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1. 发明申请

US20070269734A1 Uper Layer Film Forming Composition for Liquid Immersion and Method of Forming Photoresist Pattern 有权
标题翻译：用于液体浸渍的Uper层成膜组合物和形成光刻胶图案的方法
公开(公告)号：US20070269734A1
公开(公告)日：2007-11-22
申请号：US10586187
申请日：2005-01-14
申请人： Toru Kimura , Yukio Nishimura , Tomohiro Utaka , Hiroaki Nemoto , Atsushi Nakamura , Takashi Chiba , Hiroki Nakagawa
发明人： Toru Kimura , Yukio Nishimura , Tomohiro Utaka , Hiroaki Nemoto , Atsushi Nakamura , Takashi Chiba , Hiroki Nakagawa
IPC分类号： G03F7/20 , G03F7/11 , H01L21/027
CPC分类号： G03F7/2041 , C08F214/182 , C08F214/186 , C08F216/10 , C08F220/18 , C08F220/24 , G03F7/11 , C08F220/06 , C08F2222/1013
摘要： An immersion upper layer film composition is provided which exhibits sufficient transparency for the exposure wavelength 248 nm(KrF) and 193 nm(ArF), can form a protective film on the photoresist film without being intermixed with the photoresist film, is not eluted into water used during immersion exposure to maintain a stable film, and can be easily dissolved in an alkaline developer. The composition applied to coat on the photoresist film when using an immersion exposure device which is irradiated through water provided between a lens and the photoresist film, the composition comprises a resin forming a water-stable film during irradiation and being dissolved in a subsequent developer, and a solvent containing a monovalent alcohol having 6 or less carbon atoms, and the resin contains a resin component having an alcoholic hydroxyl group on the side chain containing a fluoroalkyl group on at least the carbon atom of α-position.
摘要翻译：提供了对于曝光波长248nm（KrF）和193nm（ArF）显示足够的透明度的浸没上层膜组合物，可以在光致抗蚀剂膜上形成保护膜而不与光致抗蚀剂膜混合，不会被洗脱到水中在浸渍曝光期间使用以保持稳定的膜，并且可以容易地溶解在碱性显影剂中。当使用通过设置在透镜和光致抗蚀剂膜之间的水照射的浸没曝光装置时，该组合物涂覆在光致抗蚀剂膜上，该组合物包含在照射期间形成水稳定膜并溶解在随后的显影剂中的树脂，和含有6个以下碳原子的一元醇的溶剂，该树脂含有至少在α-位的碳原子上在侧链上含有氟烷基的具有醇羟基的树脂成分。

2. 发明授权

US09182674B2 Immersion upper layer film forming composition and method of forming photoresist pattern 有权
标题翻译：浸渍上层成膜组合物和形成光致抗蚀剂图案的方法
公开(公告)号：US09182674B2
公开(公告)日：2015-11-10
申请号：US13550733
申请日：2012-07-17
申请人： Toru Kimura , Yukio Nishimura , Tomohiro Utaka , Hiroaki Nemoto , Atsushi Nakamura , Takashi Chiba , Hiroki Nakagawa
发明人： Toru Kimura , Yukio Nishimura , Tomohiro Utaka , Hiroaki Nemoto , Atsushi Nakamura , Takashi Chiba , Hiroki Nakagawa
IPC分类号： G03F7/11 , G03F7/20 , C08F214/18 , C08F216/10 , C08F220/18 , C08F220/24
CPC分类号： G03F7/2041 , C08F214/182 , C08F214/186 , C08F216/10 , C08F220/18 , C08F220/24 , G03F7/11 , C08F220/06 , C08F2222/1013
摘要： An immersion upper layer film composition includes a resin and a solvent. The resin forms a water-stable film during irradiation and is dissolved in a subsequent developer. The solvent contains a monovalent alcohol having 6 or less carbon atoms. The composition is to be applied to form a coat on a photoresist film in an immersion exposure process in which the photoresist film is irradiated through water provided between a lens and the photoresist film.
摘要翻译：浸渍上层膜组合物包括树脂和溶剂。树脂在照射期间形成水稳定膜并溶解在随后的显影剂中。溶剂含有具有6个或更少碳原子的一价醇。在浸渍曝光工艺中，应用该组合物在光致抗蚀剂膜上形成涂层，其中光致抗蚀剂膜通过设置在透镜和光致抗蚀剂膜之间的水进行照射。

