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91. 发明授权

US07792176B2 Narrow-band laser device for exposure apparatus 有权
标题翻译：用于曝光装置的窄带激光装置
公开(公告)号：US07792176B2
公开(公告)日：2010-09-07
申请号：US11985840
申请日：2007-11-16
申请人： Osamu Wakabayashi
发明人： Osamu Wakabayashi
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/2325 , H01S3/005 , H01S3/2251
摘要： A narrow-band laser device for exposure apparatus that allows to reduce damage to, and to hence extend the life of, optical elements such as chamber windows, output coupling mirrors or the like. A ring resonator is provided in an amplification stage laser of the narrow-band laser device for exposure apparatus that comprises an oscillation stage laser and an amplification stage laser. An OC, a high reflection mirror and a high reflection mirror are arranged to be offset, for instance, relative to a longitudinal direction axis of discharge electrodes. As a result, the beam width of laser light injected through the OC of the amplification stage laser becomes wider as the beam shifts inside the ring resonator, in each round trip within the ring resonator. The energy density of laser light in the optical elements of the amplification stage laser becomes reduced thereby, thus prolonging the life of the optical elements.
摘要翻译：一种用于曝光装置的窄带激光装置，其允许减少诸如室窗，输出耦合镜等的光学元件的损坏并因此延长其使用寿命。在用于包括振荡级激光器和放大级激光器的曝光装置的窄带激光装置的放大级激光器中设置环形谐振器。 OC，高反射镜和高反射镜被布置为例如相对于放电电极的纵向轴线偏移。结果，在环形谐振器内的每个往返行程中，通过放大级激光器的OC注入的激光的光束宽度随着光束在环形谐振器内移动而变宽。放大级激光器的光学元件中的激光的能量密度降低，从而延长了光学元件的寿命。

92. 发明授权

US07756183B2 Line narrowed laser apparatus 有权
标题翻译：线窄激光设备
公开(公告)号：US07756183B2
公开(公告)日：2010-07-13
申请号：US11453519
申请日：2006-06-15
申请人： Osamu Wakabayashi , Takahito Kumazaki
发明人： Osamu Wakabayashi , Takahito Kumazaki
IPC分类号： H01S3/09 , H01S3/10
CPC分类号： H01S3/08009 , H01S3/08031 , H01S3/0971 , H01S3/1055 , H01S3/137 , H01S3/225 , H01S3/2258 , H01S3/2308
摘要： The control of the spectral purity width E95 is performed while imparting practically no effect to the control of a central wavelength, and the spectral purity width E95 is stabilized. A wavefront adjuster 32 is provided on an output side of the interior of an optical resonator, i.e., on an output coupler 31 side. Light generated in a laser chamber 10 is transmitted through the wavefront adjuster 32 from the laser chamber 10 side, and reaches the output coupler 31. In the wavefront adjuster 32, the distance between concave and convex lenses 33 and 34 is adjusted so that a desired spectral purity width E95 can be obtained. Then, when the light passes through the wavefront adjuster 32, the wavefront of the light is adjusted to a desired wavefront.
摘要翻译：光谱纯度宽度E95的控制在对中心波长的控制实际上没有影响的同时进行，光谱纯度宽度E95稳定。波前调整器32设置在光谐振器的内部的输出侧，即在输出耦合器31侧。在激光室10中产生的光从激光室10侧透射通过波前调整器32，并到达输出耦合器31.在波前调整器32中，调节凹凸透镜33和34之间的距离，使得期望的可以得到光谱纯度宽度E95。然后，当光通过波前调整器32时，光的波前被调整到期望的波前。

93. 发明授权

US06721344B2 Injection locking type or MOPA type of laser device 有权
标题翻译：注射锁定型或MOPA型激光装置
公开(公告)号：US06721344B2
公开(公告)日：2004-04-13
申请号：US10152822
申请日：2002-05-23
申请人： Kiyoharu Nakao , Osamu Wakabayashi
发明人： Kiyoharu Nakao , Osamu Wakabayashi
IPC分类号： H01S322
CPC分类号： H01S3/10092 , H01S3/0818 , H01S3/2366
摘要： An injection locking type or MOPA type of laser device capable of always obtaining stable output energy and wavelength is provided. For this purpose, the laser device includes an oscillator (11A) for oscillating seed laser light (21A) with wavelength band-narrowed by a band-narrowing unit (30), an amplifier (11B) for amplifying the seed laser light and emitting the amplified laser light (21B), a wavelength monitor (34A) for detecting at least a wavelength characteristic of the seed laser light, and a laser controller (29) for performing adjustment oscillation to contain a wavelength characteristic within a predetermined allowable range, at a time of startup or when laser oscillation is suspended for a predetermined period of time or more.
摘要翻译：提供了能够始终获得稳定的输出能量和波长的注入锁定型或MOPA型激光装置。为此，激光装置包括振荡器（11A），用于振荡由带宽变窄单元（30）带宽波长的种子激光（21A），放大器（11B），用于放大种子激光并发射放大激光（21B），用于检测种子激光的至少波长特性的波长监视器（34A），以及激光控制器（29），用于执行调节振荡以将波长特性包含在预定允许范围内，启动时间或当激光振荡暂停预定时间或更长时间时。

