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1. 发明授权

US08329479B2 Information managing method, information managing apparatus and substrate processing system 有权
标题翻译：信息管理方法，信息管理装置和基板处理系统
公开(公告)号：US08329479B2
公开(公告)日：2012-12-11
申请号：US12423582
申请日：2009-04-14
申请人： Kazuhide Asai , Hiroyuki Iwakura , Toshiro Koshimaki , Kayoko Yashiki
发明人： Kazuhide Asai , Hiroyuki Iwakura , Toshiro Koshimaki , Kayoko Yashiki
IPC分类号： H01L21/00
CPC分类号： G05B19/4183 , G05B2219/31323 , G05B2219/31455 , G05B2219/45031 , Y02P90/10 , Y02P90/24
摘要： An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.
摘要翻译：一种用于管理信息的信息管理方法，其基于从基板处理设备发送的包含设备信息或事件信息的电子消息，包括：将包含设备信息的电子消息的发送时间的基板处理设备的设备信息存储在第一装置信息存储单元; 当发送包含事件信息的电子消息时，比较用于累积事件信息的条件和装置信息; 并且当所述条件彼此一致时，与所述事件信息已经被生成的时间相关联地将所述装置信息存储在第二装置信息存储单元中。

2. 发明申请

US20090265322A1 INFORMATION MANAGING METHOD, INFORMATION MANAGING APPARATUS AND SUBSTRATE PROCESSING SYSTEM 有权
标题翻译：信息管理方法，信息管理装置和基板处理系统
公开(公告)号：US20090265322A1
公开(公告)日：2009-10-22
申请号：US12423582
申请日：2009-04-14
申请人： Kazuhide ASAI , Hiroyuki Iwakura , Toshiro Koshimaki , Kayoko Yashiki
发明人： Kazuhide ASAI , Hiroyuki Iwakura , Toshiro Koshimaki , Kayoko Yashiki
IPC分类号： G06F17/30
CPC分类号： G05B19/4183 , G05B2219/31323 , G05B2219/31455 , G05B2219/45031 , Y02P90/10 , Y02P90/24
摘要： An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.
摘要翻译：一种用于管理信息的信息管理方法，其基于从基板处理设备发送的包含设备信息或事件信息的电子消息，包括：将包含设备信息的电子消息的发送时间的基板处理设备的设备信息存储在第一装置信息存储单元; 当发送包含事件信息的电子消息时，比较用于累积事件信息的条件和装置信息; 并且当所述条件彼此一致时，与所述事件信息已经被生成的时间相关联地将所述装置信息存储在第二装置信息存储单元中。

3. 发明授权

US08447424B2 Substrate processing system and group management system 有权
标题翻译：基板处理系统和组管理系统
公开(公告)号：US08447424B2
公开(公告)日：2013-05-21
申请号：US12805199
申请日：2010-07-19
申请人： Kazuhide Asai , Hiroyuki Iwakura
发明人： Kazuhide Asai , Hiroyuki Iwakura
IPC分类号： G06F19/00 , G06F15/173
CPC分类号： H04L12/66
摘要： It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device.
摘要翻译：旨在提供一种能够实现基板处理装置的更灵活和更简化的结构的基板处理系统和组管理系统。根据本发明的基板处理系统具有多个用于处理基板的基板处理装置和连接到基板处理装置的组管理系统，组管理系统包括用于存储结构信息的结构信息存储装置（结构管理装置），用于基于存储在结构信息存储装置中的结构信息与多个基板处理装置中的至少一个通信的多个通信装置（连接管理装置），以及连接到结构信息存储装置中的装置信息存储装置（数据管理装置）基于存储在结构信息存储装置中的结构信息，存储与通信装置进行通信的基板处理装置有关的信息。