3. 发明授权

US08247165B2 Upper layer film forming composition for liquid immersion and method of forming photoresist pattern 有权
标题翻译：用于液浸的上层成膜组合物和形成光致抗蚀剂图案的方法
公开(公告)号：US08247165B2
公开(公告)日：2012-08-21
申请号：US10586187
申请日：2005-01-14
申请人： Toru Kimura , Yukio Nishimura , Tomohiro Utaka , Hiroaki Nemoto , Atsushi Nakamura , Takashi Chiba , Hiroki Nakagawa
发明人： Toru Kimura , Yukio Nishimura , Tomohiro Utaka , Hiroaki Nemoto , Atsushi Nakamura , Takashi Chiba , Hiroki Nakagawa
IPC分类号： G03C1/00 , G03F7/00 , C08F18/20
CPC分类号： G03F7/2041 , C08F214/182 , C08F214/186 , C08F216/10 , C08F220/18 , C08F220/24 , G03F7/11 , C08F220/06 , C08F2222/1013
摘要： An immersion upper layer film composition is provided which exhibits sufficient transparency for the exposure wavelength 248 nm(KrF) and 193 nm(ArF), can form a protective film on the photoresist film without being intermixed with the photoresist film, is not eluted into water used during immersion exposure to maintain a stable film, and can be easily dissolved in an alkaline developer. The composition applied to coat on the photoresist film when using an immersion exposure device which is irradiated through water provided between a lens and the photoresist film, the composition comprises a resin forming a water-stable film during irradiation and being dissolved in a subsequent developer, and a solvent containing a monovalent alcohol having 6 or less carbon atoms, and the resin contains a resin component having an alcoholic hydroxyl group on the side chain containing a fluoroalkyl group on at least the carbon atom of α-position.
摘要翻译：提供了对于曝光波长248nm（KrF）和193nm（ArF）显示足够的透明度的浸没上层膜组合物，可以在光致抗蚀剂膜上形成保护膜而不与光致抗蚀剂膜混合，不会被洗脱到水中在浸渍曝光期间使用以保持稳定的膜，并且可以容易地溶解在碱性显影剂中。当使用通过设置在透镜和光致抗蚀剂膜之间的水照射的浸没曝光装置时，该组合物涂覆在光致抗蚀剂膜上，该组合物包含在照射期间形成水稳定膜并溶解在随后的显影剂中的树脂，和含有6个以下碳原子的一元醇的溶剂，该树脂含有至少在α-位的碳原子上的侧链上含有氟烷基的具有醇羟基的树脂成分。

