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1. 发明授权

US09836855B2 Determining a depth map from images of a scene 有权
公开(公告)号：US09836855B2
公开(公告)日：2017-12-05
申请号：US13606822
申请日：2012-09-07
申请人： David Morgan-Mar , Tuan Quang Pham , Matthew R Arnison , Kieran Gerard Larkin
发明人： David Morgan-Mar , Tuan Quang Pham , Matthew R Arnison , Kieran Gerard Larkin
IPC分类号： G06T7/571 , H04N13/02 , G06T7/00
CPC分类号： G06T7/571 , G06T2207/10148
摘要： A technique determines a depth measurement associated with a scene captured by an image capture device. The technique receives at least first and second images of the scene, in which the first image is captured using at least one different camera parameter than that of the second image. At least first and second image patches are selected from the first and second images, respectively, the selected patches corresponding to a common part of the scene. The selected image patches are used to determine which of the selected image patches provides a more focused representation of the common part. At least one value is calculated based on a combination of data in the first and second image patches, the combination being dependent on the more focused image patch. The depth measurement of the common part of the scene is determined from the at least one calculated value.

2. 发明授权

US08571300B2 Focus finding and alignment using a split linear mask 失效
标题翻译：使用分割线性掩模进行焦点查找和对齐
公开(公告)号：US08571300B2
公开(公告)日：2013-10-29
申请号：US12912053
申请日：2010-10-26
申请人： Matthew R. Arnison , Tuan Quang Pham
发明人： Matthew R. Arnison , Tuan Quang Pham
IPC分类号： G06K9/00
CPC分类号： G03F9/7026
摘要： A method of determining a focus parameter for aligning a water in an exposure tool within a measurement tolerance required for the exposure tool, the exposure tool using a lens system for alignment. A test chart is provided having a sharp auto-correlation associated with the wafer. An image of the test chart is captured using a lens pupil mask having at least two phase ramps that are non-parallel. The captured image of the test charge is auto-correlated to determine the position of the test chart relative to a focal position of the lens system. The focus parameter for alignment of the wafer is determined using the determined position of the test chart, whereby the focus parameter is determined within the measurement tolerance required by the exposure tool.
摘要翻译：一种确定用于使曝光工具中的水对准曝光工具所需的测量公差内的焦点参数的方法，所述曝光工具使用用于对准的透镜系统。提供具有与晶片相关联的清晰自相关的测试图。使用具有不平行的至少两个相位斜坡的透镜光瞳掩模来捕获测试图的图像。测试电荷的拍摄图像是自动相关的，以确定测试图相对于透镜系统焦点位置的位置。使用确定的测试图的位置确定晶片对准的焦点参数，由此在曝光工具所需的测量公差内确定焦点参数。

3. 发明申请

US20130063566A1 DETERMINING A DEPTH MAP FROM IMAGES OF A SCENE 有权
标题翻译：从场景图像中确定深度图
公开(公告)号：US20130063566A1
公开(公告)日：2013-03-14
申请号：US13606822
申请日：2012-09-07
申请人： David Morgan-Mar , Tuan Quang Pham , Matthew R. Arnison , Kieran Gerard Larkin
发明人： David Morgan-Mar , Tuan Quang Pham , Matthew R. Arnison , Kieran Gerard Larkin
IPC分类号： H04N13/02
CPC分类号： G06T7/571 , G06T2207/10148
摘要： A technique determines a depth measurement associated with a scene captured by an image capture device. The technique receives at least first and second images of the scene, in which the first image is captured using at least one different camera parameter than that of the second image. At least first and second image patches are selected from the first and second images, respectively, the selected patches corresponding to a common part of the scene. The selected image patches are used to determine which of the selected image patches provides a more focused representation of the common part. At least one value is calculated based on a combination of data in the first and second image patches, the combination being dependent on the more focused image patch. The depth measurement of the common part of the scene is determined from the at least one calculated value.
摘要翻译：技术确定与由图像捕获设备捕获的场景相关联的深度测量。该技术至少接收场景的第一和第二图像，其中利用与第二图像相比不同的相机参数捕获第一图像。分别从第一和第二图像中选择至少第一和第二图像补丁，所选择的补丁对应于场景的公共部分。所选择的图像补丁用于确定所选择的图像补丁中的哪一个提供了公共部分的更集中的表示。基于第一和第二图像补丁中的数据的组合来计算至少一个值，该组合取决于更聚焦的图像补丁。从所述至少一个计算值确定场景的公共部分的深度测量。