4. 发明申请

US20080243296A1 Substrate processing system and group management system 有权
标题翻译：基板处理系统和组管理系统
公开(公告)号：US20080243296A1
公开(公告)日：2008-10-02
申请号：US12076824
申请日：2008-03-24
申请人： Kazuhide Asai , Hiroyuki Iwakura
发明人： Kazuhide Asai , Hiroyuki Iwakura
IPC分类号： G06F19/00 , G06F3/048
CPC分类号： H04L12/66
摘要： It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device.
摘要翻译：旨在提供一种能够实现基板处理装置的更灵活和更简化的结构的基板处理系统和组管理系统。根据本发明的基板处理系统具有多个用于处理基板的基板处理装置和连接到基板处理装置的组管理系统，组管理系统包括用于存储结构信息的结构信息存储装置（结构管理装置），用于基于存储在结构信息存储装置中的结构信息与多个基板处理装置中的至少一个通信的多个通信装置（连接管理装置），以及连接到结构信息存储装置中的装置信息存储装置（数据管理装置）基于存储在结构信息存储装置中的结构信息，存储与通信装置进行通信的基板处理装置有关的信息。

5. 发明申请

US20100324718A1 Substrate processing system and group management system 有权
标题翻译：基板处理系统和组管理系统
公开(公告)号：US20100324718A1
公开(公告)日：2010-12-23
申请号：US12805199
申请日：2010-07-19
申请人： Kazuhide Asai , Hiroyuki Iwakura
发明人： Kazuhide Asai , Hiroyuki Iwakura
IPC分类号： G06F19/00
CPC分类号： H04L12/66
摘要： It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device.
摘要翻译：旨在提供一种能够实现基板处理装置的更灵活和更简化的结构的基板处理系统和组管理系统。根据本发明的基板处理系统具有多个用于处理基板的基板处理装置和连接到基板处理装置的组管理系统，组管理系统包括用于存储结构信息的结构信息存储装置（结构管理装置），用于基于存储在结构信息存储装置中的结构信息与多个基板处理装置中的至少一个通信的多个通信装置（连接管理装置），以及连接到结构信息存储装置中的装置信息存储装置（数据管理装置）基于存储在结构信息存储装置中的结构信息，存储与通信装置进行通信的基板处理装置有关的信息。

6. 发明授权

US08538571B2 Substrate processing system, group managing apparatus, and method of analyzing abnormal state 有权
标题翻译：基板处理系统，组管理装置和异常状态分析方法
公开(公告)号：US08538571B2
公开(公告)日：2013-09-17
申请号：US12884568
申请日：2010-09-17
申请人： Kazuhide Asai , Hiroyuki Iwakura , Kazuyoshi Yamamoto
发明人： Kazuhide Asai , Hiroyuki Iwakura , Kazuyoshi Yamamoto
IPC分类号： G06F19/00
CPC分类号： G05B23/0278 , G05B2219/31337
摘要： A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for indentifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.
摘要翻译：维护工程师可以以较少的难度快速正确地分析异常状态，而不依赖于他/她的技能。基板处理系统包括：基板处理装置，被配置为根据限定处理顺序和处理条件的配方进行操作，以及连接到基板处理装置的组管理装置。组管理装置包括分析支持单元。分析支持单元被配置为提取与用于识别执行食谱时发生的异常状态的异常状态信息有关的检查项目信息，以及用于识别发生异常状态的基板处理装置的类型的装置类型信息，并且准备包括提取的检查项目信息的检查项目表。

7. 发明授权

US07813828B2 Substrate processing system and group management system 有权
公开(公告)号：US07813828B2
公开(公告)日：2010-10-12
申请号：US12076824
申请日：2008-03-24
申请人： Kazuhide Asai , Hiroyuki Iwakura
发明人： Kazuhide Asai , Hiroyuki Iwakura
IPC分类号： G06F19/00 , G06F15/173
CPC分类号： H04L12/66
摘要： It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device.

