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    • 100. 发明申请
    • Field effect transistor and method of manufacturing the same
    • 场效应晶体管及其制造方法
    • US20070029577A1
    • 2007-02-08
    • US11440150
    • 2006-05-25
    • Atsuhiro KinoshitaJunji Koga
    • Atsuhiro KinoshitaJunji Koga
    • H01L29/76
    • H01L29/0847H01L21/28097H01L29/458H01L29/6653H01L29/6659H01L29/66772H01L29/7833H01L29/785H01L29/78609
    • A field effect transistor includes a first semiconductor region of a first conduction type, a gate electrode formed on the channel region of the first semiconductor region via a gate insulating film, source and drain electrodes formed to interpose the channel region, second semiconductor regions of a second conduction type formed between the source and drain electrodes and the channel region, the second semiconductor regions giving rise to an extension region of the source and drain electrodes, and third semiconductor regions of the second conduction type formed between the source and drain electrodes and each of the first and second semiconductor regions, the third semiconductor regions formed by segregation from the source and drain electrodes and having an impurity concentration higher than that of the second semiconductor regions.
    • 场效应晶体管包括第一导电类型的第一半导体区域,经由栅极绝缘膜形成在第一半导体区域的沟道区上的栅极电极,形成为插入沟道区域的源极和漏极电极,第二半导体区域 形成在源电极和漏电极之间的第二导电类型和沟道区,引起源电极和漏电极的延伸区域的第二半导体区域以及形成在源电极和漏电极之间的第二导电类型的第三半导体区域, 的第一和第二半导体区域的第三半导体区域,所述第三半导体区域通过从所述源极和漏极电极偏析形成,并且具有比所述第二半导体区域的杂质浓度更高的杂质浓度。