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    • 92. 发明授权
    • Method for fabricating a MOS device
    • MOS器件的制造方法
    • US6110787A
    • 2000-08-29
    • US391886
    • 1999-09-07
    • Lap ChanTing Cheong AngShyue Pong QuekSang Yee Loong
    • Lap ChanTing Cheong AngShyue Pong QuekSang Yee Loong
    • H01L21/336H01L21/762H01L29/417H01L29/423
    • H01L29/41775H01L21/76224H01L29/41783H01L29/6659H01L29/66628H01L29/78
    • A method of fabricating a MOS device having raised source/drain, raised isolation regions having isolation spacers, and a gate conductor having gate spacers is achieved. A layer of gate silicon oxide is grown over the surface of a semiconductor structure. A polysilicon layer is deposited overlying the gate silicon oxide layer. The polysilicon layer, gate silicon oxide layer and semiconductor structure are patterned and etched to form trenches. The trenches are filled with an isolation material to at least a level even with a top surface of the polysilicon layer to form raised isolation regions. The remaining polysilicon layer is patterned to remove polysilicon adjacent the raised isolation regions forming a gate conductor between the raised isolation regions. The gate conductor and the raised isolation regions having exposed sidewalls. The gate oxide layer between the gate conductor and raised isolation regions is removed. Isolation spacers are formed on the exposed sidewalls of the raised isolation regions and gate spacers are formed on the exposed sidewalls of the gate conductor. A layer of silicon is deposited and patterned to form raised source and drain adjacent the gate spacers with source and drain being doped to form a MOS device.
    • 实现了具有升高的源极/漏极,具有隔离间隔物的升高的隔离区域以及具有栅极间隔物的栅极导体的MOS器件的制造方法。 在半导体结构的表面上生长栅极氧化硅层。 沉积覆盖栅氧化硅层的多晶硅层。 对多晶硅层,栅极氧化硅层和半导体结构进行图案化和蚀刻以形成沟槽。 沟槽用隔离材料填充至少甚至具有多晶硅层的顶表面的水平以形成凸起的隔离区域。 将剩余的多晶硅层图案化以去除在凸起的隔离区域之间形成栅极导体的凸起的隔离区域附近的多晶硅。 栅极导体和凸起的隔离区域具有暴露的侧壁。 去除栅极导体与升高隔离区之间的栅极氧化层。 在凸起的隔离区域的暴露的侧壁上形成绝缘间隔物,并且栅极间隔物形成在栅极导体的暴露的侧壁上。 沉积一层硅并图案化以形成与栅极间隔物相邻的凸起源极和漏极,源极和漏极被掺杂以形成MOS器件。
    • 94. 发明授权
    • Application of fast etching glass for FED manufacturing
    • 快速蚀刻玻璃在FED制造中的应用
    • US5893787A
    • 1999-04-13
    • US805877
    • 1997-03-03
    • Lap ChanSimon Chooi
    • Lap ChanSimon Chooi
    • H01J9/02
    • H01J9/025
    • The microtip housing cavity in a cold cathode display was formed by selecting for the dielectric layer surrounding it a material whose etch rate (for the same etchant) was 3 to 20 times faster than the etch rate of the gate layer. Specifically, a gaseous etchant that included CHF.sub.3, CH.sub.4, CO, or CO and C.sub.4 F.sub.8 was used to form the cavity in a layer consisting of silicon oxide containing between about 3 and 10 weight % boron and between about 3 and 10 weight % phosphorus, deposited by chemical vapor deposition at pressures somewhat less than atmospheric (commonly referred to as SABPSG or sub-atmospheric boro-phosphosilicate glass). The gate layer consisted of phosphorus-doped polysilicon. Using this combination, once the gate opening had been etched, etching of the cavity proceeded very rapidly with little increase in the width of the gate opening. Thus the cavity was formed in a single mask, single etchant process.
    • 冷阴极显示器中的微尖端壳体腔通过选择围绕其的介电层形成,其蚀刻速率(相同蚀刻剂)的蚀刻速率比栅极层的蚀刻速率快3至20倍。 具体地,使用包括CHF 3,CH 4,CO或CO和C 4 F 8的气体蚀刻剂在由含有约3至10重量%硼和约3至10重量%磷之间的氧化硅组成的层中形成空腔, 通过化学气相沉积在小于大气压(通常称为SABPSG或次大气硼硅磷酸盐玻璃)的压力下沉积。 栅极层由磷掺杂多晶硅组成。 使用这种组合,一旦栅极开口被蚀刻,腔的蚀刻就非常迅速地进行,门开口的宽度几乎没有增加。 因此,腔形成在单个掩模中,单一蚀刻过程。
    • 95. 发明授权
    • Methods for gap fill and planarization of intermetal dielectrics
    • 间隙填充和金属间电介质平面化方法
    • US5858870A
    • 1999-01-12
    • US767008
    • 1996-12-16
    • Jai Zhen ZhengSimon Yew-Meng ChooiLap Chan
    • Jai Zhen ZhengSimon Yew-Meng ChooiLap Chan
    • H01L21/314H01L21/318H01L21/768H01L21/283
    • H01L21/76819H01L21/3144H01L21/318H01L21/3185
    • An improved method of gap filling and planarization in the dielectric layer by combining an anti-reflective coating with a CMP etch stop is described. Semiconductor device structures are provided in and on a semiconductor substrate. A conducting layer is deposited overlying the surfaces of the semiconductor device structures. A hard mask is deposited overlying the conducting layer wherein the hard mask acts as an anti-reflective coating. The conducting layer and the hard mask are patterned to form conducting lines wherein a gap is formed between the conducting lines. A first dielectric layer is deposited over the surfaces of the conducting lines wherein the gap remains between the conducting lines. A second dielectric layer is deposited overlying the first dielectric layer wherein the gap is filled by the second dielectric layer. The first and second dielectric layers are planarized wherein the hard mask acts as an etch stop or a polish stop. A third dielectric layer is deposited over the planarized first and second dielectric layers completing the fabrication of the integrated circuit device.
