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    • 3. 发明专利
    • FINE PARTICLE DETECTOR
    • JPH02267848A
    • 1990-11-01
    • JP8944189
    • 1989-04-07
    • FUJITSU LTD
    • SAWADA SHIGETOMOKOBAYASHI KAZUOUEHARA YUJISATO FUMIHIKO
    • H01J47/18
    • PURPOSE:To reduce stray light in intensity in a simple manner by interposing the slits in more than 2 steps each of which is different in width, in front of a concave and a convex mirror. CONSTITUTION:The slits 7-1, 7-2, 8-1 and 8-2 in more than 2 steps each of which is different in width, are interposed in front of a concave mirror 2 and a convex mirror 1. When an multipath reflection of a light beam is effected by the mirrors 1 and 2, the beam which is narrow at the initial stage starts to be widened. When the widened portion of the light beam is intercepted by the slits 7-1 and 7-2 in the first step, the light becomes sharp as it came from a light emitting source so that the occurrence of stray light is thereby prevented. In this case, since the side faces of the slits in the first step are irradiated by the beam, they shall act as a stray light emitting source. When stray light from the side faces of the slits in the first step is intercepted by the slits 8-1 and 8-2 in the second step, light which reaches a detector, is reduced in intensity, it is thereby possible to improve an effect of restricting stray light.