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    • 91. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07939827B2
    • 2011-05-10
    • US12335058
    • 2008-12-15
    • Tatsuya Arao
    • Tatsuya Arao
    • H01L29/12
    • G02F1/136209G02F1/136213G02F1/136227H01L27/124H01L27/1255H01L29/66757H01L29/66765H01L29/78633
    • To realize a semiconductor device including a capacitor element capable of obtaining a sufficient capacitor without reducing an opening ratio, in which a pixel electrode is flattened in order to control a defect in orientation of liquid crystal. A semiconductor device of the present invention includes a light-shielding film formed on the thin film transistor, a capacitor insulating film formed on the light-shielding film, a conductive layer formed on the capacitor insulating film, and a pixel electrode that is formed so as to be electrically connected to the conductive layer, in which a storage capacitor element comprises the light-shielding film, the capacitor insulating film, and the conductive layer, whereby an area of a region serving as the capacitor element can be increased.
    • 为了实现包括能够获得足够的电容器而不降低开口率的电容器元件的半导体器件,其中像素电极被平坦化以便控制液晶取向的缺陷。 本发明的半导体器件包括形成在薄膜晶体管上的遮光膜,形成在遮光膜上的电容器绝缘膜,形成在电容器绝缘膜上的导电层,以及形成为这样的像素电极 为了与导电层电连接,其中存储电容器元件包括遮光膜,电容器绝缘膜和导电层,由此可以增加用作电容器元件的区域的面积。
    • 94. 发明授权
    • Photoelectric conversion device and semiconductor device
    • 光电转换器件和半导体器件
    • US07772667B2
    • 2010-08-10
    • US11383645
    • 2006-05-16
    • Yuusuke SugawaraKazuo NishiTatsuya AraoDaiki YamadaHidekazu TakahashiNaoto Kusumoto
    • Yuusuke SugawaraKazuo NishiTatsuya AraoDaiki YamadaHidekazu TakahashiNaoto Kusumoto
    • H01L31/075
    • H01L31/1055H01L31/02162H01L31/022408H01L31/02325
    • The present invention provides a photoelectric conversion device in which a leakage current is suppressed. A photoelectric conversion device of the present invention comprises: a first electrode over a substrate; a photoelectric conversion layer including a first conductive layer having one conductivity, a second semiconductor layer, and a third semiconductor layer having a conductivity opposite to the one conductivity of the second semiconductor layer over the first electrode, wherein an end portion of the first electrode is covered with the first semiconductor layer; an insulating film, and a second electrode electrically connected to the third semiconductor film with the insulating film therebetween, over the insulating film, are formed over the third semiconductor film, and wherein a part of the second semiconductor layer and a part of the third semiconductor layer is removed in a region of the photoelectric conversion layer, which is not covered with the insulating film.
    • 本发明提供抑制漏电流的光电转换装置。 本发明的光电转换装置包括:基板上的第一电极; 光电转换层,包括具有一个导电性的第一导电层,第二半导体层和具有与第一电极上的第二半导体层的一个导电率相反的导电性的第三半导体层,其中第一电极的端部为 覆盖第一半导体层; 在所述第三半导体膜上形成绝缘膜和在所述绝缘膜上与所述第三半导体膜电绝缘膜电连接的第二电极,并且其中所述第二半导体层的一部分和所述第三半导体的一部分 在光电转换层的未被绝缘膜覆盖的区域中去除层。
    • 95. 发明授权
    • Manufacturing method for field-effect transistor
    • 场效应晶体管的制造方法
    • US07718478B2
    • 2010-05-18
    • US11646688
    • 2006-12-28
    • Tatsuya Arao
    • Tatsuya Arao
    • H01L21/00
    • H01L29/66757H01L29/78621H01L29/78633H01L29/78648
    • To provide a manufacturing method for a field-effect transistor, such as a thin-film transistor, enabling reductions in the number patterning steps and the number of photomasks and improvements in the throughput and the yield. In the method, an oxide film is formed by processing the surface of a crystalline semiconductor with ozone water or hydrogen peroxide water. Using the oxide film thus formed as an etch stop, a gate electrode, a source electrode, and a drain electrode of the field-effect transistor are simultaneously formed from a same starting film in one patterning step by use of one photomask. After forming the gate electrode, the source electrode, and the drain electrode, heating is performed thereon at 800° C. or higher for a predetermined time. Thereby, the contact resistances between the source electrode and the crystalline semiconductor and between the drain electrode and the crystalline semiconductor are reduced, whereby improving the electrical conductivity.
    • 为了提供诸如薄膜晶体管的场效应晶体管的制造方法,能够减少数量图案化步骤和光掩模的数量以及产量和产量的提高。 在该方法中,通过用臭氧水或过氧化氢水处理结晶半导体的表面来形成氧化膜。 使用如此形成的氧化膜作为蚀刻停止体,通过使用一个光掩模,在一个图案化步骤中由相同的起始膜同时形成场效应晶体管的栅电极,源电极和漏电极。 在形成栅电极,源电极和漏电极之后,在800℃以上进行规定时间的加热。 由此,源电极和结晶半导体之间以及漏电极和晶体半导体之间的接触电阻降低,从而提高导电性。
    • 98. 发明申请
    • Semiconductor Device
    • 半导体器件
    • US20090127562A1
    • 2009-05-21
    • US12335058
    • 2008-12-15
    • Tatsuya Arao
    • Tatsuya Arao
    • H01L33/00
    • G02F1/136209G02F1/136213G02F1/136227H01L27/124H01L27/1255H01L29/66757H01L29/66765H01L29/78633
    • To realize a semiconductor device including a capacitor element capable of obtaining a sufficient capacitor without reducing an opening ratio, in which a pixel electrode is flattened in order to control a defect in orientation of liquid crystal. A semiconductor device of the present invention includes a light-shielding film formed on the thin film transistor, a capacitor insulating film formed on the light-shielding film, a conductive layer formed on the capacitor insulating film, and a pixel electrode that is formed so as to be electrically connected to the conductive layer, in which a storage capacitor element comprises the light-shielding film, the capacitor insulating film, and the conductive layer, whereby an area of a region serving as the capacitor element can be increased.
    • 为了实现包括能够获得足够的电容器而不降低开口率的电容器元件的半导体器件,其中像素电极被平坦化以便控制液晶取向的缺陷。 本发明的半导体器件包括形成在薄膜晶体管上的遮光膜,形成在遮光膜上的电容器绝缘膜,形成在电容器绝缘膜上的导电层,以及形成为这样的像素电极 为了与导电层电连接,其中存储电容器元件包括遮光膜,电容器绝缘膜和导电层,由此可以增加用作电容器元件的区域的面积。