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1. 发明授权

US06663722B1 Method of cleaning fluorine-containing rubber molded article for semiconductor production apparatuses and cleaned molded article 有权
标题翻译：用于半导体制造装置的氟橡胶成型体的清洗方法和清洗后的成型体
公开(公告)号：US06663722B1
公开(公告)日：2003-12-16
申请号：US09646949
申请日：2000-09-25
申请人： Katsuhiko Higashino , Tsuyoshi Noguchi , Mitsuru Kishine , Masanori Hasegawa
发明人： Katsuhiko Higashino , Tsuyoshi Noguchi , Mitsuru Kishine , Masanori Hasegawa
IPC分类号： B08B304
CPC分类号： B08B3/04 , Y10S210/90
摘要： To provide a novel and effective cleaning method which can give a cleaned fluorine-containing rubber molded article for semiconductor production apparatuses. The method of cleaning the fluorine-containing rubber molded article for semiconductor production apparatuses, which comprises washing the fluorine-containing rubber molded article at least once with ultra pure water which has a metal content of not more than 1.0 ppm and does not contain fine particles of not less than 0.2 &mgr;m in an amount of more than 300 per 1 ml.
摘要翻译：提供一种能够得到清洗的半导体制造装置用含氟橡胶成型体的新颖有效的清洗方法。用于半导体制造装置的含氟橡胶成型体的清洗方法，其特征在于，将含氟橡胶成型体至少一次使用金属含量不超过1.0ppm的超纯水，并且不含不少于0.2mg的细颗粒，其量为每1ml多于300个。

2. 发明授权

US06663924B1 PACKAGING MATERIAL FOR MOLDING MATERIAL AND PARTS FOR SEMICONDUCTOR PRODUCTION APPARATUSES, METHOD FOR PACKAGING BY USING SAME AND PACKAGED MOLDING MATERIAL AND PARTS FOR SEMICONDUCTOR PRODUCTION APPARATUSES 有权
标题翻译：用于成型材料的包装材料和用于半导体生产装置的部件，使用其包装的包装材料和包装成型材料以及用于半导体生产装置的部件
公开(公告)号：US06663924B1
公开(公告)日：2003-12-16
申请号：US09743712
申请日：2001-01-16
申请人： Katsuhiko Higashino , Masanori Hasegawa , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Katsuhiko Higashino , Masanori Hasegawa , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： B65D8500
CPC分类号： B32B15/08 , B32B15/20 , B32B27/08 , B32B27/304 , B32B27/36 , B32B2311/24 , B32B2367/00 , B32B2439/00 , Y10T428/13 , Y10T428/1352
摘要： To provide a packaging material being capable of maintaining a highly clean state, wherein the number of fine particles having a particle size of not less than 0.2 &mgr;m and being present on its surface facing an article to be packaged is not more than 5,000/cm2, a steam permeation degree at 40° C. at 90% RH is not more than 30 g/cm2·24 hr, a total amount of gas (excluding steam) to be generated when heating at 80° C. for 15 minutes is not more than 5 ppm and a total amount of water to be generated when heating at 80° C. for 30 minutes is not more than 13 ppm.
摘要翻译：为了提供能够保持高度清洁状态的包装材料，其中具有不小于0.2μm的粒度并且其面向待包装物品的表面的细颗粒的数量不大于5,000 / 2℃时，在90％RH下在40℃下的蒸汽渗透度不超过30g / cm 2 .24小时，在80℃下加热时将产生的气体（不包括蒸汽）的总量。 15分钟不大于5ppm，在80℃加热30分钟时产生的水的总量不大于13ppm。

3. 发明授权

US07125598B2 Molded fluoroelastomer with excellent detachability and process for producing the same 有权
公开(公告)号：US07125598B2
公开(公告)日：2006-10-24
申请号：US10258066
申请日：2001-04-19
申请人： Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： D06N7/04
CPC分类号： C08J7/123 , C08J2327/12 , Y10T428/24355 , Y10T428/24802
摘要： There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 μm or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.

4. 发明申请

US20050090598A1 Crosslinkable elastomer composition and molded article produced from same 审中-公开
标题翻译：可交联弹性体组合物和由其制备的模塑制品
公开(公告)号：US20050090598A1
公开(公告)日：2005-04-28
申请号：US10995107
申请日：2004-11-24
申请人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi , Katsuhiko Higashino
发明人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi , Katsuhiko Higashino
IPC分类号： C08K3/36 , H01L23/29 , C08K3/34
CPC分类号： H01L23/293 , C08K3/36 , H01L2924/0002 , C08L27/12 , H01L2924/00
摘要： To provide a very clean elastomer molded article excellent in plasma resistance, having excellent property of metal-elution inhibition and is used suitably as a material for molded article for a semiconductor or liquid crystal manufacturing equipment. The molded article is obtained by crosslinking a crosslinkable elastomer composition comprising an elastomer component and a metal oxide filler comprising a silicon oxide filler containing impurity metals other than silicon in an amount of not more than 100 ppm. The molded article has an impurity metal content of not more than 100 ppm, and an increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 1,000% or an amount of impurity metals other than silicon which is extracted with a 50% aqueous solution of HF is not more than 200 ppb.
摘要翻译：为了提供耐溶剂性优异的非常干净的弹性体成型体，具有优异的金属洗脱性能，适用于半导体或液晶制造装置的成型品的材料。模制品通过使包含弹性体组分的交联性弹性体组合物和包含不超过100ppm的含硅杂质金属的氧化硅填料的金属氧化物填料交联而获得。模制品的杂质金属含量不大于100ppm，通过向制品照射氧等离子体而产生的颗粒的增加速率不超过1000％，或者以50被提取的除了硅以外的杂质金属的量 HF的％水溶液不超过200ppb。