4. 发明申请

US20110096981A1 Focus Finding And Alignment Using A Split Linear Mask 失效
标题翻译：使用分割线性面膜对焦寻找和对齐
公开(公告)号：US20110096981A1
公开(公告)日：2011-04-28
申请号：US12912053
申请日：2010-10-26
申请人： Matthew R. Arnison , Tuan Quang Pham
发明人： Matthew R. Arnison , Tuan Quang Pham
IPC分类号： G06K9/00
CPC分类号： G03F9/7026
摘要： Disclosed is a method for determining a focus parameter for aligning a wafer (W) in an exposure tool (1000) within a measurement tolerance required for the exposure tool, the exposure tool using a lens system (EL) for alignment. The method provides a test chart (1410) associated with the wafer, the test chart having a sharp auto-correlation and then captures (1430), using a lens pupil mask (1420), an image of the test chart, the lens pupil mask having at least two phase ramps which are non-parallel. An auto-correlation (1520) is performed on the captured image (1510) of the test chart to determine the position of the test chart relative to a focal position of the lens system. The focus parameter is then determined (1530, 1540, 1550) for alignment of the wafer using the determined position of the test chart, whereby the focus parameter is determined within the measurement tolerance required by the exposure tool.
摘要翻译：公开了一种用于确定用于使曝光工具（1000）内的晶片（W）在曝光工具所需的测量公差内的对焦参数的方法，所述曝光工具使用用于对准的透镜系统（EL）。该方法提供与晶片相关联的测试图（1410），测试图具有清晰的自相关，然后使用透镜瞳孔掩模（1420）捕获（1430），测试图的图像，透镜瞳孔掩模具有不平行的至少两个相位斜坡。对测试图的拍摄图像（1510）执行自相关（1520）以确定测试图相对于透镜系统的焦点位置的位置。然后确定焦点参数（1530,1540,1550），用于使用测试图的确定位置来对准晶片，由此在曝光工具所需的测量公差内确定焦点参数。

5. 发明授权

US08351740B2 Correlatability analysis for sparse alignment 失效
标题翻译：稀疏对齐的相关性分析
公开(公告)号：US08351740B2
公开(公告)日：2013-01-08
申请号：US12332251
申请日：2008-12-10
申请人： Tuan Quang Pham , Stephen James Hardy
发明人： Tuan Quang Pham , Stephen James Hardy
IPC分类号： G06K9/00
CPC分类号： G06K9/32
摘要： Disclosed herein is a method of estimating a geometrical relationship between a first image (101) and a second image (102), wherein the second image (102) includes a noise component. The method determines a location and size of each one of a plurality of image patches (201), based on the noise component included in the second image (102) and correlation information derived from the first image (101). The method then identifies a plurality of first image areas in the first image and a corresponding plurality of second image areas in the second image, based on the location and size of each one of the plurality of image patches. Each first image area of the first image (101) corresponds to a related second image area of the second image (102). The method then determines a geometrical relationship between the first and second images (101, 102) by comparing, for each one of the first image areas, information located within the first image area with information located within the corresponding related second image area.
摘要翻译：这里公开了一种估计第一图像（101）和第二图像（102）之间的几何关系的方法，其中第二图像（102）包括噪声分量。该方法基于包括在第二图像（102）中的噪声分量和从第一图像（101）导出的相关信息，确定多个图像块（201）中的每一个的位置和大小。该方法然后基于多个图像块中的每一个的位置和大小来识别第一图像中的多个第一图像区域和第二图像中的相应多个第二图像区域。第一图像（101）的每个第一图像区域对应于第二图像（102）的相关的第二图像区域。该方法然后通过将位于第一图像区域内的信息与位于相应的相关第二图像区域内的信息进行比较来确定第一和第二图像（101,102）之间的几何关系。

