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    • 93. 发明授权
    • Apparatus for forming laminated thin films or layers
    • 用于形成叠层薄膜或层的装置
    • US06251188B1
    • 2001-06-26
    • US09473682
    • 1999-12-29
    • Tsuyoshi HashimotoKimihiro MatsuseKazuya OkuboTsuyoshi Takahashi
    • Tsuyoshi HashimotoKimihiro MatsuseKazuya OkuboTsuyoshi Takahashi
    • C23C1600
    • C23C16/45565C23C16/4404C23C16/4405C23C16/45561
    • Pre-coating films are formed in a pretreatment by supplying first film-forming gases into a process chamber of a process vessel while heating the process chamber so as to form a first pre-coating film on the inner surface of the process vessel exposed to the process chamber, followed by supplying second film-forming gases into the process chamber to form a second pre-coating film on the first pre-coating film. A semiconductor wafer is loaded into the process chamber. Then, the first gases are supplied into the process chamber while heating the process chamber so as to form a first layer on the wafer, followed by supplying the second gases into the process chamber so as to form a second layer on the first layer. A silane gas is supplied into the process chamber to permit silicon material to be deposited on the surface of the second layer stacked on the first layer. Finally, the wafer having the first and second multi-film is unloaded out of the process vessel.
    • 在预处理中,通过将第一成膜气体提供到处理容器的处理室中,同时加热处理室以在暴露于该处理容器的处理容器的内表面上形成第一预涂膜,从而在预处理中形成预涂膜 处理室,然后将第二成膜气体供应到处理室中,以在第一预涂膜上形成第二预涂膜。 将半导体晶片装载到处理室中。 然后,在加热处理室的同时,将第一气体供给到处理室中,以在晶片上形成第一层,然后将第二气体供应到处理室中,以在第一层上形成第二层。 将硅烷气体供应到处理室中以允许硅材料沉积在堆叠在第一层上的第二层的表面上。 最后,将具有第一和第二多层膜的晶片从处理容器中卸载出来。
    • 96. 发明授权
    • PC card type magnetic disk device
    • PC卡式磁盘装置
    • US5862011A
    • 1999-01-19
    • US699425
    • 1996-08-19
    • Masahiko SegaTomio SuzukiTsuyoshi TakahashiHiroyuki MitsuhashiTetsuo YukiTakashi Matsuki
    • Masahiko SegaTomio SuzukiTsuyoshi TakahashiHiroyuki MitsuhashiTetsuo YukiTakashi Matsuki
    • G11B25/04G11B33/12G11B5/012
    • G11B33/121G11B25/043
    • A magnetic disk device has a large capacity with a small and thin structure and includes a spindle system, an actuator system, a control package for controlling the systems, and a PCMCIA connector. The spindle system is of an in-hub structure wherein two magnetic disks are rotated in inside diameter portions of the magnetic disks. The actuator system has sliders mounting magnetic heads for writing and reading magnetic information to and from the magnetic disks, guide arms and suspension structures. The suspension structures also include a coil, a magnetic circuit for imparting a drive force in cooperation with the coil, a coil holder for supporting the coil, a pivot sleeve for rocking the guide arms, the coil holder and spacers which are integrally laminated to each other, bearings and a pivot shaft. The PCMCIA connector connects to the control package and is fixed by the housing and a package cover.
    • 磁盘装置具有体积小,结构薄的大容量,包括主轴系统,致动器系统,用于控制系统的控制组件和PCMCIA连接器。 主轴系统是内嵌式结构,其中两个磁盘在磁盘的内径部分中旋转。 致动器系统具有安装用于向磁盘,引导臂和悬架结构写入和读取磁信息的磁头的滑块。 悬架结构还包括线圈,用于与线圈相配合的驱动力的磁路,用于支撑线圈的线圈架,用于摆动引导臂的枢轴套筒,线圈夹持器和间隔件,它们被整体层合到每个 其他轴承和枢轴。 PCMCIA连接器连接到控制包,并由外壳和包装盖固定。
    • 100. 发明授权
    • Magnetic disk storage system
    • 磁盘存储系统
    • US5414591A
    • 1995-05-09
    • US868421
    • 1992-04-15
    • Hideyuki KimuraTsuyoshi TakahashiTomio SuzukiToshio OhdairaKouki UefuneYuji Nishimura
    • Hideyuki KimuraTsuyoshi TakahashiTomio SuzukiToshio OhdairaKouki UefuneYuji Nishimura
    • G06F1/20G11B33/14H05K7/20
    • H05K7/20736G06F1/20G11B33/142
    • A magnetic disk storage system in which magnetic disk drives can be cooled effectively, and even if a blast device for one of he magnetic disk drives fall into trouble or cease operation, a temperature rise of this magnetic disk drive can be suppressed to the minimum. For this purpose, in the magnetic disk storage system containing a plurality of magnetic disk drives, blase devices ae provided for each of the disk drives, and the disk drives are separated by partitions in which openings are formed so that the cooling air can be passed between adjacent magnetic disk drives. With this structure, even if a blast device for a certain magnetic disk drive is out of order or stopped, a part of the cooling air from a blase device for the adjacent disk drives flows into the magnetic disk drive in question through the openings formed in the partitions, and consequently, the temperature rise of the magnetic disk drive whose blase device ceases operation can be suppressed to the minimum, to thereby enhance the reliability of the magnetic disk storage system.
    • 可以有效地冷却磁盘驱动器的磁盘存储系统,即使其中一个磁盘驱动器的鼓风装置出现故障或停止运行,也可以将该磁盘驱动器的升温最小化。 为此,在包含多个磁盘驱动器的磁盘存储系统中,为每个磁盘驱动器提供blase设备,并且磁盘驱动器被分隔开,其中形成有开口的分区,使得冷却空气可以通过 在相邻的磁盘驱动器之间。 利用这种结构,即使用于某个磁盘驱动器的鼓风装置出现故障或停止,来自用于相邻磁盘驱动器的闪光装置的一部分冷却空气通过形成在所述磁盘驱动器中的开口流入所述磁盘驱动器 因此,可以将分隔部,因此能够将消除装置停止运转的磁盘驱动器的温度上升抑制到最小限度,从而提高磁盘存储系统的可靠性。