5. 发明授权

US06515064B1 Molded elastomer 有权
标题翻译：成型弹性体
公开(公告)号：US06515064B1
公开(公告)日：2003-02-04
申请号：US09889009
申请日：2001-07-06
申请人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi , Katsuhiko Higashino
发明人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi , Katsuhiko Higashino
IPC分类号： C08K304
CPC分类号： C08J5/00 , C08J2321/00 , C08K3/04 , C08L21/00
摘要： To provide an elastomer molded article for a semiconductor manufacturing equipment which not only has cleanliness required but also has an excellent plasma resistance and an excellent property of metal-elution inhibition. The elastomer molded article is obtained by crosslinking a crosslinkable elastomer composition comprising a crosslinkable elastomer component and a carbon black filler having an average particle size of not more than 700 &mgr;m and an impurity metal content measured by an ashing analysis method of not more than 300 ppm and has an impurity metal content measured by an ashing analysis method of not more than 100 ppm. An increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 500% or an amount of impurity metals extracted from the article with a 50% aqueous solution of HF is not more than 500 ppb.
摘要翻译：为了提供一种用于半导体制造设备的弹性体模塑制品，其不仅需要清洁度，而且具有优异的等离子体电阻和优异的金属洗脱抑制性能。弹性体成型体是将包含交联性弹性体成分和平均粒径为700μm以下的炭黑填料的交联性弹性体组合物和通过灰化分析法测定的杂质金属含量为300ppm以下，并且通过灰化分析方法测定的不大于100ppm的杂质金属含量。通过向制品照射氧等离子体而产生的颗粒的增加率不大于500％，或者用50％的HF水溶液从制品中提取的杂质金属的量不超过500ppb。

6. 发明申请

US20050004298A1 Crosslinkable elastomer composition and molded article produced from same 审中-公开
标题翻译：可交联弹性体组合物和由其制备的模塑制品
公开(公告)号：US20050004298A1
公开(公告)日：2005-01-06
申请号：US10901955
申请日：2004-07-30
申请人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi , Katsuhiko Higashino , Yosuke Nishimura
发明人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi , Katsuhiko Higashino , Yosuke Nishimura
IPC分类号： C08K9/02 , C08K9/06 , H01L23/29 , C08K3/34
CPC分类号： C08K9/06 , C08K9/02 , H01L23/293 , H01L2924/0002 , H01L2924/00
摘要： To provide a crosslinkable elastomer composition which is excellent in mechanical properties, ensures a small amount of outgas such as DOP and is suitable as a very clean material for molded article for semiconductor production apparatuses. The composition comprises a crosslinkable elastomer component and ultra fine powders of silicon oxide, in which the ultra fine powders of silicon oxide have 100×1019 or less hydroxyl groups per gram on surfaces thereof, dioctylphthalate adsorption of not more than 8 μg per 1 g of silicon oxide and an average particle size of not more than 0.5 μm.
摘要翻译：为了提供机械特性优异的交联性弹性体组合物，可以确保少量的DOP等排气，适合作为半导体制造装置的成型品的非常干净的材料。该组合物包含可交联弹性体组分和氧化硅超细粉末，其中氧化硅的超细粉末在其表面上具有每克表面100×10 19或更少的羟基，邻苯二甲酸二辛酯吸附量不超过8gug / g 的氧化硅，平均粒径为0.5μm以下。

7. 发明授权

US06803402B2 Elastomer molded article and crosslinkable fluorine-containing elastomer composition for semi-conductor production apparatuses 有权
标题翻译：用于半导体生产设备的弹性体模制品和可交联的含氟弹性体组合物
公开(公告)号：US06803402B2
公开(公告)日：2004-10-12
申请号：US09959516
申请日：2001-10-29
申请人： Katsuhiko Higashino , Masanori Hasegawa , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Katsuhiko Higashino , Masanori Hasegawa , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08K318
CPC分类号： C08K3/22 , C08K2003/2227 , C08L27/12
摘要： Elastomer molded article for semiconductor production apparatuses which is obtained by crosslinking and molding a crosslinkable fluorine-containing elastomer composition comprising a crosslinkable fluorine-containing elastomer component and fine particles of aluminum oxide having an average particle size of not more than 0.5 &mgr;m. The elastomer molded article is excellent in plasma resistance and an amount of micro particles generated after irradiation of plasma is very small and therefore a very clean molded article for semiconductor production apparatuses, particularly a sealing material to be used in an environment of plasma irradiation is provided.
摘要翻译：用于半导体制造装置的弹性体成型体，其通过交联和成型包含交联性含氟弹性体组分的交联性含氟弹性体组合物和平均粒径不大于0.5μm的氧化铝微粒而获得。弹性体成形体的耐等离子体性优异，等离子体照射后产生的微粒子量非常小，因此提供了用于半导体制造装置的非常干净的成型体，特别是在等离子体照射的环境中使用的密封材料。