94. 再颁专利

USRE38372E1 Narrow band excimer laser and wavelength detecting apparatus 失效
标题翻译：窄带准分子激光器和波长检测装置
公开(公告)号：USRE38372E1
公开(公告)日：2003-12-30
申请号：US08833251
申请日：1997-04-04
申请人： Osamu Wakabayashi , Masahiko Kowaka , Yukio Kobayashi
发明人： Osamu Wakabayashi , Masahiko Kowaka , Yukio Kobayashi
IPC分类号： H01S313
CPC分类号： G03F7/70566 , G01J9/0246 , G03F7/70575 , G03F7/70583 , H01S3/0014 , H01S3/08004 , H01S3/08009 , H01S3/1394 , H01S3/225
摘要： A narrow band excimer laser and a wavelength detecting apparatus are suitable for use as a light source of a reduction projection aligner of a semiconductor device manufacturing apparatus. In the excimer laser, the ruling direction and the beam expanding direction of a prism beam expander are made substantially coincide with each other, and a polarizing element causing selective oscillation of a linearly polarized light wave substantially parallel with the beam spreading direction of a prism beam expander is contained in a laser cavity. A window at the front or rear side of a laser chamber is disposed such that the window make a Brewster's angle with respect to the axis of the laser beam in a plane containing the beam expanding direction of the prism expander and the laser beam axis. An anti-reflection film which selectively prevents reflection of a polarized light component substantially parallel to the direction of beam expanding of a prism beam expander is coated on one surface of a prism that constitutes the prism beam expander. The wavelength detecting apparatus is constructed to input a reference light and a light to be detected upon the etalon. The light transmitting through the etalon is condensed to focus on a light detector for detecting the wavelength of the laser beam based on interference fringe detected by the light detector.

95. 发明授权

US06560269B1 Fluorine laser device 有权
标题翻译：氟激光装置
公开(公告)号：US06560269B1
公开(公告)日：2003-05-06
申请号：US09625969
申请日：2000-07-26
申请人： Kiwamu Takehisa , Tatsuya Ariga , Osamu Wakabayashi
发明人： Kiwamu Takehisa , Tatsuya Ariga , Osamu Wakabayashi
IPC分类号： H01S308
CPC分类号： H01S3/08 , H01S3/08004 , H01S3/2258
摘要： Fluorine laser device capable of obtaining laser light with strong monochromatic property and large power is provided. For this purpose, the fluorine laser device is in a fluorine laser device including a laser chamber (2) in which a laser medium including fluorine is contained and is excited to thereby oscillate laser light (11), a front slit (116) disposed in front of said laser chamber (2) and having a front opening (33) for transmitting the laser light (11), and a rear slit (117) disposed behind said laser chamber (2) and having a rear opening (34) for transmitting the laser light (11), at least one of the front slit (116) and the rear slit (117) is a slit (16; 17) in which a slit inclined plane (35) is formed on a surface at a laser chamber side to make one of the front opening (33) and the rear opening (34) convex.
摘要翻译：提供能够获得具有强的单色性能和大功率的激光的氟激光装置。为此，氟激光器件在氟激光器件中，包括激光室（2），其中包含氟的激光介质被包含并激发以激发激光（11），前狭缝（116）设置在所述激光室（2）的前部并具有用于透射激光（11）的前开口（33）和设置在所述激光室（2）后面的后狭缝（117），并且具有用于传输的后开口激光（11），前狭缝（116）和后狭缝（117）中的至少一个是在激光室的表面上形成有狭缝倾斜面（35）的狭缝（16; 17）使前开口（33）和后开口（34）中的一个凸起。

