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    • 6. 发明申请
    • METHOD AND SYSTEM FOR SCRIBING A MULTILAYER PANEL
    • 用于筛选多层面板的方法和系统
    • US20120074109A1
    • 2012-03-29
    • US12893288
    • 2010-09-29
    • Wenwu ZhangKevin George HardingMarshall Gordon JonesJohn Anthony DeLucaJonathan Mack Frey
    • Wenwu ZhangKevin George HardingMarshall Gordon JonesJohn Anthony DeLucaJonathan Mack Frey
    • B23K26/00
    • B23K26/032B23K2103/50H01L31/0463Y02E10/50
    • The present invention provides method of scribing a multilayer panel. The method comprises (a) providing a multilayer panel comprising a substrate layer, a transparent conductive layer disposed thereupon, a first semiconducting layer disposed upon the transparent conductive layer; (b) configuring the multilayer panel relative to a laser machining device, the machining device comprising a laser head and an optical sensor; (c) inducing a motion of the laser head relative to the multilayer panel such that a laser beam contacts the panel along a transverse line across the panel, the laser beam incident upon the panel having sufficient energy to ablate one or more layers of the multilayer panel within a zone irradiated by the laser beam irradiated to provide a scribed panel; (d) simultaneously irradiating the scribed panel with a first light source; and (e) detecting the light emerging from the scribed panel at the optical sensor in real time. Also provided is a system for scribing a multilayer panel.
    • 本发明提供划线多层面板的方法。 该方法包括(a)提供包括基底层,设置在其上的透明导电层,设置在透明导电层上的第一半导体层的多层面板; (b)相对于激光加工装置配置所述多层板,所述加工装置包括激光头和光学传感器; (c)引起激光头相对于多层板的运动,使得激光束沿着穿过面板的横向线接触面板,入射到面板上的激光束具有足够的能量以消融一层或多层多层 在被照射的激光束照射的区域内的面板以提供划线板; (d)用第一光源同时照射刻划面板; 和(e)实时地检测在光学传感器处从划刻面板出射的光。 还提供了一种用于划线多层板的系统。