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91. 发明专利

GB0218144D0 Transport module 未知
公开(公告)号：GB0218144D0
公开(公告)日：2002-09-11
申请号：GB0218144
申请日：1998-07-10
申请人： FLUOROWARE INC
IPC分类号： H01L21/673

92. 发明专利

DE29924287U1 未知
公开(公告)号：DE29924287U1
公开(公告)日：2002-08-29
申请号：DE29924287
申请日：1999-05-27
申请人： FLUOROWARE INC
IPC分类号： B29C45/14 , B29C45/16 , B29K69/00 , B29K73/00 , B29K79/00 , G03F7/20 , H01L21/673 , B65D85/00 , H01L21/68

93. 发明专利

GB2327235B Transport module with latching door 未知
公开(公告)号：GB2327235B
公开(公告)日：2002-03-06
申请号：GB9814518
申请日：1998-07-03
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L , KRAMPOTICH DENNIS J
IPC分类号： B65D51/26 , B65D6/40 , B65D85/86 , B65G49/07 , H01L21/673 , H01L21/00
摘要： A wafer container has an open front defined by a door receiving frame and a door sized for the door receiving frame. The door receiving frame has slots on opposite sides and the door utilizes latching linkages and lifting linkages cooperate to extend, lift, lower and retract the latching portions from the door into and out of latch receptacles on the door receiving frame. The door may also have passive wafer cushions or active wafer engaging arms which extend inwardly toward the wafers to secure said wafers when the door is in place. The latching linkages, lifting linkages, and where desired the retaining arms are linked to rotatable cammed members in the interiors if the door. The cammed member utilizes cammed surfaces configured to first extend the latching portions in a first direction into the latching receptacles and to then move the latching portions in a second direction normal to the first direction to pull the door inwardly and to seal the door to the container portion.

94. 发明专利

AU6302301A Shock resistant variable load tolerant wafer shipper 未知
公开(公告)号：AU6302301A
公开(公告)日：2001-12-11
申请号：AU6302301
申请日：2001-05-10
申请人： FLUOROWARE INC
发明人： BORES GREGORY W , ZABKA MICHAEL C , HENDERER RALPH
IPC分类号： H01L21/673 , B65D85/48 , A45C13/10 , B65D85/00 , B65D85/02

95. 发明专利

ITTO991113A1 未知
公开(公告)号：ITTO991113A1
公开(公告)日：2001-06-18
申请号：ITTO991113
申请日：1999-12-17
申请人： FLUOROWARE INC
发明人： LEYS JOHN A , STEIN MICHAEL A
IPC分类号： F16K7/12 , F16K7/16 , F16K11/00 , F16K11/048 , F16K31/50
摘要： A valve made principally of plastic has a creep compensating features providing consistent engagement between valve members and their respective valve seats, minimizing creep, and compensating for any creep that does occur. The features compensate for compression of internal valve components as well as extension of the valve body. In a manually operated three way valve embodiment of the invention, a trapped spring mechanism inserted between an actuator portion and the upper valve member provides the closure force for the upper valve member on the upper valve seat. The first valve member and second valve member connect through a extensible portion. Valves according to the invention are particularly suitable for quarter-turn three-way manual diaphragm valves and for applications in the semiconductor industry.

96. 发明专利

HK1026881A1 WAFER ENCLOSURE WITH DOOR 未知
公开(公告)号：HK1026881A1
公开(公告)日：2000-12-29
申请号：HK00105845
申请日：2000-09-15
申请人： FLUOROWARE INC
发明人： MIKKELSEN KIRK J , ADAMS MICHAEL S , BORES GREG , WISEMAN BRIAN
IPC分类号： B65D85/86 , H01L21/673 , B65D
摘要： A sealable enclosure for wafers has a door with an easily accessible and disassembleable latching mechanism which utilizes a minimal number of moving parts. The door includes an enclosure with a cammed member rotatable on a post and in engagement with a pair of latching arms that extend, retract, move upwardly and downwardly or forwardly and rearwardly depending on whether the door is a front side door or a bottom door. The movement of the latching arms is accomplished by cammed portion of the cammed member configured to move cam follower portions of the latching arms in an axial direction with respect to the cammed member and in a radial direction. The latching arm pivots on a fulcrum within the enclosure. The latching mechanism is accessible through a panel that attaches by integral detents on the panel that cooperate with recesses on the interior edge walls of the door enclosure. The rotatable member has a slotted center and is secured on a T-shaped post extending from the enclosure by placement on the post in an insertion rotational position. When assembled the rotation of the cammed member is restricted to the operative range by stops on the enclosure.

