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    • 92. 发明申请
    • COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND STORAGE MEDIUM
    • 涂料和开发设备,涂料和开发方法和储存介质
    • US20090299515A1
    • 2009-12-03
    • US12427123
    • 2009-04-21
    • Tomohiro KanekoTakeshi Matsumoto
    • Tomohiro KanekoTakeshi Matsumoto
    • G05B19/406B65G35/00
    • H01L21/67288G05B2219/37224H01L21/67276
    • When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.
    • 当产品基板通过在传送路径中的检查模块前方的第n个模块的参考模块时,将用于对产品基板所属的批次进行检查的检查预约信号输出到检查模块。 当检查模块处于故障状态时,禁止输出用于产品基板的检查预约信号,并且要传送到检查模块的产品基板以转移顺序传送到检查模块旁边的模块。 当检查模块的故障已经解决,并且用于确认检查的基板优先地传送到检查模块时,输出用于确认检查的基板的检查预约信号,用于确认检查的基板被传送到检查模块,并且 执行检查模块的确认检查。