4. 发明授权

US08679654B2 Magnetic recording medium including plural FePt alloy layers including carbon, oxides or nitrides 有权
标题翻译：磁记录介质包括包含碳，氧化物或氮化物的多个FePt合金层
公开(公告)号：US08679654B2
公开(公告)日：2014-03-25
申请号：US13372116
申请日：2012-02-13
申请人： Hiroaki Nemoto , Ikuko Takekuma , Kimio Nakamura , Junichi Sayama
发明人： Hiroaki Nemoto , Ikuko Takekuma , Kimio Nakamura , Junichi Sayama
IPC分类号： G11B5/66 , G11B5/65 , C22C38/00 , C22C5/04
CPC分类号： G11B5/653 , C22C5/04 , C22C38/002 , C22C2202/02 , G11B5/65 , G11B5/66
摘要： Surface flatness of magnetic recording medium to which a magnetic recording layer made of L10 FePt magnetic alloy thin film, with distance between a magnetic head and a magnetic recording medium sufficiently reduced. The magnetic recording layer includes: magnetic layers containing a magnetic alloy including Fe and Pt as principal materials; and one non-magnetic material selected from carbon, oxide and nitride. The first magnetic layer disposed closer to a substrate has a granular structure in which magnetic alloy grains including FePt alloy as the principal material are separated from grain boundaries including the non-magnetic material as the principal material. The second magnetic layer disposed closer to the surface than the first magnetic layer is fabricated so as to have a homogeneous structure in which an FePt alloy and the non-magnetic material are mixed in a state finer than diameters of the FePt magnetic alloy grains in the first magnetic layer.
摘要翻译：由L10FePt磁性合金薄膜制成的磁记录层，磁头和磁记录介质之间的距离充分降低的磁记录介质的表面平整度。磁记录层包括：含有以Fe和Pt为主要材料的磁性合金的磁性层; 和一种选自碳，氧化物和氮化物的非磁性材料。靠近基板设置的第一磁性层具有以包含FePt合金作为主要材料的磁性合金颗粒与包括非磁性材料在内的晶界作为主要材料的颗粒结构。制造比第一磁性层更靠近表面的第二磁性层，以具有均匀的结构，其中FePt合金和非磁性材料以比FePt磁性合金粒子的直径小的状态混合第一磁性层。

5. 发明申请

US20100188769A1 METHOD AND DEVICE FOR INFORMATION RECORDING/REPRODUCING AND INFORMATION RECORDING MEDIUM 失效
标题翻译：用于信息记录/再现和信息记录介质的方法和装置
公开(公告)号：US20100188769A1
公开(公告)日：2010-07-29
申请号：US12710738
申请日：2010-02-23
申请人： Hiroaki Nemoto , Hideki Saga , Hirofumi Sukeda
发明人： Hiroaki Nemoto , Hideki Saga , Hirofumi Sukeda
IPC分类号： G11B5/02
CPC分类号： G11B11/10578 , G11B5/314 , G11B11/10502 , G11B11/10528 , G11B11/10576 , G11B2005/0005 , G11B2005/0021
摘要： In an information recording/reproducing method performing a thermo-magnetic recording, a tracking offset value of a recording light spot and/or a tracking offset value of a magnetic flux detecting element is changed in accordance with a radial position at which a tracking is performed at the present time, to make a direction of a magnetic wall of a recording magnetic domain in accord with a longitudinal direction of the magnetic flux detecting element. Alternatively, a shape of a heated area is changed to be in accord with the direction of the magnetic flux detecting means at respective radial position, to make the direction of the magnetic wall of the recording magnetic domain in accord with the longitudinal direction of the magnetic flux detecting element.
摘要翻译：在执行热磁记录的信息记录/再现方法中，根据执行跟踪的径向位置改变记录光点的跟踪偏移值和/或磁通量检测元件的跟踪偏移值目前为了根据磁通量检测元件的纵向方向制造记录磁畴的磁壁的方向。或者，加热区域的形状根据磁通检测单元的径向位置的方向变化，使得记录磁畴的磁壁的方向与磁性体的长度方向一致通量检测元件。

