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91. 发明专利

JPH09266097A PLASMA PROCESSING METHOD AND DEVICE 失效
公开(公告)号：JPH09266097A
公开(公告)日：1997-10-07
申请号：JP10357496
申请日：1996-03-29
申请人： SEIKO EPSON CORP , ULVAC CORP
发明人： MIYASHITA TAKESHI , YODA HIDENORI , YAMAGUCHI HISAO
IPC分类号： H05H1/46 , C23C16/50 , H01L21/205 , H01L21/285 , H01L21/302 , H01L21/3065 , H01L21/31 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a plasma processing method and device capable of detecting the initial state of a plasma discharge failure. SOLUTION: High frequency voltage whose output power varies is applied from a high frequency power supply 3 to a plasma generating part 5 in accordance with a voltage from a modulating oscillator 11, and a plasma discharge is produced. A high frequency signal produced as the result of the plasma discharge is detected by a sensor unit 6, a specific higher harmonic spectrum is detected therefrom by a spectrum detecting part 1 and, when a signal whose rate of change with change in voltage from the modulating oscillator 11 is high is detected from the higher harmonic spectrum, a signal showing the initial state of a plasma discharge failure is fed to a control circuit 31. At the control circuit 31 a plasma generating parameter for generating a normal plasma discharge is set in accordance with the signal fed and is stored in memory, and an RF output power control part 33, an electrode-to-electrode gap control part 34, and a gas flow rate control part 35 are controlled so that the normal plasma discharge occurs.

92. 发明专利

JPH08327959A TREATING DEVICE FOR WAFER AND SUBSTRATE AND TREATMENT METHOD THEREFOR AND TRANSFER DEVICE FOR WAFER AND SUBSTRATE 失效
公开(公告)号：JPH08327959A
公开(公告)日：1996-12-13
申请号：JP16452695
申请日：1995-06-08
申请人： SEIKO EPSON CORP
发明人： IWAMURA NAOYUKI , MORI YOSHIAKI , MIYASHITA TAKESHI , MIYAGAWA TAKUYA , YUDASAKA KAZUO
IPC分类号： G01R31/26 , G02F1/13 , H01L21/00 , H01L21/203 , H01L21/302 , H01L21/304 , H01L21/3065 , H01L21/677 , H05H1/46 , H01L21/68
摘要： PURPOSE: To rationalize the process for treatment or inspection of wafer and substrate in production of semiconductor device and liquid crystal display panel and to improve the yield thereof. CONSTITUTION: A route for transporting the wafers 2 or the substrates is provided in its mid-way with a means 12 for generating gaseous discharge in a prescribed discharge gas under the atm. pressure or a pressure approximate thereto. The excited active species of the discharge gas formed by the means are brought into contact with the wafer surfaces and also the gaseous species of the discharge gas are adequately selected, thereby, the surface treatments, such as ashing, washing and hydrophilicity imparting to the wafers, are executed inline.

93. 发明专利

JPH0878529A METHOD AND APPARATUS FOR SURFACE TREATMENT, SURFACE TREATMENT FOR SUBSTRATE, METHOD FOR FORMING MULTILAYER WIRING BOARD, AND FORMATION OF ORIENTATION FILM FOR LIQUID CRYSTAL PANEL 失效
公开(公告)号：JPH0878529A
公开(公告)日：1996-03-22
申请号：JP9747095
申请日：1995-03-31
申请人： SEIKO EPSON CORP
发明人： MORI YOSHIAKI , MIYAGAWA TAKUYA , TAKAHASHI KATSUHIRO , MIYASHITA TAKESHI , KATAUE SATORU
IPC分类号： G02F1/1333 , C23C8/36 , G02F1/1343 , H01L21/28 , H01L21/314 , H01L21/768 , H01L23/522 , H05K3/28
摘要： PURPOSE: To enhance reliability of wiring while lowering the resistance by generating gas discharge under a pressure close to atmospheric pressure, exposing a metal film deposited on the surface of a substrate to a gas active species produced through discharge and oxidizing the surface of the metal layer, thereby imparting corrosion resistance thereto. CONSTITUTION: The atmosphere between the tips of both electrodes 3 and a substrate 6, including the vicinity thereof, is substituted by a gas containing oxygen. When a predetermined voltage is applied from a power supply 2 to the electrodes 3, a gas discharge takes place between both electrodes 3 and the substrate 6. Active species, e.g. oxygen ions and excitation species, are thereby produced in the discharge region 8. Upon exposure to such active species, a metal wiring 7 is oxidized and a thin metal oxide 9 is deposited on the surface thereof. Since the surface of the metal wiring 7 is oxidized and coated with the metal oxide 9, the lower metal wiring layer has no possibility of being etched along with the upper metal wiring layer even if the interlayer insulation film is not deposited thinner than the thickness required for electric insulation and even if any pinhole is present.

