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1. 发明专利

JP2008277743A Variable device circuit and method for manufacturing the same 审中-公开
标题翻译：可变装置电路及其制造方法
公开(公告)号：JP2008277743A
公开(公告)日：2008-11-13
申请号：JP2008013984
申请日：2008-01-24
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： RI SHIYAKU , YOSHIDA YUKIHISA , NISHINO TAMOTSU , INOUE HIROMOTO , SODA SHINNOSUKE , MIYAZAKI MORIYASU
IPC分类号： H01L21/822 , B81B3/00 , B81C1/00 , H01F27/00 , H01G4/40 , H01L27/04 , H03H1/00
摘要： PROBLEM TO BE SOLVED: To provide a variable device circuit having stable/low loss circuit characteristics that is manufactured at a low cost, by simultaneously forming a variable device and a stationary passive device, each having almost the same device structure on one side of a substrate, and to provide a method for manufacturing the same. SOLUTION: A high frequency variable component is provided with a variable switching device 21, a fixed capacitor device 22, a variable inductor device 23, a variable capacitor 24, and wiring that electrically connects each device formed on an upper surface of the substrate 1, and elecrical connections for each device can be selected by the actuations of the variable switching device 21. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种具有稳定/低损耗电路特性的可变器件电路，其以低成本制造，同时形成可变器件和固定无源器件，每个器件在一个器件上具有几乎相同的器件结构并提供其制造方法。解决方案：高频可变分量具有可变开关器件21，固定电容器器件22，可变电感器器件23，可变电容器24以及将形成在其上表面上的每个器件电连接的布线基板1，并且可以通过可变开关装置21的启动来选择每个装置的电连接。版权所有：（C）2009，JPO＆INPIT

2. 发明专利

JP2005229057A High-frequency integrated circuit and its manufacturing method 有权
标题翻译：高频集成电路及其制造方法
公开(公告)号：JP2005229057A
公开(公告)日：2005-08-25
申请号：JP2004038659
申请日：2004-02-16
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： NISHINO TAMOTSU , YOSHIDA YUKIHISA , RI SHIYAKU , TAKAGI SUNAO , MIYAGUCHI KENICHI , HANYA MASAKI , KAWAKAMI KENJI , HAMANO SATOSHI , TSURU MASAOMI , MIYAZAKI MORIYASU
IPC分类号： H01L21/822 , H01L21/304 , H01L27/04 , H01P1/12 , H03H7/075 , H03H7/20
摘要： PROBLEM TO BE SOLVED: To provide a high-frequency device, having simple structure and simple manufacturing processes, as compared with conventional technology and being capable of further reducing the transmission loss, and to provide a method for manufacturing the high-frequency device.
SOLUTION: A high frequency integrated circuit is constituted of forming two different elements out of a capacitor, an inductor, a line, and a switch on a silicon substrate by forming a plurality of depression parts which are mutually independent on one surface of the silicon substrate; forming a metal film, consisting of ground and a conductor pattern on the surface of the depression part side; forming a dielectric film on the surface of the metal film; and forming two different metallic patterns among the capacitor, the inductor, the line, or the switch on the dielectric film so as to correspond to the depression parts in the same process.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种与传统技术相比具有简单结构和简单制造工艺的高频装置，并且能够进一步降低传输损耗，并且提供一种制造高频的方法设备。解决方案：高频集成电路由在硅衬底上的电容器，电感器，线路和开关中形成两个不同的元件构成，该多个凹陷部分在硅衬底; 在凹陷部分侧的表面上形成由接地和导体图案组成的金属膜; 在金属膜的表面上形成电介质膜; 并且在电容器，电感器，线路或电介质膜上的开关之间形成两个不同的金属图案，以便在相同的工艺中对应于凹陷部分。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2009065042A High-frequency passive element and method of manufacturing the same 有权
标题翻译：高频被动元件及其制造方法
公开(公告)号：JP2009065042A
公开(公告)日：2009-03-26
申请号：JP2007232862
申请日：2007-09-07
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： RI SHIYAKU , NISHINO TAMOTSU , YOSHIDA YUKIHISA , MIYAZAKI MORIYASU
IPC分类号： H01F17/00 , B81B1/00 , B81C1/00 , H01F41/04 , H01F41/34 , H01L21/822 , H01L27/04
摘要： PROBLEM TO BE SOLVED: To provide a high-frequency passive element which is excellent in characteristics and achieves miniaturization, and to provide a method of manufacturing the same.