6. 发明申请

US20130028472A1 MULTI-HYPOTHESIS PROJECTION-BASED SHIFT ESTIMATION 有权
标题翻译：多基于投影的移动估计
公开(公告)号：US20130028472A1
公开(公告)日：2013-01-31
申请号：US13559382
申请日：2012-07-26
申请人： Tuan Quang Pham
发明人： Tuan Quang Pham
IPC分类号： G06K9/68
CPC分类号： G06T7/0026 , G06T7/32 , G06T2207/20016 , G06T2207/20068 , H04N5/23238 , H04N5/23254 , H04N5/23267
摘要： A method for determining a shift between two images, determining a first correlation in a first direction, the first correlation being derived from a first image projection characteristics and a second image projection characteristics, and a second correlation in a second direction, the second correlation being derived from the first image projection characteristics and the second image projection characteristics. The method determines a set of hypotheses from a first plurality of local maxima of the first correlation and a second plurality of local maxima of the second correlation. The method then calculates a two-dimensional correlation score between the first image and the second image based on a shift indicated in at least one of the set of hypotheses, and selecting one of the set of hypotheses as the shift between the first image and the second image based on the calculated two-dimensional correlation score.
摘要翻译：一种用于确定两个图像之间的偏移的方法，确定第一方向上的第一相关性，从第一图像投影特性和第二图像投影特性导出第一相关性，以及在第二方向上确定第二相关性，第二相关是衍生自第一图像投影特性和第二图像投影特性。该方法从第一相关的第一多个局部最大值和第二相关的第二多个局部最大值确定一组假设。然后，该方法基于在该组假设中的至少一个中指示的移位来计算第一图像和第二图像之间的二维相关得分，并且选择该组假设之一作为第一图像和第二图像之间的偏移基于计算的二维相关分数的第二图像。

7. 发明申请

US20090148051A1 CORRELATABILITY ANALYSIS FOR SPARSE ALIGNMENT 失效
标题翻译：相关对准的相关性分析
公开(公告)号：US20090148051A1
公开(公告)日：2009-06-11
申请号：US12332251
申请日：2008-12-10
申请人： Tuan Quang Pham , Stephen James Hardy
发明人： Tuan Quang Pham , Stephen James Hardy
IPC分类号： G06K9/68 , G06K9/64
CPC分类号： G06K9/32
摘要： Disclosed herein is a method of estimating a geometrical relationship between a first image (101) and a second image (102), wherein the second image (102) includes a noise component. The method determines a location and size of each one of a plurality of image patches (201), based on the noise component included in the second image (102) and correlation information derived from the first image (101). The method then identifies a plurality of first image areas in the first image and a corresponding plurality of second image areas in the second image, based on the location and size of each one of the plurality of image patches. Each first image area of the first image (101) corresponds to a related second image area of the second image (102). The method then determines a geometrical relationship between the first and second images (101, 102) by comparing, for each one of the first image areas, information located within the first image area with information located within the corresponding related second image area.
摘要翻译：这里公开了一种估计第一图像（101）和第二图像（102）之间的几何关系的方法，其中第二图像（102）包括噪声分量。该方法基于包括在第二图像（102）中的噪声分量和从第一图像（101）导出的相关信息，确定多个图像块（201）中的每一个的位置和大小。该方法然后基于多个图像块中的每一个的位置和大小来识别第一图像中的多个第一图像区域和第二图像中的相应多个第二图像区域。第一图像（101）的每个第一图像区域对应于第二图像（102）的相关的第二图像区域。该方法然后通过将位于第一图像区域内的信息与位于相应的相关第二图像区域内的信息进行比较来确定第一和第二图像（101,102）之间的几何关系。

