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91. 发明授权

US06713383B2 Semiconductor device manufacturing method 失效
标题翻译：半导体器件制造方法
公开(公告)号：US06713383B2
公开(公告)日：2004-03-30
申请号：US10207015
申请日：2002-07-30
申请人： Yoshimi Shioya , Yuhko Nishimoto , Tomomi Suzuki , Shoji Ohgawara , Kazuo Maeda
发明人： Yoshimi Shioya , Yuhko Nishimoto , Tomomi Suzuki , Shoji Ohgawara , Kazuo Maeda
IPC分类号： H01L214763
CPC分类号： H01L21/76838 , H01L21/318 , H01L21/321 , H01L21/76826 , H01L21/76832 , H01L21/76834 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： A surface of a copper (Cu) wiring layer formed over a semiconductor substrate is exposed to a plasma gas selected from the group consisting of an ammonia gas, a mixed gas of nitrogen and hydrogen, a CF4 gas, a C2F6 gas and a NF3 gas. The surface of the copper (Cu) wiring layer is then exposed to an atmosphere or a plasma of a gas selected from the group consisting of an ammonia gas, an ethylenediamine gas, a fÀ-diketone gas, a mixed gas consisting of the ammonia gas and a hydrocarbon gas (CxHy), and a mixed gas consisting of a nitrogen gas and the hydrocarbon gas (CxHy), and a Cu diffusion preventing insulating film is formed on the copper (Cu) wiring layer.
摘要翻译：形成在半导体衬底上的铜（Cu）布线层的表面暴露于选自氨气，氮和氢的混合气体，CF4气体，C2F6气体和NF3气体中的等离子体气体。然后将铜（Cu）布线层的表面暴露于选自氨气，乙二胺气体，二 - 二酮气体，由氨气组成的混合气体的气体的气氛或等离子体和烃气体（CxHy）以及由氮气和烃气体组成的混合气体（CxHy），在铜（Cu）配线层上形成Cu扩散防止绝缘膜。

92. 发明授权

US06673725B2 Semiconductor device and method of manufacturing the same 失效
标题翻译：半导体装置及其制造方法
公开(公告)号：US06673725B2
公开(公告)日：2004-01-06
申请号：US09843726
申请日：2001-04-30
申请人： Yoshimi Shioya , Kouichi Ohira , Kazuo Maeda
发明人： Yoshimi Shioya , Kouichi Ohira , Kazuo Maeda
IPC分类号： H01L2131
CPC分类号： H01L21/02126 , C23C16/30 , H01L21/02211 , H01L21/02216 , H01L21/02274 , H01L21/31116 , H01L21/31138 , H01L21/3121 , H01L21/3122 , H01L21/31633 , H01L21/76801 , H01L21/76802 , H01L21/76832 , H01L21/76834
摘要： The present invention relates to a semiconductor device manufacturing method for forming an interlayer insulating film having a low dielectric constant by coating a copper wiring. The low dielectric constant insulating film is formed by reaction of a plasma of a film-forming gas containing an oxygen-containing gas of N2O, H2O, or CO2, ammonia (NH3), and at least one of an alkyl compound having a siloxane bond and methylsilane (SiHn(CH3)4−n: n=0, 1, 2, 3).
摘要翻译：本发明涉及通过涂覆铜布线形成具有低介电常数的层间绝缘膜的半导体器件制造方法。低介电常数绝缘膜是通过含有N 2 O，H 2 O或CO 2的含氧气体，氨（NH 3）和至少一种具有硅氧烷键的烷基化合物的成膜气体的等离子体和甲基硅烷（SiHn（CH 3）4-n：n = 0,1,2,3）。

