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91. 发明授权

US08723287B2 Thermal airlflow sensor 有权
标题翻译：热气流传感器
公开(公告)号：US08723287B2
公开(公告)日：2014-05-13
申请号：US13810814
申请日：2011-07-06
申请人： Norio Ishitsuka , Rintaro Minamitani , Keiji Hanzawa
发明人： Norio Ishitsuka , Rintaro Minamitani , Keiji Hanzawa
IPC分类号： H01L31/058
CPC分类号： H01L37/00 , B81C1/00793 , G01F1/6845 , G01F1/692
摘要： An object of the present invention is to provide a thermal airflow sensor that prevents moisture absorption by a silicon oxide film formed closest to a surface (formed to be located on an uppermost portion), and that reduces a measuring error. In order to attain the foregoing object, the thermal airflow sensor according to the present invention applies an ion implantation to a silicon oxide film 4, formed closest to a surface (formed to be located on an uppermost portion), by using an atom or molecule selected from at least any one of silicon, oxygen, and an inert element such as argon or nitrogen, in order to increase a concentration of an atom contained in the silicon oxide film 4 more than that before the ion implantation.
摘要翻译：本发明的目的是提供一种热气流传感器，其防止由最靠近表面（形成在最上部的部分）形成的氧化硅膜吸湿，并且减少了测量误差。为了实现上述目的，根据本发明的热气流传感器通过使用原子或分子将离子注入施加到最靠近表面（形成在最上部）的氧化硅膜4上选自硅，氧和惰性元素如氩或氮中的至少一种，以便增加氧化硅膜4中包含的原子的浓度比离子注入之前的浓度更高。

92. 发明授权

US07882735B2 Thermal air flowmeter 有权
标题翻译：热空气流量计
公开(公告)号：US07882735B2
公开(公告)日：2011-02-08
申请号：US12769291
申请日：2010-04-28
申请人： Keiji Hanzawa , Yoshihiko Akagi , Takuto Okamoto , Kohei Suseki , Takeshi Morino
发明人： Keiji Hanzawa , Yoshihiko Akagi , Takuto Okamoto , Kohei Suseki , Takeshi Morino
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/72
摘要： An object of the invention is to provide a thermal air flowmeter which can reduce a detection error occurring during pulsating air flow due to a difference of response between rising and falling of detected flow or due to air flow dependence of response. A thermal air flowmeter 1 includes a heat-generating resistor 7 which heats liquid, a heating drive circuit 5 which causes current to flow in the heat-generating resistor 7 and thereby controls heating of the heat-generating resistor 7, and a temperature-sensitive resistor 9 which detects a temperature of the fluid heated by the heat-generating resistor 7. The thermal air flowmeter 1 detects a flow Q of the liquid based on the amount of heat of the liquid heated by the heat-generating resistor 7. Further included are: flow correction value calculating means 17 which calculates a flow correction value ca based on a variation dQ/dt of the detected flow Q and on a flow correction coefficient a set dependent on the detected flow Q; and flow correction means 18 which corrects the detected flow Q based on the flow correction value ca.
摘要翻译：本发明的目的是提供一种热空气流量计，其可以减少由于检测到的流量的上升和下降之间的响应差异或由于响应的气流依赖性而在脉动空气流中发生的检测误差。热空气流量计1包括加热液体的发热电阻器7，使发热电阻器7中的电流流动并由此控制发热电阻器7的加热的加热驱动电路5以及对温度敏感的热敏电阻电阻器9，其检测由发热电阻器7加热的流体的温度。热空气流量计1基于由发热电阻器7加热的液体的热量来检测液体的流量Q。还包括是：流量校正值运算单元17，其基于检测出的流量Q的变动量dQ / dt，根据检测出的流量Q对流量校正系数a计算流量校正值ca; 以及流量校正装置18，其基于流量校正值ca校正检测到的流量Q。

93. 发明申请

US20100218614A1 Measurement Element 有权
标题翻译：测量元件
公开(公告)号：US20100218614A1
公开(公告)日：2010-09-02
申请号：US12707438
申请日：2010-02-17
申请人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01L9/02
CPC分类号： G01N27/18 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01P5/10
摘要： An object of the present invention is to provide a structure unlikely to break in the dicing process while allowing easy execution of screening, for a measurement element in which a resistor constituting a heater is formed on a thin wall part thermally insulated from a semiconductor substrate by providing a cavity part formed in the semiconductor substrate.Provided is a measurement element including: a semiconductor substrate; an electrical insulating film formed on the semiconductor substrate; a resistor formed on the electrical insulating film, the resistor constituting a heater; and a cavity formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof. The measurement element has a film formed covering a region of the opening or the slit.
摘要翻译：本发明的目的是提供一种在切割过程中不易破裂的结构，同时允许轻松执行筛选，对于其中构成加热器的电阻器形成在与半导体衬底热绝缘的薄壁部分上的测量元件提供形成在半导体衬底中的空腔部分。提供了一种测量元件，包括：半导体衬底; 形成在所述半导体基板上的电绝缘膜; 形成在所述电绝缘膜上的电阻器，所述电阻器构成加热器; 以及通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分而形成的腔。形成电阻器的主体部分的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成任何开口和狭缝以穿透薄壁部分在其厚度方向上。测量元件具有覆盖开口或狭缝的区域的膜。

