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    • 93. 发明授权
    • Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device
    • 临界尺寸扫描电子显微镜装置精细图案检测装置及方法及管理装置及方法
    • US06642519B2
    • 2003-11-04
    • US10254664
    • 2002-09-26
    • Takahiro Ikeda
    • Takahiro Ikeda
    • G01N23225
    • G06T7/0004G01N23/2206G01N23/2251G06T2207/10056G06T2207/30148H01J2237/221H01J2237/2817
    • A fine pattern inspection apparatus includes: a first calculation unit which receives data of a first secondary electron signal obtained by irradiating a plurality of test patterns formed on a test substrate with an electron beam and receives data of an contour shape of a cross-section of each of the test patterns, the test substrate being the same as a substrate on which a pattern to be inspected is formed, the test patterns being formed with different cross-sectional shapes, and which separates the first secondary electron signal into variables of a first function containing the contour shape of the cross-section as arguments, a second function that is defined by a step function depending on respective materials constituting the test patterns and a third function that represents the size of a distortion of the signal; a storing unit which has a first storing area to store the first through third functions obtained from the first calculation unit; and a second calculation unit which receives data of a second secondary electron signal obtained by irradiating the pattern to be inspected with an electron beam, and executes calculations so as to extract components relating to the cross-sectional shape of the pattern to be inspected from the second secondary electron signal by using the first through third functions stored in the storing unit.
    • 精细图案检查装置包括:第一计算单元,其接收通过用电子束照射形成在测试基板上的多个测试图案而获得的第一二次电子信号的数据,并接收横截面的轮廓形状的数据 每个测试图案,测试基板与其上形成有待检查图案的基板相同,测试图案形成为不同的横截面形状,并且将第一二次电子信号分离成第一 功能,其包含横截面的轮廓形状作为参数,根据构成测试图案的各种材料的阶梯函数定义的第二函数和表示信号的失真大小的第三函数; 存储单元,具有用于存储从第一计算单元获得的第一至第三功能的第一存储区域; 以及第二计算单元,其接收通过用电子束照射被检查的图案而获得的第二二次电子信号的数据,并且执行计算,以便从所述检查的图案的截面形状提取与 通过使用存储在存储单元中的第一至第三功能来产生第二二次电子信号。
    • 97. 发明授权
    • Cell observation device and cell observation method
    • 细胞观察装置和细胞观察方法
    • US08873027B2
    • 2014-10-28
    • US13642027
    • 2011-04-13
    • Norikazu SugiyamaTakuji KataokaTakahiro Ikeda
    • Norikazu SugiyamaTakuji KataokaTakahiro Ikeda
    • G01B9/02G06T7/00G01N15/14G02B21/14C12M1/34G01N21/45
    • G01N21/45C12M41/46G01N15/1475G01N2021/451G02B21/14G06K9/0014G06K9/00147G06T7/0012G06T2207/10056G06T2207/30024
    • A cell observation device is provided with a reflection interference shutter 106A which adjusts a light quantity of light emitted from a reflection interference measurement light source 106, a quantitative phase shutter 105A which adjusts a light quantity of light emitted from a quantitative phase measurement light source, a camera 110 which images reflected light from the reflection interference measurement light source 106 to generate a reflection interference image and which images transmitted light from a quantitative phase measurement light source 105 to generate a quantitative phase image, and a first extraction unit 204 and a second extraction unit 205 which extract first and second parameters from the reflection interference image generated by the camera 110. During generation of the reflection interference image, the quantitative phase shutter 105A blocks the light from the quantitative phase measurement light source 105. During generation of the quantitative phase image, the reflection interference shutter 106A blocks the light from the reflection interference measurement light source 106.