93. 发明授权

US06645883B2 Film forming method, semiconductor device and manufacturing method of the same 有权
标题翻译：成膜方法，半导体装置及其制造方法
公开(公告)号：US06645883B2
公开(公告)日：2003-11-11
申请号：US09863382
申请日：2001-05-24
申请人： Youichi Yamamoto , Hiroshi Ikakura , Tomomi Suzuki , Yuichiro Kotake , Yoshimi Shioya , Kouichi Ohira , Shoji Ohgawara , Kazuo Maeda
发明人： Youichi Yamamoto , Hiroshi Ikakura , Tomomi Suzuki , Yuichiro Kotake , Yoshimi Shioya , Kouichi Ohira , Shoji Ohgawara , Kazuo Maeda
IPC分类号： H01L2131
CPC分类号： H01L21/02126 , C23C16/401 , H01L21/02216 , H01L21/02274 , H01L21/3122 , H01L21/31612
摘要： The present invention discloses a film forming method for forming an insulating film having a low dielectric constant. This method comprises the steps of adding at least one diluting gas of an inert gas and a nitrogen gas (N2) to a major deposition gas component consisting of siloxane and N2O, converting the resultant deposition gas into plasma, causing reaction in the plasma, and forming an insulating film 25,27, or 28 on a substrate targeted for film formation.
摘要翻译：本发明公开了一种形成具有低介电常数的绝缘膜的成膜方法。该方法包括以下步骤：将惰性气体和氮气（N 2）的至少一种稀释气体添加到由硅氧烷和N 2 O组成的主要沉积气体组分中，将所得沉积气体转化成等离子体，引起等离子体中的反应，以及在用于成膜的基板上形成绝缘膜25,27或28。

94. 发明授权

US06504154B2 Non-destructive sugar content measuring apparatus 失效
标题翻译：无损糖含量测定装置
公开(公告)号：US06504154B2
公开(公告)日：2003-01-07
申请号：US09783994
申请日：2001-02-16
申请人： Junji Iida , Akira Terashima , Kazuo Maeda , Shintaro Ishikawa , Shinji Yamauchi
发明人： Junji Iida , Akira Terashima , Kazuo Maeda , Shintaro Ishikawa , Shinji Yamauchi
IPC分类号： G01N2135
CPC分类号： G01N21/3563 , G01N33/025
摘要： A non-destructive sugar content measuring apparatus having a plurality of trays on which vegetables and fruits are to be placed, a transport device for successively delivering the trays at appropriate intervals, and first, second and third measuring sections provided in the course of a transport path and at which laser beams having wavelengths &lgr;1, &lgr;2 and &lgr;3 are respectively made incident on each vegetable or fruit and the amount of light of each laser beam emergent from the vegetable or fruit is measured with a detector provided at each measuring section and the absorbance of each laser beam is determined from the amount of incident light made incident on the vegetable or fruit and the amount of detected light which has been measured with the detector, to measure the sugar content of the vegetables and fruits on the basis of each absorbance.
摘要翻译：一种无损糖测量装置，具有多个托盘，蔬菜和水果放置在其上，用于以适当的间隔连续输送托盘的运送装置以及在运输过程中设置的第一，第二和第三测量部分路径，并且具有波长lambd1，lambd2和lambd3的激光束分别入射到每个蔬菜或水果上，并且用在每个测量部分提供的检测器测量从蔬菜或水果出射的每个激光束的光量，并且吸光度根据入射到植物或果实上的入射光量和用检测器测量的检测光的量来确定每个激光束，以根据每个吸光度测量蔬菜和水果的糖含量。

95. 发明授权

US06472818B1 Light bulb 失效
标题翻译：灯泡
公开(公告)号：US06472818B1
公开(公告)日：2002-10-29
申请号：US09615735
申请日：2000-07-13
申请人： Taku Ikeda , Kazuo Maeda
发明人： Taku Ikeda , Kazuo Maeda
IPC分类号： H01K154
CPC分类号： H01K1/54
摘要： Providing a light bulb having a long life by preventing filament coil breakage. A glass bulb (1) has a sealing portion (4) at one end thereof and contains a filament coil (5). The filament coil (5) is suspended between lead-in wires (7, 8) extended externally of the sealing portion (4), with its opposite ends connected to respective one ends of the wires. The lead-in wires (7, 8) are supported by a stem (6) disposed between the sealing portion (4) and the filament coil (5). A getter (9) is disposed between the sealing portion (4) and the stem (6).
摘要翻译：通过防止灯丝线圈断裂，提供寿命长的灯泡。玻璃灯泡（1）在其一端具有密封部分（4）并且包含灯丝线圈（5）。灯丝线圈（5）悬挂在从密封部分（4）的外部延伸的引入线（7,8）之间，其相对端连接到电线的相应一端。导线（7,8）由设置在密封部分（4）和灯丝线圈（5）之间的杆（6）支撑。吸气剂（9）设置在密封部分（4）和杆（6）之间。