6. 发明授权

US07625646B2 Perpendicular magnetic recording medium and method of manufacturing it 失效
标题翻译：垂直磁记录介质及其制造方法
公开(公告)号：US07625646B2
公开(公告)日：2009-12-01
申请号：US11354085
申请日：2006-02-15
申请人： Yoshiyuki Hirayama , Ichiro Tamai , Takayuki Ichihara , Hiroyuki Nakagawa , Hiroaki Nemoto , Mineaki Kodama , Ikuko Takekuma
发明人： Yoshiyuki Hirayama , Ichiro Tamai , Takayuki Ichihara , Hiroyuki Nakagawa , Hiroaki Nemoto , Mineaki Kodama , Ikuko Takekuma
IPC分类号： G11B5/66
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , G11B5/667 , G11B5/732 , G11B5/7325 , G11B5/84
摘要： Disclosed are a perpendicular magnetic recording medium with lower medium noise, insusceptible to thermal fluctuation and high recording resolution and a method of manufacturing it. As the step of forming a metal layer at the time of forming a recording layer on a non-magnetic substrate via a plurality of underlayers and the step of forming an oxide layer with an average thickness of 0.2 nm or less are repeated, the crystal grains are magnetically isolated without disturbing the orientation of the crystal grain of the recording layer of the perpendicular magnetic recording medium or without degrading the magnetic characteristic of the crystal grain of the recording layer.
摘要翻译：公开了一种具有较低介质噪声，不易受热波动和高记录分辨率的垂直磁记录介质及其制造方法。作为通过多个底层在非磁性基板上形成记录层时形成金属层的步骤，重复平均厚度为0.2nm以下的氧化物层的工序，晶粒磁性隔离，而不会干扰垂直磁记录介质的记录层的晶粒的取向，或不降低记录层的晶粒的磁特性。

7. 发明授权

US07580111B2 Liquid for immersion exposure and immersion exposure method 有权
标题翻译：液体浸渍曝光和浸渍曝光方法
公开(公告)号：US07580111B2
公开(公告)日：2009-08-25
申请号：US10588263
申请日：2005-05-19
申请人： Takashi Miyamatsu , Hiroaki Nemoto , Yong Wang
发明人： Takashi Miyamatsu , Hiroaki Nemoto , Yong Wang
IPC分类号： G03B27/42 , G03B27/52
CPC分类号： G03F7/2041
摘要： An immersion exposure liquid which exhibits a high refractive index, prevents elution and dissolution of a photoresist film or its upper layer film component, and reduces defects during formation of a resist pattern when used in an immersion exposure method, and an immersion exposure method using the immersion exposure liquid. The immersion exposure liquid is used for an immersion exposure device or an immersion exposure method in which a substrate is exposed through a liquid provided between a lens of a projection optical system and the substrate, the immersion exposure liquid being liquid in an operating temperature range of the immersion exposure device and including an alicyclic hydrocarbon compound or a cyclic hydrocarbon compound containing a silicon atom in the ring structure.
摘要翻译：表现出高折射率的浸渍曝光液体，防止光刻胶膜或其上层膜成分的溶出和溶解，并且在浸渍曝光方法中使用时减少形成抗蚀剂图案时的缺陷，以及使用浸渍曝光液体。浸渍曝光液体用于浸没曝光装置或浸渍曝光方法，其中通过设置在投影光学系统的透镜和基板之间的液体曝光基板，浸没曝光液体在液晶的工作温度范围内浸渍曝光装置，并且在环结构中包含脂环族烃化合物或含有硅原子的环状烃化合物。

8. 发明申请

US20070223142A1 Magnetic storage apparatus 有权
标题翻译：磁存储装置
公开(公告)号：US20070223142A1
公开(公告)日：2007-09-27
申请号：US11726099
申请日：2007-03-20
申请人： Ikuko Takekuma , Hiroyuki Nakagawa , Hiroaki Nemoto , Yoshiyuki Hirayama
发明人： Ikuko Takekuma , Hiroyuki Nakagawa , Hiroaki Nemoto , Yoshiyuki Hirayama
IPC分类号： G11B5/74 , G11B5/66
CPC分类号： G11B5/66 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3967 , G11B5/656
摘要： According to embodiments of the present invention, a shielded pole writer and a perpendicular magnetic recording medium suitable thereto are combined to provide high medium SNR and excellent OW characteristic simultaneously. A perpendicular magnetic recording medium of a magnetic storage apparatus mounting a shielded pole writer, including a perpendicular magnetic recording medium having a recording layer of a three layered structure is used. A first recording layer has a granular structure consisting of grain boundaries containing an oxide and columnar grains comprising a CoCrPt alloy, in which a second recording layer and a third recording layer formed thereabove comprise Co as a main ingredient, contain Cr and do not contain an oxide, and the Cr concentration in the second recording layer is lower than the Cr concentration in the third recording layer.
摘要翻译：根据本发明的实施例，组合屏蔽极写入器和适合于其的垂直磁记录介质，以同时提供高中等信噪比和优异的OW特性。使用安装屏蔽极写入器的磁存储装置的垂直磁记录介质，其包括具有三层结构的记录层的垂直磁记录介质。第一记录层具有由包含氧化物的晶界和包含CoCrPt合金的柱状晶粒构成的粒状结构，其中形成在其上的第二记录层和第三记录层包含Co作为主要成分，并且不含有并且第二记录层中的Cr浓度低于第三记录层中的Cr浓度。