94. 发明专利

JPH04325676A METHOD AND APPARATUS FOR PRODUCING TRANSPARENT CONDUCTIVE FILM AND LIQUID CRYSTAL DISPLAY ELEMENT 失效
公开(公告)号：JPH04325676A
公开(公告)日：1992-11-16
申请号：JP9568191
申请日：1991-04-25
申请人： SEIKO EPSON CORP
发明人： MIYASHITA TAKESHI
IPC分类号： C23C14/40 , G02F1/1343
摘要： PURPOSE:To stabilize the conditions for forming films by dropping the sputtering voltage of a target lowered in the impedance of an electric discharge, thereby decreasing the damages by the negative ions of the films, lowering the resistance of the transparent conductive films and maintaining the discharge impedance always constant. CONSTITUTION:A high-frequency electric power impressing means consisting of a high-frequency power source 11 and a matching machine 10 and a DC electric power impressing means consisting of a DC power source 7 and a filter circuit 9 for shutting off high-frequency noises are provided in combination to impress the electric powers in superposition. Further, the DC electric power is subjected to specified electric power control and the high-frequency electric powers to be superposed are regulated by a controller 14, by which the sputtering voltage is so controlled as to be held constant.

95. 发明专利

JPH0422467A NOZZLE 失效
公开(公告)号：JPH0422467A
公开(公告)日：1992-01-27
申请号：JP12743990
申请日：1990-05-17
申请人： SEIKO EPSON CORP
发明人： MIYASHITA TAKESHI
IPC分类号： G03F7/16 , B05C5/00 , H01L21/027
摘要： PURPOSE:To prevent that air bubbles are contained in the central part of an applied liquid even when a liquid including air bubbles is applied by applying the liquid using a nozzle having an air bubble separating part provided between the suction port and emitting port thereof. CONSTITUTION:An air bubble separation part 2 is provided between a suction port 1 and an emitting port 6. Even when a liquid including air bubbles is applied by opening this nozzle, no air bubbles are contained in the central part of the applied liquid and a smooth coating surface can be obtained, and the coating irregulairy due to air bubbles is eliminated. Therefore, for example, when an adhesive is emitted, uniform film thickness is obtained and stable adhesion becomes possible.

96. 发明专利

JPH042774A METHOD AND APPARATUS FOR FORMATION OF TRANSPARENT CONDUCTIVE FILM 失效
公开(公告)号：JPH042774A
公开(公告)日：1992-01-07
申请号：JP10338790
申请日：1990-04-19
申请人： SEIKO EPSON CORP
发明人： MIYASHITA TAKESHI
IPC分类号： C23C14/35
摘要： PURPOSE:To obtain the transparent conductive film of low specific resistance even in low temp. and to prevent the generation of traces of abnormal electric discharge in DC magnetron sputtering by preventing negative-charged particles from rushing into a base plate on which film is to be formed. CONSTITUTION:The electrode 10 for catching the negative-charged particles which is formed in an annular shape made of high melting point metallic wire, such as wire of Mo, of 1mmphi thickness is provided in the middle between an ITO target 1 and a base plate holder 3 in the vacuum vessel 4 of a DC magnetron sputtering apparatus used for the formation of ITO film. The diameter of annular electrode 10 is smaller than that of the target, and set almost right above the errosion area of the target 10. The electrode 10 is kept in earth potential or in positive potential. By this method, the negative-charged particles rushing into the base plate 2 on which film is to be formed from the plasma generated in the vicinity of the target 1 are caught, and the object is achieved.