94. 发明授权

US06631645B1 Semiconductor pressure sensor utilizing capacitance change 失效
标题翻译：半导体压力传感器利用电容变化
公开(公告)号：US06631645B1
公开(公告)日：2003-10-14
申请号：US09653165
申请日：2000-09-01
申请人： Shinya Satou , Keiji Hanzawa , Satoshi Shimada , Naohiro Monma , Atsushi Miyazaki
发明人： Shinya Satou , Keiji Hanzawa , Satoshi Shimada , Naohiro Monma , Atsushi Miyazaki
IPC分类号： G01L912
CPC分类号： G01L9/0073 , G01L9/125
摘要： An S/N ratio of an output of a semiconductor pressure sensor is improved, the sensor being of an electrostatic capacitance type pressure sensor for generating an output based upon a ratio between capacitances of a pressure sensitive capacitance element and a reference capacitance element. This semiconductor pressure sensor has: a pressure sensitive capacitance element having an electrostatic capacitance Cs changing with a pressure to be detected; a reference capacitance element having an electrostatic capacitance Cr not changing with the pressure; and a unit for detecting the pressure by outputting a signal corresponding to a ratio between the capacitances Cs and Cr, wherein an initial value Cr0 of the capacitance Cr and an initial value Cs0 of the capacitance Cs are defined by 1.2
摘要翻译：提高半导体压力传感器的输出的S / N比，该传感器是用于根据压敏电容元件的电容与参考电容元件之间的比率产生输出的静电电容式压力传感器。该半导体压力传感器具有：静电电容Cs随着要检测的压力而变化的压敏电容元件; 具有不随压力变化的静电电容Cr的参考电容元件; 以及用于通过输出对应于电容Cs和Cr之间的比率的信号来检测压力的单元，其中电容Cr的初始值Cr 0 和初始值Cs 电容Cs的 0 由1.2 0 / Cs 0 <1.8。通过改变两个元件的电极面积等来调节CR 0 / Cs 0 的比例。以这种方式，可以获得较大的压力表输出DeltaV，降低放大器的放大系数，并提供传感器的高精度。

95. 发明授权

US3942767A Method and apparatus for continuously automatically controlling the water content of kneaded viscous materials 失效
标题翻译：用于连续自动控制捏合粘性物质含水量的方法和装置
公开(公告)号：US3942767A
公开(公告)日：1976-03-09
申请号：US439636
申请日：1974-02-04
申请人： Keiji Hanzawa , Yoshiyuki Takahashi , Nobuyoshi Suga , Tojo Kato , Makoto Handa , Hiromichi Hayashi , Shinichi Taneya , Toshimaro Sone
发明人： Keiji Hanzawa , Yoshiyuki Takahashi , Nobuyoshi Suga , Tojo Kato , Makoto Handa , Hiromichi Hayashi , Shinichi Taneya , Toshimaro Sone
IPC分类号： B01F15/04 , G01N27/22 , G05D22/02 , B01F3/10
CPC分类号： B01F15/0408 , G01N27/223 , G05D22/02
摘要： A feed material is introduced into a pressure-kneading portion of a kneader with a slightly insufficient water content, wherein the remaining water is added and the material is kneaded to be delivered from the kneader as having a predetermined water content, and concurrently the water content of the kneaded material being delivered is continuously measured near the exit of said kneader and the amount of water to be added to the pressure-kneading portion is controlled according to the measured water content, whereby the water content in the kneaded material is maintained constant.
摘要翻译：将原料引入捏合机的加压捏合部分，其含水量略低，其中添加剩余的水，并且将该材料捏合以从具有预定水含量的捏和机输送，同时水含量在所述捏合机的出口附近连续地测量被输送的捏合材料，并且根据测量的含水量来控制加入到加压捏合部分中的水量，从而使捏合材料中的水分含量保持不变。

