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91. 发明申请

US20070040118A1 Method and apparatus for scanning and measurement by electron beam 有权
标题翻译：电子束扫描和测量的方法和装置
公开(公告)号：US20070040118A1
公开(公告)日：2007-02-22
申请号：US11503997
申请日：2006-08-15
申请人： Zhaohui Cheng , Hiroshi Makino , Hikaru Koyama , Mitsugu Sato
发明人： Zhaohui Cheng , Hiroshi Makino , Hikaru Koyama , Mitsugu Sato
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： G01N23/2251 , G01R31/307 , H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/0047 , H01J2237/0048 , H01J2237/2816 , H01J2237/2817
摘要： A inspecting and measurement method and inspecting and measurement apparatus for semiconductor devices and patterns such as photomasks using an electron beam which can measure the charged potential of a sample with higher precision than in the prior art, and a inspecting and measurement apparatus which can measure charged potential by means of a simple construction. When an S curve is observed in a semiconductor device to be inspectioned and measured, fluctuations of the charged potential of the inspection sample surface are suppressed by optimizing the energy of a primary electron beam used for irradiation. When the surface potential of the semiconductor device is measured, a more precise potential measurement than that of the prior art can be performed which is almost unaffected by the charged potential of an insulation film surface. Further, the surface potential can be measured without installing a special apparatus for wafer surface potential measurement such as an energy filter, so the cost of the apparatus can be reduced.
摘要翻译：使用电子束的半导体器件和图案的检查和测量方法和检查和测量装置，其可以测量比现有技术更高精度的样品的带电电位的电子束，以及可以测量充电的检查和测量装置通过简单的构造来实现潜力。当在要检查和测量的半导体器件中观察到S曲线时，通过优化用于照射的一次电子束的能量来抑制检查样品表面的带电电位的波动。当测量半导体器件的表面电位时，可以进行比现有技术更精确的电位测量，其几乎不受绝缘膜表面的带电电位的影响。此外，可以在不安装诸如能量过滤器的晶片表面电位测量的专用装置的情况下测量表面电位，因此可以降低装置的成本。

92. 发明申请

US20060262628A1 Semiconductor memory device 有权
公开(公告)号：US20060262628A1
公开(公告)日：2006-11-23
申请号：US11438668
申请日：2006-05-23
申请人： Koji Nii , Shigeki Obayashi , Hiroshi Makino , Koichiro Ishibashi , Hirofumi Shinohara
发明人： Koji Nii , Shigeki Obayashi , Hiroshi Makino , Koichiro Ishibashi , Hirofumi Shinohara
IPC分类号： G11C5/14
CPC分类号： G11C11/419 , G11C5/063 , G11C11/412
摘要： Cell power supply lines are arranged for memory cell columns, and adjust impedances or voltage levels of the cell power supply lines according to the voltage levels of bit lines in the corresponding columns, respectively. In the data write operation, the cell power supply line is forced into a floating state according to the bit line potential on a selected column and has the voltage level changed, and a latching capability of a selected memory cell is reduced to write data fast. Even with a low power supply voltage, a static semiconductor memory device that can stably perform write and read of data is implemented.

