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    • 94. 发明申请
    • METHOD FOR MANUFACTURING SOLID-STATE IMAGING DEVICE
    • 制造固态成像装置的方法
    • US20100233861A1
    • 2010-09-16
    • US12717500
    • 2010-03-04
    • Naohiko KimizukaTakuji Matsumoto
    • Naohiko KimizukaTakuji Matsumoto
    • H01L21/8238
    • H01L27/146H01L27/14609H01L27/14621H01L27/14627H01L27/1463H01L27/14643H01L27/14685H01L27/14689
    • A method is provided for manufacturing a solid-state imaging device including a semiconductor substrate having a photoelectric conversion portion, a pixel transistor region and a logic circuit region. The method includes the steps of forming a first gate electrode on the semiconductor substrate with a first gate insulating film therebetween, a second gate electrode in the pixel transistor region on the semiconductor substrate with a second gate insulating film therebetween; forming a first insulating layer to cover the first gate electrode, the second gate electrode, a floating diffusion region where a floating diffusion portion is to be formed, and the photoelectric conversion portion; and forming an offset spacer on a sidewall of the first gate electrode by etch back of the first insulating layer in a state where the photoelectric conversion portion, the pixel transistor region and the floating diffusion region are masked.
    • 提供一种用于制造包括具有光电转换部分,像素晶体管区域和逻辑电路区域的半导体衬底的固态成像器件的方法。 该方法包括以下步骤:在半导体衬底上形成第一栅极绝缘膜,在半导体衬底上的像素晶体管区域中的第二栅极电极,其间具有第二栅极绝缘膜; 形成第一绝缘层以覆盖所述第一栅电极,所述第二栅电极,将形成浮动扩散部的浮动扩散区和所述光电转换部; 以及在所述光电转换部分,所述像素晶体管区域和所述浮动扩散区域被掩蔽的状态下通过所述第一绝缘层的回蚀而在所述第一栅电极的侧壁上形成偏移间隔物。