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    • 96. 发明授权
    • Shape measurement apparatus and method
    • 形状测量装置及方法
    • US09275292B2
    • 2016-03-01
    • US12784707
    • 2010-05-21
    • Joong-Ki JeongMin-Young KimSeung-Jun Lee
    • Joong-Ki JeongMin-Young KimSeung-Jun Lee
    • H04N7/18G06K9/03G01B11/25G01N21/956
    • G01B11/254G01B11/2513G01B11/2531G01N2021/95638G06K9/036
    • A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.
    • 一种形状测量装置,包括支撑目标基板的工作台,包括光源的图案投影部分,部分地透射和遮挡由光源产生的光以产生光栅图像的光栅部分,以及使光栅图像产生的投影透镜部分 在目标基板的测量目标上,捕获由目标基板的测量目标反射的光栅图像的图像捕获部分,以及控制工作台,图案投影部分和图像捕获部分的控制部分,计算 光栅图像的可靠性指标和与测量对象对应的光栅图像的相位,并且通过使用可靠性指标和相位来检查测量对象。 因此,可以提高测量的精度。
    • 98. 发明申请
    • METHOD AND DEVICE FOR CARRYING OUT OPTICAL PICKUP
    • 执行光学拾取的方法和装置
    • US20150164621A1
    • 2015-06-18
    • US14499088
    • 2014-09-27
    • ORAMETRIX, INC.
    • Rudger Rubbert
    • A61C9/00G01B11/25
    • A61C9/0053A61B1/00193A61B1/045A61B1/0623A61B1/247A61B5/0088A61B5/4547A61C19/04G01B11/2518G01B11/2531H04N1/00026
    • Disclosed is an optical imaging method and device enabling display and 3D measurement of tridimensional objects (1), whereby at least two individual images are captured one after the other and the image conversion is controlled or regulated differently for these individual images. By employing adjustable optical means (10-14) for the illumination of the object or in the optical path for the imaging of the object on the image converter (15) it is possible to acquire a larger amount of visual information on the object observed than that which is available in an individual image due to the limitations imposed by the design of the converter used (15). The invention relates to processes and design forms of the device enabling recording units to be designed, using simply and generally commercial components, which are able to display and measure larger objects (1) despite a reduced field of vision imposed by the design. This is especially useful for diagnosis in invasive applications in the bodies of humans or animals.
    • 公开了一种能够进行三维物体(1)的显示和3D测量的光学成像方法和装置,由此至少两个单独的图像被一个接一个地捕获,并且针对这些单独的图像对图像转换进行不同的控制或调节。 通过采用可调节的光学装置(10-14),用于对物体的照明或用于在图像转换器(15)上的物体成像的光路中,可以获得比观察到的物体更大量的视觉信息, 由于所使用的转换器的设计所施加的限制,在单个图像中可用的(15)。 本发明涉及使得能够使用简单且通常商业的部件来设计记录单元的装置的过程和设计形式,尽管设计所施加的视野减弱,能够显示和测量较大物体(1)。 这对于在人体或动物身体的侵入性应用中的诊断特别有用。
    • 99. 发明申请
    • METHOD OF MEASURING A HEIGHT OF 3-DIMENSIONAL SHAPE MEASUREMENT APPARATUS
    • 测量三维形状测量装置高度的方法
    • US20150124081A1
    • 2015-05-07
    • US14397520
    • 2013-05-22
    • KOH YOUNG TECHNOLOGY INC.
    • Joong Ki JeongDeok-Hwa Hong
    • G01B11/14
    • G01B11/14G01B11/0608G01B11/2513G01B11/2531G01B2210/56
    • A method of measuring a height of 3-dimensional shape measurement apparatus includes irradiating a first grid pattern light from a plurality of first lighting devices and a second grid pattern light from a plurality of second lighting devices which are alternatively arranged to the first lighting devices toward a target object wherein the first grid pattern light has a first equivalent wavelength and the second grid pattern light has a second equivalent wavelength that is different from the first equivalent wavelength, and obtaining a first pattern image corresponding to the first grid pattern light and a second pattern image corresponding to the second grid pattern light, generating combined pattern images by combining the first and second pattern images obtained from the first and second lighting devices adjacent to each other among the plurality of first and second lighting devices, calculating heights of the target object according to a combined equivalent wavelength of the combined pattern images, and determining a representative height of the target object by using the calculated heights of the target object. And therefore, it is possible to measure a height of a target object which exceeds an available height of measurement by each of the first and second lighting devices, as well as, more accurate and reliable height may be obtained.
    • 测量三维形状测量装置的高度的方法包括:照射来自多个第一照明装置的第一格栅图案光和来自多个第二照明装置的第二格栅图案光,所述第二照明装置交替地布置到第一照明装置 目标物体,其中所述第一格栅图案光具有第一等效波长,并且所述第二格栅图案光具有与所述第一等效波长不同的第二等效波长,并且获得与所述第一格栅图案光对应的第一图案图像, 对应于第二格栅图案光的图案图像,通过组合从多个第一和第二照明装置中彼此相邻的第一和第二照明装置获得的第一和第二图案图像来生成组合图案图像,计算目标对象的高度 根据组合的组合等效波长 d图案图像,并且通过使用所计算的目标对象的高度来确定目标对象的代表性高度。 因此,可以通过第一和第二照明装置中的每一个来测量超过可用测量高度的目标物体的高度,并且可以获得更准确和可靠的高度。