93. 发明授权

US06897172B2 Dielectric ceramic composition and dielectric ceramics 有权
标题翻译：介电陶瓷组合物和电介质陶瓷
公开(公告)号：US06897172B2
公开(公告)日：2005-05-24
申请号：US10350901
申请日：2003-01-23
申请人： Tatsuji Furuse , Seiichiro Hirahara , Shuji Nakazawa , Yasushi Ode , Tomoyuki Kojima , Fumiaki Sekine , Hiroshi Makino , Manabu Yonekura
发明人： Tatsuji Furuse , Seiichiro Hirahara , Shuji Nakazawa , Yasushi Ode , Tomoyuki Kojima , Fumiaki Sekine , Hiroshi Makino , Manabu Yonekura
IPC分类号： C03C8/20 , C03C10/04 , C04B35/22 , C04B35/465 , C03C14/00
CPC分类号： C04B35/22 , C03C8/20 , C04B35/465 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3234 , C04B2235/3236 , C04B2235/3239 , C04B2235/3241 , C04B2235/3244 , C04B2235/3248 , C04B2235/3255 , C04B2235/3256 , C04B2235/3258 , C04B2235/3262 , C04B2235/3267 , C04B2235/3272 , C04B2235/3275 , C04B2235/3277 , C04B2235/3279 , C04B2235/3281 , C04B2235/3284 , C04B2235/3289 , C04B2235/3291 , C04B2235/3418 , C04B2235/3427 , C04B2235/3463 , C04B2235/3481 , C04B2235/36 , C04B2235/5436 , C04B2235/6025 , C04B2235/656 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2235/9661
摘要： The present invention provides a dielectric ceramic composition comprising: 30 to 90% by weight of a crystallized glass powder capable of depositing a diopside crystal, 1 to 40% by weight of a calcium titanate powder, a strontium titanate powder or a mixed powder thereof, and 0 to 60% by weight of at least one kind of a powder selected from the group consisting of Al2O3, TiO2, ZrO2, MgTiO3, BaTi4O9, La2Ti2O7, Nd2Ti2O7, Ca2Nb2O7, SrZrO3 and CaZrO3, and a dielectric ceramics obtained by firing the same.
摘要翻译：本发明提供一种电介质陶瓷组合物，其包含：30〜90重量％的能够沉积透辉石结晶的结晶玻璃粉末，1〜40重量％的钛酸钙粉末，钛酸锶粉末或其混合粉末，和0至60重量％的至少一种选自下组的粉末：Al 2 O 3，TiO 2， ZrO 2，MgTiO 3，BaTi 4 O 9，La 2 Ti， N 2，N 2，N 2，N 2，O 2，C 2 Nb 2 O 3，SrZrO 3和CaZrO 3 3，以及通过烧结获得的电介质陶瓷一样。

94. 发明授权

US06888138B2 Absorption current image apparatus in electron microscope 有权
标题翻译：吸收电流图像设备在电子显微镜下
公开(公告)号：US06888138B2
公开(公告)日：2005-05-03
申请号：US10868907
申请日：2004-06-17
申请人： Takashi Ohshima , Hiroshi Makino , Hiroshi Toyama , Hiroyuki Shinada
发明人： Takashi Ohshima , Hiroshi Makino , Hiroshi Toyama , Hiroyuki Shinada
IPC分类号： G01N23/225 , G01Q30/02 , H01J37/04 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2605
摘要： It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.
摘要翻译：传统的扫描电镜很难在高速下进行测量，并且当物体与探针和检测器之间存在绝缘体时进行精确的测量，因为传统的扫描电镜使用连续的电子束。此外，在测量电流期间不可能对样品施加电压。通过脉冲调制电子束并从样品中提取高频信号分量，本文公开的新的SEM设备以高速和精确的方式检测样品中吸收的电子。可以实现精确和高速吸收电流测量。可以提供高功能检查装置。

95. 发明申请

US20050051722A1 Inspection system, inspection method, and process management method 有权
标题翻译：检验制度，检验方法和流程管理方法
公开(公告)号：US20050051722A1
公开(公告)日：2005-03-10
申请号：US10885725
申请日：2004-07-08
申请人： Hiroshi Makino , Hisaya Murakoshi , Hiroyuki Shinada , Hideo Todokoro
发明人： Hiroshi Makino , Hisaya Murakoshi , Hiroyuki Shinada , Hideo Todokoro
IPC分类号： G01B15/00 , G01B15/08 , G01N23/04 , G01N23/225 , H01J37/21 , H01J37/22 , H01J37/29 , H01L21/66 , G01N23/00
CPC分类号： H01J37/292 , G01N23/04 , H01J2237/2817
摘要： The present invention relates to an inspection apparatus comprising: an electron emitting unit for sequentially emitting an electron beam in the direction of the inspection area of a sample; a decelerating means for drawing back the electron beam in the vicinity of the inspection area; an imaging unit for forming images of the electron beam, which has been drawn back in the vicinity of the inspection area, on multiple different image forming conditions; an image detecting unit for capturing the electron beam that formed an image corresponding to each image forming condition and an image processing unit for comparing the images on different image forming conditions with one another to thereby detect a defect in the inspection area.
摘要翻译：本发明涉及一种检查装置，包括：电子发射单元，用于沿样本的检查区域的方向依次发射电子束; 用于在检查区域附近拉回电子束的减速装置; 用于在多个不同的图像形成条件下形成已经被拉回到检查区域附近的电子束的图像的成像单元; 用于捕获形成与每个图像形成条件相对应的图像的电子束的图像检测单元和用于将不同图像形成条件上的图像彼此进行比较的图像处理单元，从而检测检查区域中的缺陷。