8. 发明申请

US20120323855A1 SUBSTRATE PROCESSING SYSTEM AND GROUP MANAGING APPARATUS 有权
标题翻译：基板处理系统和组管理装置
公开(公告)号：US20120323855A1
公开(公告)日：2012-12-20
申请号：US13576537
申请日：2011-02-08
申请人： Yoshitaka Koyama , Hiroyuki Iwakura , Yasuhiro Joho
发明人： Yoshitaka Koyama , Hiroyuki Iwakura , Yasuhiro Joho
IPC分类号： G06F17/30
CPC分类号： G05B19/41875 , G05B2219/32221 , G05B2219/45031 , H01L21/67109 , H01L21/67276 , H01L21/67769 , Y02P90/22
摘要： There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.
摘要翻译：提供了一种通信单元，被配置为从基板处理装置接收表示基板处理的进行状态或基板处理装置的状态的监视数据; 数据库部，被配置为与生产信息数据相关联地可读地存储由通信单元接收的监视数据; 被配置为从数据库部分读取监视数据和生产信息数据的文件存档部件，然后基于监视数据创建典型值数据，并且准备包括监视数据，生产信息数据和典型值数据的文件，并可以存储此文件; 以及数据搜索部，被配置为在显示单元上接收预定搜索条件的输入以搜索文件，并且显示存储在文件中并与搜索条件匹配的数据。

9. 发明授权

US07509521B2 Memory dump generation with quick reboot 有权
标题翻译：内存转储生成，快速重启
公开(公告)号：US07509521B2
公开(公告)日：2009-03-24
申请号：US10924712
申请日：2004-08-23
申请人： Hiroyuki Iwakura , Takeshi Misu
发明人： Hiroyuki Iwakura , Takeshi Misu
IPC分类号： G06F11/00
CPC分类号： G06F11/1441 , G06F11/073 , G06F11/0778
摘要： A method and system for writing a data image in the main memory of a computer to a secondary storage device minimizes delay in performing a required reboot. Prior to the reboot, a portion of the physical memory is copied either to a reserved memory space or to secondary storage, or one portion of memory may be copied to a reserved memory space and another portion may be copied to secondary storage. After reboot, memory usage is initially limited to the portion of memory that was copied prior to the reboot. The remaining physical memory is incrementally written to the storage device and dynamically added as memory for use by the operating system. If the reboot is due to a crash or other problem, completion of a full memory dump may be cancelled if, upon scanning memory, it is determined that the problem is a known issue.
摘要翻译：将计算机的主存储器中的数据图像写入辅助存储设备的方法和系统使得执行所需的重新启动的延迟最小化。在重新启动之前，物理存储器的一部分被复制到保留的存储器空间或副存储器中，或者一部分存储器可以被复制到保留的存储器空间，并且另一部分可以被复制到二级存储器。重新启动后，内存使用率最初限于在重新启动之前复制的内存部分。剩余的物理内存被递增地写入存储设备，并被动态地添加为操作系统使用的存储器。如果重新启动是由于崩溃或其他问题，则如果在扫描内存中确定问题是已知问题，则完全内存转储可能会被取消。

10. 发明申请

US20060041739A1 Memory dump generation with quick reboot 有权
公开(公告)号：US20060041739A1
公开(公告)日：2006-02-23
申请号：US10924712
申请日：2004-08-23
申请人： Hiroyuki Iwakura , Takeshi Misu
发明人： Hiroyuki Iwakura , Takeshi Misu
IPC分类号： G06F9/24
CPC分类号： G06F11/1441 , G06F11/073 , G06F11/0778
摘要： A method and system for writing a data image in the main memory of a computer to a secondary storage device minimizes delay in performing a required reboot. Prior to the reboot, a portion of the physical memory is copied either to a reserved memory space or to secondary storage, or one portion of memory may be copied to a reserved memory space and another portion may be copied to secondary storage. After reboot, memory usage is initially limited to the portion of memory that was copied prior to the reboot. The remaining physical memory is incrementally written to the storage device and dynamically added as memory for use by the operating system. If the reboot is due to a crash or other problem, completion of a full memory dump may be cancelled if, upon scanning memory, it is determined that the problem is a known issue.

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