96. 发明授权

US08935959B2 Thermal type flow rate sensor 有权
标题翻译：热式流量传感器
公开(公告)号：US08935959B2
公开(公告)日：2015-01-20
申请号：US13638259
申请日：2011-04-01
申请人： Ryo Sato , Keiji Hanzawa
发明人： Ryo Sato , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/692 , G01F1/696 , G01F25/00
CPC分类号： G01F1/692 , G01F1/696 , G01F25/0007
摘要： To reduce a signal variation of a bridge circuit connected with a temperature sensing resistor that is caused by a strain even when the strain is generated at a diaphragm portion of a substrate installed with a heater resistor and the temperature sensing resistor. In a thermal type flow rate resistor including a substrate, a diaphragm 13 formed at the substrate, and a heat generating resistor 2 and temperature detecting resistors 7 through 10 formed on the diaphragm for detecting a flow rate of a measured fluid by heating the heat generating resistor, strain detecting resistors 11 and 12 are formed on an upstream side and on a downstream side of a flow of the measured fluid relative to the heat generating resistor on the diaphragm, an amount of a strain generated on the diaphragm is detected by the strain detecting resistors, and a flow rate signal detected by the heat generating resistor and the temperature detecting resistors is compensated for the strain based on the detected amount of the strain.
摘要翻译：即使当在安装有加热电阻器的基板的隔膜部分和温度感测电阻器上产生应变时，也可以减小由应变引起的与感温电阻器相连的桥接电路的信号变化。在包括基板的热式流量电阻器，形成在基板上的隔膜13和形成在隔膜上的发热电阻器2和温度检测电阻器7至10，用于通过加热产生的热量来检测被测流体的流量电阻器，应变检测电阻器11和12形成在测量流体相对于隔膜上的发热电阻器的流动的上游侧和下游侧，通过应变检测在隔膜上产生的应变量检测电阻器和由发热电阻器和温度检测电阻器检测的流量信号基于检测到的应变量来补偿应变。

97. 外观设计

USD674301S1 Physical amount sensor for air 有权
标题翻译：物理量传感器用于空气
公开(公告)号：USD674301S1
公开(公告)日：2013-01-15
申请号：US29397276
申请日：2011-07-14
申请人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa
设计人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa

98. 发明申请

US20120198943A1 Sensor Structure 审中-公开
标题翻译：传感器结构
公开(公告)号：US20120198943A1
公开(公告)日：2012-08-09
申请号：US13368746
申请日：2012-02-08
申请人： Takayuki SAITO , Keiji Hanzawa , Takayuki Yogo
发明人： Takayuki SAITO , Keiji Hanzawa , Takayuki Yogo
IPC分类号： G01F1/34
CPC分类号： G01L19/0007 , G01F1/684 , G01L23/24
摘要： A sensor structure is provided so that a dynamic pressure effect caused by airflow is avoided as much as possible even when a mass airflow measurement device is integrated with a pressure measurement device, thereby preventing contaminated substances, water droplets, or the like from arriving at a pressure measurement part. In the sensor structure, the mass airflow measurement device is inserted into a sensor insertion port provided in an intake air tube component including an intake air tube and is fixed to the intake air tube, and a pressure measurement device is mounted in a housing structural component of the mass airflow measurement device for measuring the pressure. The pressure measurement device and the inside of the intake air tube are connected by a pressure intake port provided in the housing structural component.
摘要翻译：提供了一种传感器结构，即使当质量气流测量装置与压力测量装置集成在一起时也尽可能地避免由气流引起的动态压力效应，从而防止污染物质，水滴等到达压力测量部件。在传感器结构中，将质量气流测量装置插入设置在包括进气管的进气管部件中的传感器插入口中，并固定在进气管上，并且将压力测量装置安装在壳体结构部件用于测量压力的质量气流测量装置。压力测量装置和进气管的内部通过设置在壳体结构部件中的压力吸入口连接。

99. 外观设计

USD660192S1 Airflow sensor 有权
标题翻译：气流传感器
公开(公告)号：USD660192S1
公开(公告)日：2012-05-22
申请号：US29385385
申请日：2011-02-14
申请人： Keiji Hanzawa , Takeshi Morino , Yuki Okamoto , Ryo Sato , Yasuo Onose
设计人： Keiji Hanzawa , Takeshi Morino , Yuki Okamoto , Ryo Sato , Yasuo Onose

100. 发明授权

US07992435B2 Air flow meter 有权
标题翻译：空气流量计
公开(公告)号：US07992435B2
公开(公告)日：2011-08-09
申请号：US12512512
申请日：2009-07-30
申请人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.
摘要翻译：在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置，电阻丝或电阻温度检测器线。

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