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    • 95. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07648862B2
    • 2010-01-19
    • US11743695
    • 2007-05-03
    • Junya MaruyamaToru TakayamaYuugo Goto
    • Junya MaruyamaToru TakayamaYuugo Goto
    • H01L21/00
    • H01L21/76275H01L21/308H01L21/76251H01L27/1214H01L27/1218H01L27/1266H01L27/32H01L29/78603H01L51/0024H01L51/56
    • A semiconductor device having a semiconductor element (a thin film transistor, a thin film diode, a photoelectric conversion element of silicon PIN junction, or a silicon resistor element) which is light-weight, flexible (bendable), and thin as a whole is provided as well as a method of manufacturing the semiconductor device. In the present invention, the element is not formed on a plastic film. Instead, a flat board such as a substrate is used as a form, the space between the substrate (third substrate (17)) and a layer including the element (peeled layer (13)) is filled with coagulant (typically an adhesive) that serves as a second bonding member (16), and the substrate used as a form (third substrate (17)) is peeled off after the adhesive is coagulated to hold the layer including the element (peeled layer (13)) by the coagulated adhesive (second bonding member (16)) alone. In this way, the present invention achieves thinning of the film and reduction in weight.
    • 具有重量轻,柔性(弯曲)和整体薄的半导体元件(薄膜晶体管,薄膜二极管,硅PIN结的光电转换元件或硅电阻元件)的半导体器件是 以及制造半导体器件的方法。 在本发明中,元件不形成在塑料膜上。 相反,使用诸如基板的平板作为形式,衬底(第三衬底(17))和包括元件(剥离层(13))的层之间的空间填充有凝结剂(通常为粘合剂),凝固剂 用作第二接合构件(16),并且在粘合剂凝固之后剥离用作形式的基板(第三基板(17)),以通过凝固的粘合剂保持包括元件(剥离层(13))的层) (第二接合部件(16))。 以这种方式,本发明实现了薄膜的薄化和重量的减轻。