    • 描述了通过将抗反射涂层与CMP蚀刻停止层组合来改善介电层中间隙填充和平坦化的方法。 半导体器件结构设置在半导体衬底中和半导体衬底上。 导电层沉积在半导体器件结构的表面上。 覆盖导电层的硬掩模被沉积,其中硬掩模用作抗反射涂层。 导电层和硬掩模被图案化以形成导线,其中在导线之间形成间隙。 第一介电层沉积在导线的表面上,其中间隙保留在导线之间。 沉积第二介电层,覆盖第一介电层,其中间隙由第二介电层填充。 第一和第二电介质层被平坦化,其中硬掩模用作蚀刻停止或抛光停止。 第三介电层沉积在平坦化的第一和第二介电层上,完成了集成电路器件的制造。
    • 96. 发明授权
    • Method of making self-aligned silicide narrow gate electrodes for field
effect transistors having low sheet resistance
    • 制造具有低薄层电阻的场效应晶体管的自对准硅化物窄栅电极的方法
    • US5731239A
    • 1998-03-24
    • US787193
    • 1997-01-22
    • Harianto WongKin Leong PeyLap Chan
    • Harianto WongKin Leong PeyLap Chan
    • H01L21/28H01L21/336
    • H01L29/66507H01L21/28052H01L29/665H01L29/6659H01L29/66545
    • A method for making low sheet resistance sub-quarter-micrometer gate electrode lengths on field effect transistors has been achieved. The method involves patterning gate electrodes on a silicon substrate from a conductively doped polysilicon layer having a silicon nitride layer on the surface. After forming the FET lightly doped drains (LDD), the sidewall spacers, and the heavily doped source/drain contact regions with titanium contacts, an insulating layer is chemically/mechanically polished back to the silicon nitride or silicon oxynitride on the gate electrode layer to form a planar self-aligning mask. A pre-amorphizing implantation is carried out, and a titanium silicide is selectively formed on the gate electrodes resulting in small grain sizes and much reduced sheet resistance. The self-aligned mask prevents ion implant damage to the shallow source/drain regions adjacent to the FET gate electrodes. A second embodiment uses the self-aligned mask to form selectively a cobalt silicide on the polysilicon gate electrodes for low sheet resistance, while preventing the cobalt silicide from reacting with the adjacent titanium silicide source/drain regions.
    • 已经实现了在场效应晶体管上制造低薄层电阻亚四分之一微米栅电极长度的方法。 该方法包括从表面上具有氮化硅层的导电掺杂多晶硅层在硅衬底上图案化栅电极。 在形成FET轻掺杂漏极(LDD),侧壁间隔物和具有钛触点的重掺杂源极/漏极接触区域之后,绝缘层被化学/机械地抛光回到栅极电极层上的氮化硅或氮氧化硅,至 形成平面自对准掩模。 进行预非晶化注入,并且在栅电极上选择性地形成硅化钛,导致小的晶粒尺寸和大大降低的薄层电阻。 自对准掩模防止离子注入损坏与FET栅电极相邻的浅源/漏区。 第二实施例使用自对准掩模在多晶硅栅电极上选择性地形成钴硅化物,用于低电阻,同时防止钴硅化物与相邻的硅化钛源极/漏极区发生反应。
    • 97. 发明授权
    • Content management systems and methods
    • 内容管理系统和方法
    • US09015629B2
    • 2015-04-21
    • US13661687
    • 2012-10-26
    • Lap Chan
    • Lap Chan
    • G06F3/048G06F3/0481G06F3/0482G06F3/0486G06F3/0488H04M1/725
    • G06F3/04817G06F3/0482G06F3/0486G06F3/04886H04M1/72519
    • Example systems and methods of managing content are described. In one implementation, a method accesses a first set of data, a second set of data, and menu data. The menu data is associated with multiple menu actions relevant to the first set of data and the second set of data. The method generates display data that allows a display device to present the first set of data, the second set of data, and the menu to a user such that the menu is positioned between the first set of data and the second set of data. The method receives a user selection of a menu action and, based on the user selection, generates a graphical object that allows the user to indicate whether to apply the selected menu action to the first set of data or the second set of data.
    • 描述了管理内容的示例系统和方法。 在一个实现中,一种方法访问第一组数据,第二组数据和菜单数据。 菜单数据与与第一组数据和第二组数据相关的多个菜单操作相关联。 该方法产生允许显示设备向用户呈现第一组数据,第二组数据和菜单的显示数据,使得菜单位于第一组数据和第二组数据之间。 该方法接收菜单动作的用户选择,并且基于用户选择,生成允许用户指示是否将所选择的菜单动作应用于第一组数据或第二组数据的图形对象。