97. 发明专利

IT1303138B1 未知
公开(公告)号：IT1303138B1
公开(公告)日：2000-10-30
申请号：ITTO980879
申请日：1998-10-16
申请人： FLUOROWARE INC
发明人： EGGUM SHAWN , NYSETH DAVID L , BHATT SANJIV M , ADAMS MICHAEL S , WISEMAN BRIAN S
IPC分类号： H01L21/673
摘要： PROBLEM TO BE SOLVED: To provide a wafer carrier which is capable of stably carrying wafers and minimizing adhesion of particles onto the wafers. SOLUTION: This wafer carrier transports or holds wafers in a horizontal condition with their axes being aligned. The carrier supports the wafers at their edge parts at least four points. In an embodiment, the carrier is of an H-bar type which has a plurality of slots defined by elongated wafer guides 120 provided on sidewalls of the carrier. The carrier holds wafers in such a condition that upward-protruded projections minimize the contact between the carrier and wafers. The number and shape of such projections are set so that the projections not to come into contact with the upper side faces of the guides.

98. 发明专利

HK1023228A1 Wafer carrier with minimum contact. 未知
公开(公告)号：HK1023228A1
公开(公告)日：2000-09-01
申请号：HK00102409
申请日：2000-04-20
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L , EGGUM SHAWN , ADAMS MICHAEL S , BHATT SANJIV M , WISEMAN BRIAN S
IPC分类号： H01L21/673 , H01L , B65G
摘要： PROBLEM TO BE SOLVED: To provide a wafer carrier which is capable of stably carrying wafers and minimizing adhesion of particles onto the wafers. SOLUTION: This wafer carrier transports or holds wafers in a horizontal condition with their axes being aligned. The carrier supports the wafers at their edge parts at least four points. In an embodiment, the carrier is of an H-bar type which has a plurality of slots defined by elongated wafer guides 120 provided on sidewalls of the carrier. The carrier holds wafers in such a condition that upward-protruded projections minimize the contact between the carrier and wafers. The number and shape of such projections are set so that the projections not to come into contact with the upper side faces of the guides.

99. 发明专利

GB0016655D0 Water carrier 未知
公开(公告)号：GB0016655D0
公开(公告)日：2000-08-23
申请号：GB0016655
申请日：1997-07-11
申请人： FLUOROWARE INC
IPC分类号： H01L21/673

100. 发明专利

GB9929947D0 Creep resistant valve 未知
公开(公告)号：GB9929947D0
公开(公告)日：2000-02-09
申请号：GB9929947
申请日：1999-12-17
申请人： FLUOROWARE INC
IPC分类号： F16K7/12 , F16K7/16 , F16K11/00 , F16K11/048 , F16K31/50
摘要： A valve made principally of plastic has a creep compensating features providing consistent engagement between valve members and their respective valve seats, minimizing creep, and compensating for any creep that does occur. The features compensate for compression of internal valve components as well as extension of the valve body. In a manually operated three way valve embodiment of the invention, a trapped spring mechanism inserted between an actuator portion and the upper valve member provides the closure force for the upper valve member on the upper valve seat. The first valve member and second valve member connect through a extensible portion. Valves according to the invention are particularly suitable for quarter-turn three-way manual diaphragm valves and for applications in the semiconductor industry.

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