8. 发明授权

US08824735B2 Multi-hypothesis projection-based shift estimation 有权
标题翻译：基于多假设投影的移位估计
公开(公告)号：US08824735B2
公开(公告)日：2014-09-02
申请号：US13559382
申请日：2012-07-26
申请人： Tuan Quang Pham
发明人： Tuan Quang Pham
IPC分类号： G06K9/00 , G06T7/00 , H04N5/228 , H04N5/232
CPC分类号： G06T7/0026 , G06T7/32 , G06T2207/20016 , G06T2207/20068 , H04N5/23238 , H04N5/23254 , H04N5/23267
摘要： A method for determining a shift between two images, determining a first correlation in a first direction, the first correlation being derived from a first image projection characteristics and a second image projection characteristics, and a second correlation in a second direction, the second correlation being derived from the first image projection characteristics and the second image projection characteristics. The method determines a set of hypotheses from a first plurality of local maxima of the first correlation and a second plurality of local maxima of the second correlation. The method then calculates a two-dimensional correlation score between the first image and the second image based on a shift indicated in at least one of the set of hypotheses, and selecting one of the set of hypotheses as the shift between the first image and the second image based on the calculated two-dimensional correlation score.
摘要翻译：一种用于确定两个图像之间的偏移的方法，确定第一方向上的第一相关性，从第一图像投影特性和第二图像投影特性导出第一相关性，以及在第二方向上确定第二相关性，第二相关是衍生自第一图像投影特性和第二图像投影特性。该方法从第一相关的第一多个局部最大值和第二相关的第二多个局部最大值确定一组假设。然后，该方法基于在该组假设中的至少一个中指示的移位来计算第一图像和第二图像之间的二维相关得分，并且选择该组假设之一作为第一图像和第二图像之间的偏移基于计算的二维相关分数的第二图像。

9. 发明授权

US08208756B2 Alpha-masked RST image registration 有权
标题翻译： Alpha掩码的RST映像注册
公开(公告)号：US08208756B2
公开(公告)日：2012-06-26
申请号：US12336505
申请日：2008-12-16
申请人： Tuan Quang Pham
发明人： Tuan Quang Pham
IPC分类号： G06K9/36 , G06K9/32
CPC分类号： G06K9/6203 , G06K2209/29 , G06T7/30 , G06T2207/10008 , G06T2207/30176
摘要： A method (500) of determining rotation and scale transformation parameters is disclosed. The method (500) determines a plurality of weight values associated with one or more parts of at least one of a first and second image (e.g., 154. 155). A representation of each of the first and second images (154. 155) is formed using the weight values, the representation being substantially invariant to translation of the first and second images (154. 155). Rotation and scale transformation parameters relating the first and second images (154. 155) are determined based on the representation of each of the first and second images (154. 155). The rotation and scale transformation parameters are stored.
摘要翻译：公开了一种确定旋转和缩放变换参数的方法（500）。方法（500）确定与第一和第二图像中的至少一个图像（例如，1544.155）的一个或多个部分相关联的多个权重值。使用权重值形成第一和第二图像（1544.155）中的每一个的表示，该表示对于第一和第二图像的平移基本上是不变的（1544.155）。基于第一和第二图像中的每一个的表示来确定与第一和第二图像相关的旋转和缩放变换参数（1544.155）。存储旋转和缩放变换参数。

10. 发明申请

US20090154832A1 ALPHA-MASKED RST IMAGE REGISTRATION 有权
标题翻译： ALPHA-MASKED RST图像注册
公开(公告)号：US20090154832A1
公开(公告)日：2009-06-18
申请号：US12336505
申请日：2008-12-16
申请人： Tuan Quang Pham
发明人： Tuan Quang Pham
IPC分类号： G06K9/36 , G06K9/32
CPC分类号： G06K9/6203 , G06K2209/29 , G06T7/30 , G06T2207/10008 , G06T2207/30176
摘要： A method (500) of determining rotation and scale transformation parameters is disclosed. The method (500) determines a plurality of weight values associated with one or more parts of at least one of a first and second image (e.g., 154. 155). A representation of each of the first and second images (154. 155) is formed using the weight values, the representation being substantially invariant to translation of the first and second images (154. 155). Rotation and scale transformation parameters relating the first and second images (154. 155) are determined based on the representation of each of the first and second images (154. 155). The rotation and scale transformation parameters are stored.
摘要翻译：公开了一种确定旋转和缩放变换参数的方法（500）。方法（500）确定与第一和第二图像中的至少一个图像（例如，1544.155）的一个或多个部分相关联的多个权重值。使用权重值形成第一和第二图像（1544.155）中的每一个的表示，该表示对于第一和第二图像的平移基本上是不变的（1544.155）。基于第一和第二图像中的每一个的表示来确定与第一和第二图像相关的旋转和缩放变换参数（1544.155）。存储旋转和缩放变换参数。

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