96. 发明授权

US06553042B2 Laser apparatus for generating vacuum ultraviolet narrow-band laser beams 有权
标题翻译：用于产生真空紫外窄带激光束的激光装置
公开(公告)号：US06553042B2
公开(公告)日：2003-04-22
申请号：US09727510
申请日：2000-12-04
申请人： Koji Shio , Toru Suzuki , Osamu Wakabayashi
发明人： Koji Shio , Toru Suzuki , Osamu Wakabayashi
IPC分类号： H01S310
CPC分类号： H01S3/13 , H01S3/1305 , H01S3/131 , H01S3/137 , H01S3/139 , H01S3/2258
摘要： In a laser apparatus, a central wavelength of vacuum ultraviolet laser beams whose bandwidth is narrowed can be maintained at a target wavelength in high precision. This laser apparatus includes a laser oscillator for generating a vacuum ultraviolet laser beam whose bandwidth is narrowed and a reference beam having a spectral distribution of a vacuum ultraviolet band to output both the vacuum ultraviolet laser beam and the reference beam; a wavelength meter for measuring a central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed by using at least one emission light contained in the reference beam as a reference; and a controller for controlling the laser oscillator based upon the central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed, which is measured by the wavelength meter, so as to thereby adjust the central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed to a target wavelength. As a result, this laser apparatus can output the vacuum ultraviolet laser beams whose bandwidth is narrowed and whose central wavelength is maintained at the target wavelength in high precision.
摘要翻译：在激光装置中，能够将带宽变窄的真空紫外线激光束的中心波长高精度地维持在目标波长。该激光装置包括用于产生带宽变窄的真空紫外激光束的激光振荡器和具有真空紫外线带的光谱分布的参考光束，以输出真空紫外激光束和参考光束; 用于通过使用包含在参考光束中的至少一个发射光作为参考来测量其带宽变窄的真空紫外激光束的中心波长的波长计; 以及控制器，用于基于由波长计测量的带宽变窄的真空紫外激光束的中心波长来控制激光振荡器，从而调节带宽变窄的真空紫外激光束的中心波长到目标波长。结果，该激光装置可以高精度地输出带宽变窄，中心波长保持在目标波长的真空紫外激光束。

97. 发明授权

US5710787A Output controller for laser device 失效
标题翻译：激光装置输出控制器
公开(公告)号：US5710787A
公开(公告)日：1998-01-20
申请号：US446858
申请日：1995-06-05
申请人： Yoshiho Amada , Osamu Wakabayashi , Noritoshi Ito
发明人： Yoshiho Amada , Osamu Wakabayashi , Noritoshi Ito
IPC分类号： H01L21/027 , B23K26/00 , H01S3/104 , H01S3/13 , H01S3/134 , H01S3/225 , H01S3/10
CPC分类号： H01S3/134 , H01S3/13
摘要： An object is to perform controlling operation always accurately to eliminate a spiking phenomenon generated in a laser device. In an output controller (6), excitation intensity data causing energies of continual pulses to be set to have a desired identical value is previously stored in association with the respective continual pulses. In an output monitor (5), the energies of the oscillated pulses are detected. And detected values of energies of pulses in a continual pulse oscillation already done are compared with a desired pulse energy value and previously-stored charging voltages associated with the respective pulses are corrected in the output controller (6) on the basis of the comparison result. When the present invention is applied to control of an output of a light source in an aligner, an accuracy of control of exposure light can be remarkabley improved.
摘要翻译： PCT No.PCT / JP94 / 01601 Sec。 371日期：1995年6月5日 102（e）日期1995年6月5日PCT 1994年9月28日PCT公布。第WO95 / 10131号公报日期1995年04月13日目的是总是精确地执行控制操作，以消除在激光装置中产生的尖峰现象。在输出控制器（6）中，与相应的连续脉冲相关联地预先存储使连续脉冲的能量被设定为具有期望的相同值的激励强度数据。在输出监视器（5）中，检测振荡脉冲的能量。并且将已经完成的连续脉冲振荡中的脉冲的能量的检测值与期望的脉冲能量值进行比较，并且基于比较结果在输出控制器（6）中校正与各个脉冲相关联的预先存储的充电电压。当本发明应用于对准器中的光源的输出的控制时，可以显着提高曝光光的控制精度。

98. 发明授权

US5373523A Excimer laser apparatus 失效
标题翻译：准分子激光装置
公开(公告)号：US5373523A
公开(公告)日：1994-12-13
申请号：US136448
申请日：1993-10-14
申请人： Junichi Fujimoto , Hakaru Mizoguchi , Yoshiho Amada , Osamu Wakabayashi
发明人： Junichi Fujimoto , Hakaru Mizoguchi , Yoshiho Amada , Osamu Wakabayashi
IPC分类号： H01S3/034 , H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/0346 , H01S3/036 , H01S3/225
摘要： An excimer laser apparatus is provided with a compact high efficiency dust particle removal means which is capable of maintaining the windows clean with only a small volume of purging gas, and which prevents deterioration of aperture masks without having to increase the cavity length or risking the possibility of leakage from piping connections. The excimer laser apparatus uses, as dust particle removal means, filters (13a and 13b) made of metal or ceramic which is non-reactive with fluorine. A ground potential dust collector can be provided at a downstream side of a static dust particle remover, having an anode and a cathode, for collecting any dust particles which have passed through the static dust particle remover. In addition, clean laser medium gas can be introduced into subchambers (14a and 14b) through gas introducing passages (11a and 11b) provided in the walls of the housing (1) and then into the laser chamber (12) through labyrinths (8a and 8b) without disturbing the clean gas which stays near the internal surfaces of the windows (6a and 6b).
摘要翻译：准分子激光装置设置有紧凑的高效除尘装置，其能够仅利用少量清洗气体来保持窗户清洁，并且防止孔径掩模的劣化，而不必增加空腔长度或冒着可能性从管道连接泄漏。准分子激光装置使用与氟反应的金属或陶瓷制成的过滤器（13a，13b）作为除尘装置。可以在具有阳极和阴极的静电除尘器的下游侧设置地电位集尘器，用于收集通过静电除尘器的任何灰尘颗粒。此外，可以通过设置在壳体（1）的壁中的气体引入通道（11a和11b）将干净的激光介质气体引入到子室（14a和14b）中，然后通过迷宫（8a和8a）进入激光室 8b），而不干扰保持在窗口（6a和6b）的内表面附近的清洁气体。