SOLUTION: A high-frequency passive element 101 has a substrate 1 wherein a first recess 9 is formed in a major surface, a first winding line conductor 2 which is formed on a bottom surface of the first recess 9 and an upper surface of which is formed approximately parallel to the major surface of the substrate 1, an insulating film 3 which is formed flat on the first winding line conductor 2 and the major surface of the substrate 1 and a second winding line conductor 4 formed on the insulating film 3.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种性能优异且实现小型化的高频无源元件，并提供其制造方法。解决方案：高频无源元件101具有基板1，其中第一凹槽9形成在主表面上，第一绕组线导体2形成在第一凹槽9的底表面上，上表面其形成为大致平行于基板1的主表面，在第一绕组导线2和基板1的主表面上平坦地形成的绝缘膜3和形成在绝缘膜上的第二绕组导线4 3.版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2007157922A High-frequency hybrid 审中-公开
标题翻译：高频混合
公开(公告)号：JP2007157922A
公开(公告)日：2007-06-21
申请号：JP2005349461
申请日：2005-12-02
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： RI SHIYAKU , DEO SHINICHI , YOSHIDA YUKIHISA , SODA SHINNOSUKE , TAGUCHI MOTOHISA
IPC分类号： H01L21/822 , H01L27/04
摘要： PROBLEM TO BE SOLVED: To provide a high-frequency hybrid which has a small size, a low loss, and stable electric properties.
SOLUTION: Solenoid inductors are each equipped with an insulating support film 4 formed so as to cover, at least, the opening surface of a recess 2, two or more first conductor inductor lines 3a which are located below the insulating support film 4 and formed in parallel with each other without coming into contact with the inner surface of the recess 2, two or more second conductor inductor lines 6a formed above the insulating support film 4, a first joint 5 which connects the one end of the first conductor inductor 3a to the end of the second conductor inductor line 6a corresponding to the first conductor inductor line 3a, and a second joint 5 which connects the other end of the first conductor inductor line 3a to the one end of the second conductor inductor line 6a next to the corresponding second conductor inductor line 6a. N pieces of the solenoid inductors are connected together through shunt capacitors or connected together direct to constitute a closed circuit.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供具有小尺寸，低损耗和稳定电性能的高频混合。解决方案：螺线管电感器各自配备有绝缘支撑膜4，绝缘支撑膜4形成为至少覆盖凹部2的开口表面，位于绝缘支撑膜4下方的两个或更多个第一导体电感线3a 并且彼此并联形成，而不与凹部2的内表面接触，形成在绝缘支撑膜4上方的两个或更多个第二导体电感线6a，连接第一导体电感器的一端的第一接头5 3a到与第一导体电感线3a对应的第二导体电感线6a的端部，以及将第一导体电感线3a的另一端连接到第二导体电感线6a的一端的第二接头5 对应的第二导体电感线6a。 N个螺线管电感器通过并联电容器连接在一起直接连接在一起构成闭合电路。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2005244084A Spiral high-frequency coil and manufacturing method thereof 审中-公开
标题翻译：螺旋高频线圈及其制造方法
公开(公告)号：JP2005244084A
公开(公告)日：2005-09-08
申请号：JP2004054587
申请日：2004-02-27
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： RI SHIYAKU , NISHINO TAMOTSU , YOSHIDA YUKIHISA , FUKAMI TATSUYA
IPC分类号： H01F41/04 , H01F17/00 , H01F17/02
摘要： PROBLEM TO BE SOLVED: To reduce a cost and a thickness as a whole by simplifying a working process of a micro high-frequency coil of low loss.
