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    • 5. 发明申请
    • Semiconductor Constructions
    • 半导体建筑
    • US20100276781A1
    • 2010-11-04
    • US12837378
    • 2010-07-15
    • Michael A. SmithSukesh SandhuXianfeng ZhouGraham Wolstenholme
    • Michael A. SmithSukesh SandhuXianfeng ZhouGraham Wolstenholme
    • H01L29/06
    • H01L29/7833H01L21/76205
    • The invention includes methods of forming oxide structures under corners of transistor gate stacks and adjacent trenched isolation regions. Such methods can include exposure of a semiconductor material to steam and H2, with the H2 being present to a concentration of from about 2% to about 40%, by volume. An oxide structure formed under the bottom corner of a transistor gate stack can have a bottom surface with a topography that includes a step of at least about 50 Å, and an upper surface directly over the bottom surface and having a topography that is substantially planar. Methodology of the present invention can be utilized to form semiconductor constructions suitable for incorporation into highly integrated circuitry. The highly integrated circuitry can be incorporated into electronic systems, and can, for example, be utilized in processors and/or memory storage devices.
    • 本发明包括在晶体管栅极堆叠和相邻沟槽隔离区域的角落处形成氧化物结构的方法。 这样的方法可以包括将半导体材料暴露于蒸汽和H2,其中H2以体积计约2%至约40%的浓度存在。 形成在晶体管栅极堆叠的底角下方的氧化物结构可以具有底表面,其具有包括至少约为50埃的步骤的形貌,以及直接在底表面上方的上表面,并且具有基本平坦的形貌。 本发明的方法可以用于形成适合并入高度集成电路的半导体结构。 高度集成的电路可以并入到电子系统中,并且可以例如在处理器和/或存储器存储设备中使用。
    • 6. 发明申请
    • ISOLATION TRENCH FILL USING OXIDE LINER AND NITRIDE ETCH BACK TECHNIQUE WITH DUAL TRENCH DEPTH CAPABILITY
    • 使用氧化锌衬垫和氮化钛回填技术的隔离透气膜,具有双重深度深度能力
    • US20100148300A1
    • 2010-06-17
    • US12712401
    • 2010-02-25
    • Xianfeng Zhou
    • Xianfeng Zhou
    • H01L29/06
    • H01L29/0653H01L21/31051H01L21/31053H01L21/311H01L21/76224H01L21/76229H01L27/11548H01L29/0649
    • An oxide layer is formed over a substrate having a smaller isolation trench and a large isolation trench. A nitride layer is formed over the oxide layer such that it completely fills the smaller isolation trench and lines the larger isolation trench. The nitride layer is etched back to form a recess in the nitride layer in the smaller isolation trench while at least a portion of the nitride layer lining the larger isolation trench is completely removed. A layer of HDP oxide is deposited over the substrate, completely filling the smaller and larger isolation trenches. The HDP oxide layer is planarized to the upper surface of the substrate. The deeper larger isolation trench may be formed by performing an etching step after the nitride layer has been etched back, prior to depositing HDP oxide.
    • 在具有较小隔离沟槽和大隔离沟槽的衬底上形成氧化物层。 在氧化物层上形成氮化物层,使得其完全填充较小的隔离沟槽并对较大的隔离沟槽进行排列。 蚀刻氮化物层以在更小的隔离沟槽中的氮化物层中形成凹陷,同时完全去除衬在较大隔离沟槽的氮化物层的至少一部分。 在衬底上沉积一层HDP氧化物,完全填充越来越小的隔离沟槽。 HDP氧化物层平坦化到衬底的上表面。 在沉积HDP氧化物之前,可以通过在氮化物层被回蚀后进行蚀刻步骤来形成更深的较大的隔离沟槽。
    • 7. 发明申请
    • FORMATION OF STANDARD VOLTAGE THRESHOLD AND LOW VOLTAGE THRESHOLD MOSFET DEVICES
    • 形成标准电压阈值和低电压阈值MOSFET器件
    • US20090286366A1
    • 2009-11-19
    • US12512631
    • 2009-07-30
    • Mark HelmXianfeng Zhou
    • Mark HelmXianfeng Zhou
    • H01L21/8238
    • H01L21/823842H01L21/823807H01L21/823892H01L29/6659H01L29/7833
    • Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    • 孔形成在要制造第一和第二类型的标准Vt和低Vt装置的基板中。 限定第一类型标准Vt器件的位置的阱被掩蔽,并且在限定第二类型标准Vt器件的阱以及第一和第二类型低Vt器件中的每一个上执行第一电压阈值注入调整。 限定第二类型标准Vt器件的位置的阱被屏蔽,并且对定义第一类型标准Vt器件的阱以及第一和第二类型低Vt器件中的每一个执行第二电压阈值注入调整。 然后在孔上形成掺杂的多晶硅栅极叠层。 通过调节第一和第二电压阈值注入调整和多晶硅栅极堆叠掺杂中的至少一个来控​​制每个器件Vt的性能特征和控制。