9. 发明授权

US07033686B2 Perpendicular magnetic recording medium and method of manufacturing it 失效
公开(公告)号：US07033686B2
公开(公告)日：2006-04-25
申请号：US10701603
申请日：2003-11-06
申请人： Yoshiyuki Hirayama , Ichiro Tamai , Takayuki Ichihara , Hiroyuki Nakagawa , Hiroaki Nemoto , Mineaki Kodama , Ikuko Takekuma
发明人： Yoshiyuki Hirayama , Ichiro Tamai , Takayuki Ichihara , Hiroyuki Nakagawa , Hiroaki Nemoto , Mineaki Kodama , Ikuko Takekuma
IPC分类号： G11B5/66 , G11B5/70
CPC分类号： G11B5/65 , G11B5/656 , G11B5/66 , G11B5/667 , G11B5/732 , G11B5/7325 , G11B5/84
摘要： Disclosed are a perpendicular magnetic recording medium with lower medium noise, insusceptible to thermal fluctuation and high recording resolution and a method of manufacturing it. As the step of forming a metal layer at the time of forming a recording layer on a non-magnetic substrate via a plurality of underlayers and the step of forming an oxide layer with an average thickness of 0.2 nm or less are repeated, the crystal grains are magnetically isolated without disturbing the orientation of the crystal grain of the recording layer of the perpendicular magnetic recording medium or without degrading the magnetic characteristic of the crystal grain of the recording layer.

10. 发明申请

US20050142378A1 Perpendicular magnetic recording medium having alternatively layered structure of Co alloy and Pt thin film, its production method and apparatus 审中-公开
标题翻译：具有Co合金和Pt薄膜的层叠结构的垂直磁记录介质，其制造方法和装置
公开(公告)号：US20050142378A1
公开(公告)日：2005-06-30
申请号：US11012835
申请日：2004-12-14
申请人： Hiroaki Nemoto , Yuzuru Hosoe , Yoshiyuki Hirayama , Mineaki Kodama
发明人： Hiroaki Nemoto , Yuzuru Hosoe , Yoshiyuki Hirayama , Mineaki Kodama
IPC分类号： G11B5/673 , G11B5/64 , G11B5/65 , G11B5/851 , B05D5/12
CPC分类号： G11B5/65 , G11B5/851 , Y10T428/12875
摘要： Embodiments of the invention provide a granular medium structure and a significant increase of the Ku value of a magnetic material at the same time using a non-metal material, thereby obtaining a magnetic recording medium capable of high density recording. In one embodiment, a magnetic metal grain in a granular magnetic film made of magnetic metal grains and a non-magnetic material is obtained by laminating a ferromagnetic exchange metallic element that contains mainly Co or Fe and a Pt element alternately and the lamination period is set between about 0.35 nm and 0.9 nm, preferably between about 0.4 nm and 0.55 nm.
摘要翻译：本发明的实施例使用非金属材料同时提供磁性材料的粒状介质结构和显着提高磁性材料的K值，由此获得能够高密度的磁记录介质记录。在一个实施例中，由磁性金属颗粒和非磁性材料制成的颗粒状磁性膜中的磁性金属颗粒通过层叠主要包含Co或Fe和Pt元素的铁磁性交换金属元素交替地获得，并且设置层压周期在约0.35nm和0.9nm之间，优选在约0.4nm和0.55nm之间。

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