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    • 94. 发明授权
    • Semiconductor element, semiconductor device and methods for manufacturing thereof
    • 半导体元件,半导体器件及其制造方法
    • US07247562B2
    • 2007-07-24
    • US10827534
    • 2004-04-20
    • Akira Ishikawa
    • Akira Ishikawa
    • H01L21/44
    • H01L29/41733H01L21/84H01L27/1203H01L29/66757H01L29/78621H01L29/78675
    • The present invention provides a method of manufacturing a semiconductor element having a miniaturized structure and a semiconductor device in which the semiconductor element having a miniaturized structure is integrated highly, by overcoming reduction of the yield caused by alignment accuracy, accuracy of a processing technique by reduced projection exposure, a finished dimension of a resist mask, an etching technique and the like. An insulating film covering a gate electrode is formed, and a source region and a drain region are exposed, a conductive film is formed thereover, a resist having a different film thickness is formed by applying the resist over the conductive film, the entire surface of the resist is exposed to light and developed, or the entire surface of the resist is etched to form a resist mask, and the conductive film is etched by using the resist mask to form a source and drain electrode.
    • 本发明提供一种制造具有小型结构的半导体元件和半导体器件的方法,其中具有小型结构的半导体元件被高度集成,通过克服由对准精度引起的成品率的降低,加工技术的精度降低 投影曝光,抗蚀剂掩模的成品尺寸,蚀刻技术等。 形成覆盖栅电极的绝缘膜,并且源极区域和漏极区域露出,在其上形成导电膜,通过在导电膜上涂覆抗蚀剂,形成具有不同膜厚度的抗蚀剂,整个表面 将抗蚀剂曝光并显影,或者蚀刻抗蚀剂的整个表面以形成抗蚀剂掩模,并且通过使用抗蚀剂掩模来蚀刻导电膜以形成源极和漏极。
    • 96. 发明授权
    • Method of fabricating semiconductor device
    • 制造半导体器件的方法
    • US07101807B2
    • 2006-09-05
    • US10998920
    • 2004-11-29
    • Akira Ishikawa
    • Akira Ishikawa
    • H01L21/302H01L21/461
    • H01L27/1288H01L27/1214H01L27/124H01L27/127H01L29/78621
    • In the step of forming a gate electrode in the region having the line width in which the miniaturization has been progressed, the present invention provides a method of fabricating a thin film transistor (TFT) whose patterning margin can be enlarged without requiring carrying out the photolithography multiple times. According to a fabricating method of the present invention, the mask pattern of the first layer and the mask pattern of the second layer can be formed in a self-aligned process and as a mask pattern which is analog and whose size are different from each other by performing the photolithography once. The hut shape gate can be formed in a self-aligned process by setting the line width located on the active layer so as to be Li in the mask pattern of the first layer, and so as to be L′ in the mask pattern of the second layer, and by in turn carrying out the anisotropic etching using the mask pattern of the second layer and the anisotropic etching using the mask pattern of the first layer. Therefore, the problem of a fabricating method being complex along with the miniaturization of a TFT can be solved by reducing the number of reticles using in the fabricating steps.
    • 在具有进行小型化的线宽度的区域中形成栅电极的步骤中,本发明提供一种制造薄膜晶体管(TFT)的方法,该薄膜晶体管(TFT)可以在不需要进行光刻的情况下扩大其图案边缘 多次。 根据本发明的制造方法,第一层的掩模图案和第二层的掩模图案可以以自对准工艺形成,并且可以形成为模拟的尺寸彼此不同的掩模图案 通过进行光刻一次。 可以通过将位于有源层上的线宽度设置为第一层的掩模图案中的Li,从而以自对准的方式形成小屋形状门,从而在第一层的掩模图案中为L' 通过第二层的掩模图案和使用第一层的掩模图案的各向异性蚀刻进行各向异性蚀刻。 因此,通过在制造步骤中减少使用的掩模版的数量,可以解决制造方法与TFT的小型化一起复杂的问题。
    • 98. 发明申请
    • Folder
    • US20050245379A1
    • 2005-11-03
    • US11116363
    • 2005-04-28
    • Akira Ishikawa
    • Akira Ishikawa
    • B65H35/04B31B50/16B41F13/60B65H26/02B65H45/04B65H45/28B31B1/14
    • B65H45/28B65H26/02B65H45/04
    • A folder includes a cut-off cylinder, etc. for cutting a web into sheets; a group of cylinders for folding each sheet into a signature in accordance with the selected folding specifications; and a conveyer apparatus, a fan wheel, a delivery conveyer, etc. for conveying signatures. In the folder, a cutting blade, etc. are disposed on the upstream side of the cut-off cylinder with respect to the feed direction of the web. When the folding specifications of signatures are changed or when the width of the web is changed, a control device operates the cutting blade to cut the web, and controls the feed of the web in such a manner that only a cut portion of the web present on the downstream side of the cut blade with respect to the feed direction is conveyed to the delivery conveyer.
    • 文件夹包括用于将纸幅切割成片材的切割滚筒等; 一组用于根据所选择的折叠规格将每张纸折叠成签名的圆柱体; 以及用于传送签名的输送装置,风扇轮,输送输送机等。 在文件夹中,切割刀片等相对于幅材的进给方向设置在切割滚筒的上游侧。 当签名的折叠规格改变或当幅材的宽度改变时,控制装置操作切割刀片以切割幅材,并且以这样的方式控制幅材的进给,使得只有幅材的切割部分存在 在切割刀片的下游侧相对于进给方向被传送到输送输送器。