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    • 7. 发明申请
    • GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT
    • 用于在充电颗粒仪器中进行STEM分析的网格保持器
    • US20100025580A1
    • 2010-02-04
    • US12533565
    • 2009-07-31
    • Matthew HammerGonzalo Amador
    • Matthew HammerGonzalo Amador
    • H01J37/26H01J37/20
    • H01J37/26H01J37/20H01J37/3056H01J2237/201H01J2237/20207H01J2237/206H01J2237/31745H01J2237/31749
    • A grid holder for STEM analysis in a charged-particle instrument has a base jaw and a pivoting jaw. Both jaws have a substantially congruent inclined portion. The base jaw has a flat portion for mounting the holder on the sample carousel of a charged-particle instrument, such as a dual beam FIB. The inclined portion of the jaws is inclined to the flat portion of the holder at an angle A approximately equal to the difference between 90 degrees and the angle between the electron beam and the ion beam in the charged-particle instrument. The inclined portion of the jaws has a pocket for receiving and holding a sample grid. When a sample is mounted on the grid and the grid is held by the grid holder, the sample will be correctly oriented for ion-beam thinning when the sample carousel is horizontal. The thinned sample may then be placed perpendicular to the electron beam for STEM analysis by tilting the sample carousel by the same angle A.
    • 带电粒子仪器中STEM分析的格栅支架具有基座卡爪和枢转卡爪。 两个钳口具有大致一致的倾斜部分。 基座钳具有用于将支架安装在带电粒子仪器(例如双光束FIB)的样品转盘上的平坦部分。 钳口的倾斜部分以大致等于带电粒子仪器中的90度与电子束和离子束之间的角度的角度A相对于保持器的平坦部分倾斜。 夹爪的倾斜部分具有用于接收和保持样品网格的口袋。 当样品安装在栅格上并且格栅由栅格保持器保持时,样品转盘水平时样品将被正确定向以进行离子束变薄。 然后可以将样品转盘垂直于电子束放置以进行STEM分析,将样品转盘倾斜相同的角度A.