96. 发明申请

US20050045820A1 ABSORPTION CURRENT IMAGE APPARATUS IN ELECTRON MICROSCOPE 有权
标题翻译：电子显微镜中的吸收电流图像装置
公开(公告)号：US20050045820A1
公开(公告)日：2005-03-03
申请号：US10868907
申请日：2004-06-17
申请人： Takashi Ohshima , Hiroshi Makino , Hiroshi Toyama , Hiroyuki Shinada
发明人： Takashi Ohshima , Hiroshi Makino , Hiroshi Toyama , Hiroyuki Shinada
IPC分类号： G01N23/225 , G01Q30/02 , H01J37/04 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2605
摘要： It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.
摘要翻译：传统的扫描电镜很难在高速下进行测量，并且当物体与探针和检测器之间存在绝缘体时进行精确的测量，因为传统的扫描电镜使用连续的电子束。此外，在测量电流期间不可能对样品施加电压。通过脉冲调制电子束并从样品中提取高频信号分量，本文公开的新的SEM设备以高速和精确的方式检测样品中吸收的电子。可以实现精确和高速吸收电流测量。可以提供高功能检查装置。

97. 发明授权

US06635935B2 Semiconductor device cell having regularly sized and arranged features 有权
标题翻译：具有规则尺寸和布置特征的半导体器件单元
公开(公告)号：US06635935B2
公开(公告)日：2003-10-21
申请号：US09818907
申请日：2001-03-28
申请人： Hiroshi Makino
发明人： Hiroshi Makino
IPC分类号： H01L2976
CPC分类号： H01L27/11807 , H01L27/088
摘要： In a semiconductor device, first gate electrodes contributing to transistor operations and second gate electrodes not contributing to the transistor operations each have the same gate length, share the common gate length direction, and are arranged in the same pitch. The first gate electrodes and the second gate electrodes are all made to extend, in the gate width direction, beyond the longest active region width. With such a configuration, it is possible to provide a semiconductor device having a pattern structure that will not cause performance degradation of transistors when designing a semiconductor integrated circuit within a semiconductor device.
摘要翻译：在半导体器件中，有助于晶体管操作的第一栅极电极和对晶体管操作无贡献的第二栅电极各具有相同的栅极长度，共享公共栅极长度方向，并以相同的间距排列。第一栅极电极和第二栅极电极都在栅极宽度方向上延伸超过最长有效区域宽度。通过这样的结构，可以提供一种半导体器件，其具有在半导体器件内设计半导体集成电路时不会引起晶体管性能劣化的图案结构。

