会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 94. 发明授权
    • Apparatus and method for thin film deposition
    • 用于薄膜沉积的装置和方法
    • US08092598B2
    • 2012-01-10
    • US10559944
    • 2005-07-20
    • Yong-Ku BaekSeung-Hoon Lee
    • Yong-Ku BaekSeung-Hoon Lee
    • C23C16/00
    • C23C16/45551C23C16/4412C23C16/45574C23C16/45589C23C16/509C30B25/14H01J2237/332
    • Disclosed herein is a thin film deposition apparatus having a reaction chamber for forming a thin film on a plurality of substrates rested on a susceptor. The apparatus comprises: a gas supply means for supplying a plurality of gases to the inside of the reaction chamber from the outside, the gases including a reaction gas; a gas distribution means for distributing and spraying the gases supplied from the gas supply means so as to conform to the purpose of a process; a gas retaining means having a plurality of reaction cells for partitionally accommodating and retaining the respective gases distributed from the gas distribution means; a rotation driving means for rotating the gas retaining means such that the gases retained in the respective reaction cells are exposed to the substrates in sequence; and a gas exhaust means for pumping the gases retained by the gas retaining means to the outside of the reaction chamber.
    • 本文公开了一种薄膜沉积设备,其具有用于在搁置在基座上的多个基板上形成薄膜的反应室。 该装置包括:从外部向反应室内部供给多个气体的气体供给装置,所述气体包括反应气体; 气体分配装置,用于分配和喷射从气体供应装置供应的气体以符合工艺的目的; 气体保持装置,具有多个用于部分地容纳和保持从气体分配装置分配的各种气体的反应池; 旋转驱动装置,用于旋转气体保持装置,使得保留在各个反应池中的气体依次暴露于基板; 以及用于将由气体保持装置保留的气体泵送到反应室外部的排气装置。
    • 98. 发明授权
    • Capacitor and capacitor array
    • 电容器和电容器阵列
    • US07560796B2
    • 2009-07-14
    • US11634752
    • 2006-12-06
    • Eun-Seok ShinHee-Cheol ChoiSeung-Hoon LeeKyung-Hoon LeeYoung-Jae Cho
    • Eun-Seok ShinHee-Cheol ChoiSeung-Hoon LeeKyung-Hoon LeeYoung-Jae Cho
    • H01L29/00
    • H01L27/0805H01L23/5223H01L2924/0002H01L2924/00
    • In a capacitor and a capacitor array configured for reducing an effect of parasitic capacitance, the capacitor array can have a matrix configuration that includes a plurality of unit capacitors. The unit capacitors include a lower electrode and an upper electrode that constitute a plate capacitor, as well as shielding structures which enclose the capacitor. The unit capacitors are connected by an upper electrode connecting line with a first direction to constitute a plurality of capacitor columns, wherein the unit capacitors are also arranged in rows, in a second direction perpendicular to the first direction, and wherein lower electrode lead lines are disposed between the capacitor columns, the lower electrode lead lines being connected to the respective lower electrodes of each of the unit capacitors.
    • 在用于减小寄生电容的影响的电容器和电容器阵列中,电容器阵列可以具有包括多个单位电容器的矩阵配置。 单元电容器包括构成平板电容器的下电极和上电极以及围绕电容器的屏蔽结构。 单元电容器通过上电极连接线与第一方向相连,以构成多个电容器列,其中单元电容器也沿垂直于第一方向的第二方向排列成行,并且其中下电极引线为 设置在电容器柱之间,下部电极引线与每个单位电容器的各个下部电极连接。