97. 发明专利

JPH04580A IMAGE FORMING DEVICE 失效
公开(公告)号：JPH04580A
公开(公告)日：1992-01-06
申请号：JP10113090
申请日：1990-04-17
申请人： SEIKO EPSON CORP
发明人： MIYASHITA TAKESHI
IPC分类号： G06T11/00 , G06F15/72
摘要： PURPOSE:To prevent an idle bloc in a ring buffer from uselessly treated by collecting image forming information in each page to form a unit block, and at the end of the image formation, processing external data correspondingly to the idle block in the ring buffer to form image forming information. CONSTITUTION:A unit block forming circuit 1 collects image forming information in each page to form a unit block. A ring buffer control circuit 2 includes plural unit blocks formed by the circuit 1 and images are formed by an image forming circuit 5 in each unit block based upon an image formation request signal 3. At this point of time, an image formation end signal 4 is outputted and operation for requesting the succeeding image formation is executed. In the case of forming a unit block based on external input data in this constitution, the control circuit 2 moves the unit blocks in accordance with the idle state of the ring buffer so that the maximum idle blocks are always formed.

98. 发明专利

JPS63294616A RECOVERY DEVICE FOR TRANSFERENCE ELECTRODE 失效
公开(公告)号：JPS63294616A
公开(公告)日：1988-12-01
申请号：JP13040387
申请日：1987-05-27
申请人： SEIKO EPSON CORP
发明人： MIYASHITA TAKESHI , GYODA KOZO
IPC分类号： C23C16/30 , C23C16/48 , H01B13/00 , H05K3/22
摘要： PURPOSE:To recover a transference electrode by irradiating a laser beam to a disconnected part or a local failure part of the electrode using a light source of laser etc., in an atmosphere of a material gas for chemical gaseous phase growing of a transference conductive film. CONSTITUTION:In a material gas atmosphere for chemical gaseous phase growing of a transference conductive film, alignment between the light axis of a laser beam 13 and a disconnected part 15 of a transference electrode 14 is conducted, and a local film forming is made by the chemical gaseous phase growing by a local over heating with the beam 13 irradiated. A film forming rate has been pre-measured for dependency of a laser power and irradiation time, and the irradiation time and laser power is adjusted so that they have the same degree of the transference electrode. And the film forming is possible in any region in a film forming range with a laser beam shape formed with an aperture, etc. This enables recovering for a disconnected part 15 or local failure part of the electrode 14 having an optional size.

99. 发明专利

JP2003260826A PRINTING SYSTEM 审中-公开
公开(公告)号：JP2003260826A
公开(公告)日：2003-09-16
申请号：JP2003016938
申请日：2003-01-27
申请人： SEIKO EPSON CORP
发明人： SUZUKI TETSUYA , MURATA SUNAO , ISOBE TOSHIAKI , MIYASHITA TAKESHI , NOZAWA SHINJI
IPC分类号： B41J29/38 , B41J5/30 , G06F3/12
摘要： PROBLEM TO BE SOLVED: To provide a printing system which can meet a variety of requests of users. SOLUTION: A printer 3 has a high-speed plotting device 31 for plotting by a high resolution 600 dpi on a color space of a 2-bit depth of each color of C, M, Y and K based on a printing command from a printer driver 9, and a high-quality plotting device 33 for plotting by various resolutions 600/300/150 dpi on a full-color color space (8-bit depth of each color). A mode using only the high-speed plotting device 31, a mode using only the high-quality plotting device 33, a mode using a combination of the high-speed plotting device 31 and the high-quality plotting device 33, and the like can be selected by the user or can be automatically selected by the printer driver 9. COPYRIGHT: (C)2003,JPO

100. 发明专利

JP2001328322A PRINTER 失效
公开(公告)号：JP2001328322A
公开(公告)日：2001-11-27
申请号：JP2000197213
申请日：2000-06-29
申请人： SEIKO EPSON CORP
发明人： MIYASHITA TAKESHI
IPC分类号： B41J29/38 , B41J2/44 , B41J3/60 , B41J5/30 , G06F3/12
摘要： PROBLEM TO BE SOLVED: To provide a printer in which high speed printing is carried out utilizing the performance of a print mechanism effectively. SOLUTION: The printer having a print mechanism available in 1UP/2UP color print mode and monochromatic print mode is arranged such that printing is carried out in monochromatic print mode (type number=0) based on monochromatic page data when one page data to be processed included in print job data is monochromatic page data, and printing is carried out in 2UP color print mode (type number=1-3) based on two page data when two page data to be processed include color page data.

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