96. 发明授权

US06403410B1 Plasma doping system and plasma doping method 失效
标题翻译：等离子体掺杂系统和等离子体掺杂法
公开(公告)号：US06403410B1
公开(公告)日：2002-06-11
申请号：US09431073
申请日：1999-11-01
申请人： Kouichi Ohira , Bunya Matsui , Kazuo Maeda
发明人： Kouichi Ohira , Bunya Matsui , Kazuo Maeda
IPC分类号： H01L21338
CPC分类号： H01J37/32412 , H01J37/3211 , H01J37/3244 , H01J37/32688
摘要： The present invention relates to a plasma doping system capable of handling larger-diameter wafers and of introducing impurities to a shallow depth with a lower energy level. The plasma doping system includes a plasma generation chamber provided with a high-frequency power source and with antennas for generating a helicon plasma of a gas containing conduction type impurities. An impurity introduction chamber is provided with a substrate holding fixture. A plasma flow passage/shaping chamber provides a flow passage through which the helicon plasma flows from the plasma generation chamber to the impurity introduction chamber and has a magnetic field generator for generating a magnetic field to constrict the helicon plasma flowing therethrough.
摘要翻译：本发明涉及一种等离子体掺杂系统，其能够处理较大直径的晶片并将杂质引入具有较低能级的浅深度。等离子体掺杂系统包括具有高频电源的等离子体产生室和用于产生含有导电型杂质的气体的螺旋等离子体的天线。杂质引入室设置有基板固定夹具。等离子体流动通道/成形室提供了一个流动通道，螺旋血浆等离子体通过该流道从等离子体产生室流向杂质引入室，并且具有用于产生磁场的磁场发生器，以收缩流过其中的螺旋血浆等离子体。

97. 发明授权

US06281113B1 Method for forming an interplayer insulating film and semiconductor device 失效
标题翻译：用于形成层间绝缘膜和半导体器件的方法
公开(公告)号：US06281113B1
公开(公告)日：2001-08-28
申请号：US09492528
申请日：2000-01-27
申请人： Kazuo Maeda
发明人： Kazuo Maeda
IPC分类号： H01L214763
CPC分类号： H01L21/02126 , H01L21/02129 , H01L21/02131 , H01L21/02203 , H01L21/02211 , H01L21/02271 , H01L21/02274 , H01L21/02304 , H01L21/0234 , H01L21/02362 , H01L21/31695 , H01L21/76801 , H01L21/7682 , H01L21/76825 , H01L21/76826 , H01L21/76831 , H01L2221/1047
摘要： A method for forming an interlayer insulating film is disclosed. This method includes the steps of: forming a first insulating film on a substrate, the film containing at least one of H2O, C and a hydrocarbon; forming pores in the first insulating film by heat treatment of the first insulating film to discharge the H2O, C or hydrocarbon therefrom; and forming a second insulating film on the porous first insulating film.
摘要翻译：公开了一种用于形成层间绝缘膜的方法。该方法包括以下步骤：在衬底上形成第一绝缘膜，所述膜含有H 2 O，C和烃中的至少一种; 通过第一绝缘膜的热处理在第一绝缘膜中形成孔，以从其中排出H 2 O，C或烃; 以及在所述多孔第一绝缘膜上形成第二绝缘膜。

98. 发明授权

US5858100A Substrate holder and reaction apparatus 失效
标题翻译：基板支架和反应装置
公开(公告)号：US5858100A
公开(公告)日：1999-01-12
申请号：US416006
申请日：1995-04-04
申请人： Kazuo Maeda , Kouichi Ohira , Yuhko Nishimoto
发明人： Kazuo Maeda , Kouichi Ohira , Yuhko Nishimoto
IPC分类号： C30B25/12 , C23C16/458 , C23C16/507 , H01L21/00 , H01L21/205 , H01L21/302 , H01L21/3065 , C23C16/00
CPC分类号： H01L21/67103 , C23C16/4586 , C23C16/507
摘要： The present invention relates to a reaction apparatus for receiving a reaction gas and for heating a substrate so as to form a film such as an insulating film on the substrate or for etching, with reduced power consumption for heating the substrate. The apparatus can change a substrate temperature within a short period of time, and maintains throughput while reducing labor and cost for maintenance. The apparatus includes a substrate holder (12) with a base of an insulating material in which an electrode (22) and a heater (23) for heating the held substrate (20) are contained. The apparatus also includes a processing chamber (7) enclosed by a chamber wall (7a).
摘要翻译：本发明涉及一种反应装置，用于接收反应气体并加热基板，以便在基板上形成诸如绝缘膜的膜或用于蚀刻，同时降低了用于加热基板的功率消耗。该装置可以在短时间内改变基板温度，并且在减少维护的劳动力和成本的同时保持生产量。该装置包括具有绝缘材料的基部的基板保持件（12），其中包含用于加热保持的基板（20）的电极（22）和加热器（23）。该装置还包括由室壁（7a）包围的处理室（7）。

