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91. 发明专利

DE69832467T2 未知
公开(公告)号：DE69832467T2
公开(公告)日：2006-08-17
申请号：DE69832467
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F16K17/22 , G05D7/06 , F16K7/14 , F16K7/16 , G05D16/20
摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The pressure-type flow rate control apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q = KP1 (K = constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves as variable orifice wherein the gap is adjusted by the orifice drive.

92. 发明专利

DE69928047T2 未知
公开(公告)号：DE69928047T2
公开(公告)日：2006-07-13
申请号：DE69928047
申请日：1999-01-11
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , DOHI RYOUSUKE , MINAMI YUKIO , NISHINO KOUJI , KAWATA KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F16K31/06 , C01B5/00 , G05D7/06 , G05D11/13 , G05D21/00
摘要： A fluid feeding apparatus for use in a gas supply system as in semiconductor manufacturing facilities which permits high-precision control of the flow of fluid without causing transient overshooting phenomena of fluid at the start of fluid feeding or fluid changeover. The fluid feeding apparatus of the present invention comprises a pressure flow controller to regulate the flow of fluid, a fluid changeover valve to open and close the fluid passage on the secondary side of the pressure flow controller and a fluid feeding control unit to control the actuation of the pressure flow controller and the fluid changeover valve, said pressure flow controller including: an orifice 5, a control valve 1 provided on the upstream side of the orifice 5, a pressure detector 3 provided between the control valve 1 and the orifice 5 and a calculation control unit 6 which inputs in a drive 2 for said control valve 1 a difference between a flow rate signal Qc and a flow rate specifying signal Qs as control signal Qy, said flow rate signal Qc calculated with flow rate Qc = KP1 (K = constant) on the basis of a pressure P1 detected by the pressure detector 3, wherein the flow rate on the downstream side of the orifice 5 is controlled by regulating the pressure P1 on the upstream side of the orifice 5 through the opening and closing of said control valve 1.

93. 发明专利

DE69926971T2 未知
公开(公告)号：DE69926971T2
公开(公告)日：2006-06-08
申请号：DE69926971
申请日：1999-05-27
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , IKEDA NOBUKAZU , NISHINO KOUJI , YOSHIKAWA KAZUHIRO , IDETA EIJI , DOHI RYOUSUKE , UNO TOMIO , YAMAJI MICHIO
IPC分类号： F17D1/00 , G05D7/06 , G05D16/20

94. 发明专利

DE69735280D1 未知
公开(公告)号：DE69735280D1
公开(公告)日：2006-04-27
申请号：DE69735280
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K31/06 , F16K7/14 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

95. 发明专利

DE69832467D1 未知
公开(公告)号：DE69832467D1
公开(公告)日：2005-12-29
申请号：DE69832467
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F16K17/22 , G05D7/06 , G05D16/20 , F16K7/16 , F16K7/14
摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The pressure-type flow rate control apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q = KP1 (K = constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves as variable orifice wherein the gap is adjusted by the orifice drive.

96. 发明专利

CA2208765C SHUTOFF-OPENING DEVICES AND FLUID CONTROL APPARATUS COMPRISING SUCH DEVICES 未知
公开(公告)号：CA2208765C
公开(公告)日：2005-09-06
申请号：CA2208765
申请日：1997-06-24
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： HATANO MASAYUKI , OHMI TADAHIRO , YAMAJI MICHIO , IKEDA NOBUKAZU , YOKOYAMA KOSUKE , TANAKA SHIGEAKI
IPC分类号： F16K1/52 , F15B13/00 , F15B13/08 , F15C3/00 , F16K27/00 , G05D7/00 , G05D7/06 , F16K11/20 , F16K51/00
摘要： A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.

97. 发明专利

DE69825848T2 未知
公开(公告)号：DE69825848T2
公开(公告)日：2005-09-01
申请号：DE69825848
申请日：1998-06-12
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , MINAMI YUKIO , KAWADA KOJI , TANABE YOSHIKAZU , IKEDA NOBUKAZU , MORIMOTO AKIHIRO
IPC分类号： C01B5/00
摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.

98. 发明专利

CA2552782A1 METHOD FOR WATER HAMMER-LESS OPENING OF FLUID PASSAGE, CHEMICAL SUPPLY METHOD USING THE SAME, AND WATER HAMMER-LESS OPENING DEVICE 未知
公开(公告)号：CA2552782A1
公开(公告)日：2005-07-28
申请号：CA2552782
申请日：2005-01-13
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： IKEDA NOBUKAZU , NISHIMURA RYUTARO , OHMI TADAHIRO , NISHINO KOUJI , NAGASE MASAAKI , DOHI RYOUSUKE
IPC分类号： F16K47/00 , F16L55/04 , F16K47/02 , G05D16/20
摘要： It is possible to rapidly open a fluid passage in a short time by using a simple device and operation without causing a water hammer. A water hammer- less opening device includes: an actuator operating valve arranged on a flui d passage; an electropneumatic conversion device for supplying two-stage actuator operation pressure Pa to the actuator operating valve; a vibration sensor detachably fixed to the upstream side of the pipe of the actuator operating valve; and a tuning box for receiving a vibration detection signal Pr detected by the vibration sensor, outputting a control signal Sc for controlling the value of a step operation pressure Ps of the two-state actuator operating pressure Pa to the electropneumatic conversion device, an d outputting the two-stage actuator operation pressure Pa of the step operatio n pressure Ps~ at which the vibration detection signal Pr from the electropneumatic conversion device becomes almost zero by adjustment of the control signal Sc.

99. 发明专利

DE69912239T2 未知
公开(公告)号：DE69912239T2
公开(公告)日：2004-07-29
申请号：DE69912239
申请日：1999-08-09
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATOSHI , HIROSE JUN , NISHINO KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO , DOHI RYOUSUKE , YOSHIKAWA KAZUHIRO , KOYOMOGI MUTSUNORI , UNO TOMIO , IDETA EIJI , HIROSE TAKASHI
IPC分类号： G05D7/06 , F16K37/00
摘要： A method and apparatus for detection of the clogging of the orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow control unit and enhance its safety. To be specific, the apparatus of detecting the clogging of the orifice in a pressure-type rate flow controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween and a flow rate setting circuit (32) wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated from the equation QC = KP1 (K: constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS, the apparatus comprising: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL, with the orifice (2) not clogged a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSR to the low set flow rate QSL, with the orifice (2) in the actual conditions a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t) and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.

100. 发明专利

DE69815593T2 未知
公开(公告)号：DE69815593T2
公开(公告)日：2004-05-06
申请号：DE69815593
申请日：1998-05-05
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , YAMAJI MICHIO , SHINOHARA TSUTOMU , ITOI SHIGERU , HIRAO KEIJI , KAWANO YUJI , TANAKA SHIGEAKI , YOKOYAMA KOSUKE , MOROKOSHI HIROSHI , IKEDA NOBUKAZU
IPC分类号： F16L15/00 , F16K27/00 , F16L39/00 , F16L41/02 , F17D1/02 , F15B13/00 , F16L37/26
摘要： A coupling (104,80) comprises a holding member (40) having a U-shaped cross section, and a channel member (41,101) held by the holding member. The holding member (40) has an upper wall (81) formed with screw bores (84) for use in attaching the holding member to a fluid controller. The channel member (41,101) comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection (92) communicating with the inner channel of the body and having an upper end (92) inserted in a through bore (85) in the upper wall (81) of the holding member (41,101) to communicate with a downward channel of the fluid controller, and a tubular lateral projection (94) communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange (93), and the through bore of the upper wall of the holding member has an inward flange (85a) for supporting the flange.

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