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    • 91. 发明授权
    • Micromachined reflective light valve
    • 微加工反光灯
    • US06268948B1
    • 2001-07-31
    • US09337204
    • 1999-06-11
    • Daniel Gelbart
    • Daniel Gelbart
    • G02B2602
    • B41J2/445B41J2/465G02B26/0825Y10S359/90
    • A light valve which can be fabricated as an array of individually addressable micromachined linear mirror reflective light valves is disclosed. Each light valve may comprise a metallized silicon nitride ribbon situated above a micromachined cavity. Incident light is reflected by the ribbons. The reflected beam travels into an optical collecting system. The ribbons may be caused to deform into the micromachined cavities by the application of electrical signals. Only a small area on the ribbons is required to be reflective. The deformation causes light reflected by the deformed ribbon to be substantially collimated. The collimated reflected light can be directed through a slit and focussed on a spot to record a data element on a recording surface. A light valve array according to the invention may be used for various data recording applications including exposing printing plates, printed circuit boards, silicon wafers, masks for making semiconductor devices, optical data storage systems and the like.
    • 公开了一种可以被制造成可单独寻址的微加工线性镜反射光阀的阵列的光阀。 每个光阀可以包括位于微加工空腔之上的金属化氮化硅带。 入射光被丝带反射。 反射光束进入光学收集系统。 可能通过施加电信号使带状变形成微加工空腔。 丝带上只有一小部分需要反光。 变形导致由变形的带反射的光基本准直。 准直反射光可以通过狭缝引导并聚焦在一个点上,以将数据元素记录在记录表面上。 根据本发明的光阀阵列可以用于各种数据记录应用,包括曝光印版,印刷电路板,硅晶片,用于制造半导体器件的掩模,光学数据存储系统等。
    • 92. 发明授权
    • System for exposing photopolymer with light from compact movable light source
    • 用于从轻巧的可移动光源曝光光聚合物的系统
    • US06266134B1
    • 2001-07-24
    • US09477378
    • 2000-01-04
    • Daniel Gelbart
    • Daniel Gelbart
    • G03B2760
    • B29C35/0894B29C2035/0827B29C2035/0833B29L2031/767G03F7/2014
    • An exposure system for liquid photopolymer printing plates has a small movable illumination source. The illumination source moves to expose all of a photopolymer object, such as a printing plate being exposed. The area covered by the light source can be adjusted to match the area of the printing plate. The system does not require a large uniform source of illumination. The collimation of the light source is variable. This permits control over the cross sectional profile of exposed features in the photopolymer. Preferably a flat horizontal glass plate supported by air pressure supports the photopolymer being exposed. An optical sensor and a control system are used in preferred embodiments to keep the plate flat by controlling air pressure in an enclosure beneath the plate.
    • 液体光聚合物印版的曝光系统具有小的可移动照明光源。 照射源移动以暴露所有的光聚合物物体,例如暴露的印版。 可以调整光源所覆盖的区域以匹配印版的面积。 该系统不需要大的均匀的照明源。 光源的准直是可变的。 这允许控制光聚合物中暴露特征的横截面轮廓。 优选地,由空气压力支撑的扁平水平玻璃板支撑曝光的光聚合物。 在优选实施例中使用光学传感器和控制系统,以通过控制板下面的外壳中的空气压力来将板保持平坦。