98. 发明授权

US06525587B2 Semiconductor integrated circuit device including a clock synchronous type logical processing circuit 失效
标题翻译：包括时钟同步型逻辑处理电路的半导体集成电路器件
公开(公告)号：US06525587B2
公开(公告)日：2003-02-25
申请号：US10086874
申请日：2002-03-04
申请人： Hiroshi Makino
发明人： Hiroshi Makino
IPC分类号： H03K3013
CPC分类号： G06F1/10
摘要： A first circuit group for generating a dock signal, and a second circuit group for carrying out a transferring operation and a logical processing operation on a signal in accordance with this clock signal are arranged, and operation voltage sources of these circuit groups are made individually settable. Thus, the operation speeds of the first circuit group and the second circuit group are individually adjusted so as to eliminate a problem of an erroneous operation due to a racing through an operation. An erroneous operation due to a racing caused by dock skew can be reliably prevented through an external operation.
摘要翻译：布置了用于产生停靠信号的第一电路组和用于对根据该时钟信号的信号执行转移操作和逻辑处理操作的第二电路组，并且使这些电路组的工作电压源单独设置。因此，分别调整第一电路组和第二电路组的操作速度，从而消除由于通过操作的竞赛而导致的错误操作的问题。可以通过外部操作可靠地防止由于由歪斜引起的赛车引起的错误操作。

99. 发明授权

US06375589B1 Roller chain sprocket 失效
标题翻译：滚子链轮
公开(公告)号：US06375589B1
公开(公告)日：2002-04-23
申请号：US09515106
申请日：2000-02-29
申请人： Hiroshi Makino , Hidetsugu Terada
发明人： Hiroshi Makino , Hidetsugu Terada
IPC分类号： F16H700
CPC分类号： F16H55/30 , F16H7/06
摘要： An improved chain drive mechanism having a closed loop of roller chain passing round the opposite sprocket wheels. The profile of each tooth formed on the circumference of the sprocket wheel is in conformity with the envelope curve traced by a roller when the roller moves with its center following an involute-trochoid curve. The involute-trochoid curve is determined by offsetting the roller pitch line a certain distance apart outside the contact pitch line, and by rotating the contact pitch line on the base circle of the sprocket wheel to allow a point on the roller pitch line to trace a curve. The certain distance is so determined that the roller pitch may be equal to the incremental arc length, which is determined by dividing the circumference of the base circle by the number of teeth.
摘要翻译：一种改进的链条驱动机构，其具有围绕相对的链轮的滚子链的闭合回路。形成在链轮圆周上的每个齿轮的轮廓与当辊以其渐开线 - 摆线曲线为中心移动时由辊跟踪的包线曲线一致。渐开线 - 副曲线曲线是通过将滚子间距线偏离接触线间外一定距离来确定的，并且通过使链轮的基圆上的接触节距线旋转，以允许滚轮节距线上的点跟踪曲线。一定距离被确定为滚子间距可以等于增加的弧长，其通过将基圆的周长除以齿数来确定。

100. 发明授权

US06278303B1 Semiconductor device that can have standby current reduced by ceasing supply of clock signal, and that can maintain status of internal circuit 失效
标题翻译：半导体器件可以通过停止时钟信号的供应来减少待机电流，并且可以保持内部电路的状态
公开(公告)号：US06278303B1
公开(公告)日：2001-08-21
申请号：US09437739
申请日：1999-11-10
申请人： Jingo Nakanishi , Hiroshi Makino , Tsutomu Yoshimura
发明人： Jingo Nakanishi , Hiroshi Makino , Tsutomu Yoshimura
IPC分类号： H03L706
CPC分类号： G06F1/3237 , G06F1/3203 , H03L7/0802 , H03L7/0891 , H03L7/0995 , Y02D10/128 , Y02D50/20
摘要： A clock circuit is provided including a clock supply circuit that can cease clock supply according to a control signal, a PLL circuit maintaining clock synchronization, and a dummy circuit. Synchronization of the internal clock signal is maintained by the PLL circuit and the dummy circuit even in a standby state. In returning to an active state from a standby state, an unstable clock signal arising from unstable locking of the PLL circuit will not be applied to the internal circuit. Therefore, the information in the latch circuit in the internal circuit can be maintained.
摘要翻译：提供了一种时钟电路，包括可以根据控制信号停止时钟供给的时钟供应电路，保持时钟同步的PLL电路和虚拟电路。即使处于待机状态，PLL电路和虚拟电路仍保持内部时钟信号的同步。在从待机状态返回到活动状态时，由PLL电路不稳定锁定引起的不稳定的时钟信号不会被施加到内部电路。因此，可以保持内部电路中的锁存电路中的信息。

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