    • 电池观察装置设置有反射干涉光圈106A,该反射干涉光圈106A调节从反射干涉测量光源106发射的光的光量,调节从定量相位测量光源发射的光的光量的定量相位快门105A, 对来自反射干涉测量光源106的反射光进行成像以产生反射干涉图像的摄像机110,以及来自定量相位测量光源105的透射光以产生定量相位图像的图像,以及第一提取单元204和第二 提取单元205,其从由相机110产生的反射干涉图像中提取第一和第二参数。在产生反射干涉图像期间,定量相位快门105A阻挡来自定量相位测量光源105的光。在定量 相位图像, 反射干涉光闸106A阻挡来自反射干涉测量光源106的光。
    • 98. 发明授权
    • Interchangeable lens and camera body
    • 可互换镜头和相机机身
    • US08649675B2
    • 2014-02-11
    • US13494405
    • 2012-06-12
    • Junji TakahataTakahiro Ikeda
    • Junji TakahataTakahiro Ikeda
    • G03B17/00G03B13/00H04N5/262G02B15/14G02B7/02
    • G03B17/14G03B17/18G03B2206/00H04N5/23209H04N5/23212H04N5/23296
    • An interchangeable lens mountable to a camera body includes a zoom lens configured to adjust an angle of view of a subject image, a driver configured to move the zoom lens in an optical axis direction, a plurality of operating members configured to generate an operation signal for driving the driver according to operation performed by a user, a communication unit configured to receive, from the camera body, setting information for setting valid/invalid of at least one of the plurality of operating members, and a controller configured to control the driver. The controller drives and does not drive the driver based on the operation signal from the operating member having been set to valid and invalid, respectively, by the setting information received through the communication unit.
    • 可安装到相机主体的可互换镜头包括被配置为调节被摄体图像的视角的变焦镜头,配置成沿光轴方向移动变焦镜头的驱动器,多个操作部件,其被配置为产生用于 根据用户执行的操作来驱动驾驶员;通信单元,被配置为从所述照相机主体接收用于设置所述多个操作构件中的至少一个的设置有效/无效的设置信息;以及控制器,其被配置为控制所述驾驶员。 控制器基于通过通信单元接收到的设置信息,分别基于已经被设置为有效和无效的操作构件的操作信号来驱动驱动器。
    • 100. 发明授权
    • Imaging apparatus
    • 成像设备
    • US08416333B2
    • 2013-04-09
    • US12869834
    • 2010-08-27
    • Yasunori NakaiTakahiro Ikeda
    • Yasunori NakaiTakahiro Ikeda
    • H04N5/222
    • H04N5/23293H04N5/2251
    • An imaging apparatus for capturing an image includes a first display unit, a second display unit capable of being in a set-in state in which the second display unit is set in a body of the imaging apparatus or a non-set-in state in which the second display unit is not set in the body of the imaging apparatus, a proximity sensor operable to sense proximity of an object, and a controller operable to allow the first display unit to display an image when the proximity sensor senses the proximity of the object, and allows the second display unit to display an image when the proximity sensor does not sense the proximity of the object. The controller controls a sensing function of the proximity sensor according to whether the second display unit is in the set-in state or the non-set-in state. For example, the proximity sensor may sense the proximity of the object when the object is continuously sensed for a predetermined sensing time or more. The controller may set the predetermined sensing time for the second display unit being in the non-set-in state to be longer than the predetermined sensing time for the second display unit being in the set-in state.
    • 一种用于拍摄图像的成像设备包括:第一显示单元,能够处于第二显示单元被设置在成像设备的主体中的设定状态或第二显示单元的未设定状态的第二显示单元 其中第二显示单元未设置在成像设备的主体中,可接近传感器可操作以感测物体的接近度;以及控制器,其可操作以允许第一显示单元在接近传感器感测到 并且当接近传感器不感测物体的接近时允许第二显示单元显示图像。 控制器根据第二显示单元是处于设置状态还是非设置状态来控制接近传感器的感测功能。 例如,当物体在预定的感测时间或更长时间连续感测时,接近传感器可以感测物体的接近度。 控制器可以将处于非设置状态的第二显示单元的预定感测时间设置为比第二显示单元处于置入状态的预定感测时间长。