99. 发明授权

US5373515A Laser wavelength controlling apparatus 失效
标题翻译：激光波长控制装置
公开(公告)号：US5373515A
公开(公告)日：1994-12-13
申请号：US721929
申请日：1991-06-21
申请人： Osamu Wakabayashi , Yasuo Itakura , Masahiko Kowaka , Yoshino Amada
发明人： Osamu Wakabayashi , Yasuo Itakura , Masahiko Kowaka , Yoshino Amada
IPC分类号： G01J3/46 , G02B27/42 , G05D25/02 , H01S3/137 , H01S3/225 , H01S3/13
CPC分类号： H01S3/137 , H01S3/08004 , H01S3/225
摘要： A laser wavelength controlling apparatus adapted for controlling the wavelength of a narrow-band oscillation laser beam at a high accuracy for long period of time even if environmental conditions such as the atmospheric temperature and pressure changes to some degree. This wavelength controlling apparatus includes a wavelength selective element (2) for narrowing the band width of the oscillating laser beam; a wavelength selection controller 9 and a wavelength selective element driver for changing the wavelength to be selected by the wavelength selective element (2); a reference light source (7) for generating a reference light for measuring the wavelength of the oscillating laser beam; a wavelength detector (8) for leading said oscillating laser beam and said reference light into a spectroscope and detecting the absolute wavelength of said oscillating laser beam on the basis of the detected value of the reference light; and a wavelength detecting driver (8a) for controlling the wavelength to be selected by said wavelength selective element in cooperation with said wavelength controller (9) so as to correspond the absolute wavelength detected by the wavelength detector with the preset wavelength.
摘要翻译：一种激光波长控制装置，即使在大气温度和压力等环境条件有一定程度的变化的情况下，也可以长时间高精度地控制窄带振荡激光的波长。该波长控制装置包括用于使振荡激光束的带宽变窄的波长选择元件（2）波长选择控制器9和用于改变由波长选择元件（2）选择的波长的波长选择元件驱动器; 用于产生用于测量所述振荡激光束的波长的参考光的参考光源（7）; 用于将所述振荡激光束和所述参考光引导到分光镜中的波长检测器（8），并且基于所述参考光的检测值来检测所述振荡激光束的绝对波长; 以及波长检测驱动器（8a），用于与所述波长控制器（9）协作控制由所述波长选择元件选择的波长，以便将波长检测器检测到的绝对波长与预设波长相对应。

100. 发明授权

US09647415B2 Laser apparatus and method of controlling laser apparatus 有权
公开(公告)号：US09647415B2
公开(公告)日：2017-05-09
申请号：US14602208
申请日：2015-01-21
申请人： Hiroaki Tsushima , Osamu Wakabayashi , Takashi Matsunaga
发明人： Hiroaki Tsushima , Osamu Wakabayashi , Takashi Matsunaga
IPC分类号： H01S3/10 , H01S3/00 , H01S3/097 , H01S3/08 , H01S3/0971 , H01S3/23
CPC分类号： H01S3/09702 , H01S3/0014 , H01S3/08009 , H01S3/09705 , H01S3/0971 , H01S3/2366
摘要： A laser apparatus according to embodiment may include: a laser chamber filled with a laser gain medium; a pair of electrodes disposed in the laser chamber; a charger configured to apply a charge voltage for causing a discharge to occur between the pair of the electrodes; a pulse power module configured to covert the charge voltage applied by the charger into a short pulsed voltage, and apply the short pulsed voltage between the pair of the electrodes; and a controller configured to calculate input energies Ein applied to the pair of the electrodes based on the charge voltage, calculate an integration value Einsum of the input energies Ein by integrating the calculated input energies Ein, and determine whether the integration value Einsum exceeds an integration lifetime value Einsumlife of input energy or not.

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