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    • 92. 发明申请
    • TRANSPORT APPARATUS
    • 运输工具
    • US20100040447A1
    • 2010-02-18
    • US12564572
    • 2009-09-22
    • Kazuhiro MUSHAHirofumi MinamiKenji AgoTakashi AsaishiToshio Koike
    • Kazuhiro MUSHAHirofumi MinamiKenji AgoTakashi AsaishiToshio Koike
    • H01L21/68B25J9/00B25J18/02
    • B25J9/107B25J9/042B25J9/102B25J9/104H01L21/67742Y10T74/20305
    • A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.
    • 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中,由于第一旋转轴和第二旋转轴同心地配置,所以装置的安装面积小,死角逸出机构的结构简单。 由于可以使手部的连接部分变薄,所以可以减少插入手部的闸阀的开口。 结果,传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度,但是即使其长度不同,该装置也不会发生故障,因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。
    • 98. 发明申请
    • Transport robot and transport apparatus
    • 运输机器人和运输设备
    • US20070166135A1
    • 2007-07-19
    • US11653423
    • 2007-01-16
    • Toshio Koike
    • Toshio Koike
    • H01L21/677
    • H01L21/68707B25J19/0054Y10S414/139Y10S700/90
    • A transport robot including a release-side high radiation ratio portion and a receive-side high radiation ratio portion that face each other. Heat in a substrate conducted to a base portion due to thermal conduction is released as radiant heat from the release-side high radiation ratio portion, and the radiant heat is absorbed by the receive-side high radiation ratio portion. The receive-side high radiation ratio portion is formed on a heat-receiving plate that is thermally connected to a vacuum chamber so that radiant heat absorbed by the receive-side high radiation ratio portion is transferred to the vacuum chamber. As a result, even in the case where the high-temperature substrate is transported in a vacuum atmosphere, heat from the substrate is not accumulated in a transport system, and the transport system hardly reaches a high temperature.
    • 包括彼此面对的释放侧高辐射比部分和接收侧高辐射比部分的传送机器人。 作为来自释放侧高放射率部分的辐射热而释放由于热传导而传导到基部的基板中的热量,并且辐射热被接收侧高辐射比部分吸收。 接收侧高辐射比部分形成在与真空室热连接的受热板上,使得由接收侧高辐射比部分吸收的辐射热被传递到真空室。 结果,即使在真空气氛中输送高温基板的情况下,来自基板的热量也不会积聚在输送系统中,并且输送系统难以达到高温。