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    • 95. 发明申请
    • Methods for sealing chambers of microelectronic packages
    • 密封微电子封装腔室的方法
    • US20060192281A1
    • 2006-08-31
    • US11406858
    • 2006-04-19
    • Daoqiang LuJohn Heck
    • Daoqiang LuJohn Heck
    • H01L23/12
    • B81C1/00269H01L2224/45144H01L2224/48463Y10S257/924H01L2924/00
    • Microelectronic packages having chambers and sealing materials, and methods of making the packages, and sealing the chambers, are disclosed. An exemplary package may include a first surface, a second surface, a solid sealing material including an intermetallic compound, such as, for example, of gallium or another relatively low melting material, between the first surface and the second surface, and a chamber defined by the first surface, the second surface, and the sealing material. An exemplary method may include disposing a ring of a sealing material including a liquid metal between a first surface and a second surface to define a chamber between the first surface, the second surface, and the ring of the sealing material, and sealing the chamber by heating the sealing material to react the liquid metal with a metal that is capable of forming an intermetallic compound with the liquid metal.
    • 公开了具有室和密封材料的微电子封装,以及制造封装的方法和密封室。 示例性包装可以包括在第一表面和第二表面之间的第一表面,第二表面,包括金属间化合物(例如镓或另一种较低熔点的材料)的固体密封材料, 通过第一表面,第二表面和密封材料。 示例性方法可以包括在第一表面和第二表面之间设置包括液体金属的密封材料的环,以在第一表面,第二表面和密封材料的环之间限定腔室,并且通过 加热密封材料以使液态金属与能够与液态金属形成金属间化合物的金属反应。