99. 发明授权

US5844678A Non-destructive taste characteristics measuring apparatus and tray used in the apparatus 失效
公开(公告)号：US5844678A
公开(公告)日：1998-12-01
申请号：US942555
申请日：1997-10-01
申请人： Masahiro Ito , Junji Iida , Akira Terashima , Kazuo Maeda , Shuji Suzuki , Takeo Ide
发明人： Masahiro Ito , Junji Iida , Akira Terashima , Kazuo Maeda , Shuji Suzuki , Takeo Ide
IPC分类号： G01N21/01 , G01N21/35 , G01N33/02
CPC分类号： G01N33/025 , G01N21/01 , G01N21/3563 , G01N21/359 , G01N2021/151 , G01N2021/152 , Y10S209/912
摘要： A non-destructive taste characteristics measuring apparatus comprising trays and a measuring section provided in the course of a transport path and at which light is made incident on a vegetable or fruit to measure its taste characteristics, wherein the trays are each provided with at least two tray-side light passages one opening ends of which are so made as to come in contact with the vegetable or fruit and the other ends of which stand open outward at the bottom of the tray, and the measuring section has at least two measurement-side light passages one opening ends of which are positionally adjustable to the opening ends of the tray-side light passages at its part facing the bottom of said tray, and is provided with i) a means for making light incident on the vegetable or fruit through one of the measurement-side light passages and one of the tray-side light passages and ii) a detector which the light emergent from the vegetable or fruit enters through the other tray-side light passage and the other measurement-side light passage. The apparatus enables continuous measurement of taste characteristics such as sugar content and ripeness of vegetables and fruits at a high speed and a high precision without complicating the structure.

100. 发明授权

US5726750A Non-destructive taste characteristics measuring apparatus and tray used in the apparatus 失效
标题翻译：该装置中使用的非破坏性味道特征测量装置和托盘
公开(公告)号：US5726750A
公开(公告)日：1998-03-10
申请号：US668337
申请日：1996-06-25
申请人： Masahiro Ito , Junji Iida , Akira Terashima , Kazuo Maeda , Shuji Suzuki , Takeo Ide , Toshiki Kishimoto
发明人： Masahiro Ito , Junji Iida , Akira Terashima , Kazuo Maeda , Shuji Suzuki , Takeo Ide , Toshiki Kishimoto
IPC分类号： G01N21/35 , G01N21/59 , G01N33/02 , G01N21/01
CPC分类号： G01N33/025 , G01N21/3563 , G01N21/359 , G01N21/59
摘要： A non-destructive taste characteristics measuring apparatus comprising trays and a measuring section provided in the course of a transport path and at which light is made incident on a vegetable or fruit to measure its taste characteristics, wherein the trays are each provided with at least two tray-side light passages one opening ends of which are so made as to come in contact with the vegetable or fruit and the other ends of which stand open outward at the bottom of the tray, and the measuring section has at least two measurement-side light passages one opening ends of which are positionally adjustable to the opening ends of the tray-side light passages at its part facing the bottom of said tray, and is provided with i) a means for making light incident on the vegetable or fruit through one of the measurement-side light passages and one of the tray-side light passages and ii) a detector which the light emergent from the vegetable or fruit enters through the other tray-side light passage and the other measurement-side light passage. The apparatus enables continuous measurement of taste characteristics such as sugar content and ripeness of vegetables and fruits at a high speed and a high precision without complicating the structure.
摘要翻译：一种非破坏性的味道特征测量装置，包括托盘和设置在运输路径的过程中并且在其上入射到蔬菜或水果上的光以测量其味道特征的测量部分，其中托盘分别设置有至少两个托盘侧光通道，其一端的开口端与植物或水果接触，其另一端在托盘的底部向外敞开，测量部分具有至少两个测量侧光通道，其一个开口端在其面向所述托盘的底部的部分处位于可调节到托盘侧光通道的开口端，并且设置有i）用于通过一个入射到蔬菜或水果上的光的测量侧光通道和托盘侧光通道中的一个，以及ii）来自蔬菜或水果的光从另一个托盘侧光通道进入的检测器年龄和其他测量侧光通道。该装置能够以高速和高精度连续测量蔬菜和水果的味道特征，如糖含量和成熟度，而不会使结构复杂化。

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