8. 发明授权

US07772327B2 Fluorine-containing elastomer and composition thereof for crosslinking 有权
标题翻译：含氟弹性体及其组合物用于交联
公开(公告)号：US07772327B2
公开(公告)日：2010-08-10
申请号：US11931286
申请日：2007-10-31
申请人： Kazuyoshi Kawasaki , Masaki Irie , Katsuhiko Iseki , Tsuyoshi Itagaki , Tsuyoshi Noguchi , Takafumi Yamato , Mitsuru Kishine
发明人： Kazuyoshi Kawasaki , Masaki Irie , Katsuhiko Iseki , Tsuyoshi Itagaki , Tsuyoshi Noguchi , Takafumi Yamato , Mitsuru Kishine
IPC分类号： C08L27/12 , C08F8/00
CPC分类号： C08L27/12 , C08F8/00 , C08F8/30 , C08F2800/10 , C08F2810/20 , C08K5/18 , C08K5/29 , C08K5/32 , C08F216/1408
摘要： To provide a novel crosslinking system of fluorine-containing elastomer giving a crosslinked product particularly having improved mechanical strength and compression set at high temperature. A fluorine-containing rubber composition comprising a fluorine-containing elastomer having carboxyl group and/or alkoxycarbonyl group at an end of a trunk chain and/or branched chain as a crosslinkable group.
摘要翻译：提供一种含氟弹性体的新型交联体系，得到交联产物，特别是在高温下具有改进的机械强度和压缩永久变形。一种含氟橡胶组合物，其包含在作为可交联基团的树脂链和/或支链末端具有羧基和/或烷氧基羰基的含氟弹性体。

9. 发明申请

US20080064820A1 FLUORINE-CONTAINING ELASTOMER AND COMPOSITION THEREOF FOR CROSSLINKING 有权
标题翻译：含氟的弹性体及其组合物用于交联
公开(公告)号：US20080064820A1
公开(公告)日：2008-03-13
申请号：US11931286
申请日：2007-10-31
申请人： Kazuyoshi Kawasaki , Masaki Irie , Katsushiko Iseki , Tsuyoshi Itagaki , Tsuyoshi Noguchi , Takafumi Yamato , Mitsuru Kishine
发明人： Kazuyoshi Kawasaki , Masaki Irie , Katsushiko Iseki , Tsuyoshi Itagaki , Tsuyoshi Noguchi , Takafumi Yamato , Mitsuru Kishine
IPC分类号： C08F214/18
CPC分类号： C08L27/12 , C08F8/00 , C08F8/30 , C08F2800/10 , C08F2810/20 , C08K5/18 , C08K5/29 , C08K5/32 , C08F216/1408
摘要： To provide a novel crosslinking system of fluorine-containing elastomer giving a crosslinked product particularly having improved mechanical strength and compression set at high temperature. A fluorine-containing rubber composition comprising a fluorine-containing elastomer having carboxyl group and/or alkoxycarbonyl group at an end of a trunk chain and/or branched chain as a crosslinkable group.
摘要翻译：提供一种含氟弹性体的新型交联体系，得到交联产物，特别是在高温下具有改进的机械强度和压缩永久变形。一种含氟橡胶组合物，其包含在作为可交联基团的树脂链和/或支链末端具有羧基和/或烷氧基羰基的含氟弹性体。

10. 发明授权

US06503986B1 Fluorine-containing rubber composition 有权
标题翻译：含氟橡胶组合物
公开(公告)号：US06503986B1
公开(公告)日：2003-01-07
申请号：US09743708
申请日：2001-01-16
申请人： Hiroyuki Tanaka , Sadashige Irie , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Hiroyuki Tanaka , Sadashige Irie , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： C08L2712
CPC分类号： C09K3/1009 , C08F293/005 , C08L27/12 , C08L27/16 , C08L27/18 , C08L53/00 , C08L2666/24 , C08L2666/02 , C08L2666/04
摘要： To provide a fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment, in which structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit. The fluorine-containing rubber composition is capable of providing a clean sealing material for semi-conductor production apparatuses without using a filler.
摘要翻译：为了提供含有（a-1）非全氟含氟橡胶的氟橡胶组合物和（b-1）含有弹性体含氟聚合物链段和非弹性体氟的含氟多段聚合物聚合物链段，其中弹性体含氟聚合物链段和非弹性含氟聚合物链段的结构单元包括不少于90摩尔％的全卤代烯烃单元。含氟橡胶组合物能够在不使用填料的情况下为半导体制造装置提供清洁的密封材料。

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