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JP2011151019A Phase contrast imaging and preparing tem for phase contrast imaging 有权
标题翻译：相位对比成像和准备相位对比成像的TEM
公开(公告)号：JP2011151019A
公开(公告)日：2011-08-04
申请号：JP2011007213
申请日：2011-01-17
申请人： Natl Research Council Of Canada , ナショナル・リサーチ・カウンシル・オブ・カナダ
发明人： MALAC MAREK , BELEGGIA MARCO , KAWASAKI MASAHIRO , EGERTON RAY
IPC分类号： H01J37/295 , H01J37/12 , H01J37/26
CPC分类号： H01J37/26 , H01J37/04 , H01J2237/2614
摘要： PROBLEM TO BE SOLVED: To provide a new method for phase contrast imaging in transmission electron microscopy. SOLUTION: In the method, an imaging electron beam itself is used to prepare a hole-free thin film for use as an effective phase plate, in some cases eliminating the need for ex-situ fabrication of a hole and reducing requirements for the precision of the ZPP hardware. The electron optical properties of the ZPP hardware are modified primarily in two ways: by boring a hole using the electron beam; and/or by modifying the electro-optical properties by charging induced by the primary beam. Furthermore a method where the sample is focused by a lens downstream from the ZPP hardware is disclosed. A method for transferring a back focal plane of the objective lens to a selected area aperture plane and optional plane conjugated with the back focal plane of the objective lens is also provided. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供透射电子显微镜相位成像的新方法。解决方案：在该方法中，使用成像电子束本身来制备用作有效相位板的无孔薄膜，在一些情况下消除了对孔的非原位制造的需要，并且减少了对 ZPP硬件的精度。 ZPP硬件的电子光学特性主要通过两种方式进行修改：通过使用电子束钻孔; 和/或通过由主光束引起的充电来改变电光特性。此外，公开了一种通过ZPP硬件下游的透镜来聚焦样品的方法。还提供了将物镜的后焦平面转移到与物镜的后焦平面共轭的选定区域孔径平面和可选平面的方法。版权所有（C）2011，JPO＆INPIT

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