个连续发生的磁场之间的时间相比在短时间内产生的磁场,并且明确定义的超音速长度的脉冲的数量被提供给发射机 线圈(8)当磁场或场具有足够的强度时。 在每个这样的脉冲之后扫描接收器线圈(56),并且在积分器(60)中将不同的接收器信号相加。 所述脉冲各自具有完整的正弦形循环的优选长度,此后相应的脉冲完全熄灭。