SOLUTION: There are provided a silicon substrate 100 formed with a recess 102, a plurality of first gold wires 201-207 almost parallel to one another without contacting the bottom surface of the recess 102, and a plurality of second cold wires 302-307 bridged almost parallel to one another on the opening surface. Ends of the first and the second gold wires are connected to each other to constitute a continuous spiral high-frequency coil.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过简化低损耗的微型高频线圈的工作过程来降低整体的成本和厚度。解决方案：提供了形成有凹槽102的硅衬底100，多个第一金线201-207，其几乎彼此平行但不与凹部102的底表面接触，并且多个第二冷线302 -307在开口表面上彼此几乎平行。第一和第二金线的端部彼此连接以构成连续的螺旋高频线圈。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2005006200A High frequency switch, unipolar double throw switch, multipolar multiple throw switch 有权
标题翻译：高频开关，单极双通道开关，多路多通道开关
公开(公告)号：JP2005006200A
公开(公告)日：2005-01-06
申请号：JP2003169742
申请日：2003-06-13
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： HANYA MASAKI , MIYAGUCHI KENICHI , YOSHIDA YUKIHISA , NISHINO TAMOTSU , RI SHIYAKU , SUEHIRO YOSHIYUKI , HIEDA MORISHIGE , IIDA AKIO , ISHIDA OSAMI
IPC分类号： H01P1/10
摘要： PROBLEM TO BE SOLVED: To provide a low height high frequency switch for a microwave band or the like having a small electromagnetic interference with other elements arranged closely.
SOLUTION: The high frequency switch comprises a pair of signal lines provided with a space on the inside surface of the cavity of a substrate, a pair of first electrodes left some space with the pair of the signal lines and extended from the inside of the cavity towards the front surface of the substrate on both sides of the signal lines, a flexible dielectric member straddled over both edges of the cavity and supported on its both sides on the substrate having flexible elasticity between a close position proximate to the pair of the signal lines and a separated position separated from the pair of the signal lines, a conductive member fixed to the rear side of the flexible dielectric member for conducting continuity between the pair of the signal lines when the flexible dielectric member locates in the close position, and a second electrode fixed to the front side of the flexible dielectric member for respectively electrostatic coupling to the pair of first electrodes through the flexible dielectric member and for generating suction force to flex the flexible dielectric member.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种与紧密布置的其他元件具有小的电磁干扰的微波带等的低高度高频开关。解决方案：高频开关包括在衬底的腔的内表面上设置有空间的一对信号线，一对第一电极与一对信号线留下一些空间并从内部延伸的空腔朝向信号线两侧的基板的前表面，柔性电介质部件跨越空腔的两个边缘并且被支撑在基板的两侧上，该基板在基板之间具有柔性弹性，该弹性弹性在接近该对所述信号线和与所述一对信号线分离的分离位置;固定到所述柔性电介质构件的后侧的导电构件，用于当所述柔性电介质构件位于所述闭合位置时，在所述一对信号线之间导通，以及第二电极，其固定到柔性电介质构件的前侧，用于分别通过所述fl静电耦合到所述一对第一电极并且用于产生用于挠曲柔性电介质构件的吸力。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2009009884A Mems switch, and manufacturing method thereof 审中-公开
标题翻译： MEMS开关及其制造方法
公开(公告)号：JP2009009884A
公开(公告)日：2009-01-15
申请号：JP2007171755
申请日：2007-06-29
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： INOUE HIROMOTO , YOSHIDA YUKIHISA , RI SHIYAKU , SODA SHINNOSUKE
IPC分类号： H01H49/00 , B81B3/00 , B81C1/00 , H01H59/00
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an MEMS switch capable of improving a switching characteristic and reliability; and an MEMS switch.
SOLUTION: A sacrifice layer arranged between a movable electrode 5 and an attraction electrode 4 constituting this MEMS switch is formed by being divided into a first sacrifice layer 8 and a second sacrifice layer 9 formed of materials different from each other, and a region where both of them are superposed on each other is formed.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供能够提高开关特性和可靠性的MEMS开关的制造方法; 和MEMS开关。解决方案：将构成该MEMS开关的可动电极5和吸引电极4之间的牺牲层分成由彼此不同的材料形成的第一牺牲层8和第二牺牲层9，形成两者彼此重叠的区域。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2006339197A High-frequency inductor element 审中-公开
标题翻译：高频电感元件
公开(公告)号：JP2006339197A
公开(公告)日：2006-12-14
申请号：JP2005158614
申请日：2005-05-31
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： RI SHIYAKU , YUASA TAKESHI , YOSHIDA YUKIHISA , TAGUCHI MOTOHISA
IPC分类号： H01L21/822 , H01F17/00 , H01L27/04
摘要： PROBLEM TO BE SOLVED: To provide a high-frequency inductor element which can be manufactured by a simpler manufacturing step and at lower cost than heretofore, and which uses one substrate and has low loss and high inductance.
SOLUTION: In the high-frequency inductor element shown by Fig.1, a grounding conductor 11 is formed on the inside surface of a recess 101 that is formed at the center of a silicon substrate 1, and the recess 101 is filled with a sacrifice layer 12 that is removed later (Fig.3). Then a winding line conductor 13 is formed at the center of the sacrifice layer 12, and an insulating supporting film 14 is formed so as to cover an opening surface of the recess 101. A winding line conductor 16 is formed at the center of the dielectric supporting film 14, and one end of the winding line conductor 13 and one end of the winding line conductor 16 are connected by a through hole 15, while the other end of the winding line conductor 13 is connected to a connection terminal conductor 20 and the other end of the winding line conductor 16 is connected to a connection terminal conductor 19.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以通过更简单的制造步骤制造并且以比迄今为止更低的成本制造的高频电感器元件，并且其使用一个基板并具有低损耗和高电感。解决方案：在图1所示的高频电感器元件中，在形成在硅衬底1的中心处的凹部101的内表面上形成接地导体11，并且填充凹部101 具有稍后去除的牺牲层12（图3）。然后在牺牲层12的中心形成绕组线导体13，并且形成绝缘支撑膜14以覆盖凹部101的开口表面。绕组线导体16形成在电介质的中心绕线导体13的一端和绕线导体16的一端由通孔15连接，而绕线导体13的另一端与连接端子导体20连接，卷绕线导体16的另一端连接到连接端子导体19.版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005286617A Delay line 有权
标题翻译：延迟线
公开(公告)号：JP2005286617A
公开(公告)日：2005-10-13
申请号：JP2004096528
申请日：2004-03-29
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： NISHINO TAMOTSU , RI SHIYAKU , YOSHIDA YUKIHISA , TAKAGI SUNAO
IPC分类号： H01P9/02 , H03H7/34
摘要： PROBLEM TO BE SOLVED: To provide a delay line of which the cross-sectional dimension is small, passage loss is small, and the amount of phase change is large.
SOLUTION: The delay line is provided with a spiral conductor line which is formed on a substrate and composed of a plurality of coils 10-13, a ground conductor 21 formed on the substrate, a plurality of upper electrodes that are formed on the substrate and respectively connected to the plurality of coils 10-13 of the spiral conductor line, and a plurality of capacitors 22-25 formed between the ground conductors 21.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供横截面尺寸小的通道损耗小，相变量大的延迟线。解决方案：延迟线设置有形成在基板上并由多个线圈10-13，形成在基板上的接地导体21，形成在基板上的多个上电极组成的螺旋导线并且分别连接到螺旋导体线的多个线圈10-13，以及形成在接地导体21之间的多个电容器22-25。（C）2006，JPO＆NCIPI

10. 发明专利

JP2005191089A High-frequency coil and its manufacturing method 审中-公开
标题翻译：高频线圈及其制造方法
公开(公告)号：JP2005191089A
公开(公告)日：2005-07-14
申请号：JP2003427770
申请日：2003-12-24
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： NISHINO TAMOTSU , YOSHIDA YUKIHISA , OHASHI HIDEMASA , SUEMATSU KENJI , RI SHIYAKU
IPC分类号： H01F41/04 , H01F17/00 , H01F17/02
摘要： PROBLEM TO BE SOLVED: To reduce a cost by simplifying a working process for a high-frequency coil having a minute low loss while thinning the whole thickness.
SOLUTION: The continuous spiral high-frequency coil is manufactured by connecting a silicon substrate 100 with a recessed section 101, a plurality of first gold wires 201 to 205 mounted in approximately parallel on the surface of the recessed section 101 respectively, a plurality of second gold wires 301 to 304 built in approximately parallel on an opening surface respectively, and the tips of the first and second gold wires.
COPYRIGHT